EP1833622B2 - Method for cleaning a vacuum screw-type pump - Google Patents

Method for cleaning a vacuum screw-type pump Download PDF

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Publication number
EP1833622B2
EP1833622B2 EP05815780.1A EP05815780A EP1833622B2 EP 1833622 B2 EP1833622 B2 EP 1833622B2 EP 05815780 A EP05815780 A EP 05815780A EP 1833622 B2 EP1833622 B2 EP 1833622B2
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EP
European Patent Office
Prior art keywords
cleaning
gas
cleaning fluid
screw
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP05815780.1A
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German (de)
French (fr)
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EP1833622A1 (en
EP1833622B8 (en
EP1833622B1 (en
Inventor
Uwe ZÖLLIG
Olaf Stahlschmidt
Christian Beyer
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Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
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Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1833622A1 publication Critical patent/EP1833622A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Definitions

  • the invention relates to a method for cleaning a dry-compressing vacuum screw pump with internal compression.
  • Dry compression vacuum screw pumps with internal compression i. with non-isochoric compression
  • high stress vacuum processes e.g. Sintering or soldering can lead to deposits on the pump rotors and / or the pump chamber.
  • the friction between the pump rotors and the pump chamber increases, so that the screw pump can finally start poorly or not at all, significant vibrations can occur during operation or a total loss of the screw pump can be caused. Therefore, the dry-compressing screw pump is cleaned regularly.
  • the object of the invention is to provide a simple method for cleaning a dry-compressing vacuum screw pump with internal compression.
  • the screw pump is operated at its rated speed for cleaning. A speed reduction for cleaning is not required. In this way, eliminates the technical effort for a speed reduction, which, depending on the nature of the electric drive motor, can be significant.
  • the internal compression screw pump can be purged without any speed reduction at rated speed.
  • the purge gas in the cleaning fluid ensures that the pressure increase in the pump chamber's pump chambers is moderate.
  • the purge gas comes from a source other than the vacuum gas.
  • the purge gas is not the gas that is pumped out of a vacuum container to create a vacuum. During the evacuation no evacuation takes place.
  • the mixing of the cleaning fluid with water as the rinsing liquid can be used, but tap water can also be used depending on the application. In any case, the flushing liquid water is inexpensive and available almost everywhere.
  • the mixing of the cleaning fluid with air takes place as a purge gas.
  • the ambient air can be used in most cases.
  • the purge gas is thus available in a simple manner and inexpensively practically everywhere.
  • the purge gas has a pressure of at least 500 mbar, and may have approximately atmospheric pressure. The ambient air can therefore be used slightly throttled or unthrottled to mix the cleaning fluid.
  • nitrogen and / or argon can be used as purge gas.
  • Nitrogen and argon are less aggressive and are therefore suitable as purge gas in particularly sensitive applications or environments.
  • a gas ballast valve of the screw pump is opened during the cleaning.
  • the vacuum line leading to the gas inlet of the vacuum pump is closed before the introduction of the cleaning fluid, and after the completion of the cleaning fluid inlet, the vacuum line is opened again. In this way, penetration of the cleaning fluid into the vacuum line or the connected vacuum vessel is reliably prevented.
  • the figure shows schematically the structure of a system with a vacuum screw pump for operating the cleaning method according to the invention.
  • the vacuum container 14 may be part of a sintering plant, a plasma CVD plant or another plant in which there is the possibility that the contains pumped by the screw pump 12 gas components that can lead to deposits in the screw pump 12.
  • the screw pump 12 has a gas inlet 16, which is connected with the interposition of valves 18,20,22 to the vacuum container 14, to a rinsing liquid container 24 and, if necessary, to a purge gas container 28.
  • the screw pump 12 rotates at a speed of, for example, 8000 rpm.
  • the vacuum valve 18 is opened while the other two valves 20, 22 are closed.
  • the vacuum tank 14 is evacuated in this way.
  • the screw pump 12 is regularly cleaned or rinsed after a specified period of operation.
  • the vacuum valve 18 is closed, so that the evacuation operation is interrupted. Subsequently, the purge gas valve 22 is opened, so that the purge gas, for example, ambient air, is sucked by the screw pump 12.
  • purge gas and nitrogen or argon can be used, which is stored in a corresponding purge gas container 28.
  • the rinsing liquid valve 20 is opened, so that the rinsing liquid is sucked by the screw pump 12.
  • Tap water is used as the rinsing liquid, but other liquids are also suitable.
  • the purge gas and the rinsing liquid mix in front of the gas inlet 16 of the screw pump 12 to a cleaning fluid. In the present case, approximately 1.0 liter per minute of rinse is mixed with the purge gas.
  • the purge gas valve 22 By the purge gas valve 22, the purge gas passes approximately at atmospheric pressure in the screw pump 12, but at least approximately 500 mbar.
  • the total cleaning fluid consumption and the duration of the cleaning depends on the degree of contamination of the screw pump 12.
  • the cleaning can be terminated when the color of the flushing fluid leaving the screw pump 12 is clear and no longer discolored. According to experience, between 3.0 and 8.0 liters of rinsing liquid are required for cleaning, so that cleaning takes a few minutes. After the actual cleaning process, the purge gas valve 22 remains open for a few minutes to ensure the fastest possible drying of the interior of the screw pump 12.
  • the purge gas valve 22 remains open for 5-10 minutes to accelerate the drying of the interior of the screw pump 12.
  • a gas ballast valve of the screw pump 12, if any, is opened. As a result, the drying is accelerated after the actual cleaning process.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Description

