WO2009053084A1 - Production d'ébauches en silicium ultra-pur - Google Patents

Production d'ébauches en silicium ultra-pur Download PDF

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Publication number
WO2009053084A1
WO2009053084A1 PCT/EP2008/009001 EP2008009001W WO2009053084A1 WO 2009053084 A1 WO2009053084 A1 WO 2009053084A1 EP 2008009001 W EP2008009001 W EP 2008009001W WO 2009053084 A1 WO2009053084 A1 WO 2009053084A1
Authority
WO
WIPO (PCT)
Prior art keywords
mold chamber
powder
mold
chamber
silicon
Prior art date
Application number
PCT/EP2008/009001
Other languages
German (de)
English (en)
Inventor
Armin Müller
Jens Piotraschke
Raymund Sonnenschein
Torsten Sill
Christian Beyer
Dietmar Kaden
Christos G. Aneziris
Dieter Melzer
Berndt Lieber
Original Assignee
Jssi Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jssi Gmbh filed Critical Jssi Gmbh
Publication of WO2009053084A1 publication Critical patent/WO2009053084A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/001—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B13/00—Feeding the unshaped material to moulds or apparatus for producing shaped articles; Discharging shaped articles from such moulds or apparatus
    • B28B13/02—Feeding the unshaped material to moulds or apparatus for producing shaped articles
    • B28B13/0215—Feeding the moulding material in measured quantities from a container or silo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B13/00—Feeding the unshaped material to moulds or apparatus for producing shaped articles; Discharging shaped articles from such moulds or apparatus
    • B28B13/02—Feeding the unshaped material to moulds or apparatus for producing shaped articles
    • B28B13/0215—Feeding the moulding material in measured quantities from a container or silo
    • B28B13/023—Feeding the moulding material in measured quantities from a container or silo by using a feed box transferring the moulding material from a hopper to the moulding cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B3/00—Producing shaped articles from the material by using presses; Presses specially adapted therefor
    • B28B3/003—Pressing by means acting upon the material via flexible mould wall parts, e.g. by means of inflatable cores, isostatic presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B5/00—Producing shaped articles from the material in moulds or on moulding surfaces, carried or formed by, in or on conveyors irrespective of the manner of shaping
    • B28B5/06—Producing shaped articles from the material in moulds or on moulding surfaces, carried or formed by, in or on conveyors irrespective of the manner of shaping in moulds on a turntable
    • B28B5/08—Producing shaped articles from the material in moulds or on moulding surfaces, carried or formed by, in or on conveyors irrespective of the manner of shaping in moulds on a turntable intermittently rotated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/0005—Details of, or accessories for, presses; Auxiliary measures in connection with pressing for briquetting presses
    • B30B15/0017—Deairing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/30—Feeding material to presses
    • B30B15/302—Feeding material in particulate or plastic state to moulding presses

