FI119299B - Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi - Google Patents
Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi Download PDFInfo
- Publication number
- FI119299B FI119299B FI20055323A FI20055323A FI119299B FI 119299 B FI119299 B FI 119299B FI 20055323 A FI20055323 A FI 20055323A FI 20055323 A FI20055323 A FI 20055323A FI 119299 B FI119299 B FI 119299B
- Authority
- FI
- Finland
- Prior art keywords
- mass
- acceleration sensor
- details
- pulp
- capacitive
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Pressure Sensors (AREA)
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20055323A FI119299B (fi) | 2005-06-17 | 2005-06-17 | Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi |
KR1020087001218A KR101286028B1 (ko) | 2005-06-17 | 2006-06-13 | 용량형 가속도 센서 및 용량형 가속도 센서의 제조 방법 |
PCT/FI2006/050257 WO2006134232A1 (en) | 2005-06-17 | 2006-06-13 | Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor |
CA002610185A CA2610185A1 (en) | 2005-06-17 | 2006-06-13 | Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor |
CN201310532722.7A CN103823082B (zh) | 2005-06-17 | 2006-06-13 | 制造电容式加速度传感器的方法和电容式加速度传感器 |
EP06764496.3A EP1891450B1 (en) | 2005-06-17 | 2006-06-13 | Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor |
CNA2006800218147A CN101198874A (zh) | 2005-06-17 | 2006-06-13 | 制造电容式加速度传感器的方法和电容式加速度传感器 |
JP2008516359A JP5215847B2 (ja) | 2005-06-17 | 2006-06-13 | 容量性加速度センサーを製造する方法、および、容量性加速度センサー |
US11/453,912 US7426863B2 (en) | 2005-06-17 | 2006-06-16 | Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor |
IL187938A IL187938A0 (en) | 2005-06-17 | 2007-12-06 | Method of manufacturing a capacitive acceleration sensor and a capacitive acceleration sensor |
NO20080334A NO20080334L (no) | 2005-06-17 | 2008-01-16 | Metode for a fremstille en kapasitiv akselerasjonssensor, og kapasitiv akselerasjonssensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20055323A FI119299B (fi) | 2005-06-17 | 2005-06-17 | Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi |
FI20055323 | 2005-06-17 |
Publications (3)
Publication Number | Publication Date |
---|---|
FI20055323A0 FI20055323A0 (fi) | 2005-06-17 |
FI20055323A FI20055323A (fi) | 2007-03-05 |
FI119299B true FI119299B (fi) | 2008-09-30 |
Family
ID=34778459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20055323A FI119299B (fi) | 2005-06-17 | 2005-06-17 | Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi |
Country Status (10)
Country | Link |
---|---|
US (1) | US7426863B2 (ja) |
EP (1) | EP1891450B1 (ja) |
JP (1) | JP5215847B2 (ja) |
KR (1) | KR101286028B1 (ja) |
CN (2) | CN103823082B (ja) |
CA (1) | CA2610185A1 (ja) |
FI (1) | FI119299B (ja) |
IL (1) | IL187938A0 (ja) |
NO (1) | NO20080334L (ja) |
WO (1) | WO2006134232A1 (ja) |
Families Citing this family (70)
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DE102006058747A1 (de) * | 2006-12-12 | 2008-06-19 | Robert Bosch Gmbh | Mikromechanischer z-Sensor |
US7610809B2 (en) * | 2007-01-18 | 2009-11-03 | Freescale Semiconductor, Inc. | Differential capacitive sensor and method of making same |
