EP0957506A1 - Röntgenstrahler mit einem Flüssigmetall-Target - Google Patents
Röntgenstrahler mit einem Flüssigmetall-Target Download PDFInfo
- Publication number
- EP0957506A1 EP0957506A1 EP99201442A EP99201442A EP0957506A1 EP 0957506 A1 EP0957506 A1 EP 0957506A1 EP 99201442 A EP99201442 A EP 99201442A EP 99201442 A EP99201442 A EP 99201442A EP 0957506 A1 EP0957506 A1 EP 0957506A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- window
- liquid metal
- ray emitter
- electrons
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/101—Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
- H01J35/1017—Bearings for rotating anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
Definitions
- the invention relates to an X-ray emitter with an electron source for Emission of electrons and one when the electrons hit the X-rays emitting target from a circulating in the operating state of the X-ray emitter liquid metal.
- Such an X-ray source is known from US Pat. No. 4,953,191.
- the liquid metal is included in a pump circuit that has a distributor head through which the liquid metal flows over a stainless steel plate into a collecting pot, from where it is again is pumped to the distributor head.
- the electron beam hits that over the Stainless steel plate flowing liquid metal and generates x-rays in it.
- the liquid metal thus flows through the vacuum space in which the Electron source of the X-ray source is located. That is why this type of tube is liquid Metals limited, which is so low even at the highest operating temperatures Have vapor pressure that does not cause the vacuum in the X-ray tube is affected. Therefore gallium must be used, which is a relatively low one Atomic number (30) and therefore a comparatively low radiation yield.
- gallium particles from the circulating gallium stream get into the vacuum space of the X-ray tube because they would endanger the high voltage strength of the X-ray emitter.
- the gallium may only be in a thin layer of flow much less than 1mm and flow at a much lower speed, than stated in the publication mentioned, whereby the expected resilience of the X-ray lamp is significantly reduced.
- the object of the present invention is to provide an improved x-ray emitter To create permanent resilience. Starting from an X-ray source at the beginning This type of object is achieved in that between the electron source and the target is penetrated by the electrons and cooled by the target Window is located.
- this window allows the coolant to flow as a turbulent flow to lead past the window. With a turbulent flow, a much better one occurs Mixing of the liquid metal on than in a laminar flow, so that a results in better cooling. It is also possible to use the liquid metal in a thicker Layer and at a higher speed through the interaction area with to carry the electrons than is possible for a laminar flow. This is one much more effective cooling or higher permanent load capacity possible.
- the separation of the vacuum space from the liquid metal allows the Choosing a metal that has a higher vapor pressure than gallium, but also a higher one Atomic number and therefore a higher proportion of electron energy in X-rays implemented.
- JP-A 08 036 978 already contains an X-ray emitter is known in which the electrons emitted from an electron source by a Hit the target through the window that closes the vacuum chamber of the X-ray emitter.
- the target - apparently a solid target - is located at a distance from the window in a rotating bracket. In the event of a defect, it can easily pass through another target this bracket will be replaced. Because part of the energy of the electrons in the window in If the heat is converted, the X-ray tube can only withstand a small amount, which makes it more difficult in addition, the outside of the window is under atmospheric conditions, so that it must be made of a material that does not oxygenate when heated responds.
- the window must be designed so that on the one hand it is as stable as possible in order to To withstand the flow pressure of the circulating liquid metal, and on the other hand it should If possible, withdraw any energy from the electrons.
- a suitable material for the window is mentioned in claim 2, wherein claim 3 describes a suitable embodiment.
- window materials can also be used, e.g. out Berryllium or plastic.
- metals or alloys called that are suitable as a target The term metal must therefore be used in conjunction with the Invention to be interpreted broadly. It is said not only through chemical elements defined metals also include their alloys.
- the configuration according to claim 6 ensures effective cooling an increased continuous output allowed.
- the further embodiment according to claim 7 causes a turbulent flow in the area of the window, which is very simple can be realized according to claim 8.
- the embodiment according to claim 9 ensures that the one enclosed by the piston Vacuum space and the space in which the liquid metal flows hermetically from one another are separated.
- the liquid metal therefore does not have to have a low vapor pressure, such as in the known X-ray tube.
- the X-rays generated in the liquid metal first pass through the window for the Electrons before it emerges from the X-ray exit window as useful radiation.
- the electron beam emitted from the electron source has an elongated one Cross section ("line focus principle"), then the plane through which Electron beam and the exit of the light beam is defined perpendicular to the direction in which the molten metal flows past the window.
- Fig. 1, 1 denotes an electrically preferably grounded tube bulb, which by a window 2 is closed vacuum-tight.
- an electron source in the form of a cathode 3, which is in the operating state emits an electron beam 4 which passes through the window 2 onto a liquid Metal that is in a system 5.
- System 5 includes a Piping system 50, in which the liquid metal is driven by a pump 52, where it flows past the outside of the window 2 in a section 51. After Passing the section 51 it passes into a heat exchanger 53, from which the generated heat can be dissipated using a suitable cooling circuit.
- the electron beam 4 preferably has a cross section based on the principle the line focus in the direction perpendicular to the drawing plane of FIG. 1 is substantially greater than towards the drawing plane.
- the radiation exit window 6 - as indicated by dashed lines - in the direction on the circumference of the piston 1, in which the line focus shows, ie in a section of the tube bulb 1 above or below the drawing level.
- the window 2 has the task of sealing the tube bulb in a vacuum-tight manner at the same time also the section 51 through which the liquid metal flows.
- the electrons 4 should be as "transparent" as possible, so that the Electrons when they pass through the window generate as little heat as possible.
- the window should also be made of a material with a good quality There is thermal conductivity. A suitable material for the window is diamond. Already with a window thickness of 1pm there is sufficient mechanical stability.
- the electrons with an energy of 150 keV in such a window experienced is less than 1%, so that that caused in the window by the electrons Heat flow is lower than 500 W when the liquid metal is carried by the electrons 50 kW is heated.
- Another advantage of diamond is its high thermal Conductivity and the fact that it is in an oxygen-free environment up to 1500 ° C can be heated without irreversible changes.
- This Diamond windows can be manufactured in the following way, for example.
- a silicon carrier 22 with a thickness of 300 ⁇ m and a diameter of 6 mm becomes a 1 ⁇ m thick Diamond layer deposited by a suitable CVD process.
- an opening 21 of e.g. 5mm x 0.8 mm generated in the silicon carrier, so that only the diamond window remains in this area.
- the silicon carrier 22 is then connected in a suitable manner to section 51 or piston 1. Subsequently the silicon carrier 22 processed in this way is provided with a thin metallization, so that it cannot be charged by electrons.
- Metals or metal alloys can be used as the liquid metal, the one have a high atomic number and preferably at a low temperature Room temperature, are liquid.
- a suitable metal is mercury, which is already liquid at - 39 ° C.
- a suitable one Metal alloy consists of 62.5% Ga / 21.5% In and 16% Sn (details in Percent by weight). This alloy is liquid at 10.7 ° C.
- Another suitable one Alloy made up in part of elements with a higher atomic number consists of 43% Bi / 21.7% Pb / 18.3% In / 8% Sn / 5% Cd and 4% Hg. This alloy becomes liquid at 38 ° C. You must before commissioning the X-ray tube should therefore be heated until it is liquid.
- the piping system could then be designed in such a way that the liquid metal from the pipe 50 with an internal dimension of, for example, 6 mm is narrowed to a cross section of 4 mm ⁇ 1 mm by means of suitable intermediate pieces.
- section 51 with the same internal dimensions as line 50 and to arrange a constriction within section 51 only in the area of window 2 opposite recess 21.
