EP0497296B1 - Filter-ventilator-arrangement for application in clean rooms - Google Patents

Filter-ventilator-arrangement for application in clean rooms Download PDF

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Publication number
EP0497296B1
EP0497296B1 EP92101413A EP92101413A EP0497296B1 EP 0497296 B1 EP0497296 B1 EP 0497296B1 EP 92101413 A EP92101413 A EP 92101413A EP 92101413 A EP92101413 A EP 92101413A EP 0497296 B1 EP0497296 B1 EP 0497296B1
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EP
European Patent Office
Prior art keywords
arrangement according
filter
arrangement
cover part
boundary walls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92101413A
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German (de)
French (fr)
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EP0497296A2 (en
EP0497296A3 (en
Inventor
Manfred Dr. Renz
Helmut Bauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meissner and Wurst GmbH and Co
Original Assignee
Meissner and Wurst GmbH and Co
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Filing date
Publication date
Priority claimed from DE4103026A external-priority patent/DE4103026C1/de
Priority claimed from DE4133093A external-priority patent/DE4133093A1/en
Application filed by Meissner and Wurst GmbH and Co filed Critical Meissner and Wurst GmbH and Co
Publication of EP0497296A2 publication Critical patent/EP0497296A2/en
Publication of EP0497296A3 publication Critical patent/EP0497296A3/en
Application granted granted Critical
Publication of EP0497296B1 publication Critical patent/EP0497296B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S454/00—Ventilation
    • Y10S454/906—Noise inhibiting means

Definitions

  • the invention relates to a filter-fan device for use in clean rooms according to the preamble of claim 1.
  • the invention has for its object to design the generic filter fan device so that it has a high noise insulation, a uniform flow distribution and low flow losses with a compact design and has a low energy requirement.
  • the flow space is designed as an annular channel which, due to its annular design, only has to have a small height.
  • the device according to the invention can thereby be made very compact. With the ring channel, a uniform flow distribution and a uniform speed over the filter surface is possible, so that the air can enter the clean room underneath evenly through the filter. As a result of the ring channel, only very short flow paths are provided, which also results in low flow losses and, accordingly, only a low energy requirement.
  • the filter-fan units according to FIGS. 1 to 3 are characterized by high noise insulation and a uniform flow distribution with a compact design.
  • the units can be used by all clean room users, e.g. in medicine, pharmacy, biotechnology, electronics and semiconductor technology.
  • the filter units are particularly suitable for small clean room areas, for subsequent installation of existing clean room areas and for local clean rooms.
  • With the units clean rooms can be constructed in a modular and thus flexible manner, so that the clean room areas can be changed and / or supplemented at any time, for example as a result of technical progress. In this way, extensions, conversions or improvements to the clean room class can be carried out quickly and inexpensively.
  • Clean room 1 shows a clean room 1 which has a floor 2 which is permeable to air. It lies at a distance above an air-impermeable floor 3 which, together with the permeable floor 2, delimits a return air duct 4.
  • a process device 5 is located in clean room 1.
  • Clean room 1 is delimited at the top by a ceiling 6, which is formed in a grid-like manner by filters 7 of filter-fan units 8.
  • the filter-fan units 8 are designed as modules, which are arranged side by side and one behind the other to form the grid ceiling 6.
  • the individual filter-fan units 8 can advantageously be replaced individually quickly, so that any repairs or maintenance can be carried out easily and quickly.
  • Each unit 8 has at least one fan 9, with which cooling air 10 and return air 25 (FIG. 2) are drawn in and conveyed through the filter 7 into the clean room 1.
  • the filtered air flows at least approximately laminar vertically downwards to the floor 2, passes through it and is deflected at the lower, closed floor 3 and flows outwards in the return air duct 4 (cf. arrows in FIG. 1).
  • each filter-fan unit 8 is provided with a cooling air connection 11. As schematically shown in FIG. 1, a plurality of cooling air connections 11 are each connected to a common supply line 12.
  • the filter-fan units 8 which are designed as modules, are each advantageously of identical design. They will be explained in detail with reference to FIGS. 2 and 3.
  • the unit 8 has an approximately square outline in the exemplary embodiment, but can also have a rectangular or any other suitable outline.
  • the square or rectangular outline has the advantage that the ceiling of the clean room 1 can be constructed in a grid form from only a few units 8.
  • the unit 8 has an outer wall 13 which is formed from four wall parts 13a to 13d which are placed at right angles to one another. They extend from a support 14 (Fig. 2) upwards.
  • the support 14 can be formed by rails, bars or the like.
  • a horizontal ceiling part 15 is placed on the wall parts 13a to 13d and has the same outline as the unit 8.
  • the ceiling part 15 has an opening 16 into which the fan 9 is inserted. It projects downwards over the ceiling part 15.
  • a further ceiling part 17 is provided, which is parallel to the ceiling part 15 and together with this limits a return air duct 18.
  • the ceiling part 17 can have the same outline as the ceiling part 15 and is held along its circumference by spacers 19 at a distance from the ceiling part 15.
  • the ceiling part 17 is preferably slightly smaller than the ceiling part 15. This facilitates the intake of the return air.
  • the ceiling part 17 can of course also have a different outline than the ceiling part 15.
  • the spacers 19 are provided with inlet openings (not shown) for the return air.
  • the ceiling part 17 is provided centrally with the cooling air connection 11, which is designed as a connecting piece to which the supply line 12 (FIG. 1) can be connected.
  • the cooling air connection 11 is thus at a distance above the fan 9 (Fig. 2).
  • the cooling air connection 11 advantageously does not protrude into the return air duct 18, but lies flush with the underside of the ceiling part 17.
  • the fan 9 preferably does not protrude into the return air duct 18, but lies flush with the one Ceiling part 17 facing the top of the ceiling part 15.
  • intermediate walls 20a to 20d are provided, which run parallel to the wall parts 13a to 13d and also extend upwards from the support 14. However, they end at a distance from the ceiling part 15 (Fig. 2).
  • the intermediate walls 20a to 20d have the same height and are thicker than the outer wall parts 13a to 13d in the exemplary embodiment.
  • a square annular channel 21 is formed between the intermediate walls 20a to 20d and the outer wall parts 13a to 13d, in which the air sucked in by the fan 9 flows downward in the direction of the filter 7.
  • inner wall parts 22a to 22d are arranged at a distance from the intermediate walls 20a to 20d, which also extend upwards from the support 14 and parallel to the intermediate walls. They have a lower height than the intermediate walls 20a to 20d (FIG. 2).
  • the inner wall parts 22a to 22d in turn adjoin one another at right angles and, together with the intermediate walls 20a to 20d, delimit a further square annular channel 23 (FIG. 3).
  • the inner wall parts 22a to 22d viewed in plan view, surround the fan 9 at a short distance.
  • the space enclosed by the inner wall parts 22a to 22d is closed by a plate 24 in the direction of the filter 7. 3, the plate 24 fills the interior enclosed by the wall parts 22a to 22d. As shown in FIG. 2, the plate 24 is fastened approximately halfway up the inside of the wall parts 22a to 22d.
  • All wall parts 13a to 13d, 20a to 20d and 22a to 22d are fastened on the support 14, which can be formed by profiled rails or the like. It is also possible to hang the wall parts 13a to 13d, 20a to 20d, 22a to 22d hanging on the ceiling part 15, for example with threaded rods.
  • the filter 7 is provided, which is either part of the unit or is a separate component that is connected to the unit during assembly.
  • All wall parts 13a to 13a, 20a to 20d, 22a to 22d consist of sound-absorbing material, such as mineral wool, foams or the like.
  • the ceiling parts 15 and 17 also consist of sound-insulating material. This results in a very high level of noise insulation for the filter-fan unit 8.
  • the plate 24 also consists of sound-absorbing material. Since the individual walls are composed of wall parts, they can be assembled from prefabricated parts. As a result, only individual wall parts can be replaced if necessary, so that the entire wall does not have to be replaced if only one wall part is damaged or worn.
  • the wall parts 13a to 13d, 20a to 20d and 22a to 22d can also each be formed in one piece.
  • the filter 7 is made of conventional material and can be designed so that it is suitable for clean rooms up to at least class 1.
  • Cooling air is drawn in centrally by the fan 9 via the cooling air connection 11 (FIG. 2).
  • the return air (arrows 25) is drawn in by the fan 9 via the return air duct 18. Since the cooling air 11 is sucked in centrally to the fan 9 and the return air is drawn in transversely thereto, the cooling air is mixed well with the return air 25, as a result of which rapid temperature compensation is also achieved.
  • the sucked-in air is guided by the fan 9 in the direction of the arrows in FIG. 2 into the ring channels 21 and 23 and is directed vertically downwards to the filter 7 in them. After passing through the filter 7, the cleaned air enters the clean room 1 (FIG. 1).
  • the gradation of the wall parts 13a to 13d, 20a to 20d and 22a to 22d is selected in such a way that a uniform speed is achieved over the filter surface.
  • This filter-fan unit 8 is thus distinguished by a uniform flow distribution with a compact design and high noise insulation.
  • the flow paths from the fan 9 to the filter 7 are extremely short due to the ring channel, so that there are only very small flow losses and thus only a very low energy requirement.
  • the individual wall parts can be relatively low, so that in addition to the advantage of low flow losses, the unit 8 is also made extremely compact. Since the fan 9 is arranged centrally, there is a uniform flow over the circumference of the ring channels 21 and 23.
  • the filter-fan unit 8 can be suspended from the ceiling or used in a grid ceiling.
  • the units 8 can be used individually as well as modular to clean rooms of any size. Maintenance work on the units 8 only slightly affect clean room operation.
  • the individual filter-fan units 8 can be replaced individually quickly from below or from above.
  • the filter 7 can be changed from below.
  • the fans 9 are accessible from below, but also from above. This allows maintenance work to be carried out on walk-in units without having to shut down the entire clean room 1.
  • small and large clean rooms can be constructed inexpensively.
  • retrofitting with the filter-fan units 8 designed as modules is also possible at low cost. As a result of their compact design, the filter-fan units 8 also have only a low weight, so that simple assembly is possible. In addition, the ceiling load is relatively low.
  • the filter-fan unit 8 has only one ring channel, which is delimited by the outer wall parts 13a to 13d and the inner wall parts 22a to 22d.
  • Such a unit is even more compact and yet has all the advantages in terms of high noise insulation, uniform flow distribution and low interference losses. It is sufficient here if only one boundary wall, that is to say the wall parts 13a to 13d or the wall parts 22a to 22d, consist of sound-absorbing material.
  • all wall parts consist of sound-absorbing material, so that very high noise insulation is achieved.
  • the filter-fan unit 8 can also have more than two ring channels.
  • are appropriate more wall parts are provided, which in turn are coordinated in height so that the wall height decreases from the outside inwards. This gradation is again chosen so that a uniform flow velocity of the air over the filter surface is achieved.
  • the units 8 can thus be very easily adapted to the respective applications by merely providing a different number of wall parts. All variants are characterized by the high noise insulation, the uniform flow distribution, the compact design, the low flow loss and the low weight.
  • the units 8 and the wall parts can also have any other suitable outline, for example a round outline.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Description

Die Erfindung betrifft eine Filter-Ventilator-Einrichtung zur Verwendung bei Reinräumen nach dem Oberbegriff des Anspruchs 1.The invention relates to a filter-fan device for use in clean rooms according to the preamble of claim 1.

Es ist bekannt vgl. z.B, Babcock-BSH "Clean room-tunnel-modul" Prospektblatt 11/87, die Filter-Ventilator-Einrichtung zusammen mit dem Reinraum als Einheit auszubilden. Nahe einer Seitenwand dieser Einheit befindet sich der Ventilator, mit dem die Kühlluft angesaugt und in den Luftströmungsraum gefördert wird. Er erstreckt sich vom Ventilator aus horizontal bis zur gegenüberliegenden Wand, hat dort eine 180°-Umlenkung und wird durch das mit Abstand unterhalb der unteren Begrenzungswand liegende Filter nach unten begrenzt. Infolge dieser Ausbildung ergeben sich für die Luft große Strömungswege, die zu entsprechend hohen Strömungsverlusten und damit zu entsprechend hohem Energiebedarf führen. Infolge dieser Luftführung ist auch eine gleichförmige Strömungsverteilung über die Filterfläche nur sehr schwierig zu erreichen. Außerdem hat diese Einrichtung einen verhältnismäßig hohen Schalldruckpegel.It is known cf. For example, Babcock-BSH "Clean room tunnel module" brochure 11/87 to design the filter-fan device together with the clean room as a unit. The fan, with which the cooling air is drawn in and conveyed into the air flow space, is located near a side wall of this unit. It extends horizontally from the fan to the opposite wall, has a 180 ° deflection there and is limited by the filter located below the lower boundary wall. As a result of this design, there are large flow paths for the air, which lead to correspondingly high flow losses and thus to a correspondingly high energy requirement. As a result of this air flow, it is very difficult to achieve a uniform flow distribution over the filter surface. In addition, this device has a relatively high sound pressure level.

Der Erfindung liegt die Aufgabe zugrunde, die gattungsgemäße Filter-Ventilator-Einrichtung so auszubilden, daß sie bei kompakter Ausbildung eine hohe Geräuschdämmung, eine gleichförmige Strömungsverteilung sowie geringe Strömungsverluste und einen geringen Energiebedarf hat.The invention has for its object to design the generic filter fan device so that it has a high noise insulation, a uniform flow distribution and low flow losses with a compact design and has a low energy requirement.

Diese Aufgabe wird bei der gattungsgemäßen Filter-Ventilator-Einrichtung erfindungsgemäß mit den kennzeichnenden Merkmalen des Anspruchs 1.This object is achieved in the generic filter-fan device according to the invention with the characterizing features of claim 1.

Bei der erfindungsgemäßen Einrichtung nach Anspruch 1 ist der Strömungsraum als Ringkanal ausgebildet, der infolge seiner ringförmigen Ausbildung nur geringe Höhe haben muß. Dadurch kann die erfindungsgemäße Einrichtung sehr kompakt ausgebildet werden. Mit dem Ringkanal ist eine gleichförmige Strömungsverteilung sowie eine gleichförmige Geschwindigkeit über die Filterfläche möglich, so daß die Luft gleichmäßig durch den Filter in den darunter befindlichen Reinraum eintreten kann. Infolge des Ringkanales sind auch nur sehr kurze Strömungswege vorgesehen, wodurch sich auch geringe Strömungsverluste und dementsprechend auch nur ein geringer Energiebedarf ergeben.In the device according to the invention according to claim 1, the flow space is designed as an annular channel which, due to its annular design, only has to have a small height. The device according to the invention can thereby be made very compact. With the ring channel, a uniform flow distribution and a uniform speed over the filter surface is possible, so that the air can enter the clean room underneath evenly through the filter. As a result of the ring channel, only very short flow paths are provided, which also results in low flow losses and, accordingly, only a low energy requirement.

Weitere Merkmale der Erfindung ergeben sich aus den weiteren Ansprüchen, der Beschreibung und den Zeichungen.Further features of the invention result from the further claims, the description and the drawings.

Die Erfindung wird anhand zweier in den Zeichnungen dargestellter Ausführungsbeispiele näher erläutert. Es zeigen

Fig. 1
in schematischer Darstellung einen Reinraum mit erfindungsgemäßen Filter-Ventilator-Einheiten,
Fig. 2
im Schnitt eine erfindungsgemäße Filter-Ventilator-Einheit,
Fig. 3
einen Schnitt längs der Linie III-III in Fig. 2,
The invention is explained in more detail using two exemplary embodiments shown in the drawings. Show it
Fig. 1
a schematic representation of a clean room with filter-fan units according to the invention,
Fig. 2
on average a filter-fan unit according to the invention,
Fig. 3
2 shows a section along the line III-III in FIG. 2,

Die Filter-Ventilator-Einheiten nach den Fig. 1 bis 3 zeichnen sich durch eine hohe Geräuschdämmung und eine gleichförmige Strömungsverteilung bei kompakter Bauweise aus. Die Einheiten können bei allen Reinraumanwendern eingesetzt werden, z.B. in der Medizin, in der Pharmazie, in der Biotechnik, in der Elektronik und in der Halbleitertechnik. Die Filtereinheiten eignen sich insbesondere für kleine Reinraumbereiche, für eine Nachinstallation schon vorhandener Reinraumbereiche und für lokale Reinräume. Mit den Einheiten lassen sich Reinräume modular und damit flexibel aufbauen, so daß die Reinraumbereiche jederzeit, beispielsweise infolge des technischen Fortschritts, geändert und/oder ergänzt werden können. Auf diese Weise lassen sich schnell und kostengünstig Erweiterungen, Umbauten oder Verbesserungen der Reinraumklasse durchführen.The filter-fan units according to FIGS. 1 to 3 are characterized by high noise insulation and a uniform flow distribution with a compact design. The units can be used by all clean room users, e.g. in medicine, pharmacy, biotechnology, electronics and semiconductor technology. The filter units are particularly suitable for small clean room areas, for subsequent installation of existing clean room areas and for local clean rooms. With the units clean rooms can be constructed in a modular and thus flexible manner, so that the clean room areas can be changed and / or supplemented at any time, for example as a result of technical progress. In this way, extensions, conversions or improvements to the clean room class can be carried out quickly and inexpensively.

Fig. 1 zeigt einen Reinraum 1, der einen für Luft durchlässigen Boden 2 aufweist. Er liegt mit Abstand oberhalb eines luftundurchlässigen Bodens 3, der zusammen mit dem durchlässigen Boden 2 eine Rückluftführung 4 begrenzt. Im Reinraum 1 befindet sich ein Prozeßgerät 5. Der Reinraum 1 ist nach oben durch eine Decke 6 begrenzt, die rasterförmig von Filtern 7 der Filter-Ventilator-Einheiten 8 gebildet ist. Die Filter-Ventilator-Einheiten 8 sind als Module ausgebildet, die neben- und hintereinander zur Bildung der Rasterdecke 6 angeordnet werden. Die einzelnen Filter-Ventilator-Einheiten 8 lassen sich vorteilhaft einzeln schnell auswechseln, so daß evtl. Reparaturen oder Wartungen einfach und schnell durchgeführt werden können.1 shows a clean room 1 which has a floor 2 which is permeable to air. It lies at a distance above an air-impermeable floor 3 which, together with the permeable floor 2, delimits a return air duct 4. A process device 5 is located in clean room 1. Clean room 1 is delimited at the top by a ceiling 6, which is formed in a grid-like manner by filters 7 of filter-fan units 8. The filter-fan units 8 are designed as modules, which are arranged side by side and one behind the other to form the grid ceiling 6. The individual filter-fan units 8 can advantageously be replaced individually quickly, so that any repairs or maintenance can be carried out easily and quickly.

Jede Einheit 8 hat jeweils mindestens einen Ventilator 9, mit dem Kühlluft 10 und Rückluft 25 (Fig. 2) angesaugt und durch das Filter 7 in den Reinraum 1 gefördert wird. Die gefilterte Luft strömt zumindest annähernd laminar senkrecht nach unten zum Boden 2, tritt durch ihn hindurch und wird am unteren, geschlossenen Boden 3 umgelenkt und strömt in der Rückluftführung 4 nach außen (vgl. Pfeile in Fig. 1). Für die Kühlluftzuführung ist jede Filter-Ventilator-Einheit 8 mit einem Kühlluftanschluß 11 versehen. Wie Fig. 1 schematisch zeigt, sind mehrere Kühlluftanschlüsse 11 jeweils an eine gemeinsame Zuführleitung 12 angeschlossen.Each unit 8 has at least one fan 9, with which cooling air 10 and return air 25 (FIG. 2) are drawn in and conveyed through the filter 7 into the clean room 1. The filtered air flows at least approximately laminar vertically downwards to the floor 2, passes through it and is deflected at the lower, closed floor 3 and flows outwards in the return air duct 4 (cf. arrows in FIG. 1). For the supply of cooling air, each filter-fan unit 8 is provided with a cooling air connection 11. As schematically shown in FIG. 1, a plurality of cooling air connections 11 are each connected to a common supply line 12.

Vorteilhaft sind die als Module ausgebildeten Filter-Ventilator-Einheiten 8 jeweils gleich ausgebildet. Sie sollen anhand der Fig. 2 und 3 im einzelnen erläutert werden. Die Einheit 8 hat im Ausführungsbeispiel etwa quadratischen Umriß, kann aber auch rechteckigen oder jeden anderen geeigneten Umriß haben. Der quadratische bzw. rechteckige Umriß hat den Vorteil, daß die Decke des Reinraumes 1 rasterförmig aus nur wenigen Einheiten 8 aufgebaut werden kann.The filter-fan units 8, which are designed as modules, are each advantageously of identical design. They will be explained in detail with reference to FIGS. 2 and 3. The unit 8 has an approximately square outline in the exemplary embodiment, but can also have a rectangular or any other suitable outline. The square or rectangular outline has the advantage that the ceiling of the clean room 1 can be constructed in a grid form from only a few units 8.

