EP0497296A2 - Installation de filtre-ventilateur pour l'utilisation dans des salles blanches - Google Patents

Installation de filtre-ventilateur pour l'utilisation dans des salles blanches Download PDF

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Publication number
EP0497296A2
EP0497296A2 EP92101413A EP92101413A EP0497296A2 EP 0497296 A2 EP0497296 A2 EP 0497296A2 EP 92101413 A EP92101413 A EP 92101413A EP 92101413 A EP92101413 A EP 92101413A EP 0497296 A2 EP0497296 A2 EP 0497296A2
Authority
EP
European Patent Office
Prior art keywords
return air
fan
filter
heat exchanger
ceiling part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92101413A
Other languages
German (de)
English (en)
Other versions
EP0497296A3 (en
EP0497296B1 (fr
Inventor
Manfred Dr. Renz
Helmut Bauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meissner and Wurst GmbH and Co
Original Assignee
Meissner and Wurst GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE4103026A external-priority patent/DE4103026C1/de
Priority claimed from DE4133093A external-priority patent/DE4133093A1/de
Application filed by Meissner and Wurst GmbH and Co filed Critical Meissner and Wurst GmbH and Co
Publication of EP0497296A2 publication Critical patent/EP0497296A2/fr
Publication of EP0497296A3 publication Critical patent/EP0497296A3/de
Application granted granted Critical
Publication of EP0497296B1 publication Critical patent/EP0497296B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S454/00—Ventilation
    • Y10S454/906—Noise inhibiting means

