EP0554275B1 - Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination - Google Patents
Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination Download PDFInfo
- Publication number
- EP0554275B1 EP0554275B1 EP91917496A EP91917496A EP0554275B1 EP 0554275 B1 EP0554275 B1 EP 0554275B1 EP 91917496 A EP91917496 A EP 91917496A EP 91917496 A EP91917496 A EP 91917496A EP 0554275 B1 EP0554275 B1 EP 0554275B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- naphthol
- phenazonium
- ethoxylate
- thiourea
- compounds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
Definitions
- the invention relates to an acid bath for the electrodeposition of shiny and leveled copper coatings and the use.
- DE-PS 1246347 organic thio compounds
- DE-AS 1521062 polyvinyl compounds
- DE-AS 1521062 also describes an acidic copper bath which, in addition to a polymeric acidic compound with a hydrophilic group, also contains at least one substituted phenazonium compound in solution.
- Baths containing polymeric phenazonium compounds have made progress and are mainly used in combination with nonionic wetting agents and organic sulfur compounds.
- ⁇ -naphthol polyglycol ether as an additive to a copper bath is disclosed in DE-OS 37 21 985 (example 2) and GB-A-2075063, but not in combination with polymeric phenazonium compounds.
- DE-PS 3104108 describes a fluoroborate bath which contains ⁇ -naphthol ethoxylate in combination with a phthalocyanine dye.
- the electrolyte itself shows only a moderate leveling in comparison to polymeric phenazonium compounds.
- a disadvantage of these baths is the high leveling of a fine roughness (pittings, nodules) on the layer, which sensitively disturbs the decorative appearance of particularly large parts.
- This roughness is not due to floating particles in the electrolyte, but is due to a disturbed deposition in the cathodic double layer. This occurs particularly with nitrogen-containing sulfur compounds (so-called thiourea derivatives) and with phenazonium compounds.
- the object of this invention is to avoid the disadvantages described and, moreover, not to worsen the advantageous leveling.
- Thiourea and thiourea derivatives and S- and N-containing heterocyclic compounds are used as nitrogen-containing thio compounds.
- Table 2 contains examples of nitrogen-containing thio compounds (so-called thiourea derivatives) or S- and N-containing heterocyclic compounds and Table 3 for polymeric phenazonium compounds.
- the preferred amount in which the ⁇ -naphthol ethoxylate must be added in order to achieve a significant improvement in copper deposition is approximately 0.005 to 3 g / liter, preferably 0.01 to 0.25 g / liter.
- ⁇ -naphthol ethoxylates are known or can be prepared by processes known per se by reacting ⁇ -naphthol with ethylene oxide and / or propylene oxide.
- the individual components of the copper bath according to the invention can in general advantageously be present in the ready-to-use bath within the following limit concentrations: Usual oxygen-containing, high-molecular compounds 0.005 - 20 g / liter preferably 0.01 - 5 g / liter Common organic thio compounds with hydrophilic groups 0.0005 - 0.2 g / liter preferably 0.001 - 0.03 g / liter Usual nitrogen-containing thio compounds (so-called thiourea derivatives) and / or polymeric phenazonium compounds 0.0001 - 0.50 g / liter preferably 0.0005 - 0.04 g / liter
- the basic composition of the bath according to the invention can vary within wide limits.
- An aqueous solution of the following composition is generally used: Copper sulfate (CuSO4. 5H2O) 20 - 250 g / liter preferably 60 - 80 g / liter or 180 - 220 g / liter sulfuric acid 50 - 350 g / liter preferably 180 - 220 g / liter or 50 - 90 g / liter Sodium chloride 0.02 - 0.25 g / liter, preferably 0.05-0.12 g / liter
- copper sulfate instead of copper sulfate, other copper salts can also be used, at least in part.
- Some or all of the sulfuric acid can be replaced by fluoroboric acid, methanesulfonic acid or other acids.