Die Einheit 8 hat eine Außenwand 13, die aus vier rechtwinklig aneinandergesetzten Wandteilen 13a bis 13d gebildet wird. Sie erstrecken sich von einer Auflage 14 (Fig. 2) aufwärts. Die Auflage 14 kann durch Profilschienen, Stangen oder dgl. gebildet sein. Auf die Wandteile 13a bis 13d ist ein horizontales Deckenteil 15 aufgesetzt, das gleichen Umriß hat wie die Einheit 8. Mittig weist das Deckenteil 15 eine Öffnung 16 auf, in die der Ventilator 9 eingesetzt ist. Er ragt nach unten über das Deckenteil 15. Mit Abstand oberhalb des Deckenteiles 15 ist ein weiteres Deckenteil 17 vorgesehen, das parallel zum Deckenteil 15 liegt und mit diesem zusammen eine Rückluftführung 18 begrenzt. Das Deckenteil 17 kann gleichen Umriß wie das Deckenteil 15 haben und ist längs seines Umfanges durch Abstandhalter 19 auf Abstand zum Deckenteil 15 gehalten. Bevorzugt ist das Deckenteil 17 geringfügig kleiner als das Deckenteil 15. Dadurch wird die Ansaugung der Rückluft erleichtert. Das Deckenteil 17 kann selbstverständlich auch anderen Umriß haben als das Deckenteil 15. Die Abstandhalter 19 sind mit (nicht dargestellten) Eintrittsöffnungen für die Rückluft versehen. Das Deckenteil 17 ist zentrisch mit dem Kühlluftanschluß 11 versehen, der als Anschlußstutzen ausgebildet ist, an den die Zuführleitung 12 (Fig. 1) angeschlossen werden kann. Der Kühlluftanschluß 11 befindet sich somit mit Abstand oberhalb des Ventilators 9 (Fig. 2). Um die Strömungsverhältnisse in der Rückluftführung 18 nicht zu beeinträchtigen, ragt der Kühlluftanschluß 11 vorteilhaft nicht in die Rückluftführung 18, sondern liegt bündig mit der Unterseite des Deckenteils 17. Ebenso ragt der Ventilator 9 vorzugsweise nicht in die Rückluftführung 18, sondern liegt bündig mit der dem Deckenteil 17 zugewandten Oberseite des Deckenteils 15.The unit 8 has an outer wall 13 which is formed from four wall parts 13a to 13d which are placed at right angles to one another. They extend from a support 14 (Fig. 2) upwards. The support 14 can be formed by rails, bars or the like. A horizontal ceiling part 15 is placed on the wall parts 13a to 13d and has the same outline as the unit 8. In the middle, the ceiling part 15 has an opening 16 into which the fan 9 is inserted. It projects downwards over the ceiling part 15. At a distance above the ceiling part 15, a further ceiling part 17 is provided, which is parallel to the ceiling part 15 and together with this limits a return air duct 18. The ceiling part 17 can have the same outline as the ceiling part 15 and is held along its circumference by spacers 19 at a distance from the ceiling part 15. The ceiling part 17 is preferably slightly smaller than the ceiling part 15. This facilitates the intake of the return air. The ceiling part 17 can of course also have a different outline than the ceiling part 15. The spacers 19 are provided with inlet openings (not shown) for the return air. The ceiling part 17 is provided centrally with the cooling air connection 11, which is designed as a connecting piece to which the supply line 12 (FIG. 1) can be connected. The cooling air connection 11 is thus at a distance above the fan 9 (Fig. 2). In order not to impair the flow conditions in the return air duct 18, the cooling air connection 11 advantageously does not protrude into the return air duct 18, but lies flush with the underside of the ceiling part 17. Likewise, the fan 9 preferably does not protrude into the return air duct 18, but lies flush with the one Ceiling part 17 facing the top of the ceiling part 15.

Mit Abstand zu den äußeren Wandteilen 13a bis 13d sind Zwischenwände 20a bis 20d vorgesehen, die parallel zu den Wandteilen 13a bis 13d verlaufen und sich von der Auflage 14 aus ebenfalls aufwärts erstrecken. Sie enden jedoch mit Abstand vom Deckenteil 15 (Fig. 2). Die Zwischenwände 20a bis 20d haben gleiche Höhe und sind im Ausführungsbeispiel dicker als die äußeren Wandteile 13a bis 13d. Zwischen den Zwischenwänden 20a bis 20d und den äußeren Wandteilen 13a bis 13d wird ein viereckiger Ringkanal 21 gebildet, in dem die vom Ventilator 9 angesaugte Luft nach unten in Richtung auf den Filter 7 strömt.At a distance from the outer wall parts 13a to 13d, intermediate walls 20a to 20d are provided, which run parallel to the wall parts 13a to 13d and also extend upwards from the support 14. However, they end at a distance from the ceiling part 15 (Fig. 2). The intermediate walls 20a to 20d have the same height and are thicker than the outer wall parts 13a to 13d in the exemplary embodiment. A square annular channel 21 is formed between the intermediate walls 20a to 20d and the outer wall parts 13a to 13d, in which the air sucked in by the fan 9 flows downward in the direction of the filter 7.

Auf der von den äußeren Wandteilen 13a bis 13d abgewandten Seite sind mit Abstand zu den Zwischenwänden 20a bis 20d innere Wandteile 22a bis 22d angeordnet, die sich ebenfalls von der Auflage 14 aus aufwärts und parallel zu den Zwischenwänden erstrecken. Sie haben geringere Höhe als die Zwischenwände 20a bis 20d (Fig. 2). Die inneren Wandteile 22a bis 22d schließen wiederum rechtwinklig aneinander und begrenzen zusammen mit den Zwischenwänden 20a bis 20d einen weiteren viereckigen Ringkanal 23 (Fig. 3). Wie sich aus Fig. 2 ergibt, umgeben die inneren Wandteile 22a bis 22d, in Draufsicht gesehen, den Ventilator 9 mit geringem Abstand.On the side facing away from the outer wall parts 13a to 13d, inner wall parts 22a to 22d are arranged at a distance from the intermediate walls 20a to 20d, which also extend upwards from the support 14 and parallel to the intermediate walls. They have a lower height than the intermediate walls 20a to 20d (FIG. 2). The inner wall parts 22a to 22d in turn adjoin one another at right angles and, together with the intermediate walls 20a to 20d, delimit a further square annular channel 23 (FIG. 3). As can be seen from FIG. 2, the inner wall parts 22a to 22d, viewed in plan view, surround the fan 9 at a short distance.