Definitions

  • the invention relates to an apparatus and a method for producing moldings from a powder.
  • the invention is thus based on the object to provide an apparatus and a method for shaping a molded article from a powder, in which the resulting fine fraction is reduced and the purity of the powder is at least largely preserved.
  • the core of the invention consists in forming in a cold isostatic dry die process, in particular, the metal chamber used for compacting the powder mold chamber.
  • the compact tion of the powder is thus carried out in an at least almost metal-free environment.
  • roll compaction in which the shaping takes place by means of linear forces and inevitably produces a fine fraction
  • stable and abrasion-resistant semi-finished products with a reduced fines content can be produced by cold isostatic pressing.
  • FIG. 1 shows a cross section through a portion of the device GE measured a first embodiment with the slider of
  • FIG. 2 shows a cross section through a portion of the device according to FIG. 1 with the slider of the intermediate member in a second position
  • FIG. 3 shows a cross section through a portion of the device according to FIG. 1 with the punch in a lower position for compressing the powder in the mold chamber
  • FIG. 4 shows a cross section through a portion of the device according to FIG. 1 with the plug in an upper position for removing the molded article from the mold chamber
  • FIG. 5 shows a cross section through a partial region of the device according to a further exemplary embodiment
  • FIG. 6 shows a cross section through a partial region of the device according to a further exemplary embodiment
  • FIG. 7 is a plan view of a device according to another embodiment
  • FIG. 8 is a sectional view taken along the line VIII-VIII through the embodiment of the apparatus of FIG. 7,
  • FIG. 9 sectional view taken along the line IX-IX through the embodiment of the apparatus of FIG. 7, and
  • FIG. 10 shows a sectional view along the line X-X through the exemplary embodiment of the device according to FIG. 7.
  • a device for shaping a molded article from a powder comprises a supply device 1 and a compression device 2.
  • the device further comprises an intermediate element 3 displaceably arranged between the supply device 1 and the compression device 2 and a base frame 4 which at least the compression device 2 is attached.
  • the supply device 1 comprises a particular designed as a funnel 5 Bef ⁇ ll element.
  • the funnel 5 is formed substantially rotationally symmetrical to a first, vertically oriented longitudinal axis 6.
  • the funnel 5 has a funnel interior 12 with an upper inlet opening 7 and a lower outlet opening 8. Both the inlet opening 7 and the outlet opening 8 are closed gas-tight.
  • the funnel 5 comprises a downwardly conically tapering upper part 9 and a downwardly adjoining this lower part 10.
  • the lower part 10 is formed substantially hollow cylindrical.
  • the upper part 9 and the lower part 10 are made of a non-metallic material at least on their side facing the funnel interior 12.
  • the funnel interior 12 facing side of the upper part 9 and the lower part 10 is in particular carried out with an abrasion-resistant hard material layer. It is intended to form the funnel 5 made of stainless steel. It is also possible to form the funnel 5 from a glass or vitreous material.
  • the funnel 5 is designed in particular in layered construction.
  • the funnel 5 comprises a funnel wall 11, which is largely gas-impermeable.
  • a first degassing device 13 is provided in the area of the funnel wall 11, in particular in the lower part 10, however.
  • the first degassing device 13 comprises a porous structure 14 in the funnel wall 1 1, at least one filter element 15 and a first vacuum device 16.
  • the porous structure 14 and the filter element 15 are designed such that they prevent penetration of the powder in the hopper interior 12 into the vacuum device 16.
  • the filter element 15 has openings which are smaller than the smallest expected size of the powder located in the funnel interior 12.
  • the filter element 15 is advantageously exchangeable bar.
  • the porous structure 14 comprises a porous plastic, in particular a plastic fleece, combined with a metallic support fabric. The plastic is resistant to abrasion and has sufficient purity for use in photovoltaics.
  • the porous structure 14 is designed in particular in layered construction.
  • the feed device 1 comprises a first feed screw 17 arranged in the hopper 5.
  • the feed screw 17 comprises a shaft 18 arranged rotatably drivable along the longitudinal axis 6 and at least one gear 19 wound helically around the shaft 18.
