EP1030360A2 - Elektrische Teststruktur auf einem Halbleitersubstrat und Testverfahren - Google Patents
Elektrische Teststruktur auf einem Halbleitersubstrat und Testverfahren Download PDFInfo
- Publication number
- EP1030360A2 EP1030360A2 EP00101693A EP00101693A EP1030360A2 EP 1030360 A2 EP1030360 A2 EP 1030360A2 EP 00101693 A EP00101693 A EP 00101693A EP 00101693 A EP00101693 A EP 00101693A EP 1030360 A2 EP1030360 A2 EP 1030360A2
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- EP
- European Patent Office
- Prior art keywords
- transistors
- transistor
- polysilicon
- layer
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 29
- 239000004065 semiconductor Substances 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 title claims description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 31
- 229920005591 polysilicon Polymers 0.000 claims abstract description 31
- 238000005530 etching Methods 0.000 claims abstract description 14
- 230000015654 memory Effects 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 24
- 239000003990 capacitor Substances 0.000 claims description 12
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 238000010998 test method Methods 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 150000004767 nitrides Chemical class 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000002513 implantation Methods 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 6
- 229910021332 silicide Inorganic materials 0.000 claims description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 3
- 239000002019 doping agent Substances 0.000 claims description 2
- 238000001039 wet etching Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 238000011065 in-situ storage Methods 0.000 abstract 1
- 238000002955 isolation Methods 0.000 description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
Definitions
- the invention relates to an electrical test structure in a integrated circuit, especially in a DRAM circuit with trench capacitors, as well as a test procedure.
- a large number of process steps are necessary for producing an integrated circuit on a semiconductor substrate.
- a number of process steps that serve to generate a specific (sub) structure of the circuit is referred to as a module; Examples of this are modules for forming isolation trenches in the substrate, for forming a transistor or for forming a capacitor.
- Monitor wafers “(additional wafers on which the complete circuit is not produced), or the wafers with the partially completed circuits themselves can be used.
- optical or electrical test methods can be used, the circuit itself or its own test structures being evaluated.
- the present invention relates to a test method and Test structure, particularly in the manufacture of DRAM memories with trench capacitors and a polysilicon strip (Surface strap) as an electrical connection between Selection transistor and capacitor can be used and on this Example will be explained in more detail.
- the essential steps the manufacturing process or the relevant process module for the type of memory cell mentioned are in the figures 5 to 8. It is provided (see Figure 5) in a semiconductor substrate 1 a trench 2 for a capacitor to form the wall in the lower section with a Capacitor dielectric 3 and in the upper section with a thicker insulation collar 4 is provided and with doped Polysilicon 5a, 5b is filled as a storage electrode.
- An isolation trench 6 is formed which partially covers the trench overlapped and filled with TEOS, for example.
- the Isolation trench serves in particular to isolate one neighboring memory cell, which is a mirror image of the shown in Figure 5 connects to the right side. Adjacent the selection transistor then becomes the capacitor trench 2 educated.
- a so-called gate stack is placed on a gate oxide 7 consisting in particular of n-doped polysilicon 8, one further conductive layer 9 arranged thereon (for example WSi or another silicide) and a top insulation layer 10 (for example made of silicon oxide or nitride).
- an isolating Spacer 11 preferably made of the material of the cover insulation layer generated and the S / D regions 12 of the transistor are implanted. Possibly.
- the spacer can be made in two parts be formed, after the first partial spacer in known How to implant LDD areas. This is the selection transistor the memory cell completed. Below a silicon nitride layer 13 is applied. Preferably their thickness is in the range of 20 to 30nm.
- the further method provides (see FIG. 6) to use a photomask to remove the nitride layer 13 again at the points where the Surface straps "for the electrical connection between the selection transistor and the capacitor are to be formed.
- etching is carried out into the upper region of the trench capacitor and in particular the thick insulation collar is removed to a predetermined depth, so that contact with the capacitor is also made possible here.
- the photomask The etching process used (for example using CHF 3 / CF 4 as well as oxygen and argon) also grips the top insulation layer 10 and the side wall spacer 11 of the gate layer.
- Stack so that there is a risk of exposing the doped polysilicon 8 of the word line
- an implantation is carried out, in particular with BF 2 ions, so that the remaining nitride 13 acts as a doping mask the photo mask.
- free lying silicon is p-doped - i.e. the area of the capacitor filling and the neighboring S / D area - while hardly any B + ions are deposited in exposed silicon oxide.
- undoped polysilicon 14 is applied and p-doped in sections by means of diffusion out of the underlying doped silicon and polysilicon.
- the polysilicon 14 fills the hole formed in the trench, its thickness is preferably 50 to 100 nm.
- the undoped polysilicon 14 is removed using a KOH etching or another suitable selective etching which does not attack the p + -doped polysilicon sections 14 ′ produced in this way (see FIG. 7).
- n-doped polysilicon 8 of the gate will also be attacked and removed.
- p - -doped silicon as a gate component would be attacked by the etchant. This leads to the failure of the selection transistor (and thus of the memory cell), since a cavity then forms over the gate oxide and the transistor cannot be switched It has been shown that the failing cells are mostly statistically distributed and correlations exist not only with one but with several preceding process steps.
- the object of the present invention is therefore a test method and specify a test structure that has an inline control, i.e. enable process monitoring. This object is achieved through the features of the claims 1 and 5 solved.
- the test structure has at least two transistors with S / D regions connected in series, which are produced in the same way as the selection transistor. They therefore have a gate stack with n-doped or p - doped polysilicon and at least one insulating sidewall spacer.
- the first and the last S / D region of the transistor row can be connected from the outside via a first or second connection.
- the gates can also be connected.
- the test method provides for further processing of this test structure in accordance with the module for generating the surface strip explained at the beginning.
- the explained nitride layer is therefore applied and structured with the photomask.
- the openings of the photomask extend in the area of the test structure at least over the areas of the transistors in which openings are also present in the cell field for the corresponding transistors.
- the openings in the area of the test structure are preferably larger, so that quasi Worst-case "conditions for the transistor, namely a more extensive etching attack, are created.
- the process is continued as described at the beginning and a surface strap is formed.
- the gates are attached to the normally off "transistors are applied to a potential which corresponds to an open state of the transistors.
- the current flowing between the first and second connection of the test structure is measured Current flows or the resistance rises sharply, in other words if at least one transistor in the series is not switchable, this allows a conclusion to be drawn about a KOH attack
- one off current "of a transistor for example in a memory cell
- On-current is in the range 10-100 ⁇ A.
- the current is at On conditions "therefore several orders of magnitude lower than with a faultless process.
- the test structure takes up little space.
- the active areas of the transistors can be arranged linearly be, i.e. a continuous strip of crystalline silicon represent who in given areas to form the S / D areas is doped and possibly additionally siliconized (with TiSi or similar) can be.
- the gates of the transistors each run across these strips, preferably a continuous word line becomes meandering (in the broadest Zigzag) over the active area, the active according to the number of transistors to be formed crosses.
- the crystalline silicon is covered by an isolation area (for example shallow trench isolation).
- the crystalline silicon strip is at one end the first port and at the other end to the second port Mistake.
- transistors in the series depends of the given boundary conditions, in particular the available space. For example, it makes sense 4-5 transistors to get a reliable test result. More transistors are also conceivable.
- Figure 1 A simple and space-saving structure is provided by a strip of crystalline silicon 20 as an active area of the transistors and a meandering one above it Word line 24 formed.
- the course of the word line 24 corresponds a rectangular function.
- the supervision shows a stripe-shaped crystalline silicon region 20 as an active region, that of an isolation region 21 on the substrate surface is surrounding.
- the silicon region 20 has a first one Port 22 and a second port 23. Between these The silicon area is connected by a continuous Word line 24 crossed several times.
- Figure 2 shows a section through a section of the test structure along the dotted line S in Figure 1.
