EP0497296B1 - Filter-Ventilator-Einrichtung zur Verwendung bei Reinräumen - Google Patents
Filter-Ventilator-Einrichtung zur Verwendung bei Reinräumen Download PDFInfo
- Publication number
- EP0497296B1 EP0497296B1 EP92101413A EP92101413A EP0497296B1 EP 0497296 B1 EP0497296 B1 EP 0497296B1 EP 92101413 A EP92101413 A EP 92101413A EP 92101413 A EP92101413 A EP 92101413A EP 0497296 B1 EP0497296 B1 EP 0497296B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- arrangement according
- filter
- arrangement
- cover part
- boundary walls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S454/00—Ventilation
- Y10S454/906—Noise inhibiting means
Definitions
- the invention relates to a filter-fan device for use in clean rooms according to the preamble of claim 1.
- the invention has for its object to design the generic filter fan device so that it has a high noise insulation, a uniform flow distribution and low flow losses with a compact design and has a low energy requirement.
- the flow space is designed as an annular channel which, due to its annular design, only has to have a small height.
- the device according to the invention can thereby be made very compact. With the ring channel, a uniform flow distribution and a uniform speed over the filter surface is possible, so that the air can enter the clean room underneath evenly through the filter. As a result of the ring channel, only very short flow paths are provided, which also results in low flow losses and, accordingly, only a low energy requirement.
- the filter-fan units according to FIGS. 1 to 3 are characterized by high noise insulation and a uniform flow distribution with a compact design.
- the units can be used by all clean room users, e.g. in medicine, pharmacy, biotechnology, electronics and semiconductor technology.
- the filter units are particularly suitable for small clean room areas, for subsequent installation of existing clean room areas and for local clean rooms.
- With the units clean rooms can be constructed in a modular and thus flexible manner, so that the clean room areas can be changed and / or supplemented at any time, for example as a result of technical progress. In this way, extensions, conversions or improvements to the clean room class can be carried out quickly and inexpensively.
- Clean room 1 shows a clean room 1 which has a floor 2 which is permeable to air. It lies at a distance above an air-impermeable floor 3 which, together with the permeable floor 2, delimits a return air duct 4.
- a process device 5 is located in clean room 1.
- Clean room 1 is delimited at the top by a ceiling 6, which is formed in a grid-like manner by filters 7 of filter-fan units 8.
- the filter-fan units 8 are designed as modules, which are arranged side by side and one behind the other to form the grid ceiling 6.
- the individual filter-fan units 8 can advantageously be replaced individually quickly, so that any repairs or maintenance can be carried out easily and quickly.
- Each unit 8 has at least one fan 9, with which cooling air 10 and return air 25 (FIG. 2) are drawn in and conveyed through the filter 7 into the clean room 1.
- the filtered air flows at least approximately laminar vertically downwards to the floor 2, passes through it and is deflected at the lower, closed floor 3 and flows outwards in the return air duct 4 (cf. arrows in FIG. 1).
- each filter-fan unit 8 is provided with a cooling air connection 11. As schematically shown in FIG. 1, a plurality of cooling air connections 11 are each connected to a common supply line 12.
- the filter-fan units 8 which are designed as modules, are each advantageously of identical design. They will be explained in detail with reference to FIGS. 2 and 3.
- the unit 8 has an approximately square outline in the exemplary embodiment, but can also have a rectangular or any other suitable outline.
- the square or rectangular outline has the advantage that the ceiling of the clean room 1 can be constructed in a grid form from only a few units 8.
- the unit 8 has an outer wall 13 which is formed from four wall parts 13a to 13d which are placed at right angles to one another. They extend from a support 14 (Fig. 2) upwards.
- the support 14 can be formed by rails, bars or the like.
- a horizontal ceiling part 15 is placed on the wall parts 13a to 13d and has the same outline as the unit 8.
- the ceiling part 15 has an opening 16 into which the fan 9 is inserted. It projects downwards over the ceiling part 15.
- a further ceiling part 17 is provided, which is parallel to the ceiling part 15 and together with this limits a return air duct 18.