  • Both the shaft 18 and the passage 19 are made at least on their funnel interior 12 facing surface of a non-metallic material.
  • the screw conveyor 17 is in particular made of a hardened steel and has an abrasion-resistant hard material layer on its surface.
  • the passage 19 is advantageously over its entire length on the circumferential side of the funnel wall 11 at. However, a gap with a gap of a few millimeters between the passage 19 and the funnel wall 11 is also possible.
  • a scraper 20 is also arranged to prevent bridging of the powder in the hopper interior 12 above the screw conveyor 17.
  • the scraper 20 is located on the funnel wall 1 1 and is rotatably supported by the shaft 18 about the longitudinal axis 6. Between the scraper 20 and the funnel wall 11 may also be provided a gap with a gap of a few millimeters.
  • the intermediate member 3 is designed in particular as a horizontally displaceable slider 21.
  • the slider 21 radially encloses an upwardly and downwardly open cavity 22.
  • the cavity 22 is rotationally symmetric to a cavity axis 23. It has a radius r H , which at least as is large as the inner radius r ü of the lower part 10 of the funnel 5.
  • the slider 21 is in the horizontal direction, that is perpendicular to the longitudinal axis 6 between a first position shown in Fig. 1, in which the cavity axis 23 with the longitudinal axis 6 coincides, and a second position shown in Fig. 2, in which the cavity axis 23 coincides with a second longitudinal axis 24, displaceable.
  • the slider 21 and thus the cavity 22 has a height h.
  • the slider 21 has a removal slide 39 forming end wall 37. It may also be provided a separate removal slide 39.
  • the cavity axis 23 and the longitudinal axis 6 coincide.
  • the slider 21 thus there is a barrier-free transition from funnel interior 12 in the lower part 10 of the funnel 5 to the cavity 22 of the slider 21.
  • the cavity 22 is in this position of the slider 21 at its lower, the funnel 5 opposite end by the Basic frame 4 powder-tight finished.
  • the slide 21 In the second position shown in FIG. 2, in which the slide 21 is displaced by at least twice the radius ⁇ H of the cavity 22 in the direction perpendicular to the first longitudinal axis 6 with respect to the first position, the slide 21 forms a closure of the outlet Opening 8 of the funnel 5.
  • the compression device 2 comprises a substantially cylindrical, rotationally symmetrical with respect to the second longitudinal axis 24 formed mold chamber 25 with a ring cylindrical shape chamber wall 26.
  • the mold chamber 25 is formed substantially rotationally symmetrical to the second longitudinal axis 24.
  • the lower end of the mold chamber 25 is closed by a plug 27.
  • the plug 27 lies in its 1, to the gas-tight position shown in FIGS. 1 to 3 on the mold chamber wall 26. It forms the lower closure of the mold chamber 25.
  • the plug 27 is displaceable along the direction of the second longitudinal axis 24. It can be lowered to open the mold chamber 25 down. However, it is also for removing a mold located in the mold chamber 25 upwards, that is, in the mold chamber 25 can be inserted.
  • the plug 27 is releasably secured against displacement along the second longitudinal axis 24 by pins or notched plates, not shown in the figures.
  • the plug 27 has an insert 28, which is oriented in particular centrally, parallel to the second longitudinal axis 24 and made of a finely porous material, in particular of an abrasion-resistant plastic combined with a metallic support fabric.
  • a further filter may additionally be provided in the region of the insert 28.
  • a second degassing device 65 is coupled to a second negative pressure device 29. By means of the second vacuum device 29, the mold chamber 25 can be controllably acted upon by the insert 28 with negative pressure.
  • the mold chamber wall 26 includes an outer sleeve 30 having at least one pressure feed opening 31.
  • the mold chamber wall 26 also includes a die 32 which is disposed on the inside of the sleeve 30.
  • the die 32 is at least on its side facing the mold chamber 25 side of a non-metallic material. It is in particular made of an abrasion-resistant elastomer. It is flexible, in particular elastic. It has a high resistance to alternating stress while remaining dimensionally stable.
  • a pressure chamber 33 is coupled to the pressure supply port 31 in the sleeve 30 .
  • the pressure chamber 33 can be provided with any, in particular a hydraulic pressure-generating device. By means of the pressure-generating device, the die 32 can be pressurized from the outside.
  • the mold chamber 25 is compressible, in particular uniformly, in particular isostatically compressible.