Der von den inneren Wandteilen 22a bis 22d umschlossene Raum ist durch eine Platte 24 in Richtung auf den Filter 7 verschlossen. Wie Fig. 3 zeigt, füllt die Platte 24 den von den Wandteilen 22a bis 22d umschlossenen Innenraum aus. Wie Fig. 2 zeigt, ist die Platte 24 etwa in halber Höhe an den Innenseiten der Wandteile 22a bis 22d befestigt.The space enclosed by the inner wall parts 22a to 22d is closed by a plate 24 in the direction of the filter 7. 3, the plate 24 fills the interior enclosed by the wall parts 22a to 22d. As shown in FIG. 2, the plate 24 is fastened approximately halfway up the inside of the wall parts 22a to 22d.

Sämtliche Wandteile 13a bis 13d, 20a bis 20d und 22a bis 22d sind auf der Auflage 14 befestigt, die durch Profilschienen oder dgl. gebildet sein kann. Es ist auch möglich, die Wandteile 13a bis 13d, 20a bis 20d, 22a bis 22d hängend am Deckenteil 15 zu befestigen, beispielsweise mit Gewindestangen.All wall parts 13a to 13d, 20a to 20d and 22a to 22d are fastened on the support 14, which can be formed by profiled rails or the like. It is also possible to hang the wall parts 13a to 13d, 20a to 20d, 22a to 22d hanging on the ceiling part 15, for example with threaded rods.

Mit Abstand unterhalb der Wandteile 13a bis 13d, 20a bis 20d und 22a bis 22d ist das Filter 7 vorgesehen, das entweder Bestandteil der Einheit ist oder ein gesondertes Bauteil ist, das bei der Montage mit der Einheit verbunden wird.At a distance below the wall parts 13a to 13d, 20a to 20d and 22a to 22d, the filter 7 is provided, which is either part of the unit or is a separate component that is connected to the unit during assembly.

Sämtliche Wandteile 13a bis 13a, 20a bis 20d, 22a bis 22d bestehen aus schalldämmendem Material, wie Mineralwolle, Schaumstoffe oder dgl. Vorteilhaft bestehen auch die Deckenteile 15 und 17 aus schalldämmendem Material. Dadurch ergibt sich eine sehr hohe Geräuschdämmung der Filter-Ventilator-Einheit 8. Vorteilhaft besteht auch die Platte 24 aus schalldämmendem Material. Da die einzelnen Wände aus Wandteilen zusammengesetzt sind, können sie aus vorgefertigten Teilen zusammengebaut werden. Dadurch lassen sich bei Bedarf auch nur einzelne Wandteile auswechseln, so daß nicht die gesamte Wand bei Beschädigung oder Verschleiß nur eines Wandteiles ausgewechselt werden muß. Selbstverständlich können die Wandteile 13a bis 13d, 20a bis 20d und 22a bis 22d jeweils auch einteilig miteinander ausgebildet sein.All wall parts 13a to 13a, 20a to 20d, 22a to 22d consist of sound-absorbing material, such as mineral wool, foams or the like. Advantageously, the ceiling parts 15 and 17 also consist of sound-insulating material. This results in a very high level of noise insulation for the filter-fan unit 8. Advantageously, the plate 24 also consists of sound-absorbing material. Since the individual walls are composed of wall parts, they can be assembled from prefabricated parts. As a result, only individual wall parts can be replaced if necessary, so that the entire wall does not have to be replaced if only one wall part is damaged or worn. Of course, the wall parts 13a to 13d, 20a to 20d and 22a to 22d can also each be formed in one piece.

Der Filter 7 besteht aus herkömmlichem Material und kann so ausgebildet sein, daß er für Reinräume bis wenigstens Klasse 1 geeignet ist.The filter 7 is made of conventional material and can be designed so that it is suitable for clean rooms up to at least class 1.

Vom Ventilator 9 wird über den Kühlluftanschluß 11 Kühlluft zentrisch angesaugt (Fig. 2). Gleichzeitig wird über die Rückluftführung 18 die Rückluft (Pfeile 25) vom Ventilator 9 angesaugt. Da die Kühlluft 11 zentrisch zum Ventilator 9 und die Rückluft quer dazu angesaugt wird, wird die Kühlluft gut mit der Rückluft 25 vermischt, wodurch auch ein schneller Temperaturausgleich erreicht wird. Die angesaugte Luft wird vom Ventilator 9 in Richtung der Pfeile in Fig. 2 in die Ringkanäle 21 und 23 geleitet und in ihnen senkrecht nach unten zum Filter 7 gelenkt. Nach dem Durchtritt durch den Filter 7 gelangt die gereinigte Luft in den Reinraum 1 (Fig. 1). Die Abstufung der Wandteile 13a bis 13d, 20a bis 20d und 22a bis 22d nach innen ist so gewählt, daß eine gleichförmige Geschwindigkeit über die Filterfläche erreicht wird. Somit zeichnet sich diese Filter-Ventilator-Einheit 8 durch eine gleichmäßige Strömungsverteilung bei kompakter Bauweise und hoher Geräuschdämmung aus. Die Strömungswege vom Ventilator 9 zum Filter 7 sind infolge des Ringkanales äußerst kurz, so daß sich nur sehr geringe Strömungsverluste und damit auch nur ein sehr geringer Energiebedarf ergeben. Infolge der Ringkanäle 21, 23 können die einzelnen Wandteile verhältnismäßig niedrig sein, so daß außer dem Vorteil der geringen Strömungsverluste auch eine äußerst kompakte Ausbildung der Einheit 8 erreicht wird. Da der Ventilator 9 zentrisch angeordnet ist, ergibt sich über den Umfang der Ringkanäle 21 und 23 eine gleichmäßige Strömung.Cooling air is drawn in centrally by the fan 9 via the cooling air connection 11 (FIG. 2). At the same time, the return air (arrows 25) is drawn in by the fan 9 via the return air duct 18. Since the cooling air 11 is sucked in centrally to the fan 9 and the return air is drawn in transversely thereto, the cooling air is mixed well with the return air 25, as a result of which rapid temperature compensation is also achieved. The sucked-in air is guided by the fan 9 in the direction of the arrows in FIG. 2 into the ring channels 21 and 23 and is directed vertically downwards to the filter 7 in them. After passing through the filter 7, the cleaned air enters the clean room 1 (FIG. 1). The gradation of the wall parts 13a to 13d, 20a to 20d and 22a to 22d is selected in such a way that a uniform speed is achieved over the filter surface. This filter-fan unit 8 is thus distinguished by a uniform flow distribution with a compact design and high noise insulation. The flow paths from the fan 9 to the filter 7 are extremely short due to the ring channel, so that there are only very small flow losses and thus only a very low energy requirement. As a result of the annular channels 21, 23, the individual wall parts can be relatively low, so that in addition to the advantage of low flow losses, the unit 8 is also made extremely compact. Since the fan 9 is arranged centrally, there is a uniform flow over the circumference of the ring channels 21 and 23.

