FR1505169A - Appareil pour vaporisation de substances sous vide - Google Patents

Appareil pour vaporisation de substances sous vide

Info

Publication number
FR1505169A
FR1505169A FR87908A FR87908A FR1505169A FR 1505169 A FR1505169 A FR 1505169A FR 87908 A FR87908 A FR 87908A FR 87908 A FR87908 A FR 87908A FR 1505169 A FR1505169 A FR 1505169A
Authority
FR
France
Prior art keywords
under vacuum
substances under
vaporizing substances
vaporizing
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR87908A
Other languages
English (en)
Inventor
Gottfried Geir
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Application granted granted Critical
Publication of FR1505169A publication Critical patent/FR1505169A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR87908A 1965-12-18 1966-12-19 Appareil pour vaporisation de substances sous vide Expired FR1505169A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1750165A CH452313A (de) 1965-12-18 1965-12-18 Vorrichtung zur Verdampfung von Stoffen im Vakuum

Publications (1)

Publication Number Publication Date
FR1505169A true FR1505169A (fr) 1967-12-08

Family

ID=4425902

Family Applications (1)

Application Number Title Priority Date Filing Date
FR87908A Expired FR1505169A (fr) 1965-12-18 1966-12-19 Appareil pour vaporisation de substances sous vide

Country Status (6)

Country Link
US (1) US3544763A (fr)
CH (1) CH452313A (fr)
DE (1) DE1521175B2 (fr)
FR (1) FR1505169A (fr)
GB (1) GB1105989A (fr)
NL (1) NL6600952A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2356268A1 (fr) * 1976-06-26 1978-01-20 Leybold Heraeus Gmbh & Co Kg Evaporateur a faisceau electronique et reservoir pour le materiau a evaporer

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4094269A (en) * 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
BG20711A1 (fr) * 1974-06-14 1975-12-20
US3996469A (en) * 1975-01-06 1976-12-07 Jersey Nuclear-Avco Isotopes, Inc. Floating convection barrier for evaporation source
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
FR2623819A1 (fr) * 1987-11-26 1989-06-02 Thomson Csf Four a bombardement electronique pour evaporation sous vide
DE4016225C2 (de) * 1990-05-19 1997-08-14 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
DE4100541C1 (fr) * 1991-01-10 1992-01-16 Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2356268A1 (fr) * 1976-06-26 1978-01-20 Leybold Heraeus Gmbh & Co Kg Evaporateur a faisceau electronique et reservoir pour le materiau a evaporer

Also Published As

Publication number Publication date
CH452313A (de) 1968-05-31
GB1105989A (en) 1968-03-13
DE1521175A1 (de) 1969-07-31
NL6600952A (fr) 1967-06-19
DE1521175B2 (de) 1973-04-26
US3544763A (en) 1970-12-01

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