EP1750931B1 - Dispositif de compression et procede d'utilisation d'un tel dispositif - Google Patents

Dispositif de compression et procede d'utilisation d'un tel dispositif Download PDF

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Publication number
EP1750931B1
EP1750931B1 EP05750911A EP05750911A EP1750931B1 EP 1750931 B1 EP1750931 B1 EP 1750931B1 EP 05750911 A EP05750911 A EP 05750911A EP 05750911 A EP05750911 A EP 05750911A EP 1750931 B1 EP1750931 B1 EP 1750931B1
Authority
EP
European Patent Office
Prior art keywords
compacting
roller
silicon
silicon powder
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP05750911A
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German (de)
English (en)
Other versions
EP1750931A1 (fr
EP1750931B8 (fr
Inventor
Peter Adler
Andreas Gölz
Holger Kirchner
Armin Müller
Torsten Sill
Raymund Sonnenschein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSSi GmbH
Original Assignee
Joint Solar Silicon GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Joint Solar Silicon GmbH and Co KG filed Critical Joint Solar Silicon GmbH and Co KG
Publication of EP1750931A1 publication Critical patent/EP1750931A1/fr
Publication of EP1750931B1 publication Critical patent/EP1750931B1/fr
Application granted granted Critical
Publication of EP1750931B8 publication Critical patent/EP1750931B8/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/16—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using pocketed rollers, e.g. two co-operating pocketed rollers
    • B30B11/165—Roll constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/18—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using profiled rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B3/00—Presses characterised by the use of rotary pressing members, e.g. rollers, rings, discs
    • B30B3/005—Roll constructions

Definitions

  • the invention relates to a compacting device of a powder and the use of such a device.
  • the low-metal or metal-free compaction of powders has long been a technical challenge.
  • One known method for densifying powders is roll compaction.
  • powder is compacted between two counter-rotating rollers.
  • the occurring specific contact pressures are in this case 5 N / cm to 50 kN / cm.
  • Metal rollers are usually used for this application. Due to the high specific contact forces, which sometimes go up to the yield point of the metal roll, it comes to wear of the rollers. The abrasion gets into the product. For applications in the photovoltaic, semiconductor, pharmaceutical and chemical industries, this metal abrasion is unfavorable to harmful, since sometimes metallic impurities in the ppm or ppb range led to defective products.
  • a crushing device for polycrystalline silicon according to the preamble of claim 1, known.
  • This comprises a housing at least partially enclosing a working space with a housing arranged on the supply means for supplying the polycrystalline silicon in the working space, two adjacent arranged and rotating rollers for crushing the silicon and for compacting the silicon means of a compression gap formed by the two rollers and a receptacle for receiving shredded silicon.
  • the rollers have a base made of iron or steel, which is coated with a high-purity silicon layer.
  • a compacting apparatus for compacting a powder is known. This has in a working space on two rotatably driven rollers, which are provided with an elastomer layer. To feed the powder, a screw feeder is provided.
  • roller press for producing moldings, for example, cement raw meal or coal known. This has two rotatable rollers whose outer surfaces carry a plurality of molds.
  • From the DE 43 44 206 A1 is a two-roll machine for the pressure treatment of bulk materials known.
  • the machine has two counter-rotating rollers with a cylindrical roller body and a composite of individual segments roll shell, the pitch of the roll shell is freely selectable into segments.
  • roller for a rolling mill consisting of a roller core and a roller sleeve known.
  • the roller sleeve is made of a sintered ceramic.
  • the invention is based on the object to provide a compression device for metal-poor or metal-free compression of a powder.
  • the object is solved by the features of the characterizing part of claim 1.
  • the essence of the invention is to provide in a compacting device compression rollers, which consist at least on their coat of ceramic and are glued to a roll core. This prevents the formation of metallic abrasion during compaction.
  • the plant 1 has, starting from the top, a tubular, vertically extending reactor 2, which encloses a cylindrical reaction chamber 3.
  • a gas supply line 4 is arranged, which opens into the reaction chamber 3.
  • the line 4 is designed so that in the middle of a Nutzgasstrom, for example, monosilane, can be introduced.
  • the Nutzgasstrom is surrounded by a ring stream of an auxiliary gas.
  • Approximately the upper half of the reactor 2 is surrounded by a ring-cylindrical heater 5, which surrounds the reactor 2 such that the wall of the chamber 3 can be heated to temperatures above 800 ° C.
  • the lower half of the reactor 2 is surrounded by an annular cylindrical cooling device 6, which is directly adjacent to the reactor 2.
  • the degassing device 31 consists of an obliquely upward, connected to the chamber 3 housing 32, which at the lower end of the reactor. 2 is scheduled.
  • a ring-cylindrical and closed bottom sintered material filter 33 is attached, can escape through the excess of hydrogen through an attached in the upper end of the housing 32 opening 34.
  • a roller ventilator 35 of known type and then a compression device 10, whose structure will be described in more detail below.
  • the compression device 10 is connected via the lock 7 with the reaction chamber 3.
  • a storage container 11 connected thereto.
  • the roller ventilator 35 has a cuboid housing 36, in which two ventilation rollers 38, 39 driven by a motor 37 are arranged.
  • the rollers 38, 39 are rotatably mounted about associated, mutually parallel axes of rotation 40, 41.
  • the rollers 38, 39 are driven in opposite directions, so that in the area of the gap 38 delimited by the rollers 38, 39 both move downwards.
  • the roller 38 is hollow and has a porous shell. On its outer surface a gas-permeable plastic film is applied. Within the roller 38 is negative pressure. In this way, the remaining gas in the silicon powder 43 gas is withdrawn.
  • the surface of the roller 39 is smooth. Both rollers 38, 39 preferably have a non-metallic surface.
  • the compression device 10 has a housing 12, which encloses a substantially cubic working space 13.
  • the housing 12 has a feed opening 14 facing the lock 7 and connected thereto and a discharge opening 15 provided at the lower edge of the housing 12 and connected to the container 11.
  • In the housing 12 are located centrally between the openings 14 and 15, two about respective axes of rotation 16, 17 rotatably driven compression rollers 18, 19, such are arranged adjacent to each other, that between them a compression gap 20 is formed.
  • the axes of rotation 16 and 17 are parallel to each other.
  • the compression gap 20 has a width B S.
  • the compression rollers 18, 19 are rotatably driven by a motor 21 which is connected via a connecting line 22 to the control device 9.
  • the tubular reactor 2 has a vertically extending central longitudinal axis 23 which extends centrally through the gap 20.
  • the rollers 18, 19 are driven in opposite directions, ie the roller 18 rotates clockwise, the roller 19 in the counterclockwise direction. As a result, the surfaces of the rollers 18, 19 move together in the region of the gap 20 downwards.
  • the rollers 18, 19 have a roll core 24 made of steel, which is formed circular-cylindrical.
  • On the roll core 24 is an annular cross-section roll shell 25 which surrounds the roll core 24 circumferentially completely.
  • the roll shell 25 is formed in one piece and consists of a non-metal material, that is, a non-metallic material. In particular, these are glass, graphite or ceramic materials. Particularly preferred is ceramic. In particular, the ceramic used consists essentially of silicon nitride.
  • the roll shell 25 is fixed on the roll core 24 in the axial and tangential direction, for example by gluing or tongue and groove joints.
  • the roll shell 25 has the shape of a circular ring cylinder. It is possible to form the entire roller 18 or 19 from a ceramic material. In this case, the separation between a roll core 24 made of steel and a roll shell 25 made of ceramic falls away.
  • the embodiment according to Fig. 2 is more stable and advantageous, especially with regard to the application of torques to the surface 26