- the ceiling part 17 can have the same outline as the ceiling part 15 and is held along its circumference by spacers 19 at a distance from the ceiling part 15.
- the ceiling part 17 is preferably slightly smaller than the ceiling part 15. This facilitates the intake of the return air.
- the ceiling part 17 can of course also have a different outline than the ceiling part 15.
- the spacers 19 are provided with inlet openings (not shown) for the return air.
- the ceiling part 17 is provided centrally with the cooling air connection 11, which is designed as a connecting piece to which the supply line 12 (FIG. 1) can be connected.
- the cooling air connection 11 is thus at a distance above the fan 9 (Fig. 2).
- the cooling air connection 11 advantageously does not protrude into the return air duct 18, but lies flush with the underside of the ceiling part 17.
- the fan 9 preferably does not protrude into the return air duct 18, but lies flush with the one Ceiling part 17 facing the top of the ceiling part 15.
- intermediate walls 20a to 20d are provided, which run parallel to the wall parts 13a to 13d and also extend upwards from the support 14. However, they end at a distance from the ceiling part 15 (Fig. 2).
- the intermediate walls 20a to 20d have the same height and are thicker than the outer wall parts 13a to 13d in the exemplary embodiment.
- a square annular channel 21 is formed between the intermediate walls 20a to 20d and the outer wall parts 13a to 13d, in which the air sucked in by the fan 9 flows downward in the direction of the filter 7.
- inner wall parts 22a to 22d are arranged at a distance from the intermediate walls 20a to 20d, which also extend upwards from the support 14 and parallel to the intermediate walls. They have a lower height than the intermediate walls 20a to 20d (FIG. 2).
- the inner wall parts 22a to 22d in turn adjoin one another at right angles and, together with the intermediate walls 20a to 20d, delimit a further square annular channel 23 (FIG. 3).
- the inner wall parts 22a to 22d viewed in plan view, surround the fan 9 at a short distance.
- the space enclosed by the inner wall parts 22a to 22d is closed by a plate 24 in the direction of the filter 7. 3, the plate 24 fills the interior enclosed by the wall parts 22a to 22d. As shown in FIG. 2, the plate 24 is fastened approximately halfway up the inside of the wall parts 22a to 22d.
- All wall parts 13a to 13d, 20a to 20d and 22a to 22d are fastened on the support 14, which can be formed by profiled rails or the like. It is also possible to hang the wall parts 13a to 13d, 20a to 20d, 22a to 22d hanging on the ceiling part 15, for example with threaded rods.
- the filter 7 is provided, which is either part of the unit or is a separate component that is connected to the unit during assembly.
- All wall parts 13a to 13a, 20a to 20d, 22a to 22d consist of sound-absorbing material, such as mineral wool, foams or the like.
- the ceiling parts 15 and 17 also consist of sound-insulating material. This results in a very high level of noise insulation for the filter-fan unit 8.
- the plate 24 also consists of sound-absorbing material. Since the individual walls are composed of wall parts, they can be assembled from prefabricated parts. As a result, only individual wall parts can be replaced if necessary, so that the entire wall does not have to be replaced if only one wall part is damaged or worn.
- the wall parts 13a to 13d, 20a to 20d and 22a to 22d can also each be formed in one piece.
- the filter 7 is made of conventional material and can be designed so that it is suitable for clean rooms up to at least class 1.
- Cooling air is drawn in centrally by the fan 9 via the cooling air connection 11 (FIG. 2).
- the return air (arrows 25) is drawn in by the fan 9 via the return air duct 18. Since the cooling air 11 is sucked in centrally to the fan 9 and the return air is drawn in transversely thereto, the cooling air is mixed well with the return air 25, as a result of which rapid temperature compensation is also achieved.
- the sucked-in air is guided by the fan 9 in the direction of the arrows in FIG. 2 into the ring channels 21 and 23 and is directed vertically downwards to the filter 7 in them. After passing through the filter 7, the cleaned air enters the clean room 1 (FIG. 1).
- the gradation of the wall parts 13a to 13d, 20a to 20d and 22a to 22d is selected in such a way that a uniform speed is achieved over the filter surface.
- This filter-fan unit 8 is thus distinguished by a uniform flow distribution with a compact design and high noise insulation.
- the flow paths from the fan 9 to the filter 7 are extremely short due to the ring channel, so that there are only very small flow losses and thus only a very low energy requirement.
- the individual wall parts can be relatively low, so that in addition to the advantage of low flow losses, the unit 8 is also made extremely compact. Since the fan 9 is arranged centrally, there is a uniform flow over the circumference of the ring channels 21 and 23.
- the filter-fan unit 8 can be suspended from the ceiling or used in a grid ceiling.
- the units 8 can be used individually as well as modular to clean rooms of any size. Maintenance work on the units 8 only slightly affect clean room operation.
- the individual filter-fan units 8 can be replaced individually quickly from below or from above.
- the filter 7 can be changed from below.
- the fans 9 are accessible from below, but also from above. This allows maintenance work to be carried out on walk-in units without having to shut down the entire clean room 1.
- small and large clean rooms can be constructed inexpensively.
- retrofitting with the filter-fan units 8 designed as modules is also possible at low cost. As a result of their compact design, the filter-fan units 8 also have only a low weight, so that simple assembly is possible. In addition, the ceiling load is relatively low.
- the filter-fan unit 8 has only one ring channel, which is delimited by the outer wall parts 13a to 13d and the inner wall parts 22a to 22d.
- Such a unit is even more compact and yet has all the advantages in terms of high noise insulation, uniform flow distribution and low interference losses. It is sufficient here if only one boundary wall, that is to say the wall parts 13a to 13d or the wall parts 22a to 22d, consist of sound-absorbing material.
- all wall parts consist of sound-absorbing material, so that very high noise insulation is achieved.
- the filter-fan unit 8 can also have more than two ring channels.
- are appropriate more wall parts are provided, which in turn are coordinated in height so that the wall height decreases from the outside inwards. This gradation is again chosen so that a uniform flow velocity of the air over the filter surface is achieved.
- the units 8 can thus be very easily adapted to the respective applications by merely providing a different number of wall parts. All variants are characterized by the high noise insulation, the uniform flow distribution, the compact design, the low flow loss and the low weight.
- the units 8 and the wall parts can also have any other suitable outline, for example a round outline.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4103026 | 1991-02-01 | ||
DE4103026A DE4103026C1 (fi) | 1991-02-01 | 1991-02-01 | |
DE4133093 | 1991-10-05 | ||
DE4133093A DE4133093A1 (de) | 1991-10-05 | 1991-10-05 | Filter-ventilator-einrichtung zur verwendung bei reinraeumen |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0497296A2 EP0497296A2 (de) | 1992-08-05 |
EP0497296A3 EP0497296A3 (en) | 1993-04-14 |
EP0497296B1 true EP0497296B1 (de) | 1996-04-03 |
Family