  • the plug 27 is slidable along the second longitudinal axis 24 to support the uniform, in particular isostatic, compression of the mold chamber 25.
  • the pressure for applying pressure to the die 32 can be regulated by means of a regulating device 34.
  • a pressure measuring device 41 is provided which measures the pressure acting on the female mold 32 and thus on the mold chamber 25.
  • the mold chamber 25 has an upper filling opening 35.
  • the filling opening 35 and thus the mold chamber 25 can be closed in a gas-tight manner by means of a punch 36 displaceable along the second longitudinal axis 24.
  • the punch 36 is formed substantially cylindrical.
  • the punch 36 has an outer circumference which corresponds to the inner circumference of the hollow space 22. He is advantageously at his lower, the
  • Mold chamber 25 facing end formed peripherally formed.
  • the punch 36 is displaceable along the direction of the second longitudinal axis 24 by at least the amount of the height h of the slider 21.
  • the punch 36 is thus as shown in Fig. 3 in the second position of the slider 21 accurately inserted into the cavity 22.
  • the punch 36 is gas-tight against the die 32.
  • the mold chamber 25 is closed in this position of the punch 36 by means of the punch 36 gas-tight upwards.
  • the mold chamber 25 with the die 32 is thus in particular powder-tight to the environment separated.
  • the stamp 36 has at least partially on a surface of a hard material layer. It can also be formed at least on its surface of ceramic, for example silicon nitride, silicon carbide or silicon oxide in proportions of at least 90% or a mixture of these.
  • the punch 36 is at least in the mold chamber 25 facing region of its surface, which closes the mold chamber 25 in the lower position of the punch 36 and thus forms part of the mold chamber wall 26, made of a non-metallic material.
  • the mold chamber 25 In the closed state, that is, with the plug 27 and the punch 36 in their respective closed position as shown in Fig. 3, the mold chamber 25 in the relaxed, that is acted upon neither with negative pressure from the inside nor with overpressure from the outside state an inner, free volume V ⁇ .
  • the volume V K of the mold chamber 25 is approximately as large as the volume V H of the cavity 22.
  • the volume V H of the cavity 22 is in particular at least as large as the volume V K of the mold chamber 25.
  • the volume V H of the cavity 22 may advantageously be slightly larger than the volume V ⁇ of the mold chamber 25th
  • the device is used to produce fusible silicon silicon powder, wherein the silicon melt is suitable for the production of polycrystalline silicon blocks and / or silicon single crystals for use of the produced silicon in the photovoltaic.
  • the supply device 1 provides for supplying a predetermined amount of the powder into the In this case, the cavity 22 in the slide 21 of the intermediate member 3 of the predosing of the introduced into the mold chamber 25 powder amount is used.
  • the funnel 5 is filled with a powder to be compacted, in particular with silicon powder, in particular with ultrafine, highly pure and highly dispersed silicon powder obtained from a monosilane in a deposition process.
  • the primary particles of the silicon powder have a mean diameter of 0.01 .mu.m to 100 .mu.m, in particular from 0.1 .mu.m to 20 .mu.m, in particular 2 .mu.m to 5 .mu.m.
  • the screw conveyor 17 the powder is introduced into the cavity 22.
  • the mounted on the shaft 18 of the screw conveyor 17 scraper 20 prevents bridging of the powder above the passage 19th
  • the funnel interior 12 in particular in the lower part 10 of the funnel 5 with negative pressure, in the range of 50 mbar to 1000 mbar, in particular from 100 mbar to 600 mbar is applied by means of the vacuum device 16, which leads to a withdrawal of gas from the powdery starting material.
  • the powder is thus already precompressed in the hopper 5, whereby the filling of the mold chamber 25 is optimized and the compression ratio for the molding is reduced.
  • the filter element 15 and / or the porous structure 14 prevent the powder from penetrating into the vacuum device 16.
  • the powder is also prevented by the geometric pressure Embodiment of the passage 19 of the screw conveyor 17 in particular in the upper part 9 of the funnel 5 pre-compressed before filling the cavity 22 in the intermediate member 3.
  • the slider 21 from its first position shown in Fig. 1, in which the cavity axis 23 coincides with the first longitudinal axis 6 in the horizontal direction, that is perpendicular to the longitudinal axis 6, in the second position shown in Fig. 2, in which the cavity axis 23 coincides with the second longitudinal axis 24, moved.
