FR2356268A1 - Evaporateur a faisceau electronique et reservoir pour le materiau a evaporer - Google Patents

Evaporateur a faisceau electronique et reservoir pour le materiau a evaporer

Info

Publication number
FR2356268A1
FR2356268A1 FR7719313A FR7719313A FR2356268A1 FR 2356268 A1 FR2356268 A1 FR 2356268A1 FR 7719313 A FR7719313 A FR 7719313A FR 7719313 A FR7719313 A FR 7719313A FR 2356268 A1 FR2356268 A1 FR 2356268A1
Authority
FR
France
Prior art keywords
reservoir
evaporated
tank
electronic beam
beam evaporator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7719313A
Other languages
English (en)
Other versions
FR2356268B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2356268A1 publication Critical patent/FR2356268A1/fr
Application granted granted Critical
Publication of FR2356268B1 publication Critical patent/FR2356268B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Evaporateur pour le dépôt de corps sublimables, comportant un réservoir muni d'une ouverture pour le matériau à évaporer et une source avec une électrode d'accélération pour la production d'un faisceau électronique accéléré et concentré, dirigé sur le réservoir. Une cible 4 est disposée horizontalement sur le trajet du faisceau électronique 23, entre la source 24 et le réservoir 3. Sa face inférieure, opposée à la face d'impact, est en regard de la cavité du réservoir, qu'elle recouvre en ménageant, en dehors de la zone d'impact du faisceau, une ouverture de sortie 5 pour le flux de vapeur.
FR7719313A 1976-06-26 1977-06-23 Evaporateur a faisceau electronique et reservoir pour le materiau a evaporer Granted FR2356268A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762628765 DE2628765C3 (de) 1976-06-26 1976-06-26 Vorrichtung zum Aufdampfen insbesondere sublimierbarer Stoffe im Vakuum mittels einer Elektronenstrahlquelle

Publications (2)

Publication Number Publication Date
FR2356268A1 true FR2356268A1 (fr) 1978-01-20
FR2356268B1 FR2356268B1 (fr) 1982-04-16

Family

ID=5981519

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7719313A Granted FR2356268A1 (fr) 1976-06-26 1977-06-23 Evaporateur a faisceau electronique et reservoir pour le materiau a evaporer

Country Status (6)

Country Link
CH (1) CH627790A5 (fr)
DE (1) DE2628765C3 (fr)
FR (1) FR2356268A1 (fr)
GB (1) GB1540944A (fr)
IT (1) IT1079238B (fr)
SE (1) SE434651B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3276333D1 (en) * 1982-10-28 1987-06-19 Ibm Method and apparatus for vacuum evaporation coating using an electron gun
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
DE19539986A1 (de) * 1995-10-27 1997-04-30 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
FR1505169A (fr) * 1965-12-18 1967-12-08 Balzers Patent Beteilig Ag Appareil pour vaporisation de substances sous vide
GB1111955A (en) * 1966-05-10 1968-05-01 Mullard Ltd Improvements in or relating to devices for evaporating powdered material
DE2206995A1 (de) * 1972-02-15 1973-08-23 Leybold Heraeus Gmbh & Co Kg Vorrichtung zum erwaermen von stoffen mittels gebuendelter elektronenstrahlen im vakuum

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
FR1505169A (fr) * 1965-12-18 1967-12-08 Balzers Patent Beteilig Ag Appareil pour vaporisation de substances sous vide
GB1111955A (en) * 1966-05-10 1968-05-01 Mullard Ltd Improvements in or relating to devices for evaporating powdered material
DE2206995A1 (de) * 1972-02-15 1973-08-23 Leybold Heraeus Gmbh & Co Kg Vorrichtung zum erwaermen von stoffen mittels gebuendelter elektronenstrahlen im vakuum

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/75 *

Also Published As

Publication number Publication date
DE2628765A1 (de) 1977-12-29
SE434651B (sv) 1984-08-06
CH627790A5 (en) 1982-01-29
FR2356268B1 (fr) 1982-04-16
GB1540944A (en) 1979-02-21
IT1079238B (it) 1985-05-08
SE7707216L (sv) 1977-12-27
DE2628765C3 (de) 1979-01-11
DE2628765B2 (de) 1978-04-20

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse