FR1369713A - Appareil pour la métallisation sous vide - Google Patents

Appareil pour la métallisation sous vide

Info

Publication number
FR1369713A
FR1369713A FR947968A FR947968A FR1369713A FR 1369713 A FR1369713 A FR 1369713A FR 947968 A FR947968 A FR 947968A FR 947968 A FR947968 A FR 947968A FR 1369713 A FR1369713 A FR 1369713A
Authority
FR
France
Prior art keywords
vacuum metallization
metallization
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR947968A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Priority to FR947968A priority Critical patent/FR1369713A/fr
Application granted granted Critical
Publication of FR1369713A publication Critical patent/FR1369713A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR947968A 1963-09-19 1963-09-19 Appareil pour la métallisation sous vide Expired FR1369713A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR947968A FR1369713A (fr) 1963-09-19 1963-09-19 Appareil pour la métallisation sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR947968A FR1369713A (fr) 1963-09-19 1963-09-19 Appareil pour la métallisation sous vide

Publications (1)

Publication Number Publication Date
FR1369713A true FR1369713A (fr) 1964-08-14

Family

ID=8812665

Family Applications (1)

Application Number Title Priority Date Filing Date
FR947968A Expired FR1369713A (fr) 1963-09-19 1963-09-19 Appareil pour la métallisation sous vide

Country Status (1)

Country Link
FR (1) FR1369713A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4122221A (en) * 1976-04-01 1978-10-24 Airco, Inc. Orbiting and rotating substrate
US4269137A (en) * 1979-03-19 1981-05-26 Xerox Corporation Pretreatment of substrates prior to thin film deposition
US4583488A (en) * 1984-03-23 1986-04-22 International Business Machines Corporation Variable axis rotary drive vacuum deposition system
US5061356A (en) * 1989-02-28 1991-10-29 Hitachi, Ltd. Vacuum treatment apparatus and vacuum treatment method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4122221A (en) * 1976-04-01 1978-10-24 Airco, Inc. Orbiting and rotating substrate
US4269137A (en) * 1979-03-19 1981-05-26 Xerox Corporation Pretreatment of substrates prior to thin film deposition
US4583488A (en) * 1984-03-23 1986-04-22 International Business Machines Corporation Variable axis rotary drive vacuum deposition system
US5061356A (en) * 1989-02-28 1991-10-29 Hitachi, Ltd. Vacuum treatment apparatus and vacuum treatment method

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