  • the slide 21 closes the outlet opening 8 of the funnel 5. It can be provided in particular to couple the drive device of the screw conveyor 17, not shown in the figures, to the position of the slide 21 such that the conveyor screw 17 only is then driven when the slider 21 is in the first position, as shown in Fig. 1.
  • the powder pre-dosed in the cavity 22 is introduced into the mold chamber 25.
  • the introduction of the powder into the mold chamber 25 takes place under the action of the gravitational force. It is supported by a negative pressure generated in the mold chamber 25 by means of the second vacuum device 29 in the range from 50 mbar to 1000 mbar, in particular in the range from 100 mbar to 600 mbar.
  • the filling of the mold chamber 25 can be monitored by means of the pressure-measuring device 41.
  • other sensors in particular weight meter or level sensors can be provided.
  • the punch 36 is inserted along the direction of the second longitudinal axis 24 down into the cavity 22 and along along the second longitudinal axis 24 is displaced until it sealingly closes the Bef ⁇ ll opening 35 of the mold chamber 25. This ensures that the powder present in the cavity 22 is completely transferred into the mold chamber 25.
  • the powder in the mold chamber 25 can be precompressed, in particular if the volume V H of the cavity 22 in the intermediate member 3 is slightly larger than the volume V K of the mold chamber 25.
  • the die 32 is pressurized to compress the powder in the mold chamber 25 from the pressure chamber 33 from the outside.
  • the pressurization is done in particular hydraulically. But it can also be provided pneumatically.
  • a molding pressures in the range of 100 to 1600 bar, in particular in the range of 200 to 600 bar used.
  • the mold chamber 25 thus becomes at least approximately uniform in the radial direction, in particular quasi-isostatic, in particular isostatic compressed, which leads to an at least largely isostatic compression of the powder in the mold chamber 25. Due to the largely isostatic compression, internal stresses in the shaping, which can lead to the formation of cracks, are avoided.
  • the pressure curve can also be controlled variable time, in particular can be specifically avoided by adjusting the pressure holding time or the pressure profile locally occurring pressure peaks in the shaping. As a result, the cracking and the occurrence of increased fines can be selectively prevented.
  • the compaction of the molding can be further improved by targeted degassing of the mold chamber 25 by means of the second degassing device 65.
  • the mold chamber 25 is pressurized from the inside with negative pressure in the range from 50 mbar to 1000 mbar, in particular from 100 mbar to 600 mbar.
  • the punch 36 is first moved along the second longitudinal axis 24 out of the cavity 22 into its upper starting position. Then, the slider 21 is shifted in the horizontal direction to its first position. Finally, the plug 27 is displaced upwardly along the second longitudinal axis 24, that is, through the mold chamber 25 to the position shown in Fig. 4, whereby the finished molding is removed from the mold chamber 25. If the slide 21 is now displaced into the second position with plugs 27 inserted into the mold chamber, the finished molding is pushed out of the press area by the end wall 37 of the slide 21.
  • the movements of the plug 27, the punch 36 and the slider 21 are coupled together, in particular by a mechanical coupling.
  • the operation of the device can be simplified and achieve an increase in performance.
  • the moldings have a nip tensile strength in the range from 0.03 N / mm 2 to 1 N / mm 2 , in particular from 0.1 N / mm 2 to 0.9 N / mm 2 .
  • the moldings are melted at a temperature of at most 1500 0 C to form a homogeneous silicon melt.
  • an inert gas device for replacing the oxygen contained in the reaction space by a protective or inert gas, preferably nitrogen or argon.
  • a protective or inert gas preferably nitrogen or argon.
  • the supply device 1 is at least partially evacuated from the gas by means of the first degassing device 13 and the compression device 2 by means of the second degassing device 65 during the filling process of the mold chamber 25 in order to remove the powder even before the compression provide largely free of gas in the mold chamber 25 and thereby minimize the formation of pores in the molding.
  • Another advantage of filling under reduced pressure is the pre-compaction of the powder thereby achieved, which in turn results in a higher final density of the moldings.