Die Erfindung bezieht sich auf ein Verfahren zum Reinigen einer trocken verdichtenden Vakuum-Schraubenpumpe mit innerer Verdichtung.The invention relates to a method for cleaning a dry-compressing vacuum screw pump with internal compression.

Trocken verdichtende Vakuum-Schraubenpumpen mit innerer Verdichtung, d.h. mit nicht isochorer Verdichtung, werden ohne eine schmierende, dichtende und reinigende Flüssigkeit betrieben. Bei bestimmten kondensatreichen, stark belastenden Vakuumprozessen, z.B. Sintern oder Löten, kann es zu Ablagerungen auf den Pumpenrotoren und/oder dem Schöpfraum-Gehäuse kommen. Dadurch erhöht sich die Reibung zwischen den Pumpenrotoren und dem Schöpfraum-Gehäuse, so dass sich die Schraubenpumpe schließlich schlecht oder gar nicht mehr starten lässt, im Betrieb erhebliche Vibrationen auftreten können bzw. ein Totalschaden der Schraubenpumpe verursacht werden kann. Daher wird die trocken verdichtende Schraubenpumpe regelmäßig gereinigt.Dry compression vacuum screw pumps with internal compression, i. with non-isochoric compression, are operated without a lubricating, sealing and cleaning liquid. In certain condensate-rich, high stress vacuum processes, e.g. Sintering or soldering can lead to deposits on the pump rotors and / or the pump chamber. As a result, the friction between the pump rotors and the pump chamber increases, so that the screw pump can finally start poorly or not at all, significant vibrations can occur during operation or a total loss of the screw pump can be caused. Therefore, the dry-compressing screw pump is cleaned regularly.

Eine manuelle Reinigung ist wegen der Notwendigkeit einer Öffnung des Schöpfraum-Gehäuses zeitaufwändig und arbeitsintensiv.Manual cleaning is time consuming and labor intensive because of the need to open the pump chamber housing.

Aufgabe der Erfindung ist es, ein einfaches Verfahren zum Reinigen einer trocken verdichtenden Vakuum-Schraubenpumpe mit innerer Verdichtung zu schaffen.The object of the invention is to provide a simple method for cleaning a dry-compressing vacuum screw pump with internal compression.

Die Aufgabe wird erfindungsgemäß mit dem Merkmal des Patentanspruches 1 gelöst.The object is achieved by the feature of claim 1.

Das erfindungsgemäße Verfahren besteht aus den Verfahrensschritten

  • Betrieb der Schraubenpumpe mit Nenndrehzahl
  • Mischen eines Reinigungsfluides aus einer Spülflüssigkeit und einem Spülgas im Volumenverhältnis von 1:10, und
  • Einleiten des Reinigungsfluides in den Gaseinlass der Schraubenpumpe.
The method according to the invention consists of the method steps
  • Operation of the screw pump with rated speed
  • Mixing a cleaning fluid from a rinsing liquid and a purge gas in the volume ratio of 1:10, and
  • Introducing the cleaning fluid into the gas inlet of the screw pump.