- the addition of sodium chloride can be omitted in whole or in part if the additives already contain halogen ions.
- customary brighteners, levelers or wetting agents can also be present in the bathroom.
- the working conditions of the bath are as follows: PH value: ⁇ 1 Temperature: 15 ° C - 45 ° C, preferably 20 ° C - 30 ° C cath. Current density: 0.5 - 12 A / dm2, preferably 2-4 A / dm2
- the electrolyte movement is achieved by blowing in air.
- Copper with a content of 0.02 to 0.067% phosphorus is used as the anode
- the invention also includes methods using the baths according to the invention according to the claims.
- CuSO4.5 H2O copper sulfate
- 0.2 g / liter sodium chloride are used as brighteners 0.2 g / liter polyethylene glycol, 0.01 g / liter bis (w-sulfopropyl) disulfide, disodium salt, and 0.02 g / liter polymeric 7-dimethylamino-5-phenyl-phenazonium chloride admitted.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electrolytic Production Of Metals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4032864 | 1990-10-13 | ||
DE4032864A DE4032864A1 (de) | 1990-10-13 | 1990-10-13 | Saures bad zur galvanischen abscheidung von kupferueberzuegen und verfahren unter verwendung dieser kombination |
PCT/DE1991/000811 WO1992007116A1 (de) | 1990-10-13 | 1991-10-11 | Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0554275A1 EP0554275A1 (de) | 1993-08-11 |
EP0554275B1 true EP0554275B1 (de) | 1994-12-14 |
Family
ID=6416407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP91917496A Expired - Lifetime EP0554275B1 (de) | 1990-10-13 | 1991-10-11 | Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0554275B1 (enrdf_load_stackoverflow) |
JP (1) | JPH06501986A (enrdf_load_stackoverflow) |
AT (1) | ATE115651T1 (enrdf_load_stackoverflow) |
CA (1) | CA2093924C (enrdf_load_stackoverflow) |
DE (2) | DE4032864A1 (enrdf_load_stackoverflow) |
ES (1) | ES2066477T3 (enrdf_load_stackoverflow) |
WO (1) | WO1992007116A1 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202015003382U1 (de) | 2014-05-09 | 2015-06-16 | Dr. Hesse GmbH & Cie. KG | Elektrolytisches Abscheiden von Kupfer aus Wasser basierenden Elektrolyten |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10261852B3 (de) | 2002-12-20 | 2004-06-03 | Atotech Deutschland Gmbh | Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad |
DE10337669B4 (de) * | 2003-08-08 | 2006-04-27 | Atotech Deutschland Gmbh | Wässrige, saure Lösung und Verfahren zum galvanischen Abscheiden von Kupferüberzügen sowie Verwendung der Lösung |
DE102004041701A1 (de) * | 2004-08-28 | 2006-03-02 | Enthone Inc., West Haven | Verfahren zur elektrolytischen Abscheidung von Metallen |
US7282602B2 (en) * | 2004-09-21 | 2007-10-16 | Bionumerik Pharmaceuticals, Inc. | Medicinal disulfide salts |
WO2007086454A1 (ja) * | 2006-01-27 | 2007-08-02 | Okuno Chemical Industries Co., Ltd. | 含リン銅をアノードとする電解銅めっき液用添加剤、電解銅めっき液及び電解銅めっき方法 |
US11035051B2 (en) | 2016-08-15 | 2021-06-15 | Atotech Deutschland Gmbh | Acidic aqueous composition for electrolytic copper plating |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL291575A (enrdf_load_stackoverflow) * | 1962-04-16 | |||
