FR2407497A1 - Procede pour former une reserve photographique, utile en particulier dans les arts graphiques et en microelectronique - Google Patents
Procede pour former une reserve photographique, utile en particulier dans les arts graphiques et en microelectroniqueInfo
- Publication number
- FR2407497A1 FR2407497A1 FR7830278A FR7830278A FR2407497A1 FR 2407497 A1 FR2407497 A1 FR 2407497A1 FR 7830278 A FR7830278 A FR 7830278A FR 7830278 A FR7830278 A FR 7830278A FR 2407497 A1 FR2407497 A1 FR 2407497A1
- Authority
- FR
- France
- Prior art keywords
- microelectronics
- useful
- forming
- graphic arts
- reserve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/844,951 US4141733A (en) | 1977-10-25 | 1977-10-25 | Development of light-sensitive quinone diazide compositions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2407497A1 true FR2407497A1 (fr) | 1979-05-25 |
| FR2407497B1 FR2407497B1 (OSRAM) | 1983-01-21 |
Family
ID=25294041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7830278A Granted FR2407497A1 (fr) | 1977-10-25 | 1978-10-25 | Procede pour former une reserve photographique, utile en particulier dans les arts graphiques et en microelectronique |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4141733A (OSRAM) |
| JP (1) | JPS5474432A (OSRAM) |
| CA (1) | CA1110903A (OSRAM) |
| FR (1) | FR2407497A1 (OSRAM) |
| GB (1) | GB2013913B (OSRAM) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4294911A (en) * | 1979-06-18 | 1981-10-13 | Eastman Kodak Company | Development of light-sensitive quinone diazide compositions using sulfite stabilizer |
| JPS56122031A (en) * | 1980-03-01 | 1981-09-25 | Japan Synthetic Rubber Co Ltd | Positive type photosensitive resin composition |
| US4419437A (en) * | 1981-02-11 | 1983-12-06 | Eastman Kodak Company | Image-forming compositions and elements containing ionic polyester dispersing agents |
| NL8101200A (nl) * | 1981-03-12 | 1982-10-01 | Philips Nv | Werkwijze voor het aanbrengen van een resistmateriaal op een drager en resist-materiaal. |
| JPS57151939A (en) * | 1981-03-16 | 1982-09-20 | Japan Synthetic Rubber Co Ltd | Positive type photosensitive resin composition |
| EP0062733B1 (en) * | 1981-04-10 | 1986-01-02 | Shipley Company Inc. | Metal ion-free photoresist developer composition |
| US4628023A (en) * | 1981-04-10 | 1986-12-09 | Shipley Company Inc. | Metal ion free photoresist developer composition with lower alkyl quaternary ammonium hydrozide as alkalai agent and a quaternary ammonium compound as surfactant |
| JPS57192952A (en) * | 1981-05-25 | 1982-11-27 | Konishiroku Photo Ind Co Ltd | Composition of developing solution |
| JPS5843451A (ja) * | 1981-09-09 | 1983-03-14 | Japan Synthetic Rubber Co Ltd | ポジ型感光性樹脂組成物 |
| US4351895A (en) * | 1981-10-19 | 1982-09-28 | American Hoechst Corporation | Deletion fluid for positive printing plates |
| US4423138A (en) * | 1982-01-21 | 1983-12-27 | Eastman Kodak Company | Resist developer with ammonium or phosphonium compound and method of use to develop o-quinone diazide and novolac resist |
| JPS58187926A (ja) * | 1982-04-28 | 1983-11-02 | Toyo Soda Mfg Co Ltd | 放射線ネガ型レジストの現像方法 |
| DE3230171A1 (de) * | 1982-08-13 | 1984-02-16 | Hoechst Ag, 6230 Frankfurt | Waessrig-alkalische loesung und verfahren zum entwickeln von positiv-arbeitenden reproduktionsschichten |
| JPS59182444A (ja) * | 1983-04-01 | 1984-10-17 | Sumitomo Chem Co Ltd | ポジ型フオトレジストの改良現像液 |
| JPS59219743A (ja) * | 1983-05-28 | 1984-12-11 | Tokyo Ohka Kogyo Co Ltd | ポジ型レジスト現像液 |
| US4464461A (en) * | 1983-07-22 | 1984-08-07 | Eastman Kodak Company | Development of light-sensitive quinone diazide compositions |
| JPS60254043A (ja) * | 1984-05-30 | 1985-12-14 | Yotsukaichi Gosei Kk | ポジ型感光材料用現像剤 |
