EP1833622B8 - Verfahren zum reinigen einer vakuum-schraubenpumpe - Google Patents

Verfahren zum reinigen einer vakuum-schraubenpumpe Download PDF

Info

Publication number
EP1833622B8
EP1833622B8 EP05815780A EP05815780A EP1833622B8 EP 1833622 B8 EP1833622 B8 EP 1833622B8 EP 05815780 A EP05815780 A EP 05815780A EP 05815780 A EP05815780 A EP 05815780A EP 1833622 B8 EP1833622 B8 EP 1833622B8
Authority
EP
European Patent Office
Prior art keywords
cleaning
type pump
vacuum screw
vacuum
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP05815780A
Other languages
English (en)
French (fr)
Other versions
EP1833622B1 (de
EP1833622A1 (de
EP1833622B2 (de
Inventor
Uwe ZÖLLIG
Olaf Stahlschmidt
Christian Beyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35788773&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1833622(B8) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1833622A1 publication Critical patent/EP1833622A1/de
Publication of EP1833622B1 publication Critical patent/EP1833622B1/de
Publication of EP1833622B8 publication Critical patent/EP1833622B8/de
Application granted granted Critical
Publication of EP1833622B2 publication Critical patent/EP1833622B2/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
EP05815780.1A 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe Not-in-force EP1833622B2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004063058A DE102004063058A1 (de) 2004-12-22 2004-12-22 Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
PCT/EP2005/056489 WO2006067032A1 (de) 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe

Publications (4)

Publication Number Publication Date
EP1833622A1 EP1833622A1 (de) 2007-09-19
EP1833622B1 EP1833622B1 (de) 2010-07-07
EP1833622B8 true EP1833622B8 (de) 2010-08-11
EP1833622B2 EP1833622B2 (de) 2013-08-21

Family

ID=35788773

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05815780.1A Not-in-force EP1833622B2 (de) 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe

Country Status (6)

Country Link
US (1) US20080135066A1 (de)
EP (1) EP1833622B2 (de)
JP (1) JP4819828B2 (de)
KR (1) KR101280493B1 (de)
DE (2) DE102004063058A1 (de)
WO (1) WO2006067032A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006039529A1 (de) * 2006-08-23 2008-03-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Abreaktion selbstentzündlicher Stäube in einer Vakuumpumpvorrichtung
FI120544B (fi) * 2007-12-13 2009-11-30 Optogan Oy HVPE-reaktorijärjestely
DE102008021971A1 (de) * 2008-05-02 2009-11-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zum Reinigen von Vakuumpumpen
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
DE102008053522A1 (de) 2008-10-28 2010-04-29 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuumpumpe
DE102009043133B4 (de) * 2009-09-23 2012-08-09 Roth & Rau Ag Vorrichtung und Verfahren zum Reinigen eines Pumpenraumes einer Vakuumpumpe
DE102011015464B4 (de) * 2010-11-30 2012-09-06 Von Ardenne Anlagentechnik Gmbh Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase
DE102011005464B4 (de) * 2011-03-11 2014-07-17 Fmp Technology Gmbh Fluid Measurements & Projects Vorrichtung zur Erzeugung eines Unterdrucks
DE102011108092A1 (de) * 2011-07-19 2013-01-24 Multivac Sepp Haggenmüller Gmbh & Co. Kg Reinigungsverfahren und -system für Vakuumpumpe
JP2017089462A (ja) * 2015-11-06 2017-05-25 エドワーズ株式会社 真空ポンプの判断システム、および真空ポンプ
CN108714587A (zh) * 2018-06-06 2018-10-30 南京采孚汽车零部件有限公司 一种泵类产品内部清洗装置
CN108775286A (zh) * 2018-08-03 2018-11-09 深圳市石金科技股份有限公司 一种干式真空泵的清洁装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415190A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Injection washer for scroll compressor part
JPH0617283A (ja) † 1992-07-02 1994-01-25 Sumitomo Metal Ind Ltd 加工性、成形性に優れためっきＡｌ板およびその製造方法
JP3013652B2 (ja) * 1993-06-01 2000-02-28 富士通株式会社 排気装置とその清浄化方法
DE19522557A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Drehkolbenverdichter, insbesondere Vakuumpumpe
DE19522554A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Verfahren zum Reinigen der Schöpfraumoberflächen eines Rotationskolbenverdichters
US6090222A (en) * 1998-11-16 2000-07-18 Seh-America, Inc. High pressure gas cleaning purge of a dry process vacuum pump
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
US6494959B1 (en) * 2000-01-28 2002-12-17 Applied Materials, Inc. Process and apparatus for cleaning a silicon surface
US6858264B2 (en) * 2002-04-24 2005-02-22 Micron Technology, Inc. Chemical vapor deposition methods
KR101151954B1 (ko) * 2002-10-14 2012-06-01 에드워즈 리미티드 진공 펌프, 화학 증착 장치, 진공 펌프 내의 퇴적물 관리 방법, 진공 펌프 기구 내의 퇴적물 관리 방법 및 컴퓨터 판독가능한 저장 매체

Also Published As

Publication number Publication date
DE502005009881D1 (de) 2010-08-19
JP2008524511A (ja) 2008-07-10
KR101280493B1 (ko) 2013-07-01
DE102004063058A1 (de) 2006-07-13
EP1833622B1 (de) 2010-07-07
US20080135066A1 (en) 2008-06-12
KR20070086062A (ko) 2007-08-27
JP4819828B2 (ja) 2011-11-24
EP1833622A1 (de) 2007-09-19
EP1833622B2 (de) 2013-08-21
WO2006067032A1 (de) 2006-06-29

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