Definitions

  • the invention relates to a filter fan device for use in clean rooms according to the preamble of claims 1 and 20 respectively.
  • the invention has for its object to design the generic filter-fan device so that it has a high noise insulation, uniform flow distribution and low flow losses with a compact design and has a low energy requirement.
  • the flow space is designed as an annular channel, which, due to its annular design, only has to have a small height.
  • the device according to the invention can be made very compact.
  • With the ring channel a uniform flow distribution and a uniform speed over the filter surface is possible, so that the air can enter the clean room underneath evenly through the filter.
  • As a result of the ring channel only very short flow paths are provided, which also results in low flow losses and, accordingly, only a low energy requirement.
  • the return air sucked in by the fan flows through the heat exchanger before it reaches the fan and emits heat in the process.
  • the return air is sufficiently cooled before entering the clean room, which is located in the area below the filter fan device.
  • the heat exchanger is advantageously arranged in the area of the inlet opening for a return air duct of the device according to the invention. Then the pressure losses are low due to the low flow velocities prevailing here, so that only a low energy requirement of the device is necessary.
  • the filter-fan units according to FIGS. 1 to 6 are characterized by high noise insulation and a uniform flow distribution with a compact design.
  • the units can be used by all clean room users, for example in medicine, in pharmacy, in biotechnology, in electronics and in semiconductor technology.
  • the filter units are particularly suitable for small clean room areas, for subsequent installation of existing clean room areas and for local clean rooms.
  • With the units clean rooms can be modularly and thus flexibly constructed so that the clean room areas can be changed and / or supplemented at any time, for example as a result of technical progress. In this way, extensions, conversions or improvements to the clean room class can be carried out quickly and inexpensively.
  • FIG. 1 shows a clean room 1 which has a floor 2 which is permeable to air. It lies at a distance above an air-impermeable floor 3 which, together with the permeable floor 2, delimits a return air duct 4.
  • a process device 5 is located in the clean room 1.
  • the clean room 1 is delimited at the top by a ceiling 6, which is formed in a grid shape by filters 7 of the filter fan units 8.
  • the filter-fan units 8 are designed as modules which are arranged side by side and one behind the other to form the grid ceiling 6.
  • the individual filter-fan units 8 can advantageously be replaced individually quickly, so that any repairs or maintenance can be carried out easily and quickly.
  • Each unit 8 has at least one fan 9, with which cooling air 10 and return air 25 (FIG. 2) are drawn in and conveyed through the filter 7 into the clean room 1.
  • the filtered air flows at least approximately laminar vertically downwards to the bottom 2, passes through it and is deflected at the lower, closed bottom 3 and flows outwards in the return air duct 4 (cf. arrows in FIG. 1).
  • each filter-fan unit 8 is provided with a cooling air connection 11. 1 shows schematically, several cooling air connections 11 are each connected to a common supply line 12.
  • the filter-fan units 8 which are designed as modules, are each advantageously identical. They will be explained in detail with reference to FIGS. 2 and 3.
  • the unit 8 has an approximately square outline in the exemplary embodiment, but can also have a rectangular or any other suitable outline.
  • the square or rectangular outline has the advantage that the ceiling of the clean room 1 can be constructed in a grid form from only a few units 8.
  • the unit 8 has an outer wall 13 which is formed from four wall parts 13a to 13d which are placed at right angles to one another. They extend from a support 14 (Fig. 2) upwards.
  • the support 14 can be formed by rails, rods or the like.
  • a horizontal ceiling part 15 is placed on the wall parts 13a to 13d and has the same outline as the unit 8.
  • the ceiling part 15 has an opening 16 into which the fan 9 is inserted. It projects downwards over the ceiling part 15.
  • a further ceiling part 17 is provided, which is parallel to the ceiling part 15 and together with this delimits a return air duct 18.
  • the ceiling part 17 can have the same outline as the ceiling part 15 and is held along its circumference by spacers 19 at a distance from the ceiling part 15.
  • the ceiling part 17 is preferably slightly smaller than the ceiling part 15. This facilitates the intake of the return air.
  • the ceiling part 17 can of course also have a different outline than the ceiling part 15.
  • the spacers 19 are provided with inlet openings (not shown) for the return air.
  • the ceiling part 17 is provided centrally with the cooling air connection 11, which is designed as a connecting piece to which the supply line 12 (FIG. 1) can be connected.
  • the cooling air connection 11 is thus at a distance above the fan 9 (Fig. 2).
  • the cooling air connection 11 advantageously does not protrude into the return air duct 18, but lies flush with the underside of the ceiling part 17.
  • the fan 9 preferably does not protrude into the return air duct 18, but lies flush with the one Ceiling part 17 facing the top of the ceiling part 15.
  • intermediate walls 20a to 20d are provided, which run parallel to the wall parts 13a to 13d and also extend upwards from the support 14. However, they end at a distance from the ceiling part 15 (Fig. 2).
  • the intermediate walls 20a to 20d have the same height and are thicker than the outer wall parts 13a to 13d in the exemplary embodiment.
  • a square annular channel 21 is formed between the intermediate walls 20a to 20d and the outer wall parts 13a to 13d, in which the air sucked in by the fan 9 flows downwards in the direction of the filter 7.
  • inner wall parts 22a to 22d are arranged at a distance from the intermediate walls 20a to 20d, which also extend upwards from the support 14 and parallel to the intermediate walls. They have a lower height than the intermediate walls 20a to 20d (FIG. 2).
  • the inner wall parts 22a to 22d in turn adjoin one another at right angles and, together with the intermediate walls 20a to 20d, delimit a further square annular channel 23 (FIG. 3).
  • the inner wall parts 22a to 22d viewed in plan view, surround the fan 9 at a short distance.
  • the space enclosed by the inner wall parts 22a to 22d is closed by a plate 24 in the direction of the filter 7. 3 shows, the plate 24 fills the interior enclosed by the wall parts 22a to 22d. As shown in FIG. 2, the plate 24 is fastened approximately halfway up the inside of the wall parts 22a to 22d.
  • All wall parts 13a to 13d, 20a to 20d and 22a to 22d are fastened on the support 14, which can be formed by profiled rails or the like. It is also possible to hang the wall parts 13a to 13d, 20a to 20d, 22a to 22d hanging on the ceiling part 15, for example with threaded rods.
  • the filter 7 is provided, which is either part of the unit or a separate component that is connected to the unit during assembly.
  • All wall parts 13a to 13a, 20a to 20d, 22a to 22d consist of sound-absorbing material, such as mineral wool, foams or the like.
  • the ceiling parts 15 and 17 also consist of sound-insulating material. This results in a very high level of noise insulation for the filter-fan unit 8.
  • the plate 24 also advantageously consists of sound-absorbing material. Since the individual walls are composed of wall parts, they can be assembled from prefabricated parts. As a result, only individual wall parts can be replaced if necessary, so that the entire wall does not have to be replaced if only one wall part is damaged or worn.
  • the wall parts 13a to 13d, 20a to 20d and 22a to 22d can also each be formed in one piece.
  • the filter 7 is made of conventional material and can be designed so that it is suitable for clean rooms up to at least class 1.
  • Cooling air is sucked in centrally by the fan 9 via