- the narrowing of the flow cross section, the heating of the liquid metal by the electrons and the relatively high speed of the liquid metal (25 ms -1 ) cause the flow in this area to be turbulent. At most in a range of a few microns from the window there remains a layer with an almost laminar flow. If necessary, this laminar flow could be eliminated by roughening the window 2 on its side facing the flow.
- the pump 52 which drives the liquid metal through the line system 50, 51, can do this liquid metal through the lines with the help of magnetohydrodynamic forces Pump 50.51, similar to that described in U.S. Patent 4,953,191.
- This magnetohydrodynamic forces arise from the interaction between the Magnetic fields caused by electrical currents in the liquid metal with external magnetic fields.
- the advantage is that such a pump is not should contain mechanically moving parts - but pumps can also be used other principles of action are used.
- the invention allows the x-ray emitter to have a continuous output of at least 10 kW to operate.
- Rotating anode x-ray tubes usually have a smaller one Permanent resilience and have bearings for the rotating anode, which e.g. in one Computer tomographs can be damaged.
Abstract
Description
- Fig. 1
- einen erfindungsgemäßen Röntgenstrahler in schematischer Darstellung und
- Fig. 2
- einen Teil dieses Röntgenstrahlers in einer vergrößerten Ansicht.
Claims (10)
- Röntgenstrahler mit einer Elektronenquelle (3) zur Emission von Elektronen und einem beim Auftreffen der Elektronen Röntgenstrahlung emittierenden Target aus einem im Betriebszustand des Röntgenstrahlers zirkulierenden flüssigen Metall, dadurch gekennzeichnet, daß sich zwischen der Elektronenquelle und dem Target ein von den Elektronen durchdringbares, durch das flüssige Metall gekühltes Fenster (2) befindet.
- Röntgenstrahler nach Anspruch 1, dadurch gekennzeichnet, daß das Fenster (2) aus Diamant besteht
- Röntgenstrahler nach Anspruch 2, dadurch gekennzeichnet, daß das Fenster einen der Elektronenquelle zugewandten, mit einer Diamantschicht (2) versehenen Träger (22) aufweist, der im Auftreffbereich der Elektronen mit einer Öffnung (21) versehen ist.
- Röntgenstrahler nach Anspruch 1, dadurch gekennzeichnet, daß das Target aus Quecksilber oder einer Quecksilberlegierung besteht.
- Röntgenstrahler nach Anspruch 1, dadurch gekennzeichnet, daß das Target aus einer Blei und Wismut enthaltenden Legierung besteht.
- Röntgenstrahler nach Anspruch 1, dadurch gekennzeichnet, daß eine Pumpe (52) vorgesehen ist, die das flüssige Metall in einem geschlossenen Kreislauf (50, 51) zirkulieren läßt, der im Bereich des Fensters (2) eine vorwiegend turbulente Strömung erzeugt
- Röntgenstrahler nach Anspruch 6, dadurch gekennzeichnet, daß der von dem flüssigen Metall durchströmte Querschnitt (51) des Kreislaufs im Bereich des Fensters (2) wesentlich kleiner ist als in einem vom Fenster entfernten Bereich.
- Röntgenstrahler nach Anspruch 7, dadurch gekennzeichnet, daß der Kreislauf ein auf seinem Umfang mit dem Fenster versehenes Rohr (51) aufweist, das im Bereich des Fenster eine Querschnittsverengung (54) enthält.
- Röntgenstrahler nach Anspruch 1, dadurch gekennzeichnet, daß die Elektronenquelle (3) sich in einem evakuierten Kolben (1) befindet, der durch das Fenster abgedichtet wird.