- Die Transistors are used in the same way and at the same time the selection transistors in the cell array, the word line consists of n-doped polysilicon 81, one Silicide 91 (especially WSi) of the insulating gate cover 101 and lateral insulating spacers 111.
- the gate oxide below of the n-doped silicon was not shown here.
- the S / D regions 121 are implanted simultaneously with the implantation of the selection transistors. The so The generated test structure is subjected to the process module explained.
- a nitride layer 131 is therefore deposited over the entire surface and applied a photomask.
- the photomask has an opening within that shown in Figure 1, dash-dotted area 30.
- the intersection line S lies completely within this area 30 so the mask here is removed and is not visible in Figure 2.
- the opening 30 can also be smaller, it only has to at least the corresponding one for each transistor of the test structure Area exposed like a transistor in the cell array, at least one edge of the gate and part of the S / D area overlap. By in this embodiment much larger opening 30 becomes a possible KOH attack safely detected.
- the mask opening also extends 30 continuously across all transistors, as in the figure 1 shown.
- Figure 3 it is the explained etching process for removing the Nitride layer 131 - and for the lateral exposure of the S / D area in cell field - performed.
- the silicon substrate is not attacked.
- the gate cover In the test structure thinned the gate cover.
- the p-implantation is explained performed and an undoped polysilicon layer 141 is upset.
- the temperature step for diffusion is performed so that the undoped polysilicon layer 141 is p-doped in sections and sections 141 'are formed become.
- the nitride layer serving as a diffusion barrier except for any (due to the anisotropy of the etching process caused) Spacer removed.
- the subsequent implantation but does not deposit the p-type dopant evenly over the entire surface, but depending on underlying Material. Therefore, diffusion does not become one continuous p-doped polysilicon layer 141 'is formed.
- Figure 4 using a KOH-containing etching solution, the undoped Polysilicon 141 selective to those by diffusion doped portions 141 'removed. Is due to previous processes the n-polysilicon 81 of the is no longer sufficiently isolated, it can be detached, as in the left transistor indicated in Figure 4. A cavity H is formed here. This transistor is no longer above the gate potential switchable.
- a potential 1 is applied to the word line 24, which corresponds to a conductive state of the transistors, and the resistance present between the first connection 22 and the second connection 23 is determined. If this resistance meets the specifications of the transistor series, a KOH attack in the test structure is impossible. Because the test structure worst case "conditions were exposed, a KOH attack can be excluded with great certainty in the cell field.
- the principle of the test method and the test structure can also be used to generally detect an intentional or unwanted undercut (removal of the polysilicon).
- normally-off "transistors cause an undercut in at least one of the transistors then a high resistance in systems with a potential (the On "corresponds to) to the gates normally-on "transistors, an undercut in all transistors causes a low resistance even when a transistor is applied Off "potentials to the gates.
- the steps coordinated with the memory cell production in particular the nitride layer, the undoped polysilicon layer, outdiffusion or implantation) are not necessary. If the generation of the cavity H is desired, it is medium of the etching process through the opening (30) of the photomask creates a suitable access to the lower polysilicon layer.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
- Figur 1
- eine Aufsicht auf eine Teststruktur
- Figuren 2-4
- einen Querschnitt durch zwei benachbarte Transistoren der Teststruktur, an den das Testverfahren erläutert wird,
- Figuren 5-7
- einen Querschnitt durch eine DRAM-Speicherzelle, an dem das zu untersuchende Prozeßmodul erläutert wird.
Claims (8)
- Halbleiterstruktur mit mindestens zwei MOS-Transistoren in einem Halbleitersubstrat,bei der jeder Transistor ein Gate mit einer n-dotierten oder p--dotierten Polysiliziumschicht (81) und einer dar-über angeordneten leitenden Schicht (91) aufweist, wobei das Gate mit einer Deck-Isolationsschicht (101) und isolierenden Seitenwand-Spacern (111) versehen ist, sowie ein erstes und ein zweites S/D-Gebiet (121),bei der die Gates miteinander elektrisch verbunden sind und einen Anschluß aufweisen,bei der das zweite S/D-Gebiet des ersten Transistors mit dem ersten S/D-Gebiet des zweiten Transistors elektrisch verbunden ist,bei der das erste S/D-Gebiet des ersten Transistors mit einem ersten Anschluß (22) und das zweite S/D-Gebiet des zweiten Transistors mit einem zweiten Anschluß (23) verbunden ist.
