IT1079238B - Evaporatore a fascio elettronico e contenitore per l'alloggiamento del materiale evaporabile - Google Patents

Evaporatore a fascio elettronico e contenitore per l'alloggiamento del materiale evaporabile

Info

Publication number
IT1079238B
IT1079238B IT2421177A IT2421177A IT1079238B IT 1079238 B IT1079238 B IT 1079238B IT 2421177 A IT2421177 A IT 2421177A IT 2421177 A IT2421177 A IT 2421177A IT 1079238 B IT1079238 B IT 1079238B
Authority
IT
Italy
Prior art keywords
accommodation
container
electronic band
evaporable material
band evaporator
Prior art date
Application number
IT2421177A
Other languages
English (en)
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Application granted granted Critical
Publication of IT1079238B publication Critical patent/IT1079238B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT2421177A 1976-06-26 1977-05-31 Evaporatore a fascio elettronico e contenitore per l'alloggiamento del materiale evaporabile IT1079238B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762628765 DE2628765C3 (de) 1976-06-26 1976-06-26 Vorrichtung zum Aufdampfen insbesondere sublimierbarer Stoffe im Vakuum mittels einer Elektronenstrahlquelle

Publications (1)

Publication Number Publication Date
IT1079238B true IT1079238B (it) 1985-05-08

Family

ID=5981519

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2421177A IT1079238B (it) 1976-06-26 1977-05-31 Evaporatore a fascio elettronico e contenitore per l'alloggiamento del materiale evaporabile

Country Status (6)

Country Link
CH (1) CH627790A5 (it)
DE (1) DE2628765C3 (it)
FR (1) FR2356268A1 (it)
GB (1) GB1540944A (it)
IT (1) IT1079238B (it)
SE (1) SE434651B (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3276333D1 (en) * 1982-10-28 1987-06-19 Ibm Method and apparatus for vacuum evaporation coating using an electron gun
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
DE19539986A1 (de) * 1995-10-27 1997-04-30 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
CH452313A (de) * 1965-12-18 1968-05-31 Balzers Patent Beteilig Ag Vorrichtung zur Verdampfung von Stoffen im Vakuum
GB1111955A (en) * 1966-05-10 1968-05-01 Mullard Ltd Improvements in or relating to devices for evaporating powdered material

Also Published As

Publication number Publication date
FR2356268A1 (fr) 1978-01-20
DE2628765A1 (de) 1977-12-29
SE434651B (sv) 1984-08-06
CH627790A5 (en) 1982-01-29
FR2356268B1 (it) 1982-04-16
GB1540944A (en) 1979-02-21
SE7707216L (sv) 1977-12-27
DE2628765C3 (de) 1979-01-11
DE2628765B2 (de) 1978-04-20

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