  • a cross-section reducing element 40 for additional compression of the powder at the end of the screw conveyor 17 is provided.
  • the cross-section reducing element 40 is designed in particular as a sieve.
  • the mold chamber 25 at its lower end to a removal opening 38. After completion of the compacting operation of the molding in the mold chamber 25, the plug 27 is moved to remove the molding from the mold chamber 25 along the direction of the second longitudinal axis 24 downward, whereby the removal opening 38 is opened and the finished molding is removed from the mold chamber 25. The finished molding is then removed from the horizontally displaceable removal slide 39 from the area between the plug 27 and the mold chamber 25.
  • the supply device 1 is formed essentially as in the embodiment according to FIG. 1.
  • the compression device 2 is essentially as in the embodiment formed according to FIG. 2.
  • the main difference compared to the first and second exemplary embodiment is that the feed device 1, in addition to the first screw conveyor 17 arranged in the hopper 5, as the second screw conveyor, has a horizontally arranged feed screw 43 with a rotationally driven feed shaft 44 and a feed -Gang 45 has.
  • a third degassing device 66 with a third vacuum device 42 corresponding to the first degassing device 13 is also provided.
  • FIGS. 7 to 10 A further embodiment of the invention will be described below with reference to FIGS. 7 to 10. Identical parts are given the same reference numerals as in the first embodiment, to the description of which reference is hereby made. Structurally different, but functionally similar parts receive the same reference numerals with a d followed.
  • the main difference with respect to the first exemplary embodiment is that a cyclic permutation device with a plurality of mold chambers 25 designed as a round-clock table 46 is provided.
  • the round-stroke table 46 includes an upper cover plate 47 and a rotatable rotary unit 48 disposed below it. In the rotary unit 48, a plurality of mold chambers 25 are arranged.
  • the number of mold chambers 25 is in particular 6. However, another number is also conceivable.
  • the mold chambers 25 are special uniformly arranged on a circle about a vertically oriented axis of rotation 49, so that the angular distance between each two adjacent mold chambers 25 is the same in each case.
  • the angular distance between two adjacent mold chambers 25 is thus 360 ° / n s, where n denotes the number of mold chambers 25 in the rotary unit 48.
  • the rotary unit 48 is radially symmetrical with respect to the axis of rotation 49, that is, it turns on a rotation by an angle of 360 ° / n in itself.
  • the rotary unit 48 is rotatably mounted about the rotation axis 49 on a pin 50.
  • a vacuum supply line 51 which communicates with the second negative pressure device 29, integrated.
  • the vacuum feed line 51 in the journal 50 comprises in particular a first, vertical section 63 arranged along the axis of rotation 49 and a second, horizontally arranged section 64.
  • the first section 63 and the second section 64 abut one another in such a way that the negative pressure Feed line 51 is formed continuously.
  • the first portion 63 is further connected to the degassing device 29 in connection.
  • a hydraulic supply line 52 for connection of the pressurizable die 32 is provided with the pressure chamber 33.
  • the pressure chamber 33 is not shown in the figures.
  • the rotary unit 48 is friction and sealed by bearings 53 and seals 54 mounted on the pin 50. As seals 54 in particular elastic O-rings are provided. Alternative embodiments of the seals 54 are also possible.
  • the rotary unit 48 is rotatable about the axis of rotation 49 by means of a drive unit 55. The drive is in particular indexed and clocked, the angular distance between two Index positions just equal to the angular distance 360 ° / n between two adjacent mold chambers 25 in the rotary unit 48 corresponds.
  • the rotary unit 48 comprises the massive base frame 4d. In the basic position 4d, a vacuum connection line 56 and a hydraulic connection line 57 are provided for each mold chamber 25.
  • the features of the six angular positions of the round-clock table 46 are described with respect to the axis of rotation 49 of the device, wherein the rotary unit 48 is currently in an index position. It is clear that by a rotation of the rotary unit 48 by a rotation angle of 60 °, the device passes into itself, with only the positions of the individual mold chambers 25 are cyclically reversed. During operation of the device, however, the respective angular positions correspond to certain, different filling states of the mold chambers 25 and different compression states of the powder located in the respective mold chamber 25.
