DE102004063058A1 - Verfahren zum Reinigen einer Vakuum-Schraubenpumpe - Google Patents

Verfahren zum Reinigen einer Vakuum-Schraubenpumpe Download PDF

Info

Publication number
DE102004063058A1
DE102004063058A1 DE102004063058A DE102004063058A DE102004063058A1 DE 102004063058 A1 DE102004063058 A1 DE 102004063058A1 DE 102004063058 A DE102004063058 A DE 102004063058A DE 102004063058 A DE102004063058 A DE 102004063058A DE 102004063058 A1 DE102004063058 A1 DE 102004063058A1
Authority
DE
Germany
Prior art keywords
screw pump
cleaning
cleaning fluid
purge gas
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102004063058A
Other languages
German (de)
English (en)
Inventor
Christian Dr.-Ing. Beyer
Olaf Dipl.-Phys. Stahlschmidt
Uwe Dipl.-Ing. Zöllig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35788773&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE102004063058(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Priority to DE102004063058A priority Critical patent/DE102004063058A1/de
Priority to KR1020077013187A priority patent/KR101280493B1/ko
Priority to DE502005009881T priority patent/DE502005009881D1/de
Priority to PCT/EP2005/056489 priority patent/WO2006067032A1/de
Priority to JP2007547437A priority patent/JP4819828B2/ja
Priority to US11/793,631 priority patent/US20080135066A1/en
Priority to EP05815780.1A priority patent/EP1833622B2/de
Publication of DE102004063058A1 publication Critical patent/DE102004063058A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
DE102004063058A 2004-12-22 2004-12-22 Verfahren zum Reinigen einer Vakuum-Schraubenpumpe Withdrawn DE102004063058A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE102004063058A DE102004063058A1 (de) 2004-12-22 2004-12-22 Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
KR1020077013187A KR101280493B1 (ko) 2004-12-22 2005-12-05 스크류형 진공 펌프 세정 방법
DE502005009881T DE502005009881D1 (https=) 2004-12-22 2005-12-05
PCT/EP2005/056489 WO2006067032A1 (de) 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe
JP2007547437A JP4819828B2 (ja) 2004-12-22 2005-12-05 真空スクリュポンプをクリーニングするための方法
US11/793,631 US20080135066A1 (en) 2004-12-22 2005-12-05 Method For Cleaning a Vacuum Screw-Type Pump
EP05815780.1A EP1833622B2 (de) 2004-12-22 2005-12-05 Verfahren zum reinigen einer vakuum-schraubenpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004063058A DE102004063058A1 (de) 2004-12-22 2004-12-22 Verfahren zum Reinigen einer Vakuum-Schraubenpumpe

Publications (1)

Publication Number Publication Date
DE102004063058A1 true DE102004063058A1 (de) 2006-07-13

Family

ID=35788773

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102004063058A Withdrawn DE102004063058A1 (de) 2004-12-22 2004-12-22 Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
DE502005009881T Expired - Lifetime DE502005009881D1 (https=) 2004-12-22 2005-12-05

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE502005009881T Expired - Lifetime DE502005009881D1 (https=) 2004-12-22 2005-12-05

Country Status (6)

Country Link
US (1) US20080135066A1 (https=)
EP (1) EP1833622B2 (https=)
JP (1) JP4819828B2 (https=)
KR (1) KR101280493B1 (https=)
DE (2) DE102004063058A1 (https=)
WO (1) WO2006067032A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008053522A1 (de) 2008-10-28 2010-04-29 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuumpumpe
DE102009043133A1 (de) * 2009-09-23 2011-04-28 Roth & Rau Ag Vorrichtung und Verfahren zum Reinigen eines Pumpenraumes einer Vakuumpumpe
DE102011005464A1 (de) * 2011-03-11 2012-09-13 Fmp Technology Gmbh Fluid Measurements & Projects Vorrichtung zur Erzeugung eines Unterdrucks
EP2231897A4 (en) * 2007-12-13 2012-12-05 Optogan Oy HVPE REACTOR DEVICE