- Halbleiterstruktur nach Anspruch 1, bei der die aktiven Gebiete der Transistoren einen zusammenhängenden Streifen monokristallinen Siliziums (20) im Halbleitersubstrat (1) bilden, und der erste Anschluß (22)und der zweite Anschluß (23) randnah an entgegengesetzten Enden des Streifens angeordnet sind.
- Halbleiterstruktur nach Anspruch 2, mit einer mäandrierend über den Siliziumstreiten (20) verlaufenden, durchgehenden Wortleitung (25) für die Transistoren, die die Gates enthält.
- Halbleiterstruktur nach einem der Ansprüche 1 bis 3, bei der die leitende Schicht (91) aus einem Silizid, insbesondere aus WSi, besteht.
- Verfahren zum Detektieren eines Ätzangriffs auf eine Polysilizium-Leitbahn unter Verwendung eines elektrischen Testverfahrens, mit folgenden Schritten:Bilden einer Halbleiterstruktur nach einem der Ansprüche 1 bis 4 als Teststruktur,Aufbringen einer Photomaske mit einer Öffnung (30) die mindestens jeweils einen isolierenden Spacer (111) an einer Seite jedes Transistors freilegt, und Durchführen eines Ätzprozesses durch diese Öffnung, und Entfernen der Photomaske,Durchführen einer selektiven Naßätzung, die Polysilizium angreift,Anlegen eines Potentials an die Gates der Transistoren,Messen des Widerstands zwischen dem ersten Anschluß (22) und dem zweiten Anschluß (23).
- Verfahren zum Detektieren eines Ätzangriffs auf eine Polysilizium-Leitbahn unter Verwendung eines elektrischen Testverfahrens, mit folgenden Schritten:Bilden einer Halbleiterstruktur nach einem der Ansprüche 1 bis 4 als Teststruktur,Aufbringen einer Nitridschicht (131)Aufbringen einer Photomaske mit einer Öffnung (30), die mindestens jeweils einen isolierenden Spacer (111) an einer Seite jedes Transistors freilegt, und Ätzen der Nitridschicht (131) durch diese Öffnung, und Entfernen der Photomaske,Implantation mit einem p-Dotierstoff,Aufbringen einer undotierten Polysiliziumschicht (141) und abschnittsweise Dotierung dieser Schicht durch Ausdiffusion aus der Unterlage,Entfernen der undotierten Abschnitte der Polysiliziumschicht (141) mit Hilfe einer selektiven NaßätzungAnlegen eines dem leitenden Zustand der Transistoren entsprechenden Potentials (V1) an die Gates der Transistoren,Messen des Widerstands zwischen dem ersten Anschluß (22) und dem zweiten Anschluß (23).
- Verfahren nach Anspruch 6, bei dem gleichzeitig mit den Transistoren der Teststruktur ein Auswahltransistor einer Speicherzelle in einer DRAM-Schaltung hergestellt wird.
