ES2066477T3 - Baño acido para la electrodeposicion de recubrimientos de cobre y procedimiento con utilizacion de esta combinacion. - Google Patents

Baño acido para la electrodeposicion de recubrimientos de cobre y procedimiento con utilizacion de esta combinacion.

Info

Publication number
ES2066477T3
ES2066477T3 ES91917496T ES91917496T ES2066477T3 ES 2066477 T3 ES2066477 T3 ES 2066477T3 ES 91917496 T ES91917496 T ES 91917496T ES 91917496 T ES91917496 T ES 91917496T ES 2066477 T3 ES2066477 T3 ES 2066477T3
Authority
ES
Spain
Prior art keywords
electrodeposicion
procedure
combination
copper coatings
bathroom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91917496T
Other languages
English (en)
Spanish (es)
Inventor
Wolfgang Dahms
Horst Westphal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Application granted granted Critical
Publication of ES2066477T3 publication Critical patent/ES2066477T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
ES91917496T 1990-10-13 1991-10-11 Baño acido para la electrodeposicion de recubrimientos de cobre y procedimiento con utilizacion de esta combinacion. Expired - Lifetime ES2066477T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4032864A DE4032864A1 (de) 1990-10-13 1990-10-13 Saures bad zur galvanischen abscheidung von kupferueberzuegen und verfahren unter verwendung dieser kombination

Publications (1)

Publication Number Publication Date
ES2066477T3 true ES2066477T3 (es) 1995-03-01

Family

ID=6416407

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91917496T Expired - Lifetime ES2066477T3 (es) 1990-10-13 1991-10-11 Baño acido para la electrodeposicion de recubrimientos de cobre y procedimiento con utilizacion de esta combinacion.

Country Status (7)

Country Link
EP (1) EP0554275B1 (enrdf_load_stackoverflow)
JP (1) JPH06501986A (enrdf_load_stackoverflow)
AT (1) ATE115651T1 (enrdf_load_stackoverflow)
CA (1) CA2093924C (enrdf_load_stackoverflow)
DE (2) DE4032864A1 (enrdf_load_stackoverflow)
ES (1) ES2066477T3 (enrdf_load_stackoverflow)
WO (1) WO1992007116A1 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10261852B3 (de) * 2002-12-20 2004-06-03 Atotech Deutschland Gmbh Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad
DE10337669B4 (de) * 2003-08-08 2006-04-27 Atotech Deutschland Gmbh Wässrige, saure Lösung und Verfahren zum galvanischen Abscheiden von Kupferüberzügen sowie Verwendung der Lösung
DE102004041701A1 (de) * 2004-08-28 2006-03-02 Enthone Inc., West Haven Verfahren zur elektrolytischen Abscheidung von Metallen
US7282602B2 (en) * 2004-09-21 2007-10-16 Bionumerik Pharmaceuticals, Inc. Medicinal disulfide salts
WO2007086454A1 (ja) * 2006-01-27 2007-08-02 Okuno Chemical Industries Co., Ltd. 含リン銅をアノードとする電解銅めっき液用添加剤、電解銅めっき液及び電解銅めっき方法
DE102014208733A1 (de) 2014-05-09 2015-11-12 Dr. Hesse Gmbh & Cie Kg Verfahren zum elektrolytischen Abscheiden von Kupfer aus Wasser basierenden Elektrolyten
EP3497267B1 (en) 2016-08-15 2020-04-29 ATOTECH Deutschland GmbH Acidic aqueous composition for electrolytic copper plating

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL291575A (enrdf_load_stackoverflow) * 1962-04-16
DE1246347B (de) * 1966-03-08 1967-08-03 Schering Ag Saures galvanisches Kupferbad
DE2028803C3 (de) * 1970-06-06 1980-08-14 Schering Ag, 1000 Berlin Und 4619 Bergkamen Polymere Phenazoniumverbindungen
BE833384A (fr) * 1975-03-11 1976-03-12 Electrodeposition du cuivre
DE2721985A1 (de) * 1977-05-14 1978-11-16 Bayer Ag Verfahren zur herstellung von urethan- und/oder harnstoffgruppen aufweisenden polyisocyanat polyadditionsprodukten
DE2746938C2 (de) * 1977-10-17 1987-04-09 Schering AG, 1000 Berlin und 4709 Bergkamen Wäßriges saures Bad zur galvanischen Abscheidung von glänzenden und rißfreien Kupferüberzügen und Verwendung dieses Bades
US4272335A (en) * 1980-02-19 1981-06-09 Oxy Metal Industries Corporation Composition and method for electrodeposition of copper
US4374709A (en) * 1980-05-01 1983-02-22 Occidental Chemical Corporation Process for plating polymeric substrates
US4376685A (en) * 1981-06-24 1983-03-15 M&T Chemicals Inc. Acid copper electroplating baths containing brightening and leveling additives
FR2510145B1 (fr) * 1981-07-24 1986-02-07 Rhone Poulenc Spec Chim Additif pour bain de cuivrage electrolytique acide, son procede de preparation et son application au cuivrage des circuits imprimes
JPS59501829A (ja) * 1982-09-30 1984-11-01 リ−ロ−ナル インコ−ポレ−テツド 電気銅メッキ液
DE3402999A1 (de) * 1984-01-28 1985-08-01 Skw Trostberg Ag, 8223 Trostberg Duengerloesungen
DE3721985A1 (de) * 1987-06-30 1989-01-12 Schering Ag Waessriges saures bad zur galvanischen abscheidung glaenzender und eingeebneter kupferueberzuege

Also Published As

Publication number Publication date
DE4032864A1 (de) 1992-04-16
JPH06501986A (ja) 1994-03-03
EP0554275A1 (de) 1993-08-11
CA2093924C (en) 2002-02-05
WO1992007116A1 (de) 1992-04-30
ATE115651T1 (de) 1994-12-15
EP0554275B1 (de) 1994-12-14
DE59103933D1 (de) 1995-01-26
CA2093924A1 (en) 1992-04-14
DE4032864C2 (enrdf_load_stackoverflow) 1993-01-07

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