- Röntgenstrahler nach Anspruch 1, dadurch gekennzeichnet, daß sich in dem Kolben (1) zusätzlich ein Fenster (6) für den Austritt der im Target erzeugten Röntgenstrahlung befindet.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19821939 | 1998-05-15 | ||
DE19821939A DE19821939A1 (de) | 1998-05-15 | 1998-05-15 | Röntgenstrahler mit einem Flüssigmetall-Target |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0957506A1 true EP0957506A1 (de) | 1999-11-17 |
EP0957506B1 EP0957506B1 (de) | 2005-11-16 |
Family
ID=7867950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99201442A Expired - Lifetime EP0957506B1 (de) | 1998-05-15 | 1999-05-07 | Röntgenstrahler mit einem Flüssigmetall-Target |
Country Status (5)
Country | Link |
---|---|
US (1) | US6185277B1 (de) |
EP (1) | EP0957506B1 (de) |
JP (1) | JPH11339702A (de) |
KR (1) | KR19990088266A (de) |
DE (2) | DE19821939A1 (de) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1028449A1 (de) * | 1999-02-12 | 2000-08-16 | Philips Corporate Intellectual Property GmbH | Röntgenröhre |
EP1102302A1 (de) * | 1999-11-18 | 2001-05-23 | Philips Patentverwaltung GmbH | Monochromatische Röntgenstrahlenquelle |
WO2002011499A1 (en) * | 2000-07-28 | 2002-02-07 | Jettec Ab | Method and apparatus for generating x-ray or euv radiation |
EP1197983A1 (de) * | 2000-10-13 | 2002-04-17 | Philips Corporate Intellectual Property GmbH | Elektronenstrahltransparentes Fenster |
EP1215707A2 (de) * | 2000-12-16 | 2002-06-19 | Philips Corporate Intellectual Property GmbH | Röntgenstrahler mit Flüssigmetall-Target |
EP1197470A3 (de) * | 2000-10-13 | 2004-12-01 | Philips Intellectual Property & Standards GmbH | Verfahren zur Herstellung eines elektronenstrahltransparenten Fensters sowie elektronenstrahtransparentes Fenster |
WO2005091326A2 (de) * | 2004-03-19 | 2005-09-29 | Yxlon International Security Gmbh | Röntgenstrahler, flüssigmetallanode für eine röntgenquelle sowie verfahren zum betrieb einer magnetohydrodynamischen pumpe hierfür |
CN106061388A (zh) * | 2014-01-07 | 2016-10-26 | 杰特克公司 | X‑射线微成像 |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19934987B4 (de) * | 1999-07-26 | 2004-11-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Röntgenanode und ihre Verwendung |
US6831963B2 (en) | 2000-10-20 | 2004-12-14 | University Of Central Florida | EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
JP4568850B2 (ja) * | 2000-11-15 | 2010-10-27 | 助川電気工業株式会社 | インバータ式核破砕ターゲットシステム |
DE10106740A1 (de) * | 2001-02-14 | 2002-08-22 | Philips Corp Intellectual Pty | Röntgenstrahler mit einem Target aus einem flüssigen Metall |
DE10129463A1 (de) | 2001-06-19 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit einem Flüssigmetall-Target |
DE10130070A1 (de) * | 2001-06-21 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit Flüssigmetall-Target |
DE10147473C2 (de) * | 2001-09-25 | 2003-09-25 | Siemens Ag | Drehanodenröntgenröhre |
DE10210045C1 (de) * | 2002-03-07 | 2003-05-08 | Philips Corp Intellectual Pty | Lichtquelle und Verfahren zur Herstellung einer Folie für die Lichtquelle |
EP1485935A1 (de) * | 2002-03-08 | 2004-12-15 | Koninklijke Philips Electronics N.V. | Gerät zur erzeugung von röntgenstrahlung mit flüssigmetallanode |
AU2003252819A1 (en) * | 2002-03-08 | 2003-09-22 | Koninklijke Philips Electronics N.V. | A device for generating x-rays having a liquid metal anode |
