JP4280198B2 - 薄膜圧電共振器 - Google Patents
薄膜圧電共振器 Download PDFInfo
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- JP4280198B2 JP4280198B2 JP2004136135A JP2004136135A JP4280198B2 JP 4280198 B2 JP4280198 B2 JP 4280198B2 JP 2004136135 A JP2004136135 A JP 2004136135A JP 2004136135 A JP2004136135 A JP 2004136135A JP 4280198 B2 JP4280198 B2 JP 4280198B2
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- 239000010409 thin film Substances 0.000 title claims description 287
- 239000000758 substrate Substances 0.000 claims description 62
- 239000010408 film Substances 0.000 claims description 47
- 239000012528 membrane Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 64
- 230000008569 process Effects 0.000 description 59
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 47
- 229910052710 silicon Inorganic materials 0.000 description 47
- 239000010703 silicon Substances 0.000 description 47
- 238000004519 manufacturing process Methods 0.000 description 44
- 239000000463 material Substances 0.000 description 19
- 238000005530 etching Methods 0.000 description 16
- 238000000206 photolithography Methods 0.000 description 9
- 230000003749 cleanliness Effects 0.000 description 8
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 238000000059 patterning Methods 0.000 description 6
- 238000010030 laminating Methods 0.000 description 5
- 238000009751 slip forming Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000010897 surface acoustic wave method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000010295 mobile communication Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000347 anisotropic wet etching Methods 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 239000001301 oxygen Substances 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/023—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the membrane type
Description
実施の形態1にかかる薄膜圧電共振器は、連続的に成膜され且つ同一のマスクを用いて同形状にパターニングされた、下部電極層と圧電体薄膜とを有することを特徴とする。また、圧電体薄膜の上面の一部と、下部電極層の側面の一つと、その側面と同じ平面内にある圧電体薄膜の側面の一つとに絶縁膜が形成されており、上部電極層が、この絶縁体膜の表面と圧電体薄膜の上面の一部とに形成されていることを特徴とする。
実施の形態2にかかる薄膜圧電共振器は、上部電極層と下部電極層との間を絶縁する絶縁膜が、圧電体薄膜の側面の一つと、その側面と同じ平面内の下部電極層の側面の一つと、シリコン基板の一部とにのみ形成されていることを特徴とする。換言すれば、図1に示した絶縁膜106のうち、圧電体薄膜105の上面に形成された部分が除去されている。
実施の形態3にかかる薄膜圧電共振器は、連続的に成膜され且つ同一のマスクを用いて同形状にパターニングされた、下部電極層と第1の圧電体薄膜とを有し、さらに、その第1の圧電体薄膜を覆う第2の圧電体薄膜を有することを特徴とする。
実施の形態4にかかる薄膜圧電共振器は、実施の形態3にかかる薄膜圧電共振器において、第2の圧電体薄膜の側面の一つが、第1の圧電体薄膜の側面の一つと同じ平面内にあることを特徴とする。
70 CMOSインバータ増幅器
100,200,300,400,500,800 シリコン基板
101 ダミーパッド
103 薄膜絶縁層
104,204,304,404,804 下部電極層
105,205,805 圧電体薄膜
114,314,414 電極層
115,315,415a,415b 圧電体層
305a,405a 第1の圧電体薄膜
305b,405b 第2の圧電体薄膜
107,207,307,407,807 上部電極層
110,210,310,410,510,810 空洞
108a,108b,208a,208b,308a,308b,408a,408b,808a,808b 電極パッド
R1 帰還抵抗
R2 ダンピング抵抗
C1,C2 負荷容量
Claims (5)
- 空洞を有する基板と、
前記基板上であって且つ前記空洞の真上に配置された共振器と、を備え、
前記共振器は、前記空洞側に位置する下部電極層と、前記下部電極層に対向する上部電極層と、前記下部電極層上に位置する第1の圧電体薄膜と、前記下部電極層の側面および前記第1の圧電体薄膜を覆う第2の圧電体薄膜と、を有し、
前記第1の圧電体薄膜の側面の一つと前記下部電極層の側面の一つは、同じ平面内にあり、前記上部電極層は、前記第2の圧電体薄膜絶縁膜の上面、及び側面上に位置し、
前記第2の圧電体薄膜は、前記第1の圧電体薄膜よりも薄いことを特徴とする薄膜圧電共振器。 - 空洞を有する基板と、
前記基板上であって且つ前記空洞の真上に配置された共振器と、を備え、
前記共振器は、前記空洞側に位置する下部電極層と、前記下部電極層に対向する上部電極層と、前記下部電極層上に位置する第1の圧電体薄膜と、前記第1の圧電体薄膜の上面と、前記第1の圧電体薄膜の側面の一つと、前記下部電極層の側面の一つとを覆う第2の圧電体薄膜と、を有し、
前記第1の圧電体薄膜の側面の前記一つと前記下部電極層の側面の前記一つは、同じ平面内にあり、前記第1の圧電体薄膜の側面の他の一つと前記第2の圧電体薄膜の側面の一つは、同じ平面内にあり、
前記第2の圧電体薄膜は、前記第1の圧電体薄膜よりも薄いことを特徴とする薄膜圧電共振器。 - 前記基板上に位置する導電層を備え、
前記下部電極層の一部は、前記導電層の上面の一部に位置することを特徴とする請求項1または2に記載の薄膜圧電共振器。 - 前記空洞は、前記基板の裏面から形成された穴であることを特徴とする請求項1〜3のいずれか一つに記載の薄膜圧電共振器。
- 前記空洞は、前記基板の表面に形成された窪みであることを特徴とする請求項1〜3のいずれか一つに記載の薄膜圧電共振器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2004136135A JP4280198B2 (ja) | 2004-04-30 | 2004-04-30 | 薄膜圧電共振器 |
US11/115,158 US7501739B2 (en) | 2004-04-30 | 2005-04-27 | Thin film piezoelectric resonator and manufacturing process thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004136135A JP4280198B2 (ja) | 2004-04-30 | 2004-04-30 | 薄膜圧電共振器 |
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JP2008155725A Division JP2008236795A (ja) | 2008-06-13 | 2008-06-13 | 薄膜圧電共振器の製造方法 |
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JP2005318420A JP2005318420A (ja) | 2005-11-10 |
JP4280198B2 true JP4280198B2 (ja) | 2009-06-17 |
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JP2004136135A Expired - Lifetime JP4280198B2 (ja) | 2004-04-30 | 2004-04-30 | 薄膜圧電共振器 |
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JP (1) | JP4280198B2 (ja) |
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JP2008035119A (ja) * | 2006-07-27 | 2008-02-14 | Toshiba Corp | 薄膜圧電共振子及びその製造方法 |
JP2008172711A (ja) * | 2007-01-15 | 2008-07-24 | Hitachi Media Electoronics Co Ltd | 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール |
-
2004
- 2004-04-30 JP JP2004136135A patent/JP4280198B2/ja not_active Expired - Lifetime
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2005
- 2005-04-27 US US11/115,158 patent/US7501739B2/en active Active
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US20050248232A1 (en) | 2005-11-10 |
US7501739B2 (en) | 2009-03-10 |
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