EP1833622B8 - Method for cleaning a vacuum screw-type pump - Google Patents
Method for cleaning a vacuum screw-type pump Download PDFInfo
- Publication number
- EP1833622B8 EP1833622B8 EP05815780A EP05815780A EP1833622B8 EP 1833622 B8 EP1833622 B8 EP 1833622B8 EP 05815780 A EP05815780 A EP 05815780A EP 05815780 A EP05815780 A EP 05815780A EP 1833622 B8 EP1833622 B8 EP 1833622B8
- Authority
- EP
- European Patent Office
- Prior art keywords
- cleaning
- type pump
- vacuum screw
- vacuum
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004063058A DE102004063058A1 (en) | 2004-12-22 | 2004-12-22 | Method for cleaning a vacuum screw pump |
PCT/EP2005/056489 WO2006067032A1 (en) | 2004-12-22 | 2005-12-05 | Method for cleaning a vacuum screw-type pump |
Publications (4)
Publication Number | Publication Date |
---|---|
EP1833622A1 EP1833622A1 (en) | 2007-09-19 |
EP1833622B1 EP1833622B1 (en) | 2010-07-07 |
EP1833622B8 true EP1833622B8 (en) | 2010-08-11 |
EP1833622B2 EP1833622B2 (en) | 2013-08-21 |
Family
ID=35788773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP05815780.1A Not-in-force EP1833622B2 (en) | 2004-12-22 | 2005-12-05 | Method for cleaning a vacuum screw-type pump |
Country Status (6)
Country | Link |
---|---|
US (1) | US20080135066A1 (en) |
EP (1) | EP1833622B2 (en) |
JP (1) | JP4819828B2 (en) |
KR (1) | KR101280493B1 (en) |
DE (2) | DE102004063058A1 (en) |
WO (1) | WO2006067032A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006039529A1 (en) * | 2006-08-23 | 2008-03-06 | Oerlikon Leybold Vacuum Gmbh | A method of reacting auto-ignitable dusts in a vacuum pumping apparatus |
FI120544B (en) * | 2007-12-13 | 2009-11-30 | Optogan Oy | HVPE reactor arrangement |
DE102008021971A1 (en) * | 2008-05-02 | 2009-11-05 | Oerlikon Leybold Vacuum Gmbh | Vacuum pump and method for cleaning vacuum pumps |
DE102008030788A1 (en) * | 2008-06-28 | 2009-12-31 | Oerlikon Leybold Vacuum Gmbh | Method for cleaning vacuum pumps |
DE102008053522A1 (en) | 2008-10-28 | 2010-04-29 | Oerlikon Leybold Vacuum Gmbh | Method for cleaning a vacuum pump |
DE102009043133B4 (en) * | 2009-09-23 | 2012-08-09 | Roth & Rau Ag | Device and method for cleaning a pump chamber of a vacuum pump |
DE102011015464B4 (en) * | 2010-11-30 | 2012-09-06 | Von Ardenne Anlagentechnik Gmbh | Vacuum pumping device and method for dusty gases |
DE102011005464B4 (en) * | 2011-03-11 | 2014-07-17 | Fmp Technology Gmbh Fluid Measurements & Projects | Device for generating a negative pressure |
DE102011108092A1 (en) * | 2011-07-19 | 2013-01-24 | Multivac Sepp Haggenmüller Gmbh & Co. Kg | Cleaning method and system for vacuum pump |
JP2017089462A (en) * | 2015-11-06 | 2017-05-25 | エドワーズ株式会社 | Determination system of vacuum pump and vacuum pump |
CN108714587A (en) * | 2018-06-06 | 2018-10-30 | 南京采孚汽车零部件有限公司 | A kind of pump class interiors of products cleaning device |
CN108775286A (en) * | 2018-08-03 | 2018-11-09 | 深圳市石金科技股份有限公司 | A kind of cleaning device of dry vacuum pump |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6415190A (en) * | 1987-07-10 | 1989-01-19 | Hitachi Ltd | Injection washer for scroll compressor part |
JPH0617283A (en) † | 1992-07-02 | 1994-01-25 | Sumitomo Metal Ind Ltd | Plated al sheet excellent in workability and moldability and its production |
JP3013652B2 (en) * | 1993-06-01 | 2000-02-28 | 富士通株式会社 | Exhaust device and its cleaning method |
DE19522554A1 (en) * | 1995-06-21 | 1997-01-02 | Sihi Ind Consult Gmbh | Compressor operative chamber surface cleaning method |
DE19522557A1 (en) * | 1995-06-21 | 1997-01-02 | Sihi Ind Consult Gmbh | Rotary piston compressor, particularly screw spindle vacuum pump |
US6090222A (en) * | 1998-11-16 | 2000-07-18 | Seh-America, Inc. | High pressure gas cleaning purge of a dry process vacuum pump |
DE19962445A1 (en) * | 1999-12-22 | 2001-06-28 | Leybold Vakuum Gmbh | Dry compressing vacuum pump has gas ballast device with valve that only opens when difference between atmospheric pressure and pressure on pump side of valve exceeds set value |
US6494959B1 (en) * | 2000-01-28 | 2002-12-17 | Applied Materials, Inc. | Process and apparatus for cleaning a silicon surface |
US6858264B2 (en) * | 2002-04-24 | 2005-02-22 | Micron Technology, Inc. | Chemical vapor deposition methods |
EP2267313B1 (en) * | 2002-10-14 | 2014-10-01 | Edwards Limited | Cleaning method of a rotary piston vacuum pump |
-
2004
- 2004-12-22 DE DE102004063058A patent/DE102004063058A1/en not_active Withdrawn
-
2005
- 2005-12-05 DE DE502005009881T patent/DE502005009881D1/de active Active
- 2005-12-05 WO PCT/EP2005/056489 patent/WO2006067032A1/en active Application Filing
- 2005-12-05 EP EP05815780.1A patent/EP1833622B2/en not_active Not-in-force
- 2005-12-05 KR KR1020077013187A patent/KR101280493B1/en not_active IP Right Cessation
- 2005-12-05 US US11/793,631 patent/US20080135066A1/en not_active Abandoned
- 2005-12-05 JP JP2007547437A patent/JP4819828B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE502005009881D1 (en) | 2010-08-19 |
EP1833622B1 (en) | 2010-07-07 |
JP2008524511A (en) | 2008-07-10 |