US7180981B2 (en) * | 2002-04-08 | 2007-02-20 | Nanodynamics-88, Inc. | High quantum energy efficiency X-ray tube and targets |
US7436931B2 (en) * | 2002-12-11 | 2008-10-14 | Koninklijke Philips Electronics N.V. | X-ray source for generating monochromatic x-rays |
JP2007503703A (ja) * | 2003-05-19 | 2007-02-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 蛍光x線源 |
US6944270B1 (en) * | 2004-02-26 | 2005-09-13 | Osmic, Inc. | X-ray source |
DE102004013620B4 (de) * | 2004-03-19 | 2008-12-04 | GE Homeland Protection, Inc., Newark | Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers |
DE102004015590B4 (de) * | 2004-03-30 | 2008-10-09 | GE Homeland Protection, Inc., Newark | Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul |
WO2005101450A1 (en) * | 2004-04-13 | 2005-10-27 | Koninklijke Philips Electronics N.V. | A device for generating x-rays having a liquid metal anode |
US7629593B2 (en) * | 2007-06-28 | 2009-12-08 | Asml Netherlands B.V. | Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method |
US8300770B2 (en) | 2010-07-13 | 2012-10-30 | Varian Medical Systems, Inc. | Liquid metal containment in an x-ray tube |
HUP1000635A2 (en) | 2010-11-26 | 2012-05-29 | Ge Hungary Kft | Liquid anode x-ray source |
US9330879B2 (en) * | 2011-08-04 | 2016-05-03 | John Lewellen | Bremstrahlung target for intensity modulated X-ray radiation therapy and stereotactic X-ray therapy |
US9368316B2 (en) | 2013-09-03 | 2016-06-14 | Electronics And Telecommunications Research Institute | X-ray tube having anode electrode |
EP3214635A1 (de) * | 2016-03-01 | 2017-09-06 | Excillum AB | Flüssig-target-röntgenquelle mit strahlmischwerkzeug |
US10748736B2 (en) * | 2017-10-18 | 2020-08-18 | Kla-Tencor Corporation | Liquid metal rotating anode X-ray source for semiconductor metrology |
KR102428199B1 (ko) | 2019-04-26 | 2022-08-02 | 이유브이 랩스, 엘티디. | 회전하는 액체 금속 타겟을 가지는 x레이 소스 및 복사 생성 방법 |
WO2021011209A1 (en) * | 2019-07-15 | 2021-01-21 | Sigray, Inc. | X-ray source with rotating anode at atmospheric pressure |
US11170965B2 (en) * | 2020-01-14 | 2021-11-09 | King Fahd University Of Petroleum And Minerals | System for generating X-ray beams from a liquid target |
US11719652B2 (en) | 2020-02-04 | 2023-08-08 | Kla Corporation | Semiconductor metrology and inspection based on an x-ray source with an electron emitter array |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4953191A (en) * | 1989-07-24 | 1990-08-28 | The United States Of America As Represented By The United States Department Of Energy | High intensity x-ray source using liquid gallium target |
US5052034A (en) * | 1989-10-30 | 1991-09-24 | Siemens Aktiengesellschaft | X-ray generator |
EP0651398A1 (de) * | 1993-10-26 | 1995-05-03 | W.R. Grace & Co. | Flüssigkeitsverdampfungskühlung des Fensters eines Teilbeschleunigers |
JPH0836978A (ja) * | 1994-07-26 | 1996-02-06 | Toshiba Corp | X線発生装置 |
Family Cites Families (6)
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JPS61153936A (ja) * | 1984-12-26 | 1986-07-12 | Toshiba Corp | プラズマx線発生装置 |
DE3586244T2 (de) * | 1984-12-26 | 2000-04-20 | Toshiba Kawasaki Kk | Vorrichtung zur Erzeugung von Weich-Röntgenstrahlen durch ein Hochenergiebündel. |
US4737647A (en) * | 1986-03-31 | 1988-04-12 | Siemens Medical Laboratories, Inc. | Target assembly for an electron linear accelerator |
