EP1833622B2 - Verfahren zum reinigen einer vakuum-schraubenpumpe - Google Patents

Verfahren zum reinigen einer vakuum-schraubenpumpe Download PDF

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Publication number
EP1833622B2
EP1833622B2 EP05815780.1A EP05815780A EP1833622B2 EP 1833622 B2 EP1833622 B2 EP 1833622B2 EP 05815780 A EP05815780 A EP 05815780A EP 1833622 B2 EP1833622 B2 EP 1833622B2
Authority
EP
European Patent Office
Prior art keywords
cleaning
gas
cleaning fluid
screw
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP05815780.1A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1833622A1 (de
EP1833622B8 (de
EP1833622B1 (de
Inventor
Uwe ZÖLLIG
Olaf Stahlschmidt
Christian Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35788773&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1833622(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1833622A1 publication Critical patent/EP1833622A1/de
Application granted granted Critical
Publication of EP1833622B1 publication Critical patent/EP1833622B1/de
Publication of EP1833622B8 publication Critical patent/EP1833622B8/de
Publication of EP1833622B2 publication Critical patent/EP1833622B2/de
Anticipated expiration legal-status Critical
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Definitions

  • the invention relates to a method for cleaning a dry-compressing vacuum screw pump with internal compression.
  • Dry compression vacuum screw pumps with internal compression i. with non-isochoric compression
  • high stress vacuum processes e.g. Sintering or soldering can lead to deposits on the pump rotors and / or the pump chamber.
  • the friction between the pump rotors and the pump chamber increases, so that the screw pump can finally start poorly or not at all, significant vibrations can occur during operation or a total loss of the screw pump can be caused. Therefore, the dry-compressing screw pump is cleaned regularly.
  • the object of the invention is to provide a simple method for cleaning a dry-compressing vacuum screw pump with internal compression.
  • the screw pump is operated at its rated speed for cleaning. A speed reduction for cleaning is not required. In this way, eliminates the technical effort for a speed reduction, which, depending on the nature of the electric drive motor, can be significant.
  • the internal compression screw pump can be purged without any speed reduction at rated speed.
  • the purge gas in the cleaning fluid ensures that the pressure increase in the pump chamber's pump chambers is moderate.
  • the purge gas comes from a source other than the vacuum gas.
  • the purge gas is not the gas that is pumped out of a vacuum container to create a vacuum. During the evacuation no evacuation takes place.
  • the mixing of the cleaning fluid with water as the rinsing liquid can be used, but tap water can also be used depending on the application. In any case, the flushing liquid water is inexpensive and available almost everywhere.
  • the mixing of the cleaning fluid with air takes place as a purge gas.
  • the ambient air can be used in most cases.
  • the purge gas is thus available in a simple manner and inexpensively practically everywhere.
  • the purge gas has a pressure of at least 500 mbar, and may have approximately atmospheric pressure. The ambient air can therefore be used slightly throttled or unthrottled to mix the cleaning fluid.
  • nitrogen and / or argon can be used as purge gas.
  • Nitrogen and argon are less aggressive and are therefore suitable as purge gas in particularly sensitive applications or environments.
  • a gas ballast valve of the screw pump is opened during the cleaning.
  • the vacuum line leading to the gas inlet of the vacuum pump is closed before the introduction of the cleaning fluid, and after the completion of the cleaning fluid inlet, the vacuum line is opened again. In this way, penetration of the cleaning fluid into the vacuum line or the connected vacuum vessel is reliably prevented.
  • the figure shows schematically the structure of a system with a vacuum screw pump for operating the cleaning method according to the invention.
  • the vacuum container 14 may be part of a sintering plant, a plasma CVD plant or another plant in which there is the possibility that the contains pumped by the screw pump 12 gas components that can lead to deposits in the screw pump 12.
  • the screw pump 12 has a gas inlet 16, which is connected with the interposition of valves 18,20,22 to the vacuum container 14, to a rinsing liquid container 24 and, if necessary, to a purge gas container 28.
  • the screw pump 12 rotates at a speed of, for example, 8000 rpm.
  • the vacuum valve 18 is opened while the other two valves 20, 22 are closed.
  • the vacuum tank 14 is evacuated in this way.
  • the screw pump 12 is regularly cleaned or rinsed after a specified period of operation.
  • the vacuum valve 18 is closed, so that the evacuation operation is interrupted. Subsequently, the purge gas valve 22 is opened, so that the purge gas, for example, ambient air, is sucked by the screw pump 12.
  • purge gas and nitrogen or argon can be used, which is stored in a corresponding purge gas container 28.
  • the rinsing liquid valve 20 is opened, so that the rinsing liquid is sucked by the screw pump 12.
  • Tap water is used as the rinsing liquid, but other liquids are also suitable.
  • the purge gas and the rinsing liquid mix in front of the gas inlet 16 of the screw pump 12 to a cleaning fluid. In the present case, approximately 1.0 liter per minute of rinse is mixed with the purge gas.
  • the purge gas valve 22 By the purge gas valve 22, the purge gas passes approximately at atmospheric pressure in the screw pump 12, but at least approximately 500 mbar.
  • the total cleaning fluid consumption and the duration of the cleaning depends on the degree of contamination of the screw pump 12.
  • the cleaning can be terminated when the color of the flushing fluid leaving the screw pump 12 is clear and no longer discolored. According to experience, between 3.0 and 8.0 liters of rinsing liquid are required for cleaning, so that cleaning takes a few minutes. After the actual cleaning process, the purge gas valve 22 remains open for a few minutes to ensure the fastest possible drying of the interior of the screw pump 12.
  • the purge gas valve 22 remains open for 5-10 minutes to accelerate the drying of the interior of the screw pump 12.
  • a gas ballast valve of the screw pump 12, if any, is opened. As a result, the drying is accelerated after the actual cleaning process.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
EP05815780.1A 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe Expired - Lifetime EP1833622B2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004063058A DE102004063058A1 (de) 2004-12-22 2004-12-22 Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
PCT/EP2005/056489 WO2006067032A1 (de) 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe

Publications (4)

Publication Number Publication Date
EP1833622A1 EP1833622A1 (de) 2007-09-19
EP1833622B1 EP1833622B1 (de) 2010-07-07
EP1833622B8 EP1833622B8 (de) 2010-08-11
EP1833622B2 true EP1833622B2 (de) 2013-08-21

Family

ID=35788773

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05815780.1A Expired - Lifetime EP1833622B2 (de) 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe

Country Status (6)

Country Link
US (1) US20080135066A1 (https=)
EP (1) EP1833622B2 (https=)
JP (1) JP4819828B2 (https=)
KR (1) KR101280493B1 (https=)
DE (2) DE102004063058A1 (https=)
WO (1) WO2006067032A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006039529A1 (de) * 2006-08-23 2008-03-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Abreaktion selbstentzündlicher Stäube in einer Vakuumpumpvorrichtung
FI120544B (fi) * 2007-12-13 2009-11-30 Optogan Oy HVPE-reaktorijärjestely
DE102008021971A1 (de) * 2008-05-02 2009-11-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zum Reinigen von Vakuumpumpen
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
DE102008053522A1 (de) * 2008-10-28 2010-04-29 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuumpumpe
DE102009043133B4 (de) * 2009-09-23 2012-08-09 Roth & Rau Ag Vorrichtung und Verfahren zum Reinigen eines Pumpenraumes einer Vakuumpumpe
DE102011015464B4 (de) * 2010-11-30 2012-09-06 Von Ardenne Anlagentechnik Gmbh Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase
DE102011005464B4 (de) * 2011-03-11 2014-07-17 Fmp Technology Gmbh Fluid Measurements & Projects Vorrichtung zur Erzeugung eines Unterdrucks
DE102011108092A1 (de) * 2011-07-19 2013-01-24 Multivac Sepp Haggenmüller Gmbh & Co. Kg Reinigungsverfahren und -system für Vakuumpumpe
JP2017089462A (ja) * 2015-11-06 2017-05-25 エドワーズ株式会社 真空ポンプの判断システム、および真空ポンプ
CN108714587A (zh) * 2018-06-06 2018-10-30 南京采孚汽车零部件有限公司 一种泵类产品内部清洗装置
CN108775286A (zh) * 2018-08-03 2018-11-09 深圳市石金科技股份有限公司 一种干式真空泵的清洁装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617283A (ja) † 1992-07-02 1994-01-25 Sumitomo Metal Ind Ltd 加工性、成形性に優れためっきＡｌ板およびその製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415190A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Injection washer for scroll compressor part
JP3013652B2 (ja) * 1993-06-01 2000-02-28 富士通株式会社 排気装置とその清浄化方法
DE19522557A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Drehkolbenverdichter, insbesondere Vakuumpumpe
DE19522554A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Verfahren zum Reinigen der Schöpfraumoberflächen eines Rotationskolbenverdichters
US6090222A (en) * 1998-11-16 2000-07-18 Seh-America, Inc. High pressure gas cleaning purge of a dry process vacuum pump
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
US6494959B1 (en) * 2000-01-28 2002-12-17 Applied Materials, Inc. Process and apparatus for cleaning a silicon surface
US6858264B2 (en) * 2002-04-24 2005-02-22 Micron Technology, Inc. Chemical vapor deposition methods
EP1552152B1 (en) * 2002-10-14 2013-03-20 Edwards Limited Rotary piston vacuum pump with washing installation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617283A (ja) † 1992-07-02 1994-01-25 Sumitomo Metal Ind Ltd 加工性、成形性に優れためっきＡｌ板およびその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
P.W.ATKINS, PHYSICAL CHEMISTRY,4TH EDITION, 1990, pages 142 †

Also Published As

Publication number Publication date
WO2006067032A1 (de) 2006-06-29
JP4819828B2 (ja) 2011-11-24
JP2008524511A (ja) 2008-07-10
KR20070086062A (ko) 2007-08-27
DE102004063058A1 (de) 2006-07-13
DE502005009881D1 (https=) 2010-08-19
EP1833622A1 (de) 2007-09-19
US20080135066A1 (en) 2008-06-12
KR101280493B1 (ko) 2013-07-01
EP1833622B8 (de) 2010-08-11
EP1833622B1 (de) 2010-07-07

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