- Verfahren nach einem der Ansprüche 6 bis 7, bei dem gleichzeitig mit der Bildung der p-dotierten Polysiliziumabschnitte (141') ein p-dotierter Polysilizium-Anschlußstreifen (14') zur elektrischen Verbindung des Auswahltransistors mit einer Elektrode eines Speicherkondensators der Speicherzelle gebildet wird.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19906292 | 1999-02-15 | ||
DE19906292A DE19906292C1 (de) | 1999-02-15 | 1999-02-15 | Elektrische Teststruktur auf einem Halbleitersubstrat und Testverfahren |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1030360A2 true EP1030360A2 (de) | 2000-08-23 |
EP1030360A3 EP1030360A3 (de) | 2003-06-04 |
Family
ID=7897568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00101693A Withdrawn EP1030360A3 (de) | 1999-02-15 | 2000-02-03 | Elektrische Teststruktur auf einem Halbleitersubstrat und Testverfahren |
Country Status (3)
Country | Link |
---|---|
US (1) | US6310361B1 (de) |
EP (1) | EP1030360A3 (de) |
DE (1) | DE19906292C1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW550729B (en) * | 2002-08-16 | 2003-09-01 | Nanya Technology Corp | A test key for detecting whether the overlay of word line structure and deep trench capacitor of DRAM is normal |
DE10245534B4 (de) * | 2002-09-30 | 2005-12-22 | Infineon Technologies Ag | Teststruktur zum Bestimmen eines Bereiches einer Deep-Trench-Ausdiffusion in einem Speicherzellenfeld |
US6686637B1 (en) | 2002-11-21 | 2004-02-03 | International Business Machines Corporation | Gate structure with independently tailored vertical doping profile |
JP4455211B2 (ja) * | 2003-08-29 | 2010-04-21 | キヤノン株式会社 | 発光素子及び表示装置 |
DE10340714B3 (de) * | 2003-09-04 | 2005-05-25 | Infineon Technologies Ag | Teststruktur für ein Single-sided Buried Strap-DRAM-Speicherzellenfeld |
DE102005003000B4 (de) * | 2005-01-21 | 2007-02-08 | Infineon Technologies Ag | Halbleiterprodukt mit einem Halbleitersubstrat und einer Teststruktur und Verfahren |
KR100675279B1 (ko) * | 2005-04-20 | 2007-01-26 | 삼성전자주식회사 | 셀 다이오드들을 채택하는 상변이 기억소자들 및 그제조방법들 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5565375A (en) * | 1993-12-01 | 1996-10-15 | Imp, Inc. | Method of fabricating a self-cascoding CMOS device |
JPH1117171A (ja) * | 1997-06-19 | 1999-01-22 | Toshiba Corp | 半導体装置及びその製造方法 |
US5872018A (en) * | 1997-05-05 | 1999-02-16 | Vanguard International Semiconductor Corporation | Testchip design for process analysis in sub-micron DRAM fabrication |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5185294A (en) * | 1991-11-22 | 1993-02-09 | International Business Machines Corporation | Boron out-diffused surface strap process |
US5731218A (en) * | 1993-11-02 | 1998-03-24 | Siemens Aktiengesellschaft | Method for producing a contact hole to a doped region |
DE4337355C2 (de) * | 1993-11-02 | 1997-08-21 | Siemens Ag | Verfahren zur Herstellung eines Kontaktlochs zu einem dotierten Bereich |
US6087189A (en) * | 1997-04-24 | 2000-07-11 | National Science Council | Test structure for monitoring overetching of silicide during contact opening |
US6080661A (en) * | 1998-05-29 | 2000-06-27 | Philips Electronics North America Corp. | Methods for fabricating gate and diffusion contacts in self-aligned contact processes |
-
1999
- 1999-02-15 DE DE19906292A patent/DE19906292C1/de not_active Expired - Fee Related
-
2000
- 2000-02-03 EP EP00101693A patent/EP1030360A3/de not_active Withdrawn
- 2000-02-15 US US09/504,275 patent/US6310361B1/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5565375A (en) * | 1993-12-01 | 1996-10-15 | Imp, Inc. | Method of fabricating a self-cascoding CMOS device |
US5872018A (en) * | 1997-05-05 | 1999-02-16 | Vanguard International Semiconductor Corporation | Testchip design for process analysis in sub-micron DRAM fabrication |
JPH1117171A (ja) * | 1997-06-19 | 1999-01-22 | Toshiba Corp | 半導体装置及びその製造方法 |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 04, 30. April 1999 (1999-04-30) & JP 11 017171 A (TOSHIBA CORP), 22. Januar 1999 (1999-01-22) * |
Also Published As
Publication number | Publication date |
---|---|
US6310361B1 (en) | 2001-10-30 |
DE19906292C1 (de) | 2000-03-30 |
EP1030360A3 (de) | 2003-06-04 |
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