US7578190B2 (en) * | 2007-08-03 | 2009-08-25 | Freescale Semiconductor, Inc. | Symmetrical differential capacitive sensor and method of making same |
US8079262B2 (en) * | 2007-10-26 | 2011-12-20 | Rosemount Aerospace Inc. | Pendulous accelerometer with balanced gas damping |
US8136400B2 (en) * | 2007-11-15 | 2012-03-20 | Physical Logic Ag | Accelerometer |
EP2279422A1 (de) * | 2008-05-15 | 2011-02-02 | Continental Teves AG & Co. oHG | Mikromechanischer beschleunigungssensor |
DE102008040855B4 (de) * | 2008-07-30 | 2022-05-25 | Robert Bosch Gmbh | Dreiachsiger Beschleunigungssensor |
US8171793B2 (en) * | 2008-07-31 | 2012-05-08 | Honeywell International Inc. | Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer |
DE102008043788A1 (de) * | 2008-11-17 | 2010-05-20 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
JP4965546B2 (ja) * | 2008-11-25 | 2012-07-04 | パナソニック株式会社 | 加速度センサ |
US8850889B2 (en) | 2008-11-25 | 2014-10-07 | Panasonic Corporation | Acceleration sensor |
DE102009000167A1 (de) * | 2009-01-13 | 2010-07-22 | Robert Bosch Gmbh | Sensoranordnung |
DE102009000594A1 (de) * | 2009-02-04 | 2010-08-05 | Robert Bosch Gmbh | Beschleunigungssensor und Verfahren zum Betreiben eines Beschleunigungssensors |
JP2010210417A (ja) * | 2009-03-10 | 2010-09-24 | Panasonic Electric Works Co Ltd | 加速度センサ |
JP2010210429A (ja) * | 2009-03-10 | 2010-09-24 | Panasonic Electric Works Co Ltd | 加速度センサ |
JP5426906B2 (ja) * | 2009-03-10 | 2014-02-26 | パナソニック株式会社 | 加速度センサ |
JP2010210424A (ja) * | 2009-03-10 | 2010-09-24 | Panasonic Electric Works Co Ltd | 加速度センサ |
US7736931B1 (en) | 2009-07-20 | 2010-06-15 | Rosemount Aerospace Inc. | Wafer process flow for a high performance MEMS accelerometer |
KR20120061880A (ko) * | 2009-08-13 | 2012-06-13 | 메기트 (산 주안 카피스트라노), 인크. | 높은 g 범위 가속 센서들에서 최대화되고 양방향이며 대칭적인 댐핑을 위한 프루프 매스 |
DE102009029248B4 (de) * | 2009-09-08 | 2022-12-15 | Robert Bosch Gmbh | Mikromechanisches System zum Erfassen einer Beschleunigung |
US8322216B2 (en) * | 2009-09-22 | 2012-12-04 | Duli Yu | Micromachined accelerometer with monolithic electrodes and method of making the same |
JP5789737B2 (ja) | 2009-11-24 | 2015-10-07 | パナソニックIpマネジメント株式会社 | 加速度センサ |
JP5716149B2 (ja) * | 2009-11-24 | 2015-05-13 | パナソニックIpマネジメント株式会社 | 加速度センサ |
JP2011112389A (ja) * | 2009-11-24 | 2011-06-09 | Panasonic Electric Works Co Ltd | 加速度センサ |
CN102667497B (zh) | 2009-11-24 | 2014-06-18 | 松下电器产业株式会社 | 加速度传感器 |
JP2011112390A (ja) * | 2009-11-24 | 2011-06-09 | Panasonic Electric Works Co Ltd | 加速度センサ |
JP2011112392A (ja) * | 2009-11-24 | 2011-06-09 | Panasonic Electric Works Co Ltd | 加速度センサ |
KR101283683B1 (ko) * | 2009-12-14 | 2013-07-08 | 한국전자통신연구원 | 수직축 방향 가속도계 |
US8418556B2 (en) * | 2010-02-10 | 2013-04-16 | Robert Bosch Gmbh | Micro electrical mechanical magnetic field sensor utilizing modified inertial elements |
JP5494804B2 (ja) * | 2010-06-15 | 2014-05-21 | 株式会社村田製作所 | 力学センサ |
IT1401001B1 (it) * | 2010-06-15 | 2013-07-05 | Milano Politecnico | Accelerometro capacitivo triassiale microelettromeccanico |