Die Filter-Ventilator-Einheit 8 kann an der Decke abgehängt oder in eine Rasterdecke eingesetzt werden. Die Einheiten 8 lassen sich sowohl einzeln einsetzen als auch modular zu Reinräumen beliebiger Größe zusammenfügen. Wartungsarbeiten an den Einheiten 8 beeinträchtigen den Reinraumbetrieb nur geringfügig. Die einzelnen Filter-Ventilator-Einheiten 8 können einzeln schnell von unten oder von oben ausgewechselt werden. Der Wechsel der Filter 7 ist von unten möglich. Die Ventilatoren 9 sind von unten, aber auch von oben zugänglich. Dadurch können über begehbare Einheiten Wartungsarbeiten durchgeführt werden, ohne den gesamten Reinraum 1 stillzulegen. Mit den einzelnen Einheiten 8 können kleinere und große Reinräume kostengünstig aufgebaut werden. Insbesondere sind auch Nachrüstungen mit den als Moduln ausgebildeten Filter-Ventilator-Einheiten 8 kostengünstig möglich. Infolge ihrer kompakten Ausbildung haben die Filter-Ventilator-Einheiten 8 auch nur geringes Gewicht, so daß eine einfache Montage möglich ist. Zudem ist die Deckenbelastung verhältnismäßig gering.The filter-fan unit 8 can be suspended from the ceiling or used in a grid ceiling. The units 8 can be used individually as well as modular to clean rooms of any size. Maintenance work on the units 8 only slightly affect clean room operation. The individual filter-fan units 8 can be replaced individually quickly from below or from above. The filter 7 can be changed from below. The fans 9 are accessible from below, but also from above. This allows maintenance work to be carried out on walk-in units without having to shut down the entire clean room 1. With the individual units 8, small and large clean rooms can be constructed inexpensively. In particular, retrofitting with the filter-fan units 8 designed as modules is also possible at low cost. As a result of their compact design, the filter-fan units 8 also have only a low weight, so that simple assembly is possible. In addition, the ceiling load is relatively low.

Bei der einfachsten Ausführung hat die Filter-Ventilator-Einheit 8 nur einen Ringkanal, der von den äußeren Wandteilen 13a bis 13d und den inneren Wandteilen 22a bis 22d begrenzt wird. Eine solche Einheit ist noch kompakter ausgebildet und weist dennoch alle Vorteile hinsichtlich der hohen Geräuschdämmung, der gleichförmigen Strömungsverteilung und der geringen Störmungsverluste auf. Hierbei reicht es aus, wenn nur die eine Begrenzungswand, also die Wandteile 13a bis 13d oder die Wandteile 22a bis 22d, aus schalldämmendem Material bestehen. Vorteilhaft bestehen aber sämtliche Wandteile aus schalldämmendem Material, so daß eine sehr hohe Geräuschdämmung erzielt wird.In the simplest embodiment, the filter-fan unit 8 has only one ring channel, which is delimited by the outer wall parts 13a to 13d and the inner wall parts 22a to 22d. Such a unit is even more compact and yet has all the advantages in terms of high noise insulation, uniform flow distribution and low interference losses. It is sufficient here if only one boundary wall, that is to say the wall parts 13a to 13d or the wall parts 22a to 22d, consist of sound-absorbing material. Advantageously, however, all wall parts consist of sound-absorbing material, so that very high noise insulation is achieved.

Bei einer anderen (nicht dargestellten) Ausführungsform kann die Filter-Ventilator-Einheit 8 auch mehr als zwei Ringkanäle aufweisen. In diesem Falle sind entsprechend mehr Wandteile vorgesehen, die wiederum in ihrer Höhe so aufeinander abgestimmt sind, daß von außen nach innen die Wandhöhe abnimmt. Diese Abstufung wird wiederum so gewählt, daß eine gleichförmige Strömungsgeschwindigkeit der Luft über die Filterfläche erreicht wird.In another embodiment (not shown), the filter-fan unit 8 can also have more than two ring channels. In this case, are appropriate more wall parts are provided, which in turn are coordinated in height so that the wall height decreases from the outside inwards. This gradation is again chosen so that a uniform flow velocity of the air over the filter surface is achieved.

Die Einheiten 8 lassen sich somit sehr einfach an die jeweiligen Einsatzfälle anpassen, indem lediglich eine unterschiedliche Zahl von Wandteilen vorgesehen wird. Alle Varianten zeichnen sich durch die hohe Geräuschdämmung, die gleichförmige Strömungsverteilung, die kompakte Bauweise, den geringen Strömungsverlust und durch das geringe Gewicht aus.The units 8 can thus be very easily adapted to the respective applications by merely providing a different number of wall parts. All variants are characterized by the high noise insulation, the uniform flow distribution, the compact design, the low flow loss and the low weight.

