KR101280493B1 - 스크류형 진공 펌프 세정 방법 - Google Patents

스크류형 진공 펌프 세정 방법 Download PDF

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Publication number
KR101280493B1
KR101280493B1 KR1020077013187A KR20077013187A KR101280493B1 KR 101280493 B1 KR101280493 B1 KR 101280493B1 KR 1020077013187 A KR1020077013187 A KR 1020077013187A KR 20077013187 A KR20077013187 A KR 20077013187A KR 101280493 B1 KR101280493 B1 KR 101280493B1
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KR
South Korea
Prior art keywords
vacuum pump
gas
cleaning
rinsing
screw type
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Expired - Fee Related
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KR1020077013187A
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English (en)
Korean (ko)
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KR20070086062A (ko
Inventor
크리스티안 베이어
올라프 슈탈슈미트
우베 쵤리크
Original Assignee
욀리콘 라이볼트 바쿰 게엠베하
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35788773&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR101280493(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 욀리콘 라이볼트 바쿰 게엠베하 filed Critical 욀리콘 라이볼트 바쿰 게엠베하
Publication of KR20070086062A publication Critical patent/KR20070086062A/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
KR1020077013187A 2004-12-22 2005-12-05 스크류형 진공 펌프 세정 방법 Expired - Fee Related KR101280493B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004063058A DE102004063058A1 (de) 2004-12-22 2004-12-22 Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
DE102004063058.5 2004-12-22
PCT/EP2005/056489 WO2006067032A1 (de) 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe

Publications (2)

Publication Number Publication Date
KR20070086062A KR20070086062A (ko) 2007-08-27
KR101280493B1 true KR101280493B1 (ko) 2013-07-01

Family

ID=35788773

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077013187A Expired - Fee Related KR101280493B1 (ko) 2004-12-22 2005-12-05 스크류형 진공 펌프 세정 방법

Country Status (6)

Country Link
US (1) US20080135066A1 (https=)
EP (1) EP1833622B2 (https=)
JP (1) JP4819828B2 (https=)
KR (1) KR101280493B1 (https=)
DE (2) DE102004063058A1 (https=)
WO (1) WO2006067032A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006039529A1 (de) * 2006-08-23 2008-03-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Abreaktion selbstentzündlicher Stäube in einer Vakuumpumpvorrichtung
FI120544B (fi) * 2007-12-13 2009-11-30 Optogan Oy HVPE-reaktorijärjestely
DE102008021971A1 (de) * 2008-05-02 2009-11-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zum Reinigen von Vakuumpumpen
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
DE102008053522A1 (de) * 2008-10-28 2010-04-29 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuumpumpe
DE102009043133B4 (de) * 2009-09-23 2012-08-09 Roth & Rau Ag Vorrichtung und Verfahren zum Reinigen eines Pumpenraumes einer Vakuumpumpe
DE102011015464B4 (de) * 2010-11-30 2012-09-06 Von Ardenne Anlagentechnik Gmbh Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase
DE102011005464B4 (de) * 2011-03-11 2014-07-17 Fmp Technology Gmbh Fluid Measurements & Projects Vorrichtung zur Erzeugung eines Unterdrucks
DE102011108092A1 (de) * 2011-07-19 2013-01-24 Multivac Sepp Haggenmüller Gmbh & Co. Kg Reinigungsverfahren und -system für Vakuumpumpe
JP2017089462A (ja) * 2015-11-06 2017-05-25 エドワーズ株式会社 真空ポンプの判断システム、および真空ポンプ
CN108714587A (zh) * 2018-06-06 2018-10-30 南京采孚汽车零部件有限公司 一种泵类产品内部清洗装置
CN108775286A (zh) * 2018-08-03 2018-11-09 深圳市石金科技股份有限公司 一种干式真空泵的清洁装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6090222A (en) * 1998-11-16 2000-07-18 Seh-America, Inc. High pressure gas cleaning purge of a dry process vacuum pump
US20030203109A1 (en) * 2002-04-24 2003-10-30 Dando Ross S. Chemical vapor deposition methods
WO2004036047A1 (en) * 2002-10-14 2004-04-29 The Boc Group Plc Rotary piston vacuum pump with washing installation
US6776588B1 (en) * 1999-12-22 2004-08-17 Leybold Vakuum Gmbh Dry compressing vacuum pump having a gas ballast device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415190A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Injection washer for scroll compressor part
JPH0617283A (ja) † 1992-07-02 1994-01-25 Sumitomo Metal Ind Ltd 加工性、成形性に優れためっきＡｌ板およびその製造方法
JP3013652B2 (ja) * 1993-06-01 2000-02-28 富士通株式会社 排気装置とその清浄化方法
DE19522557A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Drehkolbenverdichter, insbesondere Vakuumpumpe
DE19522554A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Verfahren zum Reinigen der Schöpfraumoberflächen eines Rotationskolbenverdichters
US6494959B1 (en) * 2000-01-28 2002-12-17 Applied Materials, Inc. Process and apparatus for cleaning a silicon surface

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6090222A (en) * 1998-11-16 2000-07-18 Seh-America, Inc. High pressure gas cleaning purge of a dry process vacuum pump
US6776588B1 (en) * 1999-12-22 2004-08-17 Leybold Vakuum Gmbh Dry compressing vacuum pump having a gas ballast device
US20030203109A1 (en) * 2002-04-24 2003-10-30 Dando Ross S. Chemical vapor deposition methods
WO2004036047A1 (en) * 2002-10-14 2004-04-29 The Boc Group Plc Rotary piston vacuum pump with washing installation

Also Published As

Publication number Publication date
WO2006067032A1 (de) 2006-06-29
JP4819828B2 (ja) 2011-11-24
JP2008524511A (ja) 2008-07-10
EP1833622B2 (de) 2013-08-21
KR20070086062A (ko) 2007-08-27
DE102004063058A1 (de) 2006-07-13
DE502005009881D1 (https=) 2010-08-19
EP1833622A1 (de) 2007-09-19
US20080135066A1 (en) 2008-06-12
EP1833622B8 (de) 2010-08-11
EP1833622B1 (de) 2010-07-07

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