SE434651B - Anordning for paangning av serskilt sublimerbara emnen i vakuum - Google Patents

Anordning for paangning av serskilt sublimerbara emnen i vakuum

Info

Publication number
SE434651B
SE434651B SE7707216A SE7707216A SE434651B SE 434651 B SE434651 B SE 434651B SE 7707216 A SE7707216 A SE 7707216A SE 7707216 A SE7707216 A SE 7707216A SE 434651 B SE434651 B SE 434651B
Authority
SE
Sweden
Prior art keywords
vacuum
sublimable substances
taking separately
taking
separately
Prior art date
Application number
SE7707216A
Other languages
English (en)
Swedish (sv)
Other versions
SE7707216L (sv
Inventor
K-G Redel
W Zultzle
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of SE7707216L publication Critical patent/SE7707216L/
Publication of SE434651B publication Critical patent/SE434651B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
SE7707216A 1976-06-26 1977-06-22 Anordning for paangning av serskilt sublimerbara emnen i vakuum SE434651B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762628765 DE2628765C3 (de) 1976-06-26 1976-06-26 Vorrichtung zum Aufdampfen insbesondere sublimierbarer Stoffe im Vakuum mittels einer Elektronenstrahlquelle

Publications (2)

Publication Number Publication Date
SE7707216L SE7707216L (sv) 1977-12-27
SE434651B true SE434651B (sv) 1984-08-06

Family

ID=5981519

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7707216A SE434651B (sv) 1976-06-26 1977-06-22 Anordning for paangning av serskilt sublimerbara emnen i vakuum

Country Status (6)

Country Link
CH (1) CH627790A5 (fr)
DE (1) DE2628765C3 (fr)
FR (1) FR2356268A1 (fr)
GB (1) GB1540944A (fr)
IT (1) IT1079238B (fr)
SE (1) SE434651B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0111611B1 (fr) 1982-10-28 1987-05-13 International Business Machines Corporation Perfectionnements aux procédés et équipements de dépôt par évaporation sous vide mettant en oeuvre un canon à électrons
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
DE19539986A1 (de) * 1995-10-27 1997-04-30 Leybold Ag Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2745773A (en) * 1953-03-25 1956-05-15 Rca Corp Apparatus and method for forming juxtaposed as well as superimposed coatings
CH452313A (de) * 1965-12-18 1968-05-31 Balzers Patent Beteilig Ag Vorrichtung zur Verdampfung von Stoffen im Vakuum
GB1111955A (en) * 1966-05-10 1968-05-01 Mullard Ltd Improvements in or relating to devices for evaporating powdered material

Also Published As

Publication number Publication date
DE2628765C3 (de) 1979-01-11
FR2356268B1 (fr) 1982-04-16
GB1540944A (en) 1979-02-21
IT1079238B (it) 1985-05-08
DE2628765B2 (de) 1978-04-20
CH627790A5 (en) 1982-01-29
FR2356268A1 (fr) 1978-01-20
DE2628765A1 (de) 1977-12-29
SE7707216L (sv) 1977-12-27

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