KR101280493B1 (en) | 2013-07-01 |
EP1833622A1 (en) | 2007-09-19 |
US20080135066A1 (en) | 2008-06-12 |
EP1833622B2 (en) | 2013-08-21 |
KR20070086062A (en) | 2007-08-27 |
DE102004063058A1 (en) | 2006-07-13 |
WO2006067032A1 (en) | 2006-06-29 |
JP4819828B2 (en) | 2011-11-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1833622B8 (en) | Method for cleaning a vacuum screw-type pump | |
GB2420148B (en) | Vacuum suction apparatus | |
EP1817500A4 (en) | Fore-line preconditioning for vacuum pumps | |
EP1733853A4 (en) | Vacuum suction unit | |
AU2003205775A1 (en) | Vacuum pump | |
AU2003287863A1 (en) | Vacuum pump | |
AU2003226808A1 (en) | Vacuum pump | |
GB2419810B (en) | Suction port assembly for a vacuum cleaner | |
EP2019208A4 (en) | Vacuum pump | |
GB0329839D0 (en) | Vacuum pump | |
EP1653086A4 (en) | Vacuum pump | |
GB0424199D0 (en) | Vacuum pump | |
GB0322883D0 (en) | Vacuum pump | |
AU2003227555A1 (en) | Vacuum pump | |
GB0413776D0 (en) | Vacuum pump | |
EP1766245B8 (en) | A pump unit | |
AU2003234835A1 (en) | Vacuum pump | |
AU2003221235A1 (en) | A method for configurating a singleboard automatically | |
EP1780417A4 (en) | Screw vacuum pump | |
GB0426959D0 (en) | Vacuum pump | |
GB0418547D0 (en) | Vacuum pump | |
GB0406748D0 (en) | Vacuum pump | |
HK1123018A1 (en) | A vacuum assist pump system | |
GB0525136D0 (en) | Method of inhibiting a deflagration in a vacuum pump | |
AU2003217031A1 (en) | Vacuum pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20070615 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): CH DE FR GB IT LI |
|
RBV | Designated contracting states (corrected) |
Designated state(s): CH DE FR GB IT LI |
|
DAX | Request for extension of the european patent (deleted) | ||
17Q | First examination report despatched |
Effective date: 20090109 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): CH DE FR GB IT LI |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
RAP2 | Party data changed (patent owner data changed or rights of a patent transferred) |
Owner name: OERLIKON LEYBOLD VACUUM GMBH |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REF | Corresponds to: |
Ref document number: 502005009881 Country of ref document: DE Date of ref document: 20100819 Kind code of ref document: P |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: ISLER & PEDRAZZINI AG |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20101223 Year of fee payment: 6 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20101221 Year of fee payment: 6 |
|
PLBI | Opposition filed |
Free format text: ORIGINAL CODE: 0009260 |
|
PLAX | Notice of opposition and request to file observation + time limit sent |
Free format text: ORIGINAL CODE: EPIDOSNOBS2 |
|
26 | Opposition filed |
Opponent name: EDWARDS LIMITED Effective date: 20110407 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20100707 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R026 Ref document number: 502005009881 Country of ref document: DE Effective date: 20110407 |
|
PLAF | Information modified related to communication of a notice of opposition and request to file observations + time limit |
Free format text: ORIGINAL CODE: EPIDOSCOBS2 |
|
PLBB | Reply of patent proprietor to notice(s) of opposition received |
Free format text: ORIGINAL CODE: EPIDOSNOBS3 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20120103 Year of fee payment: 7 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20111231 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20111231 |
|
RIC2 | Information provided on ipc code assigned after grant |
Ipc: B08B 9/00 20060101AFI20130419BHEP Ipc: F04C 29/00 20060101ALI20130419BHEP |
|
PUAH | Patent maintained in amended form |
Free format text: ORIGINAL CODE: 0009272 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: PATENT MAINTAINED AS AMENDED |
|
27A | Patent maintained in amended form |
Effective date: 20130821 |
|
AK | Designated contracting states |
Kind code of ref document: B2 Designated state(s): CH DE FR GB IT LI |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20121205 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20130830 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R102 Ref document number: 502005009881 Country of ref document: DE Effective date: 20130821 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20121205 Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20130102 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R082 Ref document number: 502005009881 Country of ref document: DE Representative=s name: DOMPATENT VON KREISLER SELTING WERNER - PARTNE, DE Ref country code: DE Ref legal event code: R081 Ref document number: 502005009881 Country of ref document: DE Owner name: LEYBOLD GMBH, DE Free format text: FORMER OWNER: OERLIKON LEYBOLD VACUUM GMBH, 50968 KOELN, DE |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20161229 Year of fee payment: 12 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 502005009881 Country of ref document: DE |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180703 |