CN103221778B (zh) | 2010-09-18 | 2016-03-30 | 快捷半导体公司 | 具有单驱动的微机械单片式三轴陀螺仪 |
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JP2012088120A (ja) * | 2010-10-18 | 2012-05-10 | Seiko Epson Corp | 物理量センサー素子、物理量センサーおよび電子機器 |
CN102156201B (zh) * | 2010-11-30 | 2013-01-30 | 电子科技大学 | 一种基于soi工艺及微组装技术的三轴电容式微加速度计 |
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KR102058489B1 (ko) | 2012-04-05 | 2019-12-23 | 페어차일드 세미컨덕터 코포레이션 | 멤스 장치 프론트 엔드 전하 증폭기 |
EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
JP5942554B2 (ja) * | 2012-04-11 | 2016-06-29 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
JP6002481B2 (ja) | 2012-07-06 | 2016-10-05 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
DE102013014881B4 (de) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien |
US9470709B2 (en) | 2013-01-28 | 2016-10-18 | Analog Devices, Inc. | Teeter totter accelerometer with unbalanced mass |
US9297825B2 (en) | 2013-03-05 | 2016-03-29 | Analog Devices, Inc. | Tilt mode accelerometer with improved offset and noise performance |
JP5783201B2 (ja) * | 2013-03-27 | 2015-09-24 | 株式会社デンソー | 容量式物理量センサ |
JP5783222B2 (ja) * | 2013-03-27 | 2015-09-24 | 株式会社デンソー | 加速度センサ |
JP5900398B2 (ja) * | 2013-03-27 | 2016-04-06 | 株式会社デンソー | 加速度センサ |
WO2014156119A1 (ja) * | 2013-03-27 | 2014-10-02 | 株式会社デンソー | 物理量センサ |
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JP6285541B2 (ja) | 2014-04-28 | 2018-02-28 | 日立オートモティブシステムズ株式会社 | 加速度検出装置 |
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-
2005
- 2005-06-17 FI FI20055323A patent/FI119299B/fi not_active IP Right Cessation
-
2006
- 2006-06-13 WO PCT/FI2006/050257 patent/WO2006134232A1/en active Application Filing
- 2006-06-13 KR KR1020087001218A patent/KR101286028B1/ko not_active IP Right Cessation
- 2006-06-13 JP JP2008516359A patent/JP5215847B2/ja active Active
- 2006-06-13 CN CN201310532722.7A patent/CN103823082B/zh active Active
- 2006-06-13 CA CA002610185A patent/CA2610185A1/en not_active Abandoned
- 2006-06-13 EP EP06764496.3A patent/EP1891450B1/en active Active
- 2006-06-13 CN CNA2006800218147A patent/CN101198874A/zh active Pending
- 2006-06-16 US US11/453,912 patent/US7426863B2/en active Active
-
2007
- 2007-12-06 IL IL187938A patent/IL187938A0/en unknown
-
2008
- 2008-01-16 NO NO20080334A patent/NO20080334L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP1891450A4 (en) | 2011-07-27 |
US20070000323A1 (en) | 2007-01-04 |
CN103823082B (zh) | 2017-11-10 |
KR20080031283A (ko) | 2008-04-08 |
FI20055323A (fi) | 2007-03-05 |
CN101198874A (zh) | 2008-06-11 |
JP2008544243A (ja) | 2008-12-04 |
EP1891450A1 (en) | 2008-02-27 |
FI20055323A0 (fi) | 2005-06-17 |
KR101286028B1 (ko) | 2013-07-18 |
CA2610185A1 (en) | 2006-12-21 |
JP5215847B2 (ja) | 2013-06-19 |
EP1891450B1 (en) | 2013-08-14 |
IL187938A0 (en) | 2008-03-20 |
WO2006134232A1 (en) | 2006-12-21 |
CN103823082A (zh) | 2014-05-28 |
US7426863B2 (en) | 2008-09-23 |
NO20080334L (no) | 2008-03-14 |
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