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006039529A1 (de) * 2006-08-23 2008-03-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Abreaktion selbstentzündlicher Stäube in einer Vakuumpumpvorrichtung
DE102008021971A1 (de) * 2008-05-02 2009-11-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zum Reinigen von Vakuumpumpen
DE102008030788A1 (de) * 2008-06-28 2009-12-31 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen von Vakuumpumpen
DE102011015464B4 (de) * 2010-11-30 2012-09-06 Von Ardenne Anlagentechnik Gmbh Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase
DE102011108092A1 (de) * 2011-07-19 2013-01-24 Multivac Sepp Haggenmüller Gmbh & Co. Kg Reinigungsverfahren und -system für Vakuumpumpe
JP2017089462A (ja) * 2015-11-06 2017-05-25 エドワーズ株式会社 真空ポンプの判断システム、および真空ポンプ
CN108714587A (zh) * 2018-06-06 2018-10-30 南京采孚汽车零部件有限公司 一种泵类产品内部清洗装置
CN108775286A (zh) * 2018-08-03 2018-11-09 深圳市石金科技股份有限公司 一种干式真空泵的清洁装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415190A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Injection washer for scroll compressor part
DE19522554A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Verfahren zum Reinigen der Schöpfraumoberflächen eines Rotationskolbenverdichters
DE19522557A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Drehkolbenverdichter, insbesondere Vakuumpumpe
WO2004036047A1 (en) * 2002-10-14 2004-04-29 The Boc Group Plc Rotary piston vacuum pump with washing installation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0617283A (ja) † 1992-07-02 1994-01-25 Sumitomo Metal Ind Ltd 加工性、成形性に優れためっきＡｌ板およびその製造方法
JP3013652B2 (ja) * 1993-06-01 2000-02-28 富士通株式会社 排気装置とその清浄化方法
US6090222A (en) * 1998-11-16 2000-07-18 Seh-America, Inc. High pressure gas cleaning purge of a dry process vacuum pump
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
US6494959B1 (en) * 2000-01-28 2002-12-17 Applied Materials, Inc. Process and apparatus for cleaning a silicon surface
US6858264B2 (en) * 2002-04-24 2005-02-22 Micron Technology, Inc. Chemical vapor deposition methods

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415190A (en) * 1987-07-10 1989-01-19 Hitachi Ltd Injection washer for scroll compressor part
DE19522554A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Verfahren zum Reinigen der Schöpfraumoberflächen eines Rotationskolbenverdichters
DE19522557A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Drehkolbenverdichter, insbesondere Vakuumpumpe
WO2004036047A1 (en) * 2002-10-14 2004-04-29 The Boc Group Plc Rotary piston vacuum pump with washing installation

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2231897A4 (en) * 2007-12-13 2012-12-05 Optogan Oy HVPE REACTOR DEVICE
DE102008053522A1 (de) 2008-10-28 2010-04-29 Oerlikon Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuumpumpe
WO2010049407A1 (de) 2008-10-28 2010-05-06 Oerlikon Leybold Vacuum Gmbh Verfahren zum reinigen einer vakuumpumpe
DE102009043133A1 (de) * 2009-09-23 2011-04-28 Roth & Rau Ag Vorrichtung und Verfahren zum Reinigen eines Pumpenraumes einer Vakuumpumpe
DE102009043133B4 (de) * 2009-09-23 2012-08-09 Roth & Rau Ag Vorrichtung und Verfahren zum Reinigen eines Pumpenraumes einer Vakuumpumpe
WO2011036590A3 (de) * 2009-09-23 2012-10-26 Roth & Rau Ag Vorrichtung und verfahren zum reinigen eines pumpenraumes einer vakuumpumpe
DE102011005464A1 (de) * 2011-03-11 2012-09-13 Fmp Technology Gmbh Fluid Measurements & Projects Vorrichtung zur Erzeugung eines Unterdrucks
DE102011005464B4 (de) * 2011-03-11 2014-07-17 Fmp Technology Gmbh Fluid Measurements & Projects Vorrichtung zur Erzeugung eines Unterdrucks

Also Published As

Publication number Publication date
WO2006067032A1 (de) 2006-06-29
JP4819828B2 (ja) 2011-11-24
JP2008524511A (ja) 2008-07-10
EP1833622B2 (de) 2013-08-21
KR20070086062A (ko) 2007-08-27
DE502005009881D1 (https=) 2010-08-19
EP1833622A1 (de) 2007-09-19
US20080135066A1 (en) 2008-06-12
KR101280493B1 (ko) 2013-07-01
EP1833622B8 (de) 2010-08-11
EP1833622B1 (de) 2010-07-07

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R012 Request for examination validly filed

Effective date: 20111130

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20130702