| US4711836A (en) * | 1984-09-10 | 1987-12-08 | Olin Hunt Specialty Products, Inc. | Development of positive-working photoresist compositions |
| JPS62102888A (ja) * | 1985-10-28 | 1987-05-13 | Toyo Kagaku Kenkyusho:Kk | 浄水器等の殺菌洗浄方法 |
| JPH0638159B2 (ja) * | 1986-07-18 | 1994-05-18 | 東京応化工業株式会社 | ポジ型ホトレジスト用現像液 |
| US4871644A (en) * | 1986-10-01 | 1989-10-03 | Ciba-Geigy Corporation | Photoresist compositions with a bis-benzotriazole |
| US4788127A (en) * | 1986-11-17 | 1988-11-29 | Eastman Kodak Company | Photoresist composition comprising an interpolymer of a silicon-containing monomer and an hydroxystyrene |
| WO1990001726A1 (en) * | 1988-08-10 | 1990-02-22 | Macdermid, Incorporated | Light-sensitive novolac resins |
| US4997748A (en) * | 1988-08-26 | 1991-03-05 | Tokyo Ohka Kogyo Co., Ltd. | Developer solution for positive-working resist composition |
| US5753406A (en) * | 1988-10-18 | 1998-05-19 | Japan Synthetic Rubber Co., Ltd. | Radiation-sensitive resin composition |
| JPH0234858A (ja) * | 1988-11-05 | 1990-02-05 | Toshiba Corp | フォトレジスト現像液の製造方法 |
| JP2639853B2 (ja) * | 1990-05-18 | 1997-08-13 | 富士写真フイルム株式会社 | 新規キノンジアジド化合物及びそれを含有する感光性組成物 |
| DE69203824T2 (de) * | 1991-10-29 | 1996-02-22 | Du Pont | Entwicklerlösungen für lithographische Druckelemente. |
| US6472128B2 (en) | 1996-04-30 | 2002-10-29 | Shipley Company, L.L.C. | Antihalation compositions |
| US6528235B2 (en) | 1991-11-15 | 2003-03-04 | Shipley Company, L.L.C. | Antihalation compositions |
| US6773864B1 (en) | 1991-11-15 | 2004-08-10 | Shipley Company, L.L.C. | Antihalation compositions |
| US6165697A (en) * | 1991-11-15 | 2000-12-26 | Shipley Company, L.L.C. | Antihalation compositions |
| US6340559B1 (en) * | 2001-02-21 | 2002-01-22 | Huntsman Petrochemical Corporation | Semiconductor developing agent |
| JP4080784B2 (ja) * | 2002-04-26 | 2008-04-23 | 東京応化工業株式会社 | レジスト用現像液及びそれを用いたレジストパターン形成方法、並びにレジスト用現像原液 |
| US7716813B2 (en) * | 2006-12-05 | 2010-05-18 | Hitachi Global Storage Technologies Netherlands B.V. | Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1328967A (en) * | 1969-10-14 | 1973-09-05 | Philadelphia Quartz Co | Quaternary alkanol ammonium hydroxides |
| GB1367830A (en) * | 1972-05-23 | 1974-09-25 | Hunt Chem Corp Philip A | Processes and materials for making photoresists |
| JPS5156226A (en) * | 1974-11-11 | 1976-05-17 | Sanei Kagaku Kogyo Kk | Hojitaipukankoseijushino genzozai |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264877A (en) * | 1975-11-26 | 1977-05-28 | Toshiba Corp | Production of semiconductor device |
-
1977
- 1977-10-25 US US05/844,951 patent/US4141733A/en not_active Expired - Lifetime
-
1978
- 1978-09-29 CA CA312,370A patent/CA1110903A/en not_active Expired
- 1978-10-25 JP JP13147078A patent/JPS5474432A/ja active Granted
- 1978-10-25 FR FR7830278A patent/FR2407497A1/fr active Granted
- 1978-10-25 GB GB7841887A patent/GB2013913B/en not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1328967A (en) * | 1969-10-14 | 1973-09-05 | Philadelphia Quartz Co | Quaternary alkanol ammonium hydroxides |
| GB1367830A (en) * | 1972-05-23 | 1974-09-25 | Hunt Chem Corp Philip A | Processes and materials for making photoresists |
| JPS5156226A (en) * | 1974-11-11 | 1976-05-17 | Sanei Kagaku Kogyo Kk | Hojitaipukankoseijushino genzozai |
Non-Patent Citations (2)
| Title |
|---|
| EXBK/70 * |
| EXBK/76 * |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2013913B (en) | 1982-03-03 |
| JPS5474432A (en) | 1979-06-14 |
| GB2013913A (en) | 1979-08-15 |
| FR2407497B1 (OSRAM) | 1983-01-21 |
| JPS6161097B2 (OSRAM) | 1986-12-24 |
| CA1110903A (en) | 1981-10-20 |
| US4141733A (en) | 1979-02-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |