FI107660B - Resonaattorirakenne - Google Patents

Resonaattorirakenne Download PDF

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Publication number
FI107660B
FI107660B FI991619A FI991619A FI107660B FI 107660 B FI107660 B FI 107660B FI 991619 A FI991619 A FI 991619A FI 991619 A FI991619 A FI 991619A FI 107660 B FI107660 B FI 107660B
Authority
FI
Finland
Prior art keywords
resonator
zone
frame
resonator structure
central region
Prior art date
Application number
FI991619A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI991619A (fi
Inventor
Juha Ellae
Jyrki Kaitila
Markku Ylilammi
Original Assignee
Nokia Mobile Phones Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8555088&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FI107660(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nokia Mobile Phones Ltd filed Critical Nokia Mobile Phones Ltd
Priority to FI991619A priority Critical patent/FI107660B/fi
Priority to EP14167275.8A priority patent/EP2782250A1/de
Priority to JP2001510983A priority patent/JP3735777B2/ja
Priority to US10/031,579 priority patent/US6812619B1/en
Priority to PCT/FI2000/000591 priority patent/WO2001006647A1/en
Priority to EP00942161.1A priority patent/EP1196990B1/de
Priority to AU56878/00A priority patent/AU5687800A/en
Priority to CN00810575.8A priority patent/CN1183669C/zh
Priority to AU62844/00A priority patent/AU6284400A/en
Priority to DE60042486T priority patent/DE60042486D1/de
Priority to JP2001510982A priority patent/JP3740061B2/ja
Priority to US10/031,533 priority patent/US6788170B1/en
Priority to EP00949512A priority patent/EP1196989B1/de
Priority to PCT/FI2000/000652 priority patent/WO2001006646A1/en
Priority to CN00810665.7A priority patent/CN1201486C/zh
Publication of FI991619A publication Critical patent/FI991619A/fi
Publication of FI107660B publication Critical patent/FI107660B/fi
Application granted granted Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FI991619A 1999-07-19 1999-07-19 Resonaattorirakenne FI107660B (fi)

Priority Applications (15)

Application Number Priority Date Filing Date Title
FI991619A FI107660B (fi) 1999-07-19 1999-07-19 Resonaattorirakenne
EP14167275.8A EP2782250A1 (de) 1999-07-19 2000-06-29 Resonatorstruktur und Filter mit einer derartigen Resonatorstruktur
JP2001510983A JP3735777B2 (ja) 1999-07-19 2000-06-29 共振子構造およびその共振子構造を備えるフィルタ
US10/031,579 US6812619B1 (en) 1999-07-19 2000-06-29 Resonator structure and a filter comprising such a resonator structure
PCT/FI2000/000591 WO2001006647A1 (en) 1999-07-19 2000-06-29 Resonator structure and a filter comprising such a resonator structure
EP00942161.1A EP1196990B1 (de) 1999-07-19 2000-06-29 Resonatorstruktur und dieselbe enthaltendes filter
AU56878/00A AU5687800A (en) 1999-07-19 2000-06-29 Resonator structure and a filter comprising such a resonator structure
CN00810575.8A CN1183669C (zh) 1999-07-19 2000-06-29 谐振器结构和包括这种谐振器结构的滤波器
AU62844/00A AU6284400A (en) 1999-07-19 2000-07-18 Resonator structure and a filter having such a resonator structure
DE60042486T DE60042486D1 (de) 1999-07-19 2000-07-18 Resonatorstruktur und dieselbe enthaltendesfilter
JP2001510982A JP3740061B2 (ja) 1999-07-19 2000-07-18 共振子構造及びそのような共振子構造を有するフィルター
US10/031,533 US6788170B1 (en) 1999-07-19 2000-07-18 Resonator structure having a dampening material and a filter having such a resonator structure
EP00949512A EP1196989B1 (de) 1999-07-19 2000-07-18 Resonatorstruktur und dieselbe enthaltendesfilter
PCT/FI2000/000652 WO2001006646A1 (en) 1999-07-19 2000-07-18 Resonator structure and a filter having such a resonator structure
CN00810665.7A CN1201486C (zh) 1999-07-19 2000-07-18 谐振器结构和具有这样的谐振器结构的滤波器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI991619A FI107660B (fi) 1999-07-19 1999-07-19 Resonaattorirakenne
FI991619 1999-07-19

Publications (2)

Publication Number Publication Date
FI991619A FI991619A (fi) 2001-01-20
FI107660B true FI107660B (fi) 2001-09-14

Family

ID=8555088

Family Applications (1)

Application Number Title Priority Date Filing Date
FI991619A FI107660B (fi) 1999-07-19 1999-07-19 Resonaattorirakenne

Country Status (8)

Country Link
US (2) US6812619B1 (de)
EP (3) EP2782250A1 (de)
JP (2) JP3735777B2 (de)
CN (2) CN1183669C (de)
AU (2) AU5687800A (de)
DE (1) DE60042486D1 (de)
FI (1) FI107660B (de)
WO (2) WO2001006647A1 (de)

Families Citing this family (200)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674291B1 (en) * 2000-10-30 2004-01-06 Agere Systems Guardian Corp. Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom
US6424237B1 (en) * 2000-12-21 2002-07-23 Agilent Technologies, Inc. Bulk acoustic resonator perimeter reflection system
US6548943B2 (en) * 2001-04-12 2003-04-15 Nokia Mobile Phones Ltd. Method of producing thin-film bulk acoustic wave devices
US6476536B1 (en) 2001-04-27 2002-11-05 Nokia Corporation Method of tuning BAW resonators
US6662419B2 (en) * 2001-12-17 2003-12-16 Intel Corporation Method for fabricating film bulk acoustic resonators to achieve high-Q and low loss
KR100616508B1 (ko) * 2002-04-11 2006-08-29 삼성전기주식회사 Ｆｂａｒ 소자 및 그 제조방법
DE20221966U1 (de) 2002-06-06 2010-02-25 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement mit einem Anpaßnetzwerk
DE10241425B4 (de) * 2002-09-06 2015-06-18 Epcos Ag Mit akustischen Wellen arbeitender Resonator mit Unterdrückung störender Nebenmoden
JP3879643B2 (ja) * 2002-09-25 2007-02-14 株式会社村田製作所 圧電共振子、圧電フィルタ、通信装置
DE10262056B4 (de) * 2002-11-07 2008-08-28 Infineon Technologies Ag BAW-Resonator mit akustischem Reflektor und Filterschaltung
US7275292B2 (en) 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
DE10319554B4 (de) 2003-04-30 2018-05-09 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren
EP1517443B1 (de) * 2003-09-12 2011-06-29 Panasonic Corporation Abstimmbarer Dünnschicht-Volumenwellen-Resonator, Herstellungsmethode dafür, Filter, mehrschichtiges zusammengesetztes elektronisches Bauelement und Kommunikationsvorrichtung
JP4657660B2 (ja) * 2003-09-12 2011-03-23 パナソニック株式会社 薄膜バルク音響共振器、その製造方法、フィルタ、複合電子部品および通信機器
WO2005034345A1 (en) 2003-10-06 2005-04-14 Philips Intellectual Property & Standards Gmbh Resonator structure and method of producing it
US7332985B2 (en) * 2003-10-30 2008-02-19 Avago Technologies Wireless Ip (Singapore) Pte Ltd. Cavity-less film bulk acoustic resonator (FBAR) devices
US7391285B2 (en) * 2003-10-30 2008-06-24 Avago Technologies Wireless Ip Pte Ltd Film acoustically-coupled transformer
US6946928B2 (en) * 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7372346B2 (en) * 2003-12-24 2008-05-13 Interuniversitair Microelektronica Centrum (Imec) Acoustic resonator
TWI228869B (en) * 2003-12-30 2005-03-01 Ind Tech Res Inst Noise reduction method of filter
JP4280198B2 (ja) 2004-04-30 2009-06-17 株式会社東芝 薄膜圧電共振器
US7161448B2 (en) * 2004-06-14 2007-01-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancements using recessed region
US7388454B2 (en) * 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US7280007B2 (en) 2004-11-15 2007-10-09 Avago Technologies General Ip (Singapore) Pte. Ltd. Thin film bulk acoustic resonator with a mass loaded perimeter
TWI365603B (en) * 2004-10-01 2012-06-01 Avago Technologies Wireless Ip A thin film bulk acoustic resonator with a mass loaded perimeter
JP4535841B2 (ja) * 2004-10-28 2010-09-01 富士通メディアデバイス株式会社 圧電薄膜共振子及びこれを用いたフィルタ
US7098758B2 (en) 2004-11-03 2006-08-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled thin-film resonators having an electrode with a tapered edge
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
DE102004059965A1 (de) 2004-12-13 2006-06-14 Epcos Ag Dünnschichtresonator und Verfahren zur Herstellung eines Vielschichtbauelements
US7202560B2 (en) * 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
WO2006087878A1 (ja) * 2005-02-21 2006-08-24 Murata Manufacturing Co., Ltd. 圧電薄膜共振子
US7369013B2 (en) * 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
WO2006129532A1 (ja) 2005-06-02 2006-12-07 Murata Manufacturing Co., Ltd. 圧電共振子及び圧電薄膜フィルタ
KR100622398B1 (ko) * 2005-07-18 2006-09-12 삼성전자주식회사 필름 벌크 음향 공진기 및 그 제조 방법
JP4435049B2 (ja) * 2005-08-08 2010-03-17 株式会社東芝 薄膜圧電共振器及びその製造方法
US7868522B2 (en) 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
CN101278479B (zh) * 2005-09-30 2011-04-13 Nxp股份有限公司 薄膜体声波（baw）谐振器或相关改进
US7737807B2 (en) 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7675390B2 (en) 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7463499B2 (en) 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
CN101292422B (zh) * 2005-11-04 2013-01-16 株式会社村田制作所 压电谐振器、滤波器、以及双模滤波器
DE102005057762A1 (de) 2005-12-02 2007-06-06 Epcos Ag Mit akustischen Volumenwellen arbeitender Resonator
DE102005061344A1 (de) 2005-12-21 2007-06-28 Epcos Ag Mit akustischen Volumenwellen arbeitender Resonator
JP4963193B2 (ja) * 2006-03-07 2012-06-27 日本碍子株式会社 圧電薄膜デバイス
JP4877966B2 (ja) * 2006-03-08 2012-02-15 日本碍子株式会社 圧電薄膜デバイス
US7746677B2 (en) 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US7479685B2 (en) 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
WO2007119556A1 (ja) * 2006-04-05 2007-10-25 Murata Manufacturing Co., Ltd. 圧電共振子及び圧電フィルタ
US7980599B2 (en) * 2006-05-05 2011-07-19 Weems Industries, Inc. Identification system for pneumatic couplers
DE102006023165B4 (de) * 2006-05-17 2008-02-14 Infineon Technologies Ag Verfahren zur Herstellung eines akustischen Spiegels aus alternierend angeordneten Schichten hoher und niedriger akustischer Impedanz
JP5027534B2 (ja) * 2006-07-07 2012-09-19 日本碍子株式会社 圧電薄膜デバイス
DE102006035874B3 (de) 2006-08-01 2008-02-07 Epcos Ag Mit akustischen Volumenwellen arbeitendes Filter
KR101238360B1 (ko) * 2006-08-16 2013-03-04 삼성전자주식회사 공진기 및 그 제조 방법
US7893793B2 (en) 2006-08-25 2011-02-22 Panasonic Corporation Film bulk acoustic wave resonator and method for manufacturing the same
DE102006047698B4 (de) * 2006-10-09 2009-04-09 Epcos Ag Mit akustischen Volumenwellen arbeitender Resonator
US7557677B1 (en) * 2006-12-20 2009-07-07 Hrl Laboratories, Llc Cascaded monolithic crystal filter with high out-of-band rejection
JP2008172494A (ja) * 2007-01-11 2008-07-24 Fujitsu Media Device Kk 圧電薄膜共振器、弾性波デバイスおよび弾性波デバイスの製造方法。
US20100109809A1 (en) * 2007-01-17 2010-05-06 Kensuke Tanaka Thin film piezoelectric resonator and thin film piezoelectric filter
JP2008182543A (ja) * 2007-01-25 2008-08-07 Ube Ind Ltd 薄膜圧電共振器とそれを用いた薄膜圧電フィルタ
JP5013227B2 (ja) * 2007-04-11 2012-08-29 株式会社村田製作所 圧電薄膜フィルタ
WO2009011022A1 (ja) 2007-07-13 2009-01-22 Fujitsu Limited 圧電薄膜共振素子及びこれを用いた回路部品
JPWO2009013938A1 (ja) * 2007-07-20 2010-09-30 株式会社村田製作所 圧電共振子及び圧電フィルタ装置
DE112008002199B4 (de) * 2007-08-14 2021-10-14 Avago Technologies International Sales Pte. Limited Verfahren zum Bilden einer Multilayer-Elektrode, welche unter einer piezoelektrischen Schicht liegt, und entsprechende Struktur
WO2009023098A2 (en) * 2007-08-14 2009-02-19 Skyworks Solutions, Inc. Bulk acoustic wave structure with aluminum copper nitride piezoelectric layer and related method
CN101796726B (zh) 2007-08-24 2014-04-02 太阳诱电株式会社 压电薄膜谐振器、使用该压电薄膜谐振器的滤波器、使用该滤波器的双工器、以及使用该滤波器或该双工器的通信设备
US7791435B2 (en) 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
DE112008002726T5 (de) * 2007-10-18 2010-08-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. BAW-Struktur mit reduzierten topografischen Stufen und verwandtes Verfahren
JP4730383B2 (ja) * 2008-01-21 2011-07-20 宇部興産株式会社 薄膜音響共振器及びその製造方法
JP5563739B2 (ja) 2008-02-20 2014-07-30 太陽誘電株式会社 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置
US7795781B2 (en) * 2008-04-24 2010-09-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator with reduced energy loss
US7602102B1 (en) 2008-04-24 2009-10-13 Skyworks Solutions, Inc. Bulk acoustic wave resonator with controlled thickness region having controlled electromechanical coupling
WO2009133511A1 (en) * 2008-04-29 2009-11-05 Nxp B.V. Bulk acoustic wave resonator
US7732977B2 (en) 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
JP5207902B2 (ja) * 2008-09-29 2013-06-12 京セラ株式会社 バルク音響波共振子および電子部品
IT1392576B1 (it) * 2008-12-30 2012-03-09 St Microelectronics Rousset Dispositivo di rilevamento elettronico di materiali biologici e relativo processo di fabbricazione
US8030823B2 (en) 2009-01-26 2011-10-04 Resonance Semiconductor Corporation Protected resonator
US9735338B2 (en) 2009-01-26 2017-08-15 Cymatics Laboratories Corp. Protected resonator
JP2010192721A (ja) * 2009-02-19 2010-09-02 Fujifilm Corp 圧電素子とその製造方法、及び液体吐出装置
CN102301590B (zh) 2009-02-20 2014-07-02 宇部兴产株式会社 薄膜压电谐振器以及使用它的薄膜压电滤波器
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
JP2011041136A (ja) * 2009-08-17 2011-02-24 Taiyo Yuden Co Ltd 弾性波デバイスおよびその製造方法
US8456257B1 (en) 2009-11-12 2013-06-04 Triquint Semiconductor, Inc. Bulk acoustic wave devices and method for spurious mode suppression
US20110121916A1 (en) * 2009-11-24 2011-05-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Hybrid bulk acoustic wave resonator
US8193877B2 (en) 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US9608589B2 (en) 2010-10-26 2017-03-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of forming acoustic resonator using intervening seed layer
JP5229308B2 (ja) * 2010-12-07 2013-07-03 株式会社村田製作所 圧電デバイス及びその製造方法
US8791776B2 (en) * 2011-01-19 2014-07-29 Wei Pang Acoustic wave resonator having a gasket
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8575820B2 (en) * 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9525397B2 (en) * 2011-03-29 2016-12-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising acoustic reflector, frame and collar
US8872604B2 (en) * 2011-05-05 2014-10-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor
JP2012244616A (ja) 2011-05-24 2012-12-10 Taiyo Yuden Co Ltd 圧電薄膜共振子、フィルタおよびモジュール
US8330325B1 (en) * 2011-06-16 2012-12-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8816567B2 (en) 2011-07-19 2014-08-26 Qualcomm Mems Technologies, Inc. Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression
CN102223142B (zh) * 2011-08-13 2019-09-10 张�浩 声波谐振器
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
CN103929148B (zh) * 2013-01-11 2017-09-19 中兴通讯股份有限公司 一种低插损压电声波带通滤波器及实现方法
US9450565B2 (en) 2013-03-12 2016-09-20 Qorvo Us, Inc. Border ring mode suppression in solidly-mounted bulk acoustic wave resonator
US20140292152A1 (en) * 2013-04-01 2014-10-02 Cymatics Laboratories Corp. Temperature compensating electrodes
JP5591977B2 (ja) * 2013-04-30 2014-09-17 太陽誘電株式会社 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置
US9571061B2 (en) 2014-06-06 2017-02-14 Akoustis, Inc. Integrated circuit configured with two or more single crystal acoustic resonator devices
US9673384B2 (en) 2014-06-06 2017-06-06 Akoustis, Inc. Resonance circuit with a single crystal capacitor dielectric material
US9537465B1 (en) 2014-06-06 2017-01-03 Akoustis, Inc. Acoustic resonator device with single crystal piezo material and capacitor on a bulk substrate
US9912314B2 (en) 2014-07-25 2018-03-06 Akoustics, Inc. Single crystal acoustic resonator and bulk acoustic wave filter
US9805966B2 (en) 2014-07-25 2017-10-31 Akoustis, Inc. Wafer scale packaging
US9716581B2 (en) 2014-07-31 2017-07-25 Akoustis, Inc. Mobile communication device configured with a single crystal piezo resonator structure
US9917568B2 (en) 2014-08-26 2018-03-13 Akoustis, Inc. Membrane substrate structure for single crystal acoustic resonator device
KR101973422B1 (ko) 2014-12-05 2019-04-29 삼성전기주식회사 벌크 탄성파 공진기
US9985194B1 (en) 2015-05-13 2018-05-29 Qorvo Us, Inc. Spurious mode suppression in bulk acoustic wave resonator
JP6441761B2 (ja) 2015-07-29 2018-12-19 太陽誘電株式会社 圧電薄膜共振器及びフィルタ
JP6631925B2 (ja) 2015-08-07 2020-01-15 株式会社Ｐｉｅｚｏ Ｓｔｕｄｉｏ 圧電薄膜素子の製造方法
JP6469601B2 (ja) 2016-02-05 2019-02-13 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびデュプレクサ
DE102016103959A1 (de) 2016-03-04 2017-09-07 Snaptrack, Inc. BAW-Resonator mit reduzierten Störmoden, BAW-Filter und Verfahren zum Herstellen
US11424728B2 (en) 2016-03-11 2022-08-23 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US11184079B2 (en) 2016-03-11 2021-11-23 Akoustis, Inc. Front end module for 5.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11316496B2 (en) 2016-03-11 2022-04-26 Akoustis, Inc. Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material
US10979026B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit
US11558023B2 (en) 2016-03-11 2023-01-17 Akoustis, Inc. Method for fabricating an acoustic resonator device
US11070184B2 (en) 2016-03-11 2021-07-20 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US10615773B2 (en) 2017-09-11 2020-04-07 Akoustis, Inc. Wireless communication infrastructure system configured with a single crystal piezo resonator and filter structure
US11394451B2 (en) 2016-03-11 2022-07-19 Akoustis, Inc. Front end module for 6.1 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10979023B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.9 GHz c-V2X and DSRC acoustic wave resonator RF filter circuit
US10355659B2 (en) 2016-03-11 2019-07-16 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US10979025B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5G band n79 acoustic wave resonator RF filter circuit
US10110189B2 (en) 2016-11-02 2018-10-23 Akoustis, Inc. Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
US11177868B2 (en) 2016-03-11 2021-11-16 Akoustis, Inc. Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10217930B1 (en) 2016-03-11 2019-02-26 Akoustis, Inc. Method of manufacture for single crystal acoustic resonator devices using micro-vias
US11063576B2 (en) 2016-03-11 2021-07-13 Akoustis, Inc. Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10979024B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
US11832521B2 (en) 2017-10-16 2023-11-28 Akoustis, Inc. Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers
US11677372B2 (en) 2016-03-11 2023-06-13 Akoustis, Inc. Piezoelectric acoustic resonator with dielectric protective layer manufactured with piezoelectric thin film transfer process
US11683021B2 (en) 2016-03-11 2023-06-20 Akoustis, Inc. 4.5G 3.55-3.7 GHz band bulk acoustic wave resonator RF filter circuit
US10581398B2 (en) 2016-03-11 2020-03-03 Akoustis, Inc. Method of manufacture for single crystal acoustic resonator devices using micro-vias
US10985732B2 (en) 2016-03-11 2021-04-20 Akoustis, Inc. 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10673513B2 (en) 2016-03-11 2020-06-02 Akoustis, Inc. Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
US20210257993A1 (en) 2016-03-11 2021-08-19 Akoustis, Inc. Acoustic wave resonator rf filter circuit device
US11411169B2 (en) 2017-10-16 2022-08-09 Akoustis, Inc. Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material
US10979022B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11581866B2 (en) 2016-03-11 2023-02-14 Akoustis, Inc. RF acoustic wave resonators integrated with high electron mobility transistors including a shared piezoelectric/buffer layer and methods of forming the same
US11476825B2 (en) 2016-03-11 2022-10-18 Akoustis, Inc. 5.5 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
US11356071B2 (en) 2016-03-11 2022-06-07 Akoustis, Inc. Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process
US11689186B2 (en) 2016-03-11 2023-06-27 Akoustis, Inc. 5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit
US11451213B2 (en) 2016-03-11 2022-09-20 Akoustis, Inc. 5G n79 Wi-Fi acoustic triplexer circuit
US11411168B2 (en) 2017-10-16 2022-08-09 Akoustis, Inc. Methods of forming group III piezoelectric thin films via sputtering
US10523180B2 (en) 2016-03-11 2019-12-31 Akoustis, Inc. Method and structure for single crystal acoustic resonator devices using thermal recrystallization
US11418169B2 (en) 2016-03-11 2022-08-16 Akoustis, Inc. 5G n41 2.6 GHz band acoustic wave resonator RF filter circuit
US11736177B2 (en) 2016-03-11 2023-08-22 Akoustis Inc. Front end modules for 5.6 GHz and 6.6 GHz Wi-Fi acoustic wave resonator RF filter circuits
KR102642910B1 (ko) 2016-05-18 2024-03-04 삼성전기주식회사 음향 공진기 및 그 제조 방법
DE102016111061B4 (de) 2016-06-16 2018-06-28 Snaptrack, Inc. Akustischer Volumenwellenresonator mit reduzierten Verlusten, HF-Filter mit solchen Resonatoren und Verfahren zur Herstellung solcher Resonatoren
JP7036487B2 (ja) 2016-07-07 2022-03-15 サムソン エレクトロ－メカニックス カンパニーリミテッド． 弾性波フィルタ装置及びその製造方法
US10720900B2 (en) 2016-07-07 2020-07-21 Samsung Electro-Mechanics Co., Ltd. Acoustic resonator and method
KR102703814B1 (ko) * 2016-07-07 2024-09-04 삼성전기주식회사 음향 공진기 및 그 제조 방법
US11895920B2 (en) 2016-08-15 2024-02-06 Akoustis, Inc. Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material
US10431580B1 (en) 2017-01-12 2019-10-01 Akoustis, Inc. Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices
US11228299B2 (en) 2017-02-02 2022-01-18 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator with insertion film, filter, and multiplexer
US10873316B2 (en) 2017-03-02 2020-12-22 Samsung Electro-Mechanics Co., Ltd. Acoustic resonator and method of manufacturing the same
JP6903471B2 (ja) 2017-04-07 2021-07-14 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびマルチプレクサ
DE102017117870B3 (de) * 2017-08-07 2018-12-27 RF360 Europe GmbH BAW-Resonator mit reduzierten Störmoden und erhöhtem Gütefaktor
US10277194B2 (en) 2017-09-15 2019-04-30 Globalfoundries Singapore Pte. Ltd. Acoustic MEMs resonator and filter with fractal electrode and method for producing the same
US11856858B2 (en) 2017-10-16 2023-12-26 Akoustis, Inc. Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films
KR102455391B1 (ko) 2018-01-19 2022-10-17 우한 양시 마이크로 컴포넌츠 컴퍼니 리미티드 필름 벌크 음향 공진기
US11557716B2 (en) 2018-02-20 2023-01-17 Akoustis, Inc. Method and structure of single crystal electronic devices with enhanced strain interface regions by impurity introduction
US11233496B2 (en) 2018-02-21 2022-01-25 Vanguard International Semiconductor Singapore Pte. Ltd. Acoustic resonator and filter with electrode having zig-zag edge and method for producing the same
KR102097320B1 (ko) 2018-07-24 2020-04-06 삼성전기주식회사 탄성파 필터 장치
DE112019004304T5 (de) 2018-08-27 2021-05-27 Akoustis, Inc. Akustische volumenwellen-resonator filter-vorrichtungen hoher leistung
US10790801B2 (en) 2018-09-07 2020-09-29 Vtt Technical Research Centre Of Finland Ltd Loaded resonators for adjusting frequency response of acoustic wave resonators
US10630256B2 (en) 2018-09-07 2020-04-21 Vtt Technical Research Centre Of Finland Ltd Two-stage lateral bulk acoustic wave filter
US10756696B2 (en) 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter
US11082023B2 (en) * 2018-09-24 2021-08-03 Skyworks Global Pte. Ltd. Multi-layer raised frame in bulk acoustic wave device
US11469735B2 (en) * 2018-11-28 2022-10-11 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer
JP7456734B2 (ja) * 2019-06-17 2024-03-27 太陽誘電株式会社 弾性波デバイス、フィルタおよびマルチプレクサ
JP7261568B2 (ja) * 2018-11-28 2023-04-20 太陽誘電株式会社 弾性波デバイス、フィルタおよびマルチプレクサ
US11264970B2 (en) * 2019-03-02 2022-03-01 Texas Instruments Incorporated Piezoelectric resonator with patterned resonant confiners
CN111010119B (zh) * 2019-08-15 2024-01-26 天津大学 带复合环形结构的谐振器、滤波器及电子设备
US11088670B2 (en) 2019-09-11 2021-08-10 Vtt Technical Research Centre Of Finland Ltd Loaded series resonators for adjusting frequency response of acoustic wave resonators
US11223341B2 (en) 2019-10-22 2022-01-11 Vtt Technical Research Centre Of Finland Ltd Suppressing parasitic sidebands in lateral bulk acoustic wave resonators
CN110995199B (zh) * 2019-12-17 2022-02-01 武汉大学 双工器
US11618968B2 (en) 2020-02-07 2023-04-04 Akoustis, Inc. Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers
US12102010B2 (en) 2020-03-05 2024-09-24 Akoustis, Inc. Methods of forming films including scandium at low temperatures using chemical vapor deposition to provide piezoelectric resonator devices and/or high electron mobility transistor devices
CN111600566B (zh) * 2020-04-21 2021-06-01 诺思(天津)微系统有限责任公司 滤波器、体声波谐振器组件及其制造方法、电子设备
CN111641399A (zh) * 2020-06-01 2020-09-08 中国电子科技集团公司第二十六研究所 一种设置有SiO2钝化层的RF滤波器
US11496108B2 (en) 2020-08-17 2022-11-08 Akoustis, Inc. RF BAW resonator filter architecture for 6.5GHz Wi-Fi 6E coexistence and other ultra-wideband applications
DE102021209875A1 (de) 2020-09-18 2022-03-24 Skyworks Global Pte. Ltd. Akustische volumenwellenvorrichtung mit erhöhter rahmenstruktur
KR102609139B1 (ko) 2020-10-13 2023-12-05 삼성전기주식회사 체적 음향 공진기
US11901880B2 (en) 2021-01-18 2024-02-13 Akoustis, Inc. 5 and 6 GHz Wi-Fi coexistence acoustic wave resonator RF diplexer circuit
TWI776661B (zh) * 2021-08-31 2022-09-01 國立陽明交通大學 晶體振盪器及其製作方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3379566D1 (en) * 1982-04-20 1989-05-11 Fujitsu Ltd Piezoelectric resonator chip and a method for adjusting its resonant frequency
JPS5967712A (ja) 1982-10-08 1984-04-17 Murata Mfg Co Ltd 圧電共振子
WO1986006228A1 (en) 1985-04-11 1986-10-23 Toyo Communication Equipment Co., Ltd. Piezo-electric resonator for generating overtones
US4924131A (en) * 1987-10-14 1990-05-08 Fujikura Ltd. Piezo-electric acceleration sensor
US4783821A (en) * 1987-11-25 1988-11-08 The Regents Of The University Of California IC processed piezoelectric microphone
US5373268A (en) 1993-02-01 1994-12-13 Motorola, Inc. Thin film resonator having stacked acoustic reflecting impedance matching layers and method
US5596239A (en) 1995-06-29 1997-01-21 Motorola, Inc. Enhanced quality factor resonator
JPH09181560A (ja) 1995-12-22 1997-07-11 Murata Mfg Co Ltd 圧電共振子
US5714917A (en) 1996-10-02 1998-02-03 Nokia Mobile Phones Limited Device incorporating a tunable thin film bulk acoustic resonator for performing amplitude and phase modulation
US6111341A (en) * 1997-02-26 2000-08-29 Toyo Communication Equipment Co., Ltd. Piezoelectric vibrator and method for manufacturing the same
US5910756A (en) 1997-05-21 1999-06-08 Nokia Mobile Phones Limited Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators
JP4326151B2 (ja) 1998-05-08 2009-09-02 アバゴ・テクノロジーズ・ワイヤレス・アイピー（シンガポール）プライベート・リミテッド 薄膜圧電振動子
FI108583B (fi) 1998-06-02 2002-02-15 Nokia Corp Resonaattorirakenteita
FI106894B (fi) 1998-06-02 2001-04-30 Nokia Mobile Phones Ltd Resonaattorirakenteita
JP3303777B2 (ja) 1998-06-02 2002-07-22 株式会社村田製作所 圧電共振子
US6150703A (en) * 1998-06-29 2000-11-21 Trw Inc. Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
US6486751B1 (en) * 2000-09-26 2002-11-26 Agere Systems Inc. Increased bandwidth thin film resonator having a columnar structure
US6476536B1 (en) * 2001-04-27 2002-11-05 Nokia Corporation Method of tuning BAW resonators

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