SE7707216L - Elektronstraleforangare och behallare for upptagande av forangbart material - Google Patents

Elektronstraleforangare och behallare for upptagande av forangbart material

Info

Publication number
SE7707216L
SE7707216L SE7707216A SE7707216A SE7707216L SE 7707216 L SE7707216 L SE 7707216L SE 7707216 A SE7707216 A SE 7707216A SE 7707216 A SE7707216 A SE 7707216A SE 7707216 L SE7707216 L SE 7707216L
Authority
SE
Sweden
Prior art keywords
container
electron beam
impingement plate
evaporator
impingement
Prior art date
Application number
SE7707216A
Other languages
Unknown language ( )
English (en)
Other versions
SE434651B (sv
Inventor
K-G Redel
W Zultzle
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of SE7707216L publication Critical patent/SE7707216L/sv
Publication of SE434651B publication Critical patent/SE434651B/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
SE7707216A 1976-06-26 1977-06-22 Anordning for paangning av serskilt sublimerbara emnen i vakuum SE434651B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762628765 DE2628765C3 (de) 1976-06-26 1976-06-26 Vorrichtung zum Aufdampfen insbesondere sublimierbarer Stoffe im Vakuum mittels einer Elektronenstrahlquelle

Publications (2)

Publication Number Publication Date
SE7707216L true SE7707216L (sv) 1977-12-27
SE434651B SE434651B (sv) 1984-08-06

Family

ID=5981519

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7707216A SE434651B (sv) 1976-06-26 1977-06-22 Anordning for paangning av serskilt sublimerbara emnen i vakuum

Country Status (6)

Country Link
CH (1) CH627790A5 (sv)
DE (1) DE2628765C3 (sv)
FR (1) FR2356268A1 (sv)
GB (1) GB1540944A (sv)
IT (1) IT1079238B (sv)
SE (1) SE434651B (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3276333D1 (en) * 1982-10-28 1987-06-19 Ibm Method and apparatus for vacuum evaporation coating using an electron gun
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
DE19539986A1 (de) * 1995-10-27 1997-04-30 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material
CN116004994A (zh) * 2022-12-26 2023-04-25 核工业理化工程研究院 用于电子束蒸发熔炼的蒸发器装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
CH452313A (de) * 1965-12-18 1968-05-31 Balzers Patent Beteilig Ag Vorrichtung zur Verdampfung von Stoffen im Vakuum
GB1111955A (en) * 1966-05-10 1968-05-01 Mullard Ltd Improvements in or relating to devices for evaporating powdered material

Also Published As

Publication number Publication date
DE2628765C3 (de) 1979-01-11
IT1079238B (it) 1985-05-08
DE2628765B2 (de) 1978-04-20
DE2628765A1 (de) 1977-12-29
FR2356268A1 (fr) 1978-01-20
FR2356268B1 (sv) 1982-04-16
GB1540944A (en) 1979-02-21
CH627790A5 (en) 1982-01-29
SE434651B (sv) 1984-08-06

Similar Documents

Publication Publication Date Title
TR199802410T2 (xx) Is� veren bile�enlerin so�utulmas� i�in �s� yay�c� sistem.
SE7707216L (sv) Elektronstraleforangare och behallare for upptagande av forangbart material
KR960034458A (ko) 증발속도를 크게 한 Mg 증발방법
KR920006535A (ko) 진공증착장치
UST988002I4 (en) Apparatus for forming a vacuum evaporating layer on a substrate
JPH04228562A (ja) 薄膜形成装置
JPH02270959A (ja) 蒸発源用坩堝
JPS648266A (en) Laser beam vapor deposition method
JPH089770B2 (ja) 真空蒸着装置
JPS5573865A (en) Manufacture of vapor deposition coating
JPH0745711B2 (ja) 高指向性蒸着装置
JPH04187760A (ja) 薄膜形成装置
GB1094747A (en) Improvements in and relating to the vaporisation of materials
JPS57162666A (en) Liquid dropping device
JPS61176257U (sv)
JPS55159802A (en) Scatter preventing structure of circulating liquid in plate shaped liquid film flow-down type evaporation boiler
KR930014810A (ko) 고온초전도 박막 제조용 레이저 증착 장치
JPS5222471A (en) Field radiation type electron gun
JPS6314859A (ja) 金属蒸発方法
JPS5940359U (ja) 蒸着物質収容器
SU510978A1 (ru) Устройство дл нанесени тонких пленок на объектодержатель электронного микроскопа
CA996242A (en) Evaporative cooling system employing liquid film evaporation from grooved evaporator surface and vapor push pump for circulating liquid
JPS5842770A (ja) 蒸発源からの蒸気流を阻止する装置
SU367755A1 (ru) Электродуговой испаритель металлов
JPS5940358U (ja) 蒸着物質収容器

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 7707216-3

Effective date: 19930109

Format of ref document f/p: F