EP2054626B1 - Method for reacting self-igniting dusts in a vacuum pump device - Google Patents

Method for reacting self-igniting dusts in a vacuum pump device Download PDF

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Publication number
EP2054626B1
EP2054626B1 EP20070788296 EP07788296A EP2054626B1 EP 2054626 B1 EP2054626 B1 EP 2054626B1 EP 20070788296 EP20070788296 EP 20070788296 EP 07788296 A EP07788296 A EP 07788296A EP 2054626 B1 EP2054626 B1 EP 2054626B1
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EP
European Patent Office
Prior art keywords
oxygen
vacuum pump
pump device
supply
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP20070788296
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German (de)
French (fr)
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EP2054626A1 (en
Inventor
Uwe ZÖLLIG
Thomas Dreifert
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Leybold GmbH
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Oerlikon Leybold Vacuum GmbH
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Publication of EP2054626A1 publication Critical patent/EP2054626A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D3/00—Axial-flow pumps
    • F04D3/02—Axial-flow pumps of screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/85986—Pumped fluid control

Definitions

  • the invention relates to a method for the reaction of self-igniting dusts in a dry-compressing vacuum pumping apparatus and a corresponding vacuum pump.
  • particles or fine dusts In metallurgical and various other processes that take place in a vacuum, particles or fine dusts often form, which are so reactive due to their chemical composition and their large surface that they self ignite on contact with ambient air, whereby they react with the atmospheric oxygen.
  • Such processes are, for example, the Czochalsky process for the production of silicon single crystals or the melting and Degassing of steels.
  • silicon oxide (SiO) is formed and in the second case, metallic fine dusts, such as. B. magnesium dust.
  • the dust particles are sucked into the vacuum pump, which generates the vacuum required for the process.
  • the dust particles In oil-sealed vacuum pumps, the dust particles are absorbed by the lubricant and not discharged from the pump.
  • the dusts also pose a safety risk for the maintenance personnel of the systems, as in the event of faulty operation or unplanned system ventilation, ignition of the dusts can not be ruled out. Such inflammation can even occur in the filter or in the piping.
  • EP 0 985 828 A1 describes a method for dissolving disturbing deposits that arise through electrical discharges between the rotor and stator inside a turbomolecular pump.
  • the pump interior is supplied with a reaction gas through a channel, which reacts with molecules that form the deposits and forms a gaseous compound, which is evacuated by the pump.
  • EP 1 681 469 A1 describes a rotary dry vacuum pump in the form of a screw-spindle pump to prevent corrosive gas flowing from the discharge chamber into the hermetically sealed pump motor upon stopping the pump motor due to the prevailing overpressure in the discharge chamber.
  • the motor housing is pressurized with a cleaning gas to create a pressure balance between the motor housing and outlet chamber.
  • the invention has for its object to provide a method for abreaction of auto-ignitable dusts in a dry-compressing vacuum pump, in which a continuous oxidation of the reactive dusts within the vacuum pump, whereby the vacuum pump as such simplifies and working on the vacuum pump is made safer.
  • the inventive method is defined in claim 1. Thereafter, the vacuum pumping device during operation continuously metered oxygen is supplied, whereby an oxidation of the dust is effected.
  • the invention provides for a targeted Abresure oxidizable dusts in the vacuum pump.
  • silica SiO 2
  • metals are oxidized to metal oxides. Since gas is essentially conveyed by the vacuum pump and the absolute mass flow of dust per unit of time is relatively low, this method represents a possibility of allowing the reactive dusts to react continuously and in a controlled manner. An uncontrolled inflammation of the dusts is reliably prevented.
  • the oxygen supply can be in the form of pure oxygen or in the form of air. Due to the supply of oxygen, the pumping speed of the vacuum pump is only insignificantly impaired.
  • the amount of dust introduced per unit of time into the vacuum pump is so small that it is continuously burned with a relatively small air-to-gas ballast without this combustion causing damage to the pump.
  • the particles, which leave the pump on the pressure side, are all reacted.
  • a separation of dusts can thus be done on the pressure side with conventional dust filters without the risk of uncontrolled reactions. This allows a simpler and less expensive installation of the vacuum pump. Any accumulation of dusts in the exhaust-side piping is safety-friendly, since no longer reactive.
  • the supplied oxygen-containing gas can be introduced at a suitable location in the vacuum pumping device, for example in the pump chamber at the pump inlet, in the course of the compression chamber or at the pump outlet.
  • the inventive method can be applied to a dry-compressing vacuum pumping device with at least one driven compression member and a housing with pump inlet and pump outlet.
  • the housing of the vacuum pump has at least one oxygen inlet with a throttle valve for regulating the inlet cross-section.
  • dry-compacting vacuum pumping apparatus there may be considered screw pumps, claw pumps, Roots pumps, turbo compressors, side channel blowers, dry compressing rotary vane pumps and others.
  • the vacuum pumping device may consist of a single vacuum pump or of a plurality of pumps connected in series, each of which forms a pump stage.
  • the oxygen may also be introduced into a reaction chamber located between two pump stages. In this case, a reaction space is provided. As a reaction space can also serve a pipe.
  • temperature or pressure sensors are provided for monitoring the reaction in the vacuum pump device.
  • a method for cleaning the vacuum pumping device and the dusts of dust may be that after the end of the process, the supply of process gas is stopped and further an oxygen-containing gas mixture, for. As air is conveyed by the pumping device.
  • the oxygen required for the oxidation may also be contained in the sealing gas of a shaft seal.
  • the oxygen flows metered out of the shaft seal into a pump chamber or a line of the pumping device.
  • a vacuum pump in the form of a screw pump is provided.
  • This has an elongated housing 10, in which two screw rotors 12, 14 are rotatably mounted in opposite directions to each other.
  • Each screw rotor has a helically arranged tooth 16, 18, the pitch of which continuously decreases from the pump inlet 20 towards the pump outlet 22, as in FIG FIG. 1 is recognizable.
  • the working chamber which migrates in the axial direction when the screw rotors rotate decreases from the pump inlet 20 to the pump outlet 22.
  • the compression chamber 24th Between the pump inlet and the pump outlet is the compression chamber 24th
  • the pump inlet 20 forms the suction chamber, which is connected to the device to be evacuated.
  • the process gas 38 is sucked. It contains particles 40 in the form of non-oxidized dusts.
  • the pump inlet 20 is connected to a laterally attached to the housing 10 oxygen inlet 26 which is provided with a throttle valve 28.
  • the throttle valve 28 may be set to different throttle areas to regulate the oxygen supply.
  • the oxygen may be pure oxygen or be part of a gas mixture, for. B. of air.
  • the dusts react in the pump housing 10 in a controlled manner with the supplied oxygen as soon as an oxygen partial pressure required for the reaction is established during the compression.
  • An alternative embodiment of the oxygen inlet is designated 26a.
  • the oxygen inlet 26a is located in the middle region of the length of the Compression space 24, and in the middle between the two intermeshing helical teeth 16, 18th
  • a third alternative is the oxygen inlet 26b, which is arranged at the pump outlet 22.
  • FIG. 3 shows a schematic representation of the pump with the pump inlet 20, in which the process gas 38 is sucked.
  • the oxygen inlet 26 is here at the intake of the pump inlet 20th
  • the full beads set in FIG. 3 the non-oxidized particles and the hollow beads the oxidized particles.
  • the oxidation takes place in the compression space 24 depending on which of the oxygen inlets 26, 26a, 26b is open.
  • the shafts for turning the screw rotors are in FIG. 3 designated 30.

Description

Die Erfindung betrifft ein Verfahren zur Abreaktion selbstentzündlicher Stäube in einer trockenverdichtenden Vakuumpumpvorrichtung sowie eine entsprechende Vakuumpumpe.The invention relates to a method for the reaction of self-igniting dusts in a dry-compressing vacuum pumping apparatus and a corresponding vacuum pump.

Bei metallurgischen und verschiedenen anderen Prozessen, die im Vakuum ablaufen, entstehen häufig Partikel oder Feinstäube, die aufgrund ihrer chemischen Zusammensetzung und ihrer großen Oberfläche so reaktiv sind, dass sie sich beim Kontakt mit Umgebungsluft selbst entzünden, wobei sie mit dem Luftsauerstoff abreagieren. Solche Prozesse sind beispielsweise das Czochalsky-Verfahren zur Herstellung von Silzium-Einkristallen oder das Schmelzen und Entgasen von Stählen. Im ersten Fall entsteht Siliziumoxid (SiO) und im zweiten Fall entstehen metallische Feinstäube, wie z. B. Magnesiumstaub. Die StaubPartikel werden in die Vakuumpumpe eingesaugt, die das für den Prozess erforderliche Vakuum erzeugt. Bei ölgedichteten Vakuumpumpen werden die Staubpartikel von dem Schmierstoff aufgenommen und nicht aus der Pumpe ausgetragen. Da die Partikel zumeist sehr hart sind und zusammen mit dem Öl wie ein Schleifmittel wirken, führt dies häufig zu starkem Verschleiß innerhalb der Vakuumpumpe. Bei trockenverdichtenden Vakuumpumpen, wie z. B. Schraubenvakuumpumpen, besteht dagegen die Gefahr, dass durch die starke Reaktion bei plötzlichem Sauerstoffkontakt Explosionen entstehen. In beiden Fällen werden die Anlagen daher mit aufwendigen Staubfiltern versehen, die den Staub vor der Vakuumpumpe ausfiltern. Die Stäube sammeln sich innerhalb des Staubfilters, wodurch allerdings die Explosionsgefahr aber nicht beseitigt wird. Bei trockenverdichtenden Pumpen ist auch eine Akkumulation von Stäuben auspuffseitig der Vakuumpumpe möglich.In metallurgical and various other processes that take place in a vacuum, particles or fine dusts often form, which are so reactive due to their chemical composition and their large surface that they self ignite on contact with ambient air, whereby they react with the atmospheric oxygen. Such processes are, for example, the Czochalsky process for the production of silicon single crystals or the melting and Degassing of steels. In the first case, silicon oxide (SiO) is formed and in the second case, metallic fine dusts, such as. B. magnesium dust. The dust particles are sucked into the vacuum pump, which generates the vacuum required for the process. In oil-sealed vacuum pumps, the dust particles are absorbed by the lubricant and not discharged from the pump. Since the particles are usually very hard and act together with the oil like an abrasive, this often leads to severe wear inside the vacuum pump. For dry compressing vacuum pumps, such. As screw vacuum pumps, on the other hand there is the danger that caused by the strong reaction in case of sudden oxygen contact explosions. In both cases, the systems are therefore provided with elaborate dust filters, which filter out the dust in front of the vacuum pump. The dusts accumulate inside the dust filter, but this does not eliminate the risk of explosion. With dry compressing pumps it is also possible to accumulate dusts on the exhaust side of the vacuum pump.

Die Stäube stellen auch ein Sicherheitsrisiko für das Wartungspersonal der Anlagen dar, da bei einer fehlerhaften Bedienung oder einen ungeplanten Anlagenbelüftung eine Entzündung der Stäube nicht ausgeschlossen werden kann. Eine solche Entzündung kann sogar im Filter oder in der Verrohrung auftreten.The dusts also pose a safety risk for the maintenance personnel of the systems, as in the event of faulty operation or unplanned system ventilation, ignition of the dusts can not be ruled out. Such inflammation can even occur in the filter or in the piping.

EP 0 985 828 A1 beschreibt ein Verfahren zum Auflösen von störenden Ablagerungen, die durch elektrische Entladungen zwischen Rotor und Stator im Inneren einer Turbomolekularpumpe entstehen. Dem Pumpeninnenraum wird durch einen Kanal ein Reaktionsgas zugeführt, das mit Molekülen, die die Ablagerungen bilden, reagiert und eine Gasförmige Verbindung bildet, die von der Pumpe evakuiert wird. EP 0 985 828 A1 describes a method for dissolving disturbing deposits that arise through electrical discharges between the rotor and stator inside a turbomolecular pump. The pump interior is supplied with a reaction gas through a channel, which reacts with molecules that form the deposits and forms a gaseous compound, which is evacuated by the pump.

EP 1 681 469 A1 beschreibt eine Rotationstrockenvakuumpumpe in Form einer Schrauben-Spindel-Pumpe um zu verhindern, das bei Stoppen des Pumpenmotors aufgrund des herrschenden Überdrucks in der Auslasskammer korrosives Gas von der Auslasskammer in den hermetisch versiegelten Pumpenmotor einströmt, wird das Motorgehäuse mit einem Reinigungsgas mit Druck beaufschlagt, um einen Druckausgleich zwischen Motorgehäuse und Auslasskammer zu erzeugen. EP 1 681 469 A1 describes a rotary dry vacuum pump in the form of a screw-spindle pump to prevent corrosive gas flowing from the discharge chamber into the hermetically sealed pump motor upon stopping the pump motor due to the prevailing overpressure in the discharge chamber. The motor housing is pressurized with a cleaning gas to create a pressure balance between the motor housing and outlet chamber.

Der Erfindung liegt die Aufgabe zugrunde, ein Verfahren zur Abreaktion selbstentzündlicher Stäube in einer trockenverdichtenden Vakuumpumpe anzugeben, bei welchem eine kontinuierliche Oxidation der reaktiven Stäube innerhalb der Vakuumpumpe erfolgt, wodurch die Vakuumpumpe als solche vereinfacht und das Arbeiten an der Vakuumpumpe sicherer gemacht wird.The invention has for its object to provide a method for abreaction of auto-ignitable dusts in a dry-compressing vacuum pump, in which a continuous oxidation of the reactive dusts within the vacuum pump, whereby the vacuum pump as such simplifies and working on the vacuum pump is made safer.

Das erfindungsgemäße Verfahren ist im Patentanspruch 1 definiert. Hiernach wird der Vakuumpumpvorrichtung während des Betriebes kontinuierlich dosiert Sauerstoff zugeführt, wodurch eine Oxidation des Staubes bewirkt wird.The inventive method is defined in claim 1. Thereafter, the vacuum pumping device during operation continuously metered oxygen is supplied, whereby an oxidation of the dust is effected.

Die Erfindung sieht eine gezielte Abreaktion oxidierbarer Stäube in der Vakuumpumpe vor. So wird beispielsweise Siliziumoxid (SiO) zu Siliziumdioxid (SiO2) oxidiert und Metalle werden zu Metalloxiden oxidiert. Da von der Vakuumpumpe im Wesentlichen Gas gefördert wird und der absolute Massenstrom an Staub pro Zeiteinheit relativ gering ist, stellt dieses Verfahren eine Möglichkeit dar, die reaktiven Stäube kontinuierlich und kontrolliert abreagieren zu lassen. Eine unkontrollierte Entzündung der Stäube wird sicher verhindert. Die Sauerstoffzufuhr kann in Form von reinem Sauerstoff oder in Form von Luft erfolgen. Durch die Zufuhr von Sauerstoff wird das Saugvermögen der Vakuumpumpe nur unwesentlich beeinträchtigt. Die pro Zeiteinheit in die Vakuumpumpe eingetragene Staubmenge ist so gering, dass sie mit einem relativ geringen Luft-Gasballast kontinuierlich verbrannt wird, ohne dass diese Verbrennung Schäden an der Pumpe hervorruft. Die Partikel, welche die Pumpe druckseitig wieder verlassen, sind sämtlich abreagiert. Eine Abscheidung von Stäuben kann somit mit üblichen Staubfiltern druckseitig erfolgen, ohne dass die Gefahr unkontrollierter Reaktionen besteht. Dies ermöglicht eine einfachere und kostengünstigere Installation der Vakuumpumpe. Eventuelle Ansammlungen von Stäuben in der auspuffseitigen Verrohrung sind sicherheitstechnisch unbedenklich, da nicht mehr reaktiv.The invention provides for a targeted Abreaktion oxidizable dusts in the vacuum pump. For example, silica (SiO 2 ) is oxidized to silica (SiO 2 ) and metals are oxidized to metal oxides. Since gas is essentially conveyed by the vacuum pump and the absolute mass flow of dust per unit of time is relatively low, this method represents a possibility of allowing the reactive dusts to react continuously and in a controlled manner. An uncontrolled inflammation of the dusts is reliably prevented. The oxygen supply can be in the form of pure oxygen or in the form of air. Due to the supply of oxygen, the pumping speed of the vacuum pump is only insignificantly impaired. The amount of dust introduced per unit of time into the vacuum pump is so small that it is continuously burned with a relatively small air-to-gas ballast without this combustion causing damage to the pump. The particles, which leave the pump on the pressure side, are all reacted. A separation of dusts can thus be done on the pressure side with conventional dust filters without the risk of uncontrolled reactions. This allows a simpler and less expensive installation of the vacuum pump. Any accumulation of dusts in the exhaust-side piping is safety-friendly, since no longer reactive.

Das zugeführte sauerstoffhaltige Gas kann an geeigneter Stelle in die Vakuumpumpvorrichtung eingeführt werden, beispielsweise in den Schöpfraum am Pumpeneintritt, im Verlauf des Kompressionsraums oder am Pumpenaustritt.The supplied oxygen-containing gas can be introduced at a suitable location in the vacuum pumping device, for example in the pump chamber at the pump inlet, in the course of the compression chamber or at the pump outlet.

Das erfindungsgemäße Verfahren kann Anwendung finden bei einer trockenverdichtenden Vakuumpumpvorrichtung mit mindestens einem angetriebenen Kompressionsorgan und einem Gehäuse mit Pumpeneintritt und Pumpenaustritt. Das Gehäuse der Vakuumpumpe hat mindestens einen Sauerstoffeinlass mit einem Drosselventil zum Regulieren des Einlassquerschnittes aufweist.The inventive method can be applied to a dry-compressing vacuum pumping device with at least one driven compression member and a housing with pump inlet and pump outlet. The housing of the vacuum pump has at least one oxygen inlet with a throttle valve for regulating the inlet cross-section.

Als trockenverdichtende Vakuumpumpvorrichtung kommen in Betracht: Schraubenpumpen, Klauenpumpen, Roots-Pumpen, Turboverdichter, Seitenkanalverdichter, trockenverdichtende Drehschieberpumpen und andere.As the dry-compacting vacuum pumping apparatus, there may be considered screw pumps, claw pumps, Roots pumps, turbo compressors, side channel blowers, dry compressing rotary vane pumps and others.

Die Vakuumpumpvorrichtung kann aus einer einzigen Vakuumpumpe bestehen oder auch aus mehreren in Reihe geschalteten Pumpen, von denen jede eine Pumpenstufe bildet. Der Sauerstoff kann auch in eine Reaktionskammer, die sich zwischen zwei Pumpenstufen befindet, eingeleitet werden. In diesem Fall ist ein Reaktionsraum vorgesehen. Als Reaktionsraum kann auch eine Rohrleitung dienen.The vacuum pumping device may consist of a single vacuum pump or of a plurality of pumps connected in series, each of which forms a pump stage. The oxygen may also be introduced into a reaction chamber located between two pump stages. In this case, a reaction space is provided. As a reaction space can also serve a pipe.

Gemäß einer Weiterbildung sind Temperatur- oder Drucksensoren zur Überwachung der Reaktion in der Vakuumpumpvorrichtung vorgesehen.According to a further development, temperature or pressure sensors are provided for monitoring the reaction in the vacuum pump device.

Ein Verfahren zum Reinigen der Vakuumpumpvorrichtung und der Zuleitungen von Stäuben kann darin bestehen, dass nach Ende des Prozesses die Zufuhr von Prozessgas beendet wird und weiterhin ein sauerstoffhaltiges Gasgemisch, z. B. Luft, durch die Pumpvorrichtung gefördert wird.A method for cleaning the vacuum pumping device and the dusts of dust may be that after the end of the process, the supply of process gas is stopped and further an oxygen-containing gas mixture, for. As air is conveyed by the pumping device.

Schließlich kann der für die Oxidation erforderliche Sauerstoff auch im Sperrgas einer Wellendichtung enthalten sein. In diesem Fall strömt der Sauerstoff dosiert aus der Wellendichtung in einen Pumpenraum oder eine Leitung der Pumpvorrichtung.Finally, the oxygen required for the oxidation may also be contained in the sealing gas of a shaft seal. In this case, the oxygen flows metered out of the shaft seal into a pump chamber or a line of the pumping device.

Im Folgenden wird unter Bezugnahme auf die Zeichnungen ein Ausführungsbeispiel der Erfindung näher erläutert.In the following an embodiment of the invention will be explained in more detail with reference to the drawings.

Es zeigen:

Fig. 1
einen schematischen Längsschnitt, durch den Kompressionsraum einer Vakuumpumpe,
Fig. 2
einen Schnitt entlang der Linie II-II von Figur 1 und
Fig. 3
eine schematische Darstellung des Prinzips der vorliegenden Erfindung.
Show it:
Fig. 1
a schematic longitudinal section through the compression space of a vacuum pump,
Fig. 2
a section along the line II-II of FIG. 1 and
Fig. 3
a schematic representation of the principle of the present invention.

Gemäß Figur 1 ist eine Vakuumpumpe in Form einer Schraubenpumpe vorgesehen. Diese weist ein langgestrecktes Gehäuse 10 auf, in dem zwei Schraubenrotoren 12, 14 gegensinnig zueinander drehbar gelagert sind. Jeder Schraubenrotor weist einen schraubenförmig angeordneten Zahn 16, 18, dessen Steigung von dem Pumpeneintritt 20 zum Pumpenaustritt 22 hin stetig abnimmt, wie in Figur 1 erkennbar ist. Hierdurch verkleinert sich die bei drehenden Schraubenrotoren in axialer Richtung wandernde Arbeitskammer vom Pumpeneintritt 20 zum Pumpenaustritt 22 hin. Zwischen dem Pumpeneintritt und dem Pumpenaustritt befindet sich der Kompressionsraum 24.According to FIG. 1 a vacuum pump in the form of a screw pump is provided. This has an elongated housing 10, in which two screw rotors 12, 14 are rotatably mounted in opposite directions to each other. Each screw rotor has a helically arranged tooth 16, 18, the pitch of which continuously decreases from the pump inlet 20 towards the pump outlet 22, as in FIG FIG. 1 is recognizable. As a result, the working chamber which migrates in the axial direction when the screw rotors rotate decreases from the pump inlet 20 to the pump outlet 22. Between the pump inlet and the pump outlet is the compression chamber 24th

Der Pumpeneintritt 20 bildet den Schöpfraum, der an die zu evakuierende Einrichtung angeschlossen wird. In diesen Schöpfraum wird das Prozessgas 38 eingesaugt. Es enthält Partikel 40 in Form nicht-oxidierter Stäube.The pump inlet 20 forms the suction chamber, which is connected to the device to be evacuated. In this pumping chamber, the process gas 38 is sucked. It contains particles 40 in the form of non-oxidized dusts.

Der Pumpeneintritt 20 ist mit einem seitlich an das Gehäuse 10 angesetzten Sauerstoffeinlass 26 verbunden, der mit einem Drosselventil 28 versehen ist. Das Drosselventil 28 kann auf unterschiedliche Drosselquerschnitte eingestellt werden, um die Sauerstoffzufuhr zu regulieren. Der Sauerstoff kann reiner Sauerstoff sein oder Bestandteil eines Gasgemisches sein, z. B. von Luft.The pump inlet 20 is connected to a laterally attached to the housing 10 oxygen inlet 26 which is provided with a throttle valve 28. The throttle valve 28 may be set to different throttle areas to regulate the oxygen supply. The oxygen may be pure oxygen or be part of a gas mixture, for. B. of air.

Die Stäube reagieren in dem Pumpengehäuse 10 in kontrollierter Weise mit dem zugeführten Sauerstoff, sobald sich während der Verdichtung ein für die Reaktion erforderlicher Sauerstoffpartialdruck einstellt.The dusts react in the pump housing 10 in a controlled manner with the supplied oxygen as soon as an oxygen partial pressure required for the reaction is established during the compression.

Eine alternative Ausführungsform des Sauerstoffeinlasses ist mit 26a bezeichnet. Der Sauerstoffeinlass 26a befindet sich im mittleren Bereich der Länge des Kompressionsraums 24, und zwar mittig zwischen den beiden zusammengreifenden schraubenförmigen Zähnen 16, 18.An alternative embodiment of the oxygen inlet is designated 26a. The oxygen inlet 26a is located in the middle region of the length of the Compression space 24, and in the middle between the two intermeshing helical teeth 16, 18th

Eine dritte Alternative bildet der Sauerstoffeinlass 26b, der am Pumpenaustritt 22 angeordnet ist.A third alternative is the oxygen inlet 26b, which is arranged at the pump outlet 22.

Bei den Sauerstoffeinlässen 26, 26a erfolgt jeweils eine Ansaugung des Sauerstoffs bzw. der Außenluft, weil dort ein Vakuum vorhanden ist. Der Sauerstoffeinlass 26b ist hingegen am Pumpenaustritt 22 vorgesehen, wo Atmosphärendruck herrscht. Daher muss eine angesetzte Sauerstoffquelle einen Überdruck haben. In jedem Fall ist ein Drosselventil 28 an dem Sauerstoffeinlass vorgesehen.In the case of the oxygen inlets 26, 26a, in each case an intake of the oxygen or of the outside air takes place, because there is a vacuum. The oxygen inlet 26b, however, is provided at the pump outlet 22, where atmospheric pressure prevails. Therefore, an attached source of oxygen must have an overpressure. In either case, a throttle valve 28 is provided at the oxygen inlet.

Figur 3 zeigt eine schematische Darstellung der Pumpe mit dem Pumpeneinlass 20, in den das Prozessgas 38 eingesaugt wird. Der Sauerstoffeinlass 26 befindet sich hier an dem Ansaugstutzen des Pumpeneinlasses 20. FIG. 3 shows a schematic representation of the pump with the pump inlet 20, in which the process gas 38 is sucked. The oxygen inlet 26 is here at the intake of the pump inlet 20th

Die vollen Kügelchen stellen in Figur 3 die nicht-oxidierten Partikel dar und die Hohlkügelchen die oxidierten Partikel. Die Oxidation erfolgt in dem Kompressionsraum 24 in Abhängigkeit davon, welcher der Sauerstoffeinlässe 26, 26a, 26b geöffnet ist.The full beads set in FIG. 3 the non-oxidized particles and the hollow beads the oxidized particles. The oxidation takes place in the compression space 24 depending on which of the oxygen inlets 26, 26a, 26b is open.

Die Wellen zum Drehen der Schraubenrotoren sind in Figur 3 mit 30 bezeichnet.The shafts for turning the screw rotors are in FIG. 3 designated 30.

Claims (7)

  1. A method for exhaustive reaction of self-igniting dust in a dry-sealed vacuum pump device,
    characterized in that,
    during operation, oxygen is continuously supplied to the vacuum pump device in a dosed manner, whereby an oxidation of the dust (40) is effected, that the dust is continuously burned and possible accumulation of dust in the piping on the exhaust side are not reactive anymore.
  2. The method according to claim 1, characterized in that the supply of oxygen takes place at the entrance (20) of the vacuum pump device or in the feed lines of the vacuum pump.
  3. The method according to claim 1 or 2, characterized in that the supply of oxygen takes place along a compression chamber (24) of the vacuum pump device.
  4. The method according to claim 1 or 2, characterized in that the supply of oxygen takes place along or between at least two compression chambers.
  5. The method according to claim 1 or 2, characterized in that the supply of oxygen is performed at the exit (22) or in the exhaust lines of the vacuum pump device.
  6. The method according to claim 1 or 2, characterized in that the supply of oxygen is performed via a settable or controllable throttle valve (28).
  7. The method according to claim 1 or 2, characterized in that, for cleaning the pump device and the supply lines from dust and for fully exhaustive reaction of the dust, the supply of process gas (38) for condensation is terminated, and the supply of an oxygen-containing gas mixture, e.g. air, by the pump device is continued.
EP20070788296 2006-08-23 2007-08-07 Method for reacting self-igniting dusts in a vacuum pump device Not-in-force EP2054626B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610039529 DE102006039529A1 (en) 2006-08-23 2006-08-23 A method of reacting auto-ignitable dusts in a vacuum pumping apparatus
PCT/EP2007/058199 WO2008022916A1 (en) 2006-08-23 2007-08-07 Method for reacting self-igniting dusts in a vacuum pump device

Publications (2)

Publication Number Publication Date
EP2054626A1 EP2054626A1 (en) 2009-05-06
EP2054626B1 true EP2054626B1 (en) 2012-12-05

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EP20070788296 Not-in-force EP2054626B1 (en) 2006-08-23 2007-08-07 Method for reacting self-igniting dusts in a vacuum pump device

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US (1) US20100086883A1 (en)
EP (1) EP2054626B1 (en)
JP (1) JP2010501766A (en)
CN (1) CN101535651B (en)
DE (1) DE102006039529A1 (en)
RU (1) RU2009110263A (en)
WO (1) WO2008022916A1 (en)

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DE102006039529A1 (en) 2008-03-06
EP2054626A1 (en) 2009-05-06
US20100086883A1 (en) 2010-04-08
CN101535651B (en) 2014-05-14
CN101535651A (en) 2009-09-16
WO2008022916A1 (en) 2008-02-28
RU2009110263A (en) 2010-09-27
JP2010501766A (en) 2010-01-21

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