ID=25900684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92101413A Expired - Lifetime EP0497296B1 (de) | 1991-02-01 | 1992-01-29 | Filter-Ventilator-Einrichtung zur Verwendung bei Reinräumen |
Country Status (6)
Country | Link |
---|---|
US (1) | US5297990A (fi) |
EP (1) | EP0497296B1 (fi) |
DE (1) | DE59205885D1 (fi) |
ES (1) | ES2085499T3 (fi) |
FI (1) | FI98158C (fi) |
IE (1) | IE74881B1 (fi) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016226157A1 (de) | 2016-12-23 | 2018-06-28 | Ziehl-Abegg Se | Ventilatormodul sowie Anordnung eines oder mehrerer solcher Ventilatormodule in einem Strömungskanal |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5526805A (en) * | 1993-11-03 | 1996-06-18 | Dryden Engineering Company, Inc. | In-line silencer for clean room breathing apparatus |
DE19511158C2 (de) * | 1995-03-27 | 2000-01-27 | Meissner & Wurst | Ventilatoreinheit für Reinräume |
DE19518445A1 (de) * | 1995-05-19 | 1996-11-21 | Meissner & Wurst | Reinraumanlage |
DE19518455C2 (de) * | 1995-05-19 | 1998-07-02 | Sfb Planungs Und Handelsgesell | Schlauchbandförderer |
JPH0960942A (ja) * | 1995-08-25 | 1997-03-04 | Mitsubishi Electric Corp | 送風機 |
JP3090088B2 (ja) * | 1997-02-07 | 2000-09-18 | 富士電機株式会社 | クリーンルームのファンフィルタユニット |
SE513093C2 (sv) | 1997-06-27 | 2000-07-03 | Flaekt Ab | Fläktmodul för renrumstillämpningar |
US6319297B1 (en) * | 1998-03-27 | 2001-11-20 | Asyst Technologies, Inc. | Modular SMIF pod breather, adsorbent, and purge cartridges |
US7630198B2 (en) * | 2006-03-08 | 2009-12-08 | Cray Inc. | Multi-stage air movers for cooling computer systems and for other uses |
US6383241B1 (en) | 2000-02-16 | 2002-05-07 | Battelle Memorial Institute | Protective filtration system for enclosures within buildings |
DE10019543C2 (de) * | 2000-04-20 | 2002-03-07 | Fraunhofer Ges Forschung | Zuluftelement |
KR100370014B1 (ko) * | 2000-05-16 | 2003-01-29 | 엘지전자 주식회사 | 공기조화기의 실외기의 소음 저감구조 |
US7597534B2 (en) | 2003-03-20 | 2009-10-06 | Huntair, Inc. | Fan array fan section in air-handling systems |
US11255332B2 (en) * | 2003-03-20 | 2022-02-22 | Nortek Air Solutions, Llc | Modular fan housing with multiple modular units having sound attenuation for a fan array for an air-handling system |
US7137775B2 (en) | 2003-03-20 | 2006-11-21 | Huntair Inc. | Fan array fan section in air-handling systems |
US20050211190A1 (en) * | 2004-02-26 | 2005-09-29 | Weinblatt Richard C | Device for keeping pets' ears clean or substantially clean |
US7434657B2 (en) * | 2004-05-11 | 2008-10-14 | H-P Products, Inc. | Acoustic foam sound reducer for vacuum power unit |
US7314113B2 (en) * | 2004-09-14 | 2008-01-01 | Cray Inc. | Acoustic absorbers for use with computer cabinet fans and other cooling systems |
US7320721B2 (en) * | 2005-03-17 | 2008-01-22 | Samsung Electronics Co., Ltd. | Chemical filter and fan filter unit having the same |
JP2006263688A (ja) * | 2005-03-25 | 2006-10-05 | Seiko Epson Corp | ファン・フィルタユニットおよびこれを備えたクリーンブース |
US20090269219A1 (en) * | 2005-07-29 | 2009-10-29 | Bsh Bosch Und Siemens Hausgerate Gmbh | Domestic appliance with a sound damper |
DE102005062523A1 (de) * | 2005-12-19 | 2007-06-21 | M+W Zander Holding Ag | Filter-Ventilator-Einheit |
ATE495062T1 (de) * | 2006-10-20 | 2011-01-15 | Mann & Hummel Gmbh | Filtersystem für eine brennkraftmaschine in einem kraftfahrzeug |
US20090154091A1 (en) * | 2007-12-17 | 2009-06-18 | Yatskov Alexander I | Cooling systems and heat exchangers for cooling computer components |
US8170724B2 (en) | 2008-02-11 | 2012-05-01 | Cray Inc. | Systems and associated methods for controllably cooling computer components |