  • each stopper 27d has a respective first latching element 58, designed as a notch, for example, and a correspondingly designed second latching element 59.
  • the latching device 60 is designed in particular as a pneumatic cylinder, which can be brought into engagement with the latching elements 58, 59 designed as a bore or notch. In the latched position, the plug 27d is secured against displacement along the longitudinal axis 24.
  • the supply device 1 is arranged on the upper cover plate 47 of the round-cycle table 46.
  • a feeder 1 a feeder 1 according to any one of the preceding embodiments is provided.
  • the longitudinal axis 24 of one of the mold chambers 25 coincides with the longitudinal axis 6 of the funnel 5 of the feed device 1.
  • the lower outlet opening 8 of the trichter- 5 opens into the filling opening 35 of the mold chamber 25 in this angular position.
  • the second section 64 of the negative pressure supply line 51 in the journal 50 which runs from the axis of rotation 49 in the direction of the first angular position, pushes the negative pressure connecting line 56 in the base frame 4d of the rotary shaft.
  • the seals 54 ensure a sealed transition from the vacuum feed line 51 to the vacuum connecting line 56.
  • the stopper 27d In the first position, the stopper 27d is in its lower position, that is to say the latching device 60 is connected to the first latching device. Element 58 engaged.
  • the mold chamber 25 can be filled with powder from the supply device 1 in this position.
  • the filling opening 35 of the mold chamber 25 is closed by the upper cover plate 47 of the round-cycle table 46.
  • the mold chamber 25 is in this position neither with the negative pressure supply line 51 nor with the hydraulic supply line 52 in connection.
  • the second angle position is provided as a buffer station.
  • the loading of the mold chamber 25 is provided with pressure from the pressure chamber 33.
  • the hydraulic supply line 52 communicates with the hydraulic connection line 57 sealed by the seal 54 in combination.
  • the filling opening 35 of the mold chamber 25 can be closed in this position with the punch 36d.
  • the punch 36d is displaceable in the vertical direction for rotation of the rotary unit 48, in particular can be raised.
  • the chamfered edges of the punch 36d when engaged in the fill port 35 of the mold chamber 25, aid in the precise locking of the rotary unit 48 in the respective index position.
  • the third angular position corresponds functionally to the compression device 2 of one of the exemplary embodiments described above.
  • a fourth, about 60 ° rotated in the direction of rotation about the axis of rotation 49 angular position is provided for removal of the molding from the mold chamber 25.
  • the plug 27d in this angular position is displaceable in the vertical direction to an upper position for removal of the molding from the mold chamber 25.
  • the latching means 60 may be engaged with the second latching member 59 of the plug 27d.
  • the removal recess 61 in the upper cover plate 47 is bounded by a vertical guide surface 62.
  • the guide surface 62 is formed such that the guided out of the mold chamber 25 by means of the plug 27 d in a further rotation of the rotary unit 48 in the direction of rotation along the guide surface 62 slides while a predetermined path to the peripheral edge of the rotary unit 48 is transported.
  • the guide surface 62 extends in particular to the peripheral boundary of the round-clock table 46. At this point, for example, under the round-clock table 46, a catching device, not shown in the figures may be provided for collecting the finished moldings.
  • the plug 27d is still in the mold chamber 25.
  • the filling opening 35 is at least largely completed in this position of the upper cover plate 47 , so that the molding can not slip back into the mold chamber 25 even with a lowering of the plug 27 d in its lower position.
  • the plug 27d is again moved from its upper to its lower position.
  • the displacement of the plug 27 is done in particular pneumatically or hydraulically.
  • a mechanical displacement of the plug 27d is conceivable.
  • the displacement of the plug 27 d may also be coupled to the rotation of the rotary unit 48.
  • the mold chamber 25 is ventilated.
  • the upper cover plate 47 of the round-cycle table 46 is executed in this position upwards finally with a gap of 2 mm.
  • the sixfold radial symmetry of the rotary unit 48 represents only one possible embodiment and should not be construed as limiting.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Press Drives And Press Lines (AREA)

