EP1750931A1 - Dispositif de compression - Google Patents

Dispositif de compression

Info

Publication number
EP1750931A1
EP1750931A1 EP05750911A EP05750911A EP1750931A1 EP 1750931 A1 EP1750931 A1 EP 1750931A1 EP 05750911 A EP05750911 A EP 05750911A EP 05750911 A EP05750911 A EP 05750911A EP 1750931 A1 EP1750931 A1 EP 1750931A1
Authority
EP
European Patent Office
Prior art keywords
roller
silicon
powder
compaction
compacting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05750911A
Other languages
German (de)
English (en)
Other versions
EP1750931B1 (fr
EP1750931B8 (fr
Inventor
Peter Adler
Andreas Gölz
Holger Kirchner
Armin Müller
Torsten Sill
Raymund Sonnenschein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSSi GmbH
Original Assignee
Joint Solar Silicon GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Joint Solar Silicon GmbH and Co KG filed Critical Joint Solar Silicon GmbH and Co KG
Publication of EP1750931A1 publication Critical patent/EP1750931A1/fr
Publication of EP1750931B1 publication Critical patent/EP1750931B1/fr
Application granted granted Critical
Publication of EP1750931B8 publication Critical patent/EP1750931B8/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B11/00Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/16Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using pocketed rollers, e.g. two co-operating pocketed rollers
    • B30B11/165Roll constructions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B11/00Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/18Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using profiled rollers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B3/00Presses characterised by the use of rotary pressing members, e.g. rollers, rings, discs
    • B30B3/005Roll constructions

Definitions

  • roller compaction A well-known method for compacting powders is roller compaction.
  • powder is compressed between two counter-rotating rollers.
  • the specific contact pressures that occur are 5 N / cm to 50 kN / cm.
  • Metal rollers are generally used for this application. Due to the high specific contact forces, which in some cases reach the flow limit of the metal roller, the rollers wear. The abrasion gets into the product. For applications in the photovoltaic, semiconductor, pharmaceutical and chemical industries, this metal abrasion is unfavorable to harmful, since metallic impurities in the ppm or ppb range sometimes lead to defective products.
  • the invention is based on the object of creating a compaction device for the low-metal or metal-free compaction of a powder.
  • the object is achieved by the features of claim 1.
  • the essence of the invention is to provide compaction rollers in a compaction device which consists of ceramic at least on its jacket. This prevents metallic abrasion from occurring during compaction.
  • FIG. 1 shows a section of a plant for producing silicon with a compression device according to a first exemplary embodiment
  • Fig. 2 is an enlargement of a compaction roller of the compaction device according to Fig. 1 and
  • Fig. 3 is an enlargement of a compaction roller according to a second embodiment.
  • the structure of a system 1 for producing silicon powder according to a first exemplary embodiment is described below with reference to FIGS. 1 and 2.
  • the plant 1 has, starting from above, a tubular, vertically running reactor 2 which encloses a cylindrical reaction chamber 3.
  • a gas supply line 4 is arranged, which opens into the reaction chamber 3.
  • the line 4 is designed such that a useful gas flow, for example made of monosilane, can be introduced in the middle.
  • the useful gas flow is surrounded by a ring flow of an auxiliary gas.
  • Approximately the upper half of the reactor 2 is surrounded by a ring-cylindrical heater 5 which surrounds the reactor 2 in such a way that the wall of the chamber 3 can be heated to temperatures of over 800 ° C.
  • the lower half of the reactor 2 is surrounded by an annular cylindrical cooling device 6 which is directly adjacent to the reactor 2.
  • the degassing device 31 consists of a housing 32, which runs obliquely upwards and is connected to the chamber 3, at the lower end of the reactor 2 is scheduled.
  • an annular cylindrical sintered material filter 33 which is closed at the bottom and through which excess hydrogen can escape through an opening 34 located in the upper end of the housing 32.
  • a roller breather 35 of known type and then a compression device 10, the construction of which is described in more detail below.
  • the compression device 10 is connected to the reaction chamber 3 via the lock 7.
  • a storage container 11 connected to it.
  • the roller breather 35 has a cuboid housing 36, in which two breather rollers 38, 39 driven by a motor 37 are arranged.
  • the rollers 38, 39 are rotatably mounted about associated axes of rotation 40, 41 running parallel to one another.
  • the rollers 38, 39 are driven in opposite directions, so that both move downwards in the area of the gap 42 delimited by the rollers 38, 39.
  • the roller 38 is hollow and has a porous jacket.
  • a gas-permeable plastic film is applied to its outer surface. There is negative pressure within the roller 38. In this way, the gas remaining in the silicon powder 43 is drawn off.
  • the surface of the roller 39 is smooth. Both rollers 38, 39 preferably have a non-metallic surface.
  • the compression device 10 has a housing 12 which encloses an essentially cubic working space 13.
  • the housing 12 has a feed opening 14 facing the lock 7 and connected to it, and a discharge opening 15 provided on the lower edge of the housing 12 and connected to the container 11.
  • In the housing 12 there are two compacting rollers 18, 19, which can be driven in rotation about respective axes of rotation 16, 17, in the middle between the openings 14 and 15 are arranged adjacent to each other that a compression gap 20 is formed between them.
  • the axes of rotation 16 and 17 run parallel to one another.
  • the compression gap 20 has a width Bs.
  • the compaction rollers 18, 19 can be driven in rotation by a motor 21, which is connected to the control device 9 via a connecting line 22.
  • the tubular reactor 2 has a vertical central longitudinal axis 23, which runs centrally through the gap 20.
  • the rollers 18, 19 are driven in opposite directions, ie the roller 18 rotates clockwise, the roller 19 counterclockwise. As a result, the surfaces of the rollers 18, 19 move downward together in the region of the gap 20.
  • the rollers 18, 19 have a roller core 24 made of steel, which is circular cylindrical in shape.
  • a roller jacket 25 with an annular cross section, which completely surrounds the roller core 24 on the circumferential side.
  • the roller shell 25 is formed in one piece and consists of a non-metal material, that is, a non-metallic material. In particular, these are glass, graphite or ceramic materials. Ceramic is particularly preferred. The ceramics used consist mainly of silicon nitride.
  • the roll shell 25 is fixed on the roll core 24 in the axial and tangential direction, for example by gluing or tongue and groove connections.
  • the roller jacket 25 has the shape of a circular cylinder. It is possible to form the entire roller 18 or 19 from a ceramic material.
  • FIG. 2 shows a second exemplary embodiment. Identical parts are given the same reference numerals as in the exemplary embodiment according to FIG. 2. Structurally different, but functionally similar parts are given the same reference numerals with a suffix a.
  • the main difference compared to the exemplary embodiment according to FIG. 2 is that the roller jacket 25a is not formed in one piece, but consists of two half-shells 27, 28 which completely and completely enclose the roller core 24.
  • the gaps 29 between the half-shells 27 and 28 are completely and completely closed, so that material which reaches the surface 26 does not come into contact with the roller core 24.
  • the half-shells 27, 28 were subjected to an exact mechanical processing after the ceramic production. As part of the mechanical processing, the surface of the half-shells 27, 28 was profiled.
  • the surface of the half-shells 27, 28 can also be designed in such a way that the compressed silicon has the shape of rods, pillows, almonds etc.
  • the combination of ceramic and metal materials withstood the machining It is also possible to use partial shells with a center angle of ⁇ 180 ° on the circumference. In particular, three partial shells with a center angle of 120 ° or four partial shells with a center angle of 90 ° can be provided on the circumference. Other divisions are also possible.
  • a gas mixture of monosilane and hydrogen in a volume or molar ratio of 1: 3 was converted into silicon powder and hydrogen in the reactor 2 with a wall temperature of the wall 30 of> 800 ° C. and a production rate of 200 g silicon per hour implemented.
  • the addition took place in such a way that the monosilane was introduced centrally into the reaction chamber 3 from above.
  • the hydrogen surrounded the monosilane in the form of a ring flow in order to prevent the silicon from being deposited directly on the walls of the reaction chamber 3.
  • the silicon powder 43 was partially degassed after the decomposition by means of the degassing device 31 arranged on the lock 7.
  • the powder obtained had a bulk density of about 50 g / l.
  • the degassing in the degassing device 31 was carried out automatically in relation to the ambient pressure.
  • the deaerated and pre-compressed product with a bulk density of approx. 200 g / dm 3 was compressed to a bulk weight of 450 g / dm 3 by means of the compression device 10. 6 kg of this compressed silicon powder were placed in an induction melting plant IS30 from Leybold. The system was then evacuated. An argon atmosphere with a pressure between 1 and 100 mbar was generated.
  • the silicon powder was heated to a melting temperature of 1415 ° C.
  • the silicon powder was then melted without residues at 1450 ° C. in 30 minutes with a melting capacity of 70 kW.
  • the silicon melt was then poured off and the silicon solidified in a directed manner.
  • the solidified polycrystalline silicon block showed a homogeneous polycrystalline structure of the silicon, and no residues of silicon powder or silicon-containing slag.
  • a gas containing silicon can be decomposed in the reactor. Examples of these are trichlorosilane or monosilane. Other gases containing silicon can also be used.
  • the gas containing silicon is introduced into the center of the tubular reactor 2 and is surrounded by a ring flow of an auxiliary gas so that the gas containing silicon is not deposited directly on the reactor walls.
  • the auxiliary gas can generally be an inert gas. Hydrogen is particularly advantageous because it also forms during the decomposition of monosilane, for example. However, noble gases such as argon and other gases such as e.g. B. nitrogen or carbon dioxide can be used.
  • the mixture ratio, ie volume or molar ratio, of monosilane to hydrogen can be between 1: 0 and 1: 100.
  • the specific energy requirement per 1 kg of solid silicon for the process steps of thermal decomposition and mechanical compression was less than 20 kWh.
  • the space-time yield per tubular reactor 2 was more than 1 kg of silicon powder per hour.
  • the wall temperature of the reactor 2 is more than 400 ° C., in particular more than 800 ° C.
  • the silicon powder can be compressed in one or two stages, advantageously in two stages.
  • the contact forces in the compression device 10 were between 5 N / cm and 50 kN / cm.
  • the silicon powder comes into contact only with the roller jacket 25 made of ceramic, so that this is ensured.
  • the high-purity powdered silicon produced by the process according to the invention has good handling properties despite its powdery ground state and is suitable for the production of pure silicon melts from which silicon blocks or silicon crystals can be produced. It was found that with the defined composition of the pyrolysis gas consisting of hydrogen and monosilane, it is possible to produce silicon in powder form with high yields and very low energy consumption.
  • the process is particularly characterized in that the silicon powder can be handled, packaged and shipped separately after the process has been carried out and can thus be used with a time delay for the production of silicon blocks or silicon crystals.
  • the silicon is characterized by a good melting behavior and a high purity despite the large surface and an unfavorable, small volume / surface ratio in comparison to Prime Poly silicon.
  • the silicon powder produced by the thermal decomposition had a bulk density of 10 to 100 g / dm 3 .
  • the silicon powder finally compacted by the device 10 had a bulk density of 100 to 1500 g / dm 3 , in particular from 200 to 1200 g / dm 3 , in particular from 250 to
  • the total silicon powder contained no more than 10 19 atoms of foreign elements per 1 cm 3 silicon.
  • the silicon powder consisted of crystalline particles with a primary particle size of 10 nm to 10000 nm, preferably 50 nm to 500 nm, typically about 200 nm.
  • the compacted silicon powder consisted of aggregates with an aggregate size of 500 nm to 100000 nm, in particular 1000 nm to 10000 nm, typically about 4000 nm.
  • the compressed silicon pieces from silicon aggregates had a largest dimension of 1 to 200 mm. They were irregular in shape, which could also be chopsticks.
  • the silicon powder had a surface area of 1 to 50 m 2 / g.
  • the compacted silicon powder had a total of no more than 10 17 atoms of transition metals per 1 cm 3 silicon.
  • the silicon powder according to the invention has a brown color, whereas silicon granules produced by conventional processes are gray.
  • the compressed silicon powder can be used for the production of polycrystalline silicon blocks for photovoltaics or for the production of silicon single crystals. Silicon wafers can be produced from the silicon according to the invention.
  • the metal content of the compacted silicon powder corresponded to that of the starting product. No contamination was found. Due to the manufacturing process, the silicon did not contain any silicon oxide compounds on the surface of the silicon particles, which would have significantly increased the melting temperature of the silicon powder.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Silicon Compounds (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Road Repair (AREA)
  • Disintegrating Or Milling (AREA)
  • Road Paving Machines (AREA)
EP05750911A 2004-06-04 2005-05-10 Dispositif de compression et procede d'utilisation d'un tel dispositif Not-in-force EP1750931B8 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004027564A DE102004027564A1 (de) 2004-06-04 2004-06-04 Verdichtungs-Vorrichtung
PCT/EP2005/005019 WO2005118272A1 (fr) 2004-06-04 2005-05-10 Dispositif de compression

Publications (3)

Publication Number Publication Date
EP1750931A1 true EP1750931A1 (fr) 2007-02-14
EP1750931B1 EP1750931B1 (fr) 2009-03-18
EP1750931B8 EP1750931B8 (fr) 2009-07-08

Family

ID=34970196

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05750911A Not-in-force EP1750931B8 (fr) 2004-06-04 2005-05-10 Dispositif de compression et procede d'utilisation d'un tel dispositif

Country Status (8)

Country Link
US (1) US7584919B2 (fr)
EP (1) EP1750931B8 (fr)
JP (1) JP2008501528A (fr)
CN (1) CN1960852B (fr)
AT (1) ATE425868T1 (fr)
DE (2) DE102004027564A1 (fr)
ES (1) ES2321016T3 (fr)
WO (1) WO2005118272A1 (fr)

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DE102004027563A1 (de) * 2004-06-04 2005-12-22 Joint Solar Silicon Gmbh & Co. Kg Silizium sowie Verfahren zu dessen Herstellung
WO2006094714A1 (fr) 2005-03-05 2006-09-14 Joint Solar Silicon Gmbh & Co. Kg Reacteur et procede de production de silicium
DE102005046105B3 (de) * 2005-09-27 2007-04-26 Degussa Gmbh Verfahren zur Herstellung von Monosilan
US20080308970A1 (en) 2007-06-15 2008-12-18 General Electric Company Process for melting silicon powders
DE102008044687A1 (de) 2007-10-27 2009-04-30 Joint Solar Silicon Gmbh & Co. Kg Aufbereitung von Formlingen aus Reinstsilizium
EP2087984B1 (fr) * 2008-02-05 2010-05-12 Texmag GmbH Vertriebsgesellschaft Cylindre destiné à exercer une pression de contact sur des bandes de matériau
DE102008044689A1 (de) * 2008-07-01 2010-01-21 Sunicon Ag Silizium-Kompaktat
US20100243963A1 (en) * 2009-03-31 2010-09-30 Integrated Photovoltaics, Incorporated Doping and milling of granular silicon
US8739962B2 (en) * 2009-12-15 2014-06-03 Exxonmobil Research And Engineering Company Active solids supply system and method for supplying solids
CN102049876A (zh) * 2011-02-01 2011-05-11 季陵 一种松散物料压块机
JP6272867B2 (ja) 2012-08-29 2018-01-31 ヘムロック・セミコンダクター・オペレーションズ・エルエルシー 先細り流動床反応器及びその使用のためのプロセス
DE102013103880B3 (de) * 2013-04-17 2014-08-07 Maschinenfabrik Köppern GmbH & Co KG Presswalze
CN103625703B (zh) * 2013-11-28 2015-07-15 泗阳瑞泰光伏材料有限公司 一种缩小粉末硅原料体积的方法
CN104385656B (zh) * 2014-11-10 2016-01-20 浙江中技桩业有限公司 一种新型物料挤压装置
JP6886734B1 (ja) * 2020-02-20 2021-06-16 株式会社不二製作所 弾性研磨材の製造方法,弾性研磨材の製造装置,ブラスト加工方法,及びブラスト加工装置
CN113368942A (zh) * 2021-07-21 2021-09-10 南京凯盛国际工程有限公司 一种带预压功能的辊压机
CN117753309B (zh) * 2024-02-21 2024-04-26 洛阳可利威化工有限公司 一种辊压式造粒机

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Also Published As

Publication number Publication date
US7584919B2 (en) 2009-09-08
DE502005006878D1 (de) 2009-04-30
ES2321016T3 (es) 2009-06-01
US20070248438A1 (en) 2007-10-25
EP1750931B1 (fr) 2009-03-18
CN1960852A (zh) 2007-05-09
WO2005118272A1 (fr) 2005-12-15
DE102004027564A1 (de) 2005-12-22
EP1750931B8 (fr) 2009-07-08
JP2008501528A (ja) 2008-01-24
CN1960852B (zh) 2010-06-23
ATE425868T1 (de) 2009-04-15

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