US7898799B2 (en) * | 2008-04-01 | 2011-03-01 | Cray Inc. | Airflow management apparatus for computer cabinets and associated methods |
US7903403B2 (en) * | 2008-10-17 | 2011-03-08 | Cray Inc. | Airflow intake systems and associated methods for use with computer cabinets |
US8081459B2 (en) | 2008-10-17 | 2011-12-20 | Cray Inc. | Air conditioning systems for computer systems and associated methods |
DE102009027170A1 (de) * | 2009-06-24 | 2010-12-30 | BSH Bosch und Siemens Hausgeräte GmbH | Externes Gebläse für Dunstabzugsvorrichtung |
US8087492B2 (en) * | 2010-03-08 | 2012-01-03 | Huntair, Inc. | Methods and systems for integrating sound attenuation into a filter bank |
US8472181B2 (en) | 2010-04-20 | 2013-06-25 | Cray Inc. | Computer cabinets having progressive air velocity cooling systems and associated methods of manufacture and use |
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US1685701A (en) * | 1926-03-18 | 1928-09-25 | Blanchard Joseph | Exhaust-gas muffler for internal-combustion engines |
DE7213615U (de) * | 1972-04-12 | 1972-10-05 | Laufenberg W | Ventilationsgerät zum Anbringen auf Entlüftungsschächten |
AT337409B (de) * | 1973-07-19 | 1977-06-27 | Fischbach Kg Blech Metall R | Dachlufter |
DE8303119U1 (de) * | 1983-02-05 | 1983-05-11 | Siegenia-Frank Kg, 5900 Siegen | Lueftungsvorrichtung fuer den einbau in fenster und/oder in andere wandoeffnungen von gebaeuden |
JPS59157432A (ja) * | 1983-02-23 | 1984-09-06 | Hitachi Plant Eng & Constr Co Ltd | 組替式局所環境制御室 |
JPS6071830A (ja) * | 1983-09-29 | 1985-04-23 | Hitachi Plant Eng & Constr Co Ltd | 組替式局所環境制御室 |
JPS62228827A (ja) * | 1986-03-31 | 1987-10-07 | Fuji Electric Co Ltd | 清浄空気送風装置 |
JPH0733922B2 (ja) * | 1987-05-13 | 1995-04-12 | 株式会社日立製作所 | 送風装置 |
DE3836147C2 (de) * | 1988-10-23 | 1996-03-21 | Ltg Lufttechnische Gmbh | Reinraumdecke |
-
1992
- 1992-01-29 EP EP92101413A patent/EP0497296B1/de not_active Expired - Lifetime
- 1992-01-29 DE DE59205885T patent/DE59205885D1/de not_active Expired - Lifetime
- 1992-01-29 ES ES92101413T patent/ES2085499T3/es not_active Expired - Lifetime
- 1992-01-30 US US07/828,154 patent/US5297990A/en not_active Expired - Lifetime
- 1992-01-31 IE IE920336A patent/IE74881B1/en not_active IP Right Cessation
- 1992-01-31 FI FI920433A patent/FI98158C/fi active
Non-Patent Citations (1)
Title |
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Prospektblatt 11/87, Firma Babcock- BSH "Clean-room tunnel-modul" * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016226157A1 (de) | 2016-12-23 | 2018-06-28 | Ziehl-Abegg Se | Ventilatormodul sowie Anordnung eines oder mehrerer solcher Ventilatormodule in einem Strömungskanal |
WO2018113855A1 (de) | 2016-12-23 | 2018-06-28 | Ziehl-Abegg Se | Ventilatormodul sowie anordnung eines oder mehrerer solcher ventilatormodule in einem strömungskanal |
US11371730B2 (en) | 2016-12-23 | 2022-06-28 | Ziehl-Abegg Se | Fan system and arrangement of one or more such fan systems in a flow duct |
Also Published As
Publication number | Publication date |
---|---|
FI920433A (fi) | 1992-08-02 |
IE74881B1 (en) | 1997-08-13 |
EP0497296A2 (de) | 1992-08-05 |
IE920336A1 (en) | 1992-08-12 |
FI98158C (fi) | 1997-04-25 |
FI920433A0 (fi) | 1992-01-31 |
US5297990A (en) | 1994-03-29 |
FI98158B (fi) | 1997-01-15 |
DE59205885D1 (de) | 1996-05-09 |
EP0497296A3 (en) | 1993-04-14 |
ES2085499T3 (es) | 1996-06-01 |
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