FR1436585A - Appareil pour dépôt de vapeur sous vide - Google Patents

Appareil pour dépôt de vapeur sous vide

Info

Publication number
FR1436585A
FR1436585A FR999733A FR999733A FR1436585A FR 1436585 A FR1436585 A FR 1436585A FR 999733 A FR999733 A FR 999733A FR 999733 A FR999733 A FR 999733A FR 1436585 A FR1436585 A FR 1436585A
Authority
FR
France
Prior art keywords
vapor deposition
vacuum vapor
vacuum
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR999733A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR1436585A publication Critical patent/FR1436585A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR999733A 1963-12-23 1964-12-23 Appareil pour dépôt de vapeur sous vide Expired FR1436585A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US332587A US3244857A (en) 1963-12-23 1963-12-23 Vapor deposition source

Publications (1)

Publication Number Publication Date
FR1436585A true FR1436585A (fr) 1966-04-29

Family

ID=23298897

Family Applications (1)

Application Number Title Priority Date Filing Date
FR999733A Expired FR1436585A (fr) 1963-12-23 1964-12-23 Appareil pour dépôt de vapeur sous vide

Country Status (6)

Country Link
US (1) US3244857A (fr)
DE (1) DE1298381B (fr)
FR (1) FR1436585A (fr)
GB (1) GB1021776A (fr)
NL (1) NL6414696A (fr)
SE (1) SE304893B (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3344768A (en) * 1965-08-30 1967-10-03 Burroughs Corp Powder evaporation apparatus
US3450097A (en) * 1965-09-10 1969-06-17 Us Army Vapor deposition apparatus
US3466424A (en) * 1967-08-31 1969-09-09 Nasa Evaporant source for vapor deposition
US3538305A (en) * 1969-05-16 1970-11-03 Us Navy Alloy deterring shunt for conical tungsten evaporation sources
US4002880A (en) * 1975-08-13 1977-01-11 Gte Sylvania Incorporated Evaporation source
GB2176337B (en) * 1985-06-04 1990-02-14 English Electric Valve Co Ltd Metal vapour laser apparatus
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
DE4439519C1 (de) * 1994-11-04 1996-04-25 Fraunhofer Ges Forschung Vorrichtung und Verfahren zum Vakuumbedampfen von Folien

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE882173C (de) * 1941-08-24 1953-07-06 Siemens Ag Einrichtung zur Herstellung duenner UEberzugsschichten aus verdampften Stoffen durchKondensation
NL85130C (fr) * 1953-01-26
DE961772C (de) * 1955-08-06 1957-04-11 Vacuumtechnik A G Verfahren und Anordnung zum Verdampfen von auf Traegermaterial wie Papierbahnen aufzubringenden Metallen, insbesondere Aluminium im Hochvakuum
US2998376A (en) * 1956-10-29 1961-08-29 Temescal Metallurgical Corp High-vacuum evaporator
NL253747A (fr) * 1959-07-13
US3153137A (en) * 1961-10-13 1964-10-13 Union Carbide Corp Evaporation source
US3129315A (en) * 1961-12-26 1964-04-14 Lear Siegler Inc Vacuum vaporizing fixture

Also Published As

Publication number Publication date
GB1021776A (fr) 1966-03-09
DE1298381B (de) 1969-06-26
US3244857A (en) 1966-04-05
SE304893B (fr) 1968-10-07
NL6414696A (fr) 1965-06-24

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