Das Einleiten des Reinigungsfluides erfolgt durch den Haupt-Gaseinlass der Schraubenpumpe, der auch zum Evakuieren verwendet wird. Ein separater Einlass zum Einleiten des Reinigungsfluides wird nicht benötigt. Die Schraubenpumpe wird zum Reinigen mit ihrer Nenndrehzahl betrieben. Eine Drehzahlabsenkung zur Reinigung ist nicht erforderlich. Auf diese Weise entfällt der technische Aufwand für eine Drehzahlabsenkung, der, je nach Art des elektrischen Antriebmotors, erheblich sein kann.The introduction of the cleaning fluid through the main gas inlet of the screw pump, which is also used for evacuation. A separate inlet for introducing the cleaning fluid is not needed. The screw pump is operated at its rated speed for cleaning. A speed reduction for cleaning is not required. In this way, eliminates the technical effort for a speed reduction, which, depending on the nature of the electric drive motor, can be significant.

Auf ein Volumenteil Spülflüssigkeit kommen zehn Volumenteile Spülgas bezogen auf einen atmosphärischen Gasdruck des Spülgases. Durch Vorsehen einer erheblichen Menge Spülgas in dem Reinigungsfluid kann die Schraubenpumpe mit innerer Verdichtung ohne jede Drehzahlabsenkung bei Nenndrehzahl gespült werden. Das Spülgas in dem Reinigungsfluid sorgt dafür, dass der Druckanstieg in den Schöpfräumen der Schraubenpumpe moderat ausfällt.On a volume of washing liquid ten volumes of purge gas based on an atmospheric gas pressure of the purge gas. By providing a substantial amount of purge gas in the purge fluid, the internal compression screw pump can be purged without any speed reduction at rated speed. The purge gas in the cleaning fluid ensures that the pressure increase in the pump chamber's pump chambers is moderate.

Das Spülgas kommt aus einer anderen Quelle als das Vakuumgas. Das Spülgas ist nicht das Gas, das zur Erzeugung eines Vakuums aus einem Vakuumbehälter abgepumpt wird. Während der Reinigung erfolgt keine Evakuierung.The purge gas comes from a source other than the vacuum gas. The purge gas is not the gas that is pumped out of a vacuum container to create a vacuum. During the evacuation no evacuation takes place.

Mit dem Reinigungsverfahren kann die regelmäßige Reinigung der Schraubenpumpe ohne jede Demontage schnell und preiswert vorgenommen werden.With the cleaning method, the regular cleaning of the screw pump can be done quickly and inexpensively without any disassembly.

Gemäß einer bevorzugten Ausgestaltung erfolgt das Mischen des Reinigungsfluides mit Wasser als Spülflüssigkeit. Es kann destilliertes Wasser verwendet werden, es kann jedoch auch, je nach Anwendung, Leitungswasser verwendet werden. In jedem Fall ist die Spülflüssigkeit Wasser preiswert und nahezu überall erhältlich.According to a preferred embodiment, the mixing of the cleaning fluid with water as the rinsing liquid. Distilled water can be used, but tap water can also be used depending on the application. In any case, the flushing liquid water is inexpensive and available almost everywhere.

Vorzugsweise erfolgt das Mischen des Reinigungsfluides mit Luft als Spülgas. Hierzu kann in den meisten Fällen die Umgebungs-Luft verwendet werden. Das Spülgas ist also auf einfache Weise und preiswert praktisch überall verfügbar. Gemäß einer bevorzugten Ausgestaltung hat das Spülgas einen Druck von mindestens 500 mbar, und kann annähernd atmosphärischen Druck aufweisen. Die Umgebungs-Luft kann daher geringfügig gedrosselt oder ungedrosselt zur Mischung des Reinigungsfluides genutzt werden.Preferably, the mixing of the cleaning fluid with air takes place as a purge gas. For this purpose, the ambient air can be used in most cases. The purge gas is thus available in a simple manner and inexpensively practically everywhere. According to a preferred embodiment, the purge gas has a pressure of at least 500 mbar, and may have approximately atmospheric pressure. The ambient air can therefore be used slightly throttled or unthrottled to mix the cleaning fluid.

Vorzugsweise kann als Spülgas Stickstoff und/oder Argon verwendet werden. Stickstoff und Argon sind wenig aggressiv und eignen sich daher als Spülgas in besonders sensiblen Anwendungen bzw. Umgebungen.Preferably, nitrogen and / or argon can be used as purge gas. Nitrogen and argon are less aggressive and are therefore suitable as purge gas in particularly sensitive applications or environments.