Anstelle der viereckigen Querschnittsausbildung können die Einheiten 8 und die Wandteile auch jeden anderen geeigneten Umriß haben, beispielsweise runden Umriß.Instead of the quadrangular cross-sectional configuration, the units 8 and the wall parts can also have any other suitable outline, for example a round outline.

Claims (18)

  1. A filter-ventilator arrangement for use in clean rooms, with at least one ventilator (9), the delivery side thereof facing an air current space (21, 23) which is bounded by boundary walls (13a to 13d, 20a to 20d, 22a to 22d) and which supplies the current of air to the clean room via at least one filter (7) situated in the region beneath the air current space (21, 23), characterised in that the current space is formed by at least one annular channel (21, 23), the two boundary walls thereof (13a to 13d, 20a to 20d, 22a to 22d) consisting of at least one sound-absorbing material.
  2. An arrangement according to Claim 1, characterised in that the ventilator (9) arranged preferably in a cover part (15) is arranged in the centre with respect to the annular channel (21, 23).
  3. An arrangement according to Claim 1 or 2, characterised in that the annular channel (21) is bounded externally by an outer wall (13) of the arrangement (8).
  4. An arrangement according to any one of Claims 1 to 3, characterised in that at least the outer boundary wall (13a to 13d) consists of sound-absorbing material.
  5. An arrangement according to any one of Claims 1 to 4, characterised in that the outer wall (13) ofthe arrangement (8) extends to the cover part (15).
  6. An arrangement according to any one of Claims 1 to 5, characterised in that the inner boundary wall (20a to 20d) is at a distance from the cover part (15).
  7. An arrangement according to any one of Claims 1 to 6, characterised in that the arrangement (8) has a plurality of annular channels (21, 23), the boundary walls (13a to 13d, 20a to 20d, 22a to 22d) thereof diminishing in height from the outside to the inside.
  8. An arrangement according to any one of Claims 1 to 7, characterised in that the space surrounded by the innermost boundary walls (22a to 22d) is closed towards the filter (7).
  9. An arrangement according to Claim 8, characterised in that the inner surfaces of the innermost boundary walls (22a to 22d) connect to a plate (24) consisting preferably of sound-absorbing material.
  10. An arrangement according to any one of Claims 2 to 9, characterised in that the cover part (15) consists of sound-absorbing material, and preferably forms the lower limit of a return air guideway (18).
  11. An arrangement according to Claim 10, characterised in that the return air guideway (18) is bounded towards the top by another cover part (17) preferably consisting of sound-absorbing material.
  12. An arrangement according to Claim 11, characterised in that a cool air connection (11) is provided in the other cover part (17) and is arranged preferably vertically above the suction side of the ventilator (9).
  13. An arrangement according to Claim 12, characterised in that the cool air flowing through the cool air connection (11) flows transversely, preferably at right angles, to the return air (25).
  14. An arrangement according to any one of Claims 1 to 13, characterised in that the arrangement (8) takes the form of a module.
  15. An arrangement according to any one of Claims 1 to 14, characterised in that the boundary walls (13a to 13d, 20a to 20d, 22a to 22d) are arranged on supports (14).
  16. An arrangement according to any one of Claims 1 to 14, characterised in that the boundary walls (13a to 13d, 20a to 20d, 22a to 22d) are secured to the cover part (15) so as to be suspended.
  17. An arrangement according to any one of Claims 1 to 16, characterised in that the annular channels are coaxial to each other.
  18. An arrangement according to any one of Claims 1 to 17, characterised in that the annular channels (21, 23) have a quadrilateral outline.
EP92101413A 1991-02-01 1992-01-29 Filter-ventilator-arrangement for application in clean rooms Expired - Lifetime EP0497296B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4103026 1991-02-01
DE4103026A DE4103026C1 (en) 1991-02-01 1991-02-01
DE4133093A DE4133093A1 (en) 1991-10-05 1991-10-05 Filter ventilator
DE4133093 1991-10-05

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EP0497296A2 EP0497296A2 (en) 1992-08-05
EP0497296A3 EP0497296A3 (en) 1993-04-14
EP0497296B1 true EP0497296B1 (en) 1996-04-03

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US (1) US5297990A (en)
EP (1) EP0497296B1 (en)
DE (1) DE59205885D1 (en)
ES (1) ES2085499T3 (en)
FI (1) FI98158C (en)
IE (1) IE74881B1 (en)

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Publication number Priority date Publication date Assignee Title
WO2018113855A1 (en) 2016-12-23 2018-06-28 Ziehl-Abegg Se Fan module and arrangement of one or more such fan modules in a flow duct
DE102016226157A1 (en) 2016-12-23 2018-06-28 Ziehl-Abegg Se Fan module and arrangement of one or more such fan modules in a flow channel
US11371730B2 (en) 2016-12-23 2022-06-28 Ziehl-Abegg Se Fan system and arrangement of one or more such fan systems in a flow duct

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Publication number Publication date
FI920433A (en) 1992-08-02
EP0497296A2 (en) 1992-08-05
FI98158C (en) 1997-04-25
DE59205885D1 (en) 1996-05-09
ES2085499T3 (en) 1996-06-01
FI920433A0 (en) 1992-01-31
FI98158B (en) 1997-01-15
IE74881B1 (en) 1997-08-13
IE920336A1 (en) 1992-08-12
EP0497296A3 (en) 1993-04-14
US5297990A (en) 1994-03-29

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