DE1246347B (de) * | 1966-03-08 | 1967-08-03 | Schering Ag | Saures galvanisches Kupferbad |
DE2039831C3 (de) * | 1970-06-06 | 1979-09-06 | Schering Ag, 1000 Berlin Und 4619 Bergkamen | Saures Bad zur galvanischen Abscheidung glänzender Kupferüberzüge |
IT1046971B (it) * | 1975-03-11 | 1980-09-10 | Oxy Metal Industries Corp | Begno per l elettrodeposizione di rame e metodo per prepararlo |
DE2721985A1 (de) * | 1977-05-14 | 1978-11-16 | Bayer Ag | Verfahren zur herstellung von urethan- und/oder harnstoffgruppen aufweisenden polyisocyanat polyadditionsprodukten |
DE2746938C2 (de) * | 1977-10-17 | 1987-04-09 | Schering AG, 1000 Berlin und 4709 Bergkamen | Wäßriges saures Bad zur galvanischen Abscheidung von glänzenden und rißfreien Kupferüberzügen und Verwendung dieses Bades |
US4272335A (en) * | 1980-02-19 | 1981-06-09 | Oxy Metal Industries Corporation | Composition and method for electrodeposition of copper |
US4374709A (en) * | 1980-05-01 | 1983-02-22 | Occidental Chemical Corporation | Process for plating polymeric substrates |
US4376685A (en) * | 1981-06-24 | 1983-03-15 | M&T Chemicals Inc. | Acid copper electroplating baths containing brightening and leveling additives |
FR2510145B1 (fr) * | 1981-07-24 | 1986-02-07 | Rhone Poulenc Spec Chim | Additif pour bain de cuivrage electrolytique acide, son procede de preparation et son application au cuivrage des circuits imprimes |
JPS59501829A (ja) * | 1982-09-30 | 1984-11-01 | リ−ロ−ナル インコ−ポレ−テツド | 電気銅メッキ液 |
DE3402999A1 (de) * | 1984-01-28 | 1985-08-01 | Skw Trostberg Ag, 8223 Trostberg | Duengerloesungen |
DE3721985A1 (de) * | 1987-06-30 | 1989-01-12 | Schering Ag | Waessriges saures bad zur galvanischen abscheidung glaenzender und eingeebneter kupferueberzuege |
-
1990
- 1990-10-13 DE DE4032864A patent/DE4032864A1/de active Granted
-
1991
- 1991-10-11 EP EP91917496A patent/EP0554275B1/de not_active Expired - Lifetime
- 1991-10-11 CA CA002093924A patent/CA2093924C/en not_active Expired - Lifetime
- 1991-10-11 DE DE59103933T patent/DE59103933D1/de not_active Expired - Lifetime
- 1991-10-11 ES ES91917496T patent/ES2066477T3/es not_active Expired - Lifetime
- 1991-10-11 JP JP3516095A patent/JPH06501986A/ja active Pending
- 1991-10-11 AT AT91917496T patent/ATE115651T1/de not_active IP Right Cessation
- 1991-10-11 WO PCT/DE1991/000811 patent/WO1992007116A1/de active IP Right Grant
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202015003382U1 (de) | 2014-05-09 | 2015-06-16 | Dr. Hesse GmbH & Cie. KG | Elektrolytisches Abscheiden von Kupfer aus Wasser basierenden Elektrolyten |
DE102014208733A1 (de) | 2014-05-09 | 2015-11-12 | Dr. Hesse Gmbh & Cie Kg | Verfahren zum elektrolytischen Abscheiden von Kupfer aus Wasser basierenden Elektrolyten |
Also Published As
Publication number | Publication date |
---|---|
CA2093924A1 (en) | 1992-04-14 |
WO1992007116A1 (de) | 1992-04-30 |
ATE115651T1 (de) | 1994-12-15 |
EP0554275A1 (de) | 1993-08-11 |
DE4032864A1 (de) | 1992-04-16 |
JPH06501986A (ja) | 1994-03-03 |
CA2093924C (en) | 2002-02-05 |
ES2066477T3 (es) | 1995-03-01 |
DE4032864C2 (enrdf_load_stackoverflow) | 1993-01-07 |
DE59103933D1 (de) | 1995-01-26 |
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