GB1540944A - Electron-beam evaporator - Google Patents

Electron-beam evaporator

Info

Publication number
GB1540944A
GB1540944A GB2639277A GB2639277A GB1540944A GB 1540944 A GB1540944 A GB 1540944A GB 2639277 A GB2639277 A GB 2639277A GB 2639277 A GB2639277 A GB 2639277A GB 1540944 A GB1540944 A GB 1540944A
Authority
GB
United Kingdom
Prior art keywords
electron beam
container
impingement plate
evaporator
beam evaporator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2639277A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of GB1540944A publication Critical patent/GB1540944A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Abstract

The electron beam evaporator is used for vapour deposition, especially of sublimable substances, in vacuum vapour deposition systems. The electron beam evaporator in this arrangement comprises a container (3), which has an opening, for the material to be evaporated and an electron beam source (24) for supplying the heat of evaporation to the container (3). So as to be able to employ an electron beam evaporator of this type to evaporate pulverulent material even if present as relatively thick layers, continuously and without squirting and dusting over a prolonged period, it is proposed according to the invention that there be arranged in the beam path between the electron beam source (24) and the container (3) an impingement plate (4) for the electron beam (23). The underside facing away from the impingement side of the impingement plate (4) faces the container cavity. The impingement plate (4) covers the container (3) while leaving free an outlet orifice (5) for the vapour beam. <IMAGE>
GB2639277A 1976-06-26 1977-06-23 Electron-beam evaporator Expired GB1540944A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762628765 DE2628765C3 (en) 1976-06-26 1976-06-26 Apparatus for vapor deposition, in particular sublimable substances, in a vacuum by means of an electron beam source

Publications (1)

Publication Number Publication Date
GB1540944A true GB1540944A (en) 1979-02-21

Family

ID=5981519

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2639277A Expired GB1540944A (en) 1976-06-26 1977-06-23 Electron-beam evaporator

Country Status (6)

Country Link
CH (1) CH627790A5 (en)
DE (1) DE2628765C3 (en)
FR (1) FR2356268A1 (en)
GB (1) GB1540944A (en)
IT (1) IT1079238B (en)
SE (1) SE434651B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2250752A (en) * 1990-10-12 1992-06-17 Custom Metalliz Serv Inc Cylindrical vapor source for vacuum metallizing containing through passage; radiant shield associated therewith
DE19539986A1 (en) * 1995-10-27 1997-04-30 Leybold Ag Vacuum coating system with a crucible arranged in the vacuum chamber for receiving material to be evaporated

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0111611B1 (en) * 1982-10-28 1987-05-13 International Business Machines Corporation Method and apparatus for vacuum evaporation coating using an electron gun

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
CH452313A (en) * 1965-12-18 1968-05-31 Balzers Patent Beteilig Ag Device for the evaporation of substances in a vacuum
GB1111955A (en) * 1966-05-10 1968-05-01 Mullard Ltd Improvements in or relating to devices for evaporating powdered material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2250752A (en) * 1990-10-12 1992-06-17 Custom Metalliz Serv Inc Cylindrical vapor source for vacuum metallizing containing through passage; radiant shield associated therewith
GB2250752B (en) * 1990-10-12 1994-11-23 Custom Metalliz Serv Inc Vapor source for vacuum metallizing
DE19539986A1 (en) * 1995-10-27 1997-04-30 Leybold Ag Vacuum coating system with a crucible arranged in the vacuum chamber for receiving material to be evaporated

Also Published As

Publication number Publication date
DE2628765C3 (en) 1979-01-11
DE2628765A1 (en) 1977-12-29
CH627790A5 (en) 1982-01-29
FR2356268A1 (en) 1978-01-20
SE7707216L (en) 1977-12-27
DE2628765B2 (en) 1978-04-20
FR2356268B1 (en) 1982-04-16
SE434651B (en) 1984-08-06
IT1079238B (en) 1985-05-08

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19920623