JPH02138900A (ja) * | 1988-11-18 | 1990-05-28 | Nikon Corp | 電子線透過窓 |
JPH05101797A (ja) * | 1991-10-04 | 1993-04-23 | Olympus Optical Co Ltd | X線光源装置 |
JPH08138594A (ja) * | 1994-11-11 | 1996-05-31 | Olympus Optical Co Ltd | 軟x線光源装置 |
-
1998
- 1998-05-15 DE DE19821939A patent/DE19821939A1/de not_active Withdrawn
-
1999
- 1999-05-07 DE DE59912786T patent/DE59912786D1/de not_active Expired - Lifetime
- 1999-05-07 US US09/307,156 patent/US6185277B1/en not_active Expired - Fee Related
- 1999-05-07 EP EP99201442A patent/EP0957506B1/de not_active Expired - Lifetime
- 1999-05-12 JP JP11131444A patent/JPH11339702A/ja active Pending
- 1999-05-13 KR KR1019990017208A patent/KR19990088266A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4953191A (en) * | 1989-07-24 | 1990-08-28 | The United States Of America As Represented By The United States Department Of Energy | High intensity x-ray source using liquid gallium target |
US5052034A (en) * | 1989-10-30 | 1991-09-24 | Siemens Aktiengesellschaft | X-ray generator |
EP0651398A1 (de) * | 1993-10-26 | 1995-05-03 | W.R. Grace & Co. | Flüssigkeitsverdampfungskühlung des Fensters eines Teilbeschleunigers |
JPH0836978A (ja) * | 1994-07-26 | 1996-02-06 | Toshiba Corp | X線発生装置 |
Non-Patent Citations (1)
Title |
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PATENT ABSTRACTS OF JAPAN vol. 096, no. 006 28 June 1996 (1996-06-28) * |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1028449A1 (de) * | 1999-02-12 | 2000-08-16 | Philips Corporate Intellectual Property GmbH | Röntgenröhre |
EP1102302A1 (de) * | 1999-11-18 | 2001-05-23 | Philips Patentverwaltung GmbH | Monochromatische Röntgenstrahlenquelle |
WO2002011499A1 (en) * | 2000-07-28 | 2002-02-07 | Jettec Ab | Method and apparatus for generating x-ray or euv radiation |
EP1197983A1 (de) * | 2000-10-13 | 2002-04-17 | Philips Corporate Intellectual Property GmbH | Elektronenstrahltransparentes Fenster |
US6625254B2 (en) | 2000-10-13 | 2003-09-23 | Koninklijke Philips Electronics N.V. | Window transparent to electron rays |
EP1197470A3 (de) * | 2000-10-13 | 2004-12-01 | Philips Intellectual Property & Standards GmbH | Verfahren zur Herstellung eines elektronenstrahltransparenten Fensters sowie elektronenstrahtransparentes Fenster |
EP1215707A2 (de) * | 2000-12-16 | 2002-06-19 | Philips Corporate Intellectual Property GmbH | Röntgenstrahler mit Flüssigmetall-Target |
EP1215707A3 (de) * | 2000-12-16 | 2004-02-11 | Philips Intellectual Property & Standards GmbH | Röntgenstrahler mit Flüssigmetall-Target |
WO2005091326A2 (de) * | 2004-03-19 | 2005-09-29 | Yxlon International Security Gmbh | Röntgenstrahler, flüssigmetallanode für eine röntgenquelle sowie verfahren zum betrieb einer magnetohydrodynamischen pumpe hierfür |
WO2005091326A3 (de) * | 2004-03-19 | 2006-01-12 | Yxlon Int Security Gmbh | Röntgenstrahler, flüssigmetallanode für eine röntgenquelle sowie verfahren zum betrieb einer magnetohydrodynamischen pumpe hierfür |
CN106061388A (zh) * | 2014-01-07 | 2016-10-26 | 杰特克公司 | X‑射线微成像 |
Also Published As
Publication number | Publication date |
---|---|
KR19990088266A (ko) | 1999-12-27 |
US6185277B1 (en) | 2001-02-06 |
JPH11339702A (ja) | 1999-12-10 |
DE59912786D1 (de) | 2005-12-22 |
DE19821939A1 (de) | 1999-11-18 |
EP0957506B1 (de) | 2005-11-16 |
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