Vorzugsweise wird während des Reinigens ein Gasballast-Ventil der Schraubenpumpe geöffnet. Hierdurch können die gereinigten Teile der Schraubenpumpe, insbesondere die Wellendichtungen, schneller trocknen.Preferably, a gas ballast valve of the screw pump is opened during the cleaning. As a result, the cleaned parts of the screw pump, in particular the shaft seals, dry faster.

Gemäß einer bevorzugten Ausführungsform wird vor dem Einleiten des Reinigungsfluides die zum Gaseinlass der Vakuumpumpe führende Vakuumleitung geschlossen, und wird nach dem Beenden der Reinigungsfluideinleitung die Vakuumleitung wieder geöffnet. Auf diese Weise wird ein Eindringen des Reinigungsfluides in die Vakuumleitung bzw. das angeschlossene Vakuumgefäß zuverlässig vermieden.According to a preferred embodiment, the vacuum line leading to the gas inlet of the vacuum pump is closed before the introduction of the cleaning fluid, and after the completion of the cleaning fluid inlet, the vacuum line is opened again. In this way, penetration of the cleaning fluid into the vacuum line or the connected vacuum vessel is reliably prevented.

Im Folgenden wird ein Ausführungsbeispiel der Erfindung anhand der Figur näher erläutert.In the following an embodiment of the invention will be explained in more detail with reference to FIG.

Die Figur zeigt schematisch den Aufbau einer Anlage mit einer Vakuum-Schraubenpumpe zum Betrieb des erfindungsgemäßen Reinigungsverfahrens.The figure shows schematically the structure of a system with a vacuum screw pump for operating the cleaning method according to the invention.

In der Figur ist eine Vakuum-Anordnung. 10 dargestellt, die der Evakuierung eines Vakuumbehälters 14 dient. Der Vakuumbehälter 14 kann Teil einer Sinter-Anlage, einer Plasma-CVD-Anlage oder einer anderen Anlage sein, bei der die Möglichkeit besteht, dass das durch die Schraubenpumpe 12 abgepumpte Gas Bestandteile enthält, die zu Ablagerungen in der Schraubenpumpe 12 führen können.In the figure is a vacuum arrangement. 10, which serves to evacuate a vacuum container 14. The vacuum container 14 may be part of a sintering plant, a plasma CVD plant or another plant in which there is the possibility that the contains pumped by the screw pump 12 gas components that can lead to deposits in the screw pump 12.

Die Schraubenpumpe 12 weist einen Gaseinlass 16 auf, der unter Zwischenschaltung von Ventilen 18,20,22 an den Vakuumbehälter 14, an einen Spülflüssigkeits-Behälter 24 und, wenn erforderlich, an einen Spülgas-Behälter 28 angeschlossen ist.The screw pump 12 has a gas inlet 16, which is connected with the interposition of valves 18,20,22 to the vacuum container 14, to a rinsing liquid container 24 and, if necessary, to a purge gas container 28.

Im Pumpbetrieb dreht die Schraubenpumpe 12 mit einer Drehzahl von beispielsweise 8000 U/min.. Im Pumpbetrieb ist das Vakuum-Ventil 18 geöffnet, während die beiden anderen Ventile 20,22 geschlossen sind. Im Pumpbetrieb wird auf diese Weise der Vakuumbehälter 14 evakuiert.In pumping operation, the screw pump 12 rotates at a speed of, for example, 8000 rpm. In pumping operation, the vacuum valve 18 is opened while the other two valves 20, 22 are closed. In pumping operation, the vacuum tank 14 is evacuated in this way.

Die Schraubenpumpe 12 wird nach einer festgelegten Betriebsdauer regelmäßig gereinigt bzw. gespült.The screw pump 12 is regularly cleaned or rinsed after a specified period of operation.

Zum Spülen der Schraubenpumpe 12 wird zunächst das Vakuum-Ventil 18 geschlossen, so dass der Evakuierbetrieb unterbrochen ist. Anschließend wird das Spülgas-Ventil 22 geöffnet, so dass das Spülgas, beispielsweise Umgebungs-Luft, von der Schraubenpumpe 12 angesaugt wird. Als Spülgas kann auch Stickstoff oder Argon verwendet werden, das in einem entsprechenden Spülgas-Behälter 28 gelagert ist.For flushing the screw pump 12, first the vacuum valve 18 is closed, so that the evacuation operation is interrupted. Subsequently, the purge gas valve 22 is opened, so that the purge gas, for example, ambient air, is sucked by the screw pump 12. As purge gas and nitrogen or argon can be used, which is stored in a corresponding purge gas container 28.