  • a second embodiment is shown. Identical parts are given the same reference numerals as in the embodiment according to FIG Fig. 2 , Structurally different but functionally similar parts receive the same reference numerals with a following a.
  • the main difference compared to the embodiment according to Fig. 2 consists in that the roll shell 25a is not formed in one piece, but consists of two half-shells 27, 28 which surround the roll core 24 completely and completely. In particular, the gaps 29 between the half-shells 27 and 28 are completely and completely closed, so that material which reaches the surface 26 does not come into contact with the roller core 24.
  • the half-shells 27, 28 were subjected to the ceramic production of a precise mechanical processing.
  • the surface of the half-shells 27, 28 was profiled.
  • the surface of the half-shells 27, 28 may also be designed so that the compacted silicon has the shape of rods, pillows, almonds, etc.
  • the material combination of ceramic and metal withstood machining It is also possible to use on the circumference of partial shells with a center angle of ⁇ 180 °. In particular, three partial shells with a center angle of 120 ° or four partial shells with a center angle of 90 ° can be provided on the circumference. There are also other divisions possible.
  • a gas mixture of monosilane and hydrogen in the volume or molar ratio 1: 3 was in the reactor 2 with a wall temperature of the wall 30 of> 800 ° C and a production rate of 200 g silicon per hour to silicon powder and hydrogen implemented.
  • the addition was carried out in such a way that the monosilane was introduced centrally from above into the reaction chamber 3.
  • the hydrogen surrounded the monosilane in the form of a ring current to prevent the silicon from depositing directly on the walls of the reaction chamber 3.
  • the silicon powder 43 was partially degassed following the decomposition by means of the arranged at the lock 7 degassing device 31.
  • the resulting powder had a bulk density of about 50 g / l.
  • the reaction chamber 3 was worked with an overpressure of 200 mbar to the environment. In this way, the degassing was carried out automatically in the degassing device 31 with respect to the ambient pressure.
  • the silicon powder was in two steps by means of the roller breather 35 and the compression device 10, the hydrogen atmosphere in the powder against an inert gas, for. As argon or nitrogen, exchanged.
  • the deaerated and pre-compressed product with a bulk density of about 200 g / dm 3 was compacted by means of the compression device 10 to a bulk density of 450 g / dm 3 . 6 kg of this compacted silicon powder were placed in an induction melting system IS30 from Leybold. Subsequently, the plant was evacuated.
  • a silicon-containing gas can be decomposed in the reactor. Examples of these are trichlorosilane or monosilane. Other silicon containing gases may also be used.
  • the silicon-containing gas is introduced centrally into the tubular reactor 2 and is in this case surrounded by a ring stream of an auxiliary gas, so that the silicon-containing gas does not deposit directly on the reactor walls.
  • the auxiliary gas may generally be an inert gas. Hydrogen is particularly advantageous since it is also formed during the decomposition of, for example, monosilane. However, it can also noble gases such as argon and other gases such. As nitrogen or carbon dioxide can be used. The mixture ratio, d. H.
  • Volume or molar ratio of monosilane to hydrogen can be between 1: 0 and 1: 100.
  • the specific energy requirement per 1 kg of solid silicon for the thermal decomposition and mechanical compaction process steps was less than 20 kWh.
  • the space-time yield per tubular reactor 2 was more than 1 kg of silicon powder per hour.
  • the wall temperature of the reactor 2 is more than 400 ° C, in particular more than 800 ° C.
  • the densification of the silicon powder can be one or two stages, advantageously two stages done.
  • the contact forces in the compression device 10 were between 5 N / cm and 50 kN / cm.
  • the compression of the silicon powder in the device 10 is metal-free and thus there is no metal contamination of the silicon powder.
  • the silicon powder comes into contact exclusively with the roll shell 25 made of ceramic, so that this is ensured.
  • the high-purity powdery silicon produced by the process according to the invention despite its powdery ground state has good handling properties and is suitable for the production of pure silicon melts, from which silicon blocks or silicon crystals can be produced. It has been found that with the defined composition of the pyrolysis gas consisting of hydrogen and monosilane it is possible to produce silicon in powder form with high yields and very low energy consumption.
  • the method is characterized in particular by the fact that the silicon powder can be handled separately, packaged and shipped after the process has been carried out, and thus can be used with a time delay for the production of silicon blocks or silicon crystals.
  • the silicon is characterized by a good melting behavior and high purity despite its large surface area and an unfavorable, small volume / surface ratio compared to Prime Poly silicon.
  • the silicon powder produced by the thermal decomposition had a bulk density of 10 to 100 g / dm 3 .
  • the silicon powder finally compacted by the device 10 had a bulk density of 100 to 1500 g / dm 3 , in particular of 200 to 1200 g / dm 3 , in particular of 250 to 950 g / dm 3 , in particular about 450 g / dm 3 .
  • the silicon powder contained in total not more than 10 19 atoms of foreign elements per 1 cm 3 of silicon.
  • the silicon powder consisted of crystalline particles having a primary particle size of 10 nm to 10,000 nm, preferably 50 nm to 500 nm, typically about 200 nm.
  • the compacted silicon powder consisted of aggregates with an aggregate size of 500 nm to 100,000 nm, in particular 1,000 nm to 10,000 typically about 4000 nm.
  • the densified silicon pieces of silicon aggregates had a largest dimension of 1 to 200 mm. They had an irregular shape, which could also be chopsticks.
  • the silicon powder had a surface area of 1 to 50 m 2 / g.
  • the compacted silicon powder had a total of not more than 10 17 atoms of transition metals per 1 cm 3 of silicon.
  • the silicon powder according to the invention has a brown color, whereas silicon granules produced by conventional methods are gray.
  • the compacted silicon powder can be used for the production of polycrystalline silicon blocks for photovoltaics or for the production of silicon single crystals.
  • Silicon wafers can be produced from the silicon according to the invention.
  • the metal content of the compacted silicon powder was the same as that of the starting product. No impurities could be detected.
  • the silicon did not contain silicon oxide compounds on the surface of the silicon particles due to the manufacturing process, which would have substantially increased the melting temperature of the silicon powder.

Claims (6)

  1. Dispositif de compression pour la compression pauvre en métal d'une poudre de silicium
    a. avec un boîtier (12) entourant au moins partiellement un espace de travail (13),
    b. avec un dispositif d'amenée (14) disposé sur le boîtier (12) pour l'amenée d'une poudre de silicium à compresser dans l'espace de travail (13),
    c. avec au moins un rouleau de compression (18) présentant une enveloppe de rouleau (25), disposé de manière entraînable en rotation dans l'espace de travail (13), qui forme conjointement avec un second rouleau de compression (19) une fente de compression (20) pour la compression de la poudre de silicium dans celle-ci,
    d. les rouleaux de compression (18, 19) présentant un noyau de rouleau (24) en métal qui est entouré par une enveloppe de rouleau (25 ; 25a), caractérisé en ce que
    e. les pressions d'application spécifiques apparaissant sont comprises ici entre 5 N/cm et 50 kN/cm,
    f. les rouleaux de compression (18, 19) se composent de céramique au moins sur l'enveloppe de rouleau (25 ; 25a),
    g. l'enveloppe de rouleau (25 ; 25a) est collée au noyau de rouleau (24) et
    h. la surface de l'enveloppe de rouleau (25 ; 25a) est réalisée de sorte que la poudre de silicium compressée possède la forme de baguettes, de coussins ou d'amandes.
  2. Dispositif de compression selon la revendication 1, caractérisé en ce qu'un rouleau de compression (18) logé à rotation autour d'un premier axe de rotation (16) ainsi qu'un second rouleau de compression (19) logé à rotation autour d'un second axe de rotation (17) sont prévus, les deux axes de rotation (16, 17) s'étendant parallèlement l'un à l'autre.
  3. Dispositif de compression selon la revendication 2, caractérisé en ce que l'enveloppe de rouleau (25) est réalisée essentiellement en forme de cylindre annulaire.
  4. Dispositif de compression selon la revendication 2 ou 3, caractérisé en ce que l'enveloppe de rouleau (25) est réalisée d'un seul tenant.
  5. Dispositif de compression selon l'une quelconque des revendications 2 ou 3, caractérisé en ce que l'enveloppe de rouleau (25a) est formée de deux demi-coques (27, 28).
  6. Utilisation du dispositif de compression selon l'une quelconque des revendications précédentes, caractérisée en ce qu'il s'agit pour la poudre à compresser de poudre de silicium et la poudre de silicium compressée ne présente au total pas plus de 1017 atomes par cm3 de métaux transitoires.
EP05750911A 2004-06-04 2005-05-10 Dispositif de compression et procede d'utilisation d'un tel dispositif Not-in-force EP1750931B8 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004027564A DE102004027564A1 (de) 2004-06-04 2004-06-04 Verdichtungs-Vorrichtung
PCT/EP2005/005019 WO2005118272A1 (fr) 2004-06-04 2005-05-10 Dispositif de compression

Publications (3)

Publication Number Publication Date
EP1750931A1 EP1750931A1 (fr) 2007-02-14
EP1750931B1 true EP1750931B1 (fr) 2009-03-18
EP1750931B8 EP1750931B8 (fr) 2009-07-08

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EP05750911A Not-in-force EP1750931B8 (fr) 2004-06-04 2005-05-10 Dispositif de compression et procede d'utilisation d'un tel dispositif

Country Status (8)

Country Link
US (1) US7584919B2 (fr)
EP (1) EP1750931B8 (fr)
JP (1) JP2008501528A (fr)
CN (1) CN1960852B (fr)
AT (1) ATE425868T1 (fr)
DE (2) DE102004027564A1 (fr)
ES (1) ES2321016T3 (fr)
WO (1) WO2005118272A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004027563A1 (de) * 2004-06-04 2005-12-22 Joint Solar Silicon Gmbh & Co. Kg Silizium sowie Verfahren zu dessen Herstellung
CN101128393A (zh) 2005-03-05 2008-02-20 联合太阳能硅有限及两合公司 反应器和制备硅的方法
DE102005046105B3 (de) * 2005-09-27 2007-04-26 Degussa Gmbh Verfahren zur Herstellung von Monosilan
US20080308970A1 (en) 2007-06-15 2008-12-18 General Electric Company Process for melting silicon powders
EP2052848A1 (fr) 2007-10-27 2009-04-29 Joint Solar Silicon GmbH & Co. KG Préparation de pièces brutes en silicium pur
EP2087984B1 (fr) * 2008-02-05 2010-05-12 Texmag GmbH Vertriebsgesellschaft Cylindre destiné à exercer une pression de contact sur des bandes de matériau
DE102008044688B4 (de) * 2008-07-01 2010-11-18 Sunicon Ag Kompaktierung von Silizium
US20100243963A1 (en) * 2009-03-31 2010-09-30 Integrated Photovoltaics, Incorporated Doping and milling of granular silicon
US8739962B2 (en) * 2009-12-15 2014-06-03 Exxonmobil Research And Engineering Company Active solids supply system and method for supplying solids
CN102049876A (zh) * 2011-02-01 2011-05-11 季陵 一种松散物料压块机
CN104583122B (zh) 2012-08-29 2017-09-05 赫姆洛克半导体运营有限责任公司 锥形流化床反应器及其使用方法
DE102013103880B3 (de) * 2013-04-17 2014-08-07 Maschinenfabrik Köppern GmbH & Co KG Presswalze
CN103625703B (zh) * 2013-11-28 2015-07-15 泗阳瑞泰光伏材料有限公司 一种缩小粉末硅原料体积的方法
CN104385656B (zh) * 2014-11-10 2016-01-20 浙江中技桩业有限公司 一种新型物料挤压装置
JP6886734B1 (ja) * 2020-02-20 2021-06-16 株式会社不二製作所 弾性研磨材の製造方法，弾性研磨材の製造装置，ブラスト加工方法，及びブラスト加工装置
CN113368942A (zh) * 2021-07-21 2021-09-10 南京凯盛国际工程有限公司 一种带预压功能的辊压机
CN117753309B (zh) * 2024-02-21 2024-04-26 洛阳可利威化工有限公司 一种辊压式造粒机