Abstract

Dispositif pour façonner une ébauche à partir d'une poudre, comprenant : au moins une chambre de formage (25), destinée à recevoir une poudre et délimitée au moins partiellement par au moins un côté d'au moins une paroi (26) de chambre de formage ; un dispositif d'alimentation (1) pour alimenter la poudre dans la ou les chambres de formage (25) ; et un dispositif de compression (2) pour comprimer la poudre dans la ou les chambres de formage (25). La ou les parois (26) de chambre de formage sont constituées d'un matériau non métallique au moins dans la région du côté tourné vers la chambre de formage (25).
PCT/EP2008/009001 2007-10-27 2008-10-24 Production d'ébauches en silicium ultra-pur WO2009053084A1 (fr)

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DE102007051484 2007-10-27

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DE (1) DE102008044687A1 (fr)
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Cited By (1)

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WO2010000347A2 (fr) * 2008-07-01 2010-01-07 Sunicon Ag Compactage de silicium

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DE102010002251A1 (de) * 2010-02-23 2011-08-25 Sunicon AG, 09599 Verdichtungs-Vorrichtung
DE102010011995A1 (de) * 2010-03-17 2011-09-22 Peter Luxner Verfahren und Vorrichtung zum Verpressen von Pulver und Granulat
CN102126307B (zh) * 2010-11-24 2013-10-09 南京东部精密机械有限公司 全自动干粉压机伺服送料装置
JP6540492B2 (ja) 2015-12-15 2019-07-10 株式会社デンソー 粉末供給装置
DE102021105649A1 (de) 2021-03-09 2022-09-15 Dorst Technologies Gmbh & Co. Kg Presseneinrichtung

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US3698843A (en) * 1971-02-24 1972-10-17 Nat Forge Co High production isostatic molding device
US3730666A (en) * 1972-01-10 1973-05-01 Nat Forge Co Threaded closure high production isostatic molding device
US3956452A (en) * 1973-08-16 1976-05-11 Shinagawa Firebrick, Co., Ltd. Dry-type isostatic pressing method involving minimization of breaks or cracks in the molded bodies
US4604252A (en) * 1983-06-13 1986-08-05 Anton Stigler Process for the production of a profile from dry powder material along with a contrivance for this purpose
EP0414601A1 (fr) * 1989-08-22 1991-02-27 Commissariat A L'energie Atomique Machine de remplissage en poudre de gaines
JPH0989465A (ja) * 1995-09-27 1997-04-04 Ngk Insulators Ltd 静水圧加圧成形装置および静水圧加圧成形方法
US5747073A (en) * 1995-10-27 1998-05-05 Tecsyn, Inc. Apparatus for producing composite cylinders
WO2005118272A1 (fr) * 2004-06-04 2005-12-15 Joint Solar Silicon Gmbh & Co. Kg Dispositif de compression

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3698843A (en) * 1971-02-24 1972-10-17 Nat Forge Co High production isostatic molding device
US3730666A (en) * 1972-01-10 1973-05-01 Nat Forge Co Threaded closure high production isostatic molding device
US3956452A (en) * 1973-08-16 1976-05-11 Shinagawa Firebrick, Co., Ltd. Dry-type isostatic pressing method involving minimization of breaks or cracks in the molded bodies
US4604252A (en) * 1983-06-13 1986-08-05 Anton Stigler Process for the production of a profile from dry powder material along with a contrivance for this purpose
EP0414601A1 (fr) * 1989-08-22 1991-02-27 Commissariat A L'energie Atomique Machine de remplissage en poudre de gaines
JPH0989465A (ja) * 1995-09-27 1997-04-04 Ngk Insulators Ltd 静水圧加圧成形装置および静水圧加圧成形方法
US5747073A (en) * 1995-10-27 1998-05-05 Tecsyn, Inc. Apparatus for producing composite cylinders
WO2005118272A1 (fr) * 2004-06-04 2005-12-15 Joint Solar Silicon Gmbh & Co. Kg Dispositif de compression

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010000347A2 (fr) * 2008-07-01 2010-01-07 Sunicon Ag Compactage de silicium
WO2010000347A3 (fr) * 2008-07-01 2010-04-29 Sunicon Ag Compactage de silicium

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EP2052848A1 (fr) 2009-04-29

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