Anschließend wird das Spülflüssigkeits-Ventil 20 geöffnet, so dass die Spülflüssigkeit von der Schraubenpumpe 12 angesaugt wird. Als Spülflüssigkeit wird Leitungswasser verwendet, es sind jedoch auch andere Flüssigkeiten geeignet. Das Spülgas und die Spülflüssigkeit vermischen sich vor dem Gaseinlass 16 der Schraubenpumpe 12 zu einem Reinigungsfluid. Im vorliegenden Fall wird ungefähr 1,0 Liter pro Minute Spülflüssigkeit mit dem Spülgas gemischt.Subsequently, the rinsing liquid valve 20 is opened, so that the rinsing liquid is sucked by the screw pump 12. Tap water is used as the rinsing liquid, but other liquids are also suitable. The purge gas and the rinsing liquid mix in front of the gas inlet 16 of the screw pump 12 to a cleaning fluid. In the present case, approximately 1.0 liter per minute of rinse is mixed with the purge gas.

Durch das Spülgas-Ventil 22 gelangt das Spülgas ungefähr mit atmosphärischem Druck in die Schraubenpumpe 12, mindestens jedoch mit ungefähr 500 mbar.By the purge gas valve 22, the purge gas passes approximately at atmospheric pressure in the screw pump 12, but at least approximately 500 mbar.

Der Reinigungsfluid-Gesamtverbrauch und die Dauer der Reinigung hängt vom Grad der Verunreinigung der Schraubenpumpe 12 ab. Die Reinigung kann beendet werden, wenn die Farbe der aus der Schraubenpumpe 12 austretenden Spülflüssigkeit klar, und nicht mehr verfärbt ist. Erfahrungsgemäß werden für die Reinigung zwischen 3,0 und 8,0 Litern Spülflüssigkeit benötigt, so dass die Reinigung wenige Minuten dauert. Nach dem eigentlichen Reinigungsvorgang bleibt das Spülgas-Ventil 22 noch einige Minuten geöffnet, um eine schnellstmögliche Trocknung des Inneren der Schraubenpumpe 12 zu gewährleisten.The total cleaning fluid consumption and the duration of the cleaning depends on the degree of contamination of the screw pump 12. The cleaning can be terminated when the color of the flushing fluid leaving the screw pump 12 is clear and no longer discolored. According to experience, between 3.0 and 8.0 liters of rinsing liquid are required for cleaning, so that cleaning takes a few minutes. After the actual cleaning process, the purge gas valve 22 remains open for a few minutes to ensure the fastest possible drying of the interior of the screw pump 12.

Versuche haben ergeben, dass 20 - 30 Sekunden nach dem Öffnen des Spülflüssigkeits-Ventils 20 ein Dampfstrahl von 2-3 Sekunden am Auslass der Schraubenpumpe 12 austritt. Dies kann damit erklärt werden, dass die Spalte in der Schraubenpumpe 12 zwischen den Schraubenrotoren bzw. zwischen den Schraubenrotoren und dem Gehäuse durch die eintretende Flüssigkeit abgedichtet werden, wodurch das Saugvermögen sprunghaft ansteigt. Durch die starke Komprimierung des Spülgases erfolgt eine schnelle und starke Aufheizung, so dass die Spülflüssigkeit im Schöpfraum verdampft. Der Wasserdampf wird durch den Gasauslass der Schraubenpumpe 12 ausgestoßen, und die Spalten sind wieder relativ schlecht abgedichtet. Der beschriebene Zyklus beginnt nunmehr von Neuem.Experiments have shown that 20 to 30 seconds after the opening of the rinsing liquid valve 20, a steam jet of 2-3 seconds emerges at the outlet of the screw pump 12. This can be explained by the fact that the gaps in the screw pump 12 between the screw rotors or between the screw rotors and the housing are sealed by the incoming liquid, whereby the pumping speed increases abruptly. Due to the strong compression of the purge gas is a rapid and strong heating, so that the rinsing liquid evaporates in the suction chamber. The water vapor is expelled through the gas outlet of the screw pump 12 and the gaps are again relatively poorly sealed. The described cycle begins again.