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE539923C (de) 1931-12-03 Fried Krupp Grusonwerk Akt Ges Walzenpresse zum Herstellen von Formlingen
US3622091A (en) * 1969-06-18 1971-11-23 Howard Bidwell Dry fluffing pulp sheet stock
US3867490A (en) 1972-04-18 1975-02-18 Boliden Ab Method of agglomerating particulate material
JPS5767019A (en) * 1980-10-13 1982-04-23 Shin Etsu Handotai Co Ltd Manufacture of pure silicon granule for manufacturing polycrystalline silicon by fluidized bed method
JPS58145611A (ja) * 1982-02-23 1983-08-30 Shin Etsu Chem Co Ltd シリコン粒子の粉砕、篩別方法
JPS592425A (ja) * 1982-06-28 1984-01-09 Fujitsu Ltd パルス成形ライン
JPS59197307A (ja) 1983-04-22 1984-11-08 Hitachi Ltd 圧延機用ロ−ル
DE3431865A1 (de) 1984-08-30 1986-03-06 Degussa Ag, 6000 Frankfurt Verfahren und vorrichtung zum granulieren von pulverfoermigen stoffen
DD233798B1 (de) * 1984-12-04 1988-04-13 Piesteritz Agrochemie Verfahren zur kontinuierlichen strukturschonenden verdichtung von acetylenruss oder sich aehnlich verhaltenden stoffen
DE8435987U1 (fr) * 1984-12-08 1987-05-07 Mtu Muenchen Gmbh
DE3915508A1 (de) * 1989-05-12 1990-11-15 Feldmuehle Ag Walze zur druckbehandlung von warenbahnen
DE4121797A1 (de) * 1991-07-02 1993-01-07 Zementanlagen Und Maschinenbau Verfahren und vorrichtung zum zerkleinern von heissen, koernigen schuettguetern
CA2089230A1 (fr) * 1992-03-09 1993-09-10 Ralph Herman Pelto Methode de compactage de nitrate d'argent, et appareil connexe
KR940006017B1 (ko) * 1992-03-19 1994-07-02 재단법인 한국화학연구소 실리콘 입자의 제트분쇄방법
JP3246951B2 (ja) * 1992-07-28 2002-01-15 電気化学工業株式会社 窒化珪素粉末の製造方法
JP3425950B2 (ja) * 1992-11-09 2003-07-14 アメリカン ローラ カンパニー，エルエルシー 混合セラミック層を有する電荷ドナーローラ
DE4344206A1 (de) 1993-12-23 1995-06-29 Kloeckner Humboldt Deutz Ag Zweiwalzenmaschine für die Druckbehandlung von Schüttgütern
CN2231144Y (zh) 1995-08-31 1996-07-17 于超 复合陶瓷辊环
JP2989812B1 (ja) * 1998-08-25 1999-12-13 東芝エンジニアリング株式会社 粉末圧延装置
IT1309769B1 (it) 1999-08-04 2002-01-30 Lb Officine Meccaniche Spa Impianto di laminazione per la formazione di scaglie.

Also Published As

Publication number Publication date
DE102004027564A1 (de) 2005-12-22
ATE425868T1 (de) 2009-04-15
EP1750931A1 (fr) 2007-02-14
CN1960852A (zh) 2007-05-09
US7584919B2 (en) 2009-09-08
US20070248438A1 (en) 2007-10-25
JP2008501528A (ja) 2008-01-24
ES2321016T3 (es) 2009-06-01
CN1960852B (zh) 2010-06-23
DE502005006878D1 (de) 2009-04-30
EP1750931B8 (fr) 2009-07-08
WO2005118272A1 (fr) 2005-12-15

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