EP0554275B1 - Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination - Google Patents

Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination Download PDF

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Publication number
EP0554275B1
EP0554275B1 EP91917496A EP91917496A EP0554275B1 EP 0554275 B1 EP0554275 B1 EP 0554275B1 EP 91917496 A EP91917496 A EP 91917496A EP 91917496 A EP91917496 A EP 91917496A EP 0554275 B1 EP0554275 B1 EP 0554275B1
Authority
EP
European Patent Office
Prior art keywords
naphthol
phenazonium
ethoxylate
thiourea
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91917496A
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German (de)
English (en)
French (fr)
Other versions
EP0554275A1 (de
Inventor
Wolfgang Dahms
Horst Westphal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
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Filing date
Publication date
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Publication of EP0554275A1 publication Critical patent/EP0554275A1/de
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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper

Definitions

  • the invention relates to an acid bath for the electrodeposition of shiny and leveled copper coatings and the use.
  • DE-PS 1246347 organic thio compounds
  • DE-AS 1521062 polyvinyl compounds
  • DE-AS 1521062 also describes an acidic copper bath which, in addition to a polymeric acidic compound with a hydrophilic group, also contains at least one substituted phenazonium compound in solution.
  • Baths containing polymeric phenazonium compounds have made progress and are mainly used in combination with nonionic wetting agents and organic sulfur compounds.
  • ⁇ -naphthol polyglycol ether as an additive to a copper bath is disclosed in DE-OS 37 21 985 (example 2) and GB-A-2075063, but not in combination with polymeric phenazonium compounds.
  • DE-PS 3104108 describes a fluoroborate bath which contains ⁇ -naphthol ethoxylate in combination with a phthalocyanine dye.
  • the electrolyte itself shows only a moderate leveling in comparison to polymeric phenazonium compounds.
  • a disadvantage of these baths is the high leveling of a fine roughness (pittings, nodules) on the layer, which sensitively disturbs the decorative appearance of particularly large parts.
  • This roughness is not due to floating particles in the electrolyte, but is due to a disturbed deposition in the cathodic double layer. This occurs particularly with nitrogen-containing sulfur compounds (so-called thiourea derivatives) and with phenazonium compounds.
  • the object of this invention is to avoid the disadvantages described and, moreover, not to worsen the advantageous leveling.
  • Thiourea and thiourea derivatives and S- and N-containing heterocyclic compounds are used as nitrogen-containing thio compounds.
  • Table 2 contains examples of nitrogen-containing thio compounds (so-called thiourea derivatives) or S- and N-containing heterocyclic compounds and Table 3 for polymeric phenazonium compounds.
  • the preferred amount in which the ⁇ -naphthol ethoxylate must be added in order to achieve a significant improvement in copper deposition is approximately 0.005 to 3 g / liter, preferably 0.01 to 0.25 g / liter.
  • ⁇ -naphthol ethoxylates are known or can be prepared by processes known per se by reacting ⁇ -naphthol with ethylene oxide and / or propylene oxide.
  • the individual components of the copper bath according to the invention can in general advantageously be present in the ready-to-use bath within the following limit concentrations: Usual oxygen-containing, high-molecular compounds 0.005 - 20 g / liter preferably 0.01 - 5 g / liter Common organic thio compounds with hydrophilic groups 0.0005 - 0.2 g / liter preferably 0.001 - 0.03 g / liter Usual nitrogen-containing thio compounds (so-called thiourea derivatives) and / or polymeric phenazonium compounds 0.0001 - 0.50 g / liter preferably 0.0005 - 0.04 g / liter
  • the basic composition of the bath according to the invention can vary within wide limits.
  • An aqueous solution of the following composition is generally used: Copper sulfate (CuSO4. 5H2O) 20 - 250 g / liter preferably 60 - 80 g / liter or 180 - 220 g / liter sulfuric acid 50 - 350 g / liter preferably 180 - 220 g / liter or 50 - 90 g / liter Sodium chloride 0.02 - 0.25 g / liter, preferably 0.05-0.12 g / liter
  • copper sulfate instead of copper sulfate, other copper salts can also be used, at least in part.
  • Some or all of the sulfuric acid can be replaced by fluoroboric acid, methanesulfonic acid or other acids.
  • the addition of sodium chloride can be omitted in whole or in part if the additives already contain halogen ions.
  • customary brighteners, levelers or wetting agents can also be present in the bathroom.
  • the working conditions of the bath are as follows: PH value: ⁇ 1 Temperature: 15 ° C - 45 ° C, preferably 20 ° C - 30 ° C cath. Current density: 0.5 - 12 A / dm2, preferably 2-4 A / dm2
  • the electrolyte movement is achieved by blowing in air.
  • Copper with a content of 0.02 to 0.067% phosphorus is used as the anode
  • the invention also includes methods using the baths according to the invention according to the claims.
  • CuSO4.5 H2O copper sulfate
  • 0.2 g / liter sodium chloride are used as brighteners 0.2 g / liter polyethylene glycol, 0.01 g / liter bis (w-sulfopropyl) disulfide, disodium salt, and 0.02 g / liter polymeric 7-dimethylamino-5-phenyl-phenazonium chloride admitted.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
EP91917496A 1990-10-13 1991-10-11 Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination Expired - Lifetime EP0554275B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4032864 1990-10-13
DE4032864A DE4032864A1 (de) 1990-10-13 1990-10-13 Saures bad zur galvanischen abscheidung von kupferueberzuegen und verfahren unter verwendung dieser kombination
PCT/DE1991/000811 WO1992007116A1 (de) 1990-10-13 1991-10-11 Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination

Publications (2)

Publication Number Publication Date
EP0554275A1 EP0554275A1 (de) 1993-08-11
EP0554275B1 true EP0554275B1 (de) 1994-12-14

Family

ID=6416407

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91917496A Expired - Lifetime EP0554275B1 (de) 1990-10-13 1991-10-11 Saures bad zur galvanischen abscheidung von kupferüberzügen und verfahren unter verwendung dieser kombination

Country Status (7)

Country Link
EP (1) EP0554275B1 (enrdf_load_stackoverflow)
JP (1) JPH06501986A (enrdf_load_stackoverflow)
AT (1) ATE115651T1 (enrdf_load_stackoverflow)
CA (1) CA2093924C (enrdf_load_stackoverflow)
DE (2) DE4032864A1 (enrdf_load_stackoverflow)
ES (1) ES2066477T3 (enrdf_load_stackoverflow)
WO (1) WO1992007116A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015003382U1 (de) 2014-05-09 2015-06-16 Dr. Hesse GmbH & Cie. KG Elektrolytisches Abscheiden von Kupfer aus Wasser basierenden Elektrolyten

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10261852B3 (de) 2002-12-20 2004-06-03 Atotech Deutschland Gmbh Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad
DE10337669B4 (de) * 2003-08-08 2006-04-27 Atotech Deutschland Gmbh Wässrige, saure Lösung und Verfahren zum galvanischen Abscheiden von Kupferüberzügen sowie Verwendung der Lösung
DE102004041701A1 (de) * 2004-08-28 2006-03-02 Enthone Inc., West Haven Verfahren zur elektrolytischen Abscheidung von Metallen
US7282602B2 (en) * 2004-09-21 2007-10-16 Bionumerik Pharmaceuticals, Inc. Medicinal disulfide salts
WO2007086454A1 (ja) * 2006-01-27 2007-08-02 Okuno Chemical Industries Co., Ltd. 含リン銅をアノードとする電解銅めっき液用添加剤、電解銅めっき液及び電解銅めっき方法
US11035051B2 (en) 2016-08-15 2021-06-15 Atotech Deutschland Gmbh Acidic aqueous composition for electrolytic copper plating

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL291575A (enrdf_load_stackoverflow) * 1962-04-16
DE1246347B (de) * 1966-03-08 1967-08-03 Schering Ag Saures galvanisches Kupferbad
DE2039831C3 (de) * 1970-06-06 1979-09-06 Schering Ag, 1000 Berlin Und 4619 Bergkamen Saures Bad zur galvanischen Abscheidung glänzender Kupferüberzüge
IT1046971B (it) * 1975-03-11 1980-09-10 Oxy Metal Industries Corp Begno per l elettrodeposizione di rame e metodo per prepararlo
DE2721985A1 (de) * 1977-05-14 1978-11-16 Bayer Ag Verfahren zur herstellung von urethan- und/oder harnstoffgruppen aufweisenden polyisocyanat polyadditionsprodukten
DE2746938C2 (de) * 1977-10-17 1987-04-09 Schering AG, 1000 Berlin und 4709 Bergkamen Wäßriges saures Bad zur galvanischen Abscheidung von glänzenden und rißfreien Kupferüberzügen und Verwendung dieses Bades
US4272335A (en) * 1980-02-19 1981-06-09 Oxy Metal Industries Corporation Composition and method for electrodeposition of copper
US4374709A (en) * 1980-05-01 1983-02-22 Occidental Chemical Corporation Process for plating polymeric substrates
US4376685A (en) * 1981-06-24 1983-03-15 M&T Chemicals Inc. Acid copper electroplating baths containing brightening and leveling additives
FR2510145B1 (fr) * 1981-07-24 1986-02-07 Rhone Poulenc Spec Chim Additif pour bain de cuivrage electrolytique acide, son procede de preparation et son application au cuivrage des circuits imprimes
JPS59501829A (ja) * 1982-09-30 1984-11-01 リ−ロ−ナル インコ−ポレ−テツド 電気銅メッキ液
DE3402999A1 (de) * 1984-01-28 1985-08-01 Skw Trostberg Ag, 8223 Trostberg Duengerloesungen
DE3721985A1 (de) * 1987-06-30 1989-01-12 Schering Ag Waessriges saures bad zur galvanischen abscheidung glaenzender und eingeebneter kupferueberzuege

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202015003382U1 (de) 2014-05-09 2015-06-16 Dr. Hesse GmbH & Cie. KG Elektrolytisches Abscheiden von Kupfer aus Wasser basierenden Elektrolyten
DE102014208733A1 (de) 2014-05-09 2015-11-12 Dr. Hesse Gmbh & Cie Kg Verfahren zum elektrolytischen Abscheiden von Kupfer aus Wasser basierenden Elektrolyten

Also Published As

Publication number Publication date
CA2093924A1 (en) 1992-04-14
WO1992007116A1 (de) 1992-04-30
ATE115651T1 (de) 1994-12-15
EP0554275A1 (de) 1993-08-11
DE4032864A1 (de) 1992-04-16
JPH06501986A (ja) 1994-03-03
CA2093924C (en) 2002-02-05
ES2066477T3 (es) 1995-03-01
DE4032864C2 (enrdf_load_stackoverflow) 1993-01-07
DE59103933D1 (de) 1995-01-26

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