Nach der eigentlichen Reinigung bleibt das Spülgas-Ventil 22 noch 5-10 Minuten geöffnet, um die Trocknung des Innenraumes der Schraubenpumpe 12 zu beschleunigen. Während und/oder nach der Reinigung wird ein Gasballast-Ventil der Schraubenpumpe 12, soweit vorhanden, geöffnet. Hierdurch wird die Trocknung nach dem eigentlichen Reinigungsvorgang beschleunigt.After the actual cleaning, the purge gas valve 22 remains open for 5-10 minutes to accelerate the drying of the interior of the screw pump 12. During and / or after cleaning, a gas ballast valve of the screw pump 12, if any, is opened. As a result, the drying is accelerated after the actual cleaning process.

Claims (9)

  1. Method for cleaning a dry compressing screw-type vacuum pump (12) having an inner, non-isochore compression, comprising the following method steps:
    - operating the screw-type vacuum pump (12) at nominal rotation speed;
    - mixing a cleaning fluid from a flushing liquid and a flushing gas in a volume ratio of 1:10, and
    - introducing the cleaning fluid into the gas inlet (16) of the screw-type vacuum pump (12).
  2. The method of claim 1, characterized in that the flushing gas is supplied from another source than the vacuum gas.
  3. The method of one of claims 1 to 2, characterized in that the cleaning fluid is mixed with water serving as the flushing liquid.
  4. The method of one of claims 1 to 3, characterized in that the cleaning fluid is mixed with air serving as the flushing gas.
  5. The method of one of claims 1 to 4, characterized in that the flushing gas is at a pressure of at least 500 mbar.
  6. The method of claim 5, characterized in that the flushing gas is approximately at atmospheric pressure.
  7. The method of one of claims 1 to 3, 5 or 6, characterized in that the flushing gas is nitrogen and/or argon.
  8. The method of one of claims 1 to 7, characterized in that a gas ballast valve of the screw-type pump (12) is open during the cleaning operation.
  9. The method of one of claims 1 to 8, characterized by the following method steps:
    - prior to the introduction of the cleaning fluid: closing the vacuum line (24) leading to the gas inlet (16) of the vacuum pump (12), and
    - after the end of the introduction of cleaning fluid: opening the vacuum line (24).
EP05815780.1A 2004-12-22 2005-12-05 Method for cleaning a vacuum screw-type pump Not-in-force EP1833622B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004063058A DE102004063058A1 (en) 2004-12-22 2004-12-22 Method for cleaning a vacuum screw pump
PCT/EP2005/056489 WO2006067032A1 (en) 2004-12-22 2005-12-05 Method for cleaning a vacuum screw-type pump

Publications (4)

Publication Number Publication Date
EP1833622A1 EP1833622A1 (en) 2007-09-19
EP1833622B1 EP1833622B1 (en) 2010-07-07
EP1833622B8 EP1833622B8 (en) 2010-08-11
EP1833622B2 true EP1833622B2 (en) 2013-08-21

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Application Number Title Priority Date Filing Date
EP05815780.1A Not-in-force EP1833622B2 (en) 2004-12-22 2005-12-05 Method for cleaning a vacuum screw-type pump

Country Status (6)

Country Link
US (1) US20080135066A1 (en)
EP (1) EP1833622B2 (en)
JP (1) JP4819828B2 (en)
KR (1) KR101280493B1 (en)
DE (2) DE102004063058A1 (en)
WO (1) WO2006067032A1 (en)

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FI120544B (en) * 2007-12-13 2009-11-30 Optogan Oy HVPE reactor arrangement
DE102008021971A1 (en) * 2008-05-02 2009-11-05 Oerlikon Leybold Vacuum Gmbh Vacuum pump and method for cleaning vacuum pumps
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JP4819828B2 (en) 2011-11-24
DE502005009881D1 (en) 2010-08-19
EP1833622B8 (en) 2010-08-11
DE102004063058A1 (en) 2006-07-13
US20080135066A1 (en) 2008-06-12
EP1833622B1 (en) 2010-07-07
KR20070086062A (en) 2007-08-27
WO2006067032A1 (en) 2006-06-29
KR101280493B1 (en) 2013-07-01
JP2008524511A (en) 2008-07-10

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