CA1020494A - Method of manufacturing etched patterns - Google Patents
Method of manufacturing etched patternsInfo
- Publication number
- CA1020494A CA1020494A CA182,588A CA182588A CA1020494A CA 1020494 A CA1020494 A CA 1020494A CA 182588 A CA182588 A CA 182588A CA 1020494 A CA1020494 A CA 1020494A
- Authority
- CA
- Canada
- Prior art keywords
- etched patterns
- manufacturing etched
- manufacturing
- patterns
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10W74/40—
-
- H10P76/4083—
-
- H10P95/00—
-
- H10W74/43—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7213625A NL7213625A (enExample) | 1972-10-07 | 1972-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1020494A true CA1020494A (en) | 1977-11-08 |
Family
ID=19817096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA182,588A Expired CA1020494A (en) | 1972-10-07 | 1973-10-03 | Method of manufacturing etched patterns |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3919066A (enExample) |
| JP (1) | JPS5232954B2 (enExample) |
| CA (1) | CA1020494A (enExample) |
| FR (1) | FR2202369B2 (enExample) |
| GB (1) | GB1440349A (enExample) |
| IT (1) | IT1055539B (enExample) |
| NL (1) | NL7213625A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4057831A (en) * | 1972-09-05 | 1977-11-08 | U.S. Philips Corporation | Video record disc manufactured by a process involving chemical or sputter etching |
| DE2547792C3 (de) * | 1974-10-25 | 1978-08-31 | Hitachi, Ltd., Tokio | Verfahren zur Herstellung eines Halbleiterbauelementes |
| JPS5210080A (en) * | 1975-07-15 | 1977-01-26 | Nippon Telegr & Teleph Corp <Ntt> | Method for manufacturing semiconductor device |
| NL7607298A (nl) * | 1976-07-02 | 1978-01-04 | Philips Nv | Werkwijze voor het vervaardigen van een inrichting en inrichting vervaardigd volgens de werkwijze. |
| JPS5381110A (en) * | 1976-12-25 | 1978-07-18 | Toshiba Corp | Manufacture of magnetic film head |
| JPS5539646A (en) * | 1978-09-12 | 1980-03-19 | Nec Corp | Ion taper etching |
| US4534826A (en) * | 1983-12-29 | 1985-08-13 | Ibm Corporation | Trench etch process for dielectric isolation |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2117199C3 (de) * | 1971-04-08 | 1974-08-22 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur Herstellung geätzter Muster in dünnen Schichten mit definierten Kantenprofilen |
| US3723277A (en) * | 1971-07-14 | 1973-03-27 | Molekularelektronik | Method for the production of masks in the manufacture of semiconductor components |
-
1972
- 1972-10-07 NL NL7213625A patent/NL7213625A/xx unknown
-
1973
- 1973-09-26 US US400879A patent/US3919066A/en not_active Expired - Lifetime
- 1973-10-03 CA CA182,588A patent/CA1020494A/en not_active Expired
- 1973-10-04 FR FR7335435A patent/FR2202369B2/fr not_active Expired
- 1973-10-04 IT IT69925/73A patent/IT1055539B/it active
- 1973-10-04 GB GB4637673A patent/GB1440349A/en not_active Expired
- 1973-10-08 JP JP48112424A patent/JPS5232954B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2348779A1 (de) | 1974-04-11 |
| JPS4974483A (enExample) | 1974-07-18 |
| AU6103973A (en) | 1975-04-10 |
| NL7213625A (enExample) | 1974-04-09 |
| FR2202369A2 (enExample) | 1974-05-03 |
| IT1055539B (it) | 1982-01-11 |
| FR2202369B2 (enExample) | 1976-10-01 |
| DE2348779B2 (de) | 1976-05-26 |
| US3919066A (en) | 1975-11-11 |
| GB1440349A (en) | 1976-06-23 |
| JPS5232954B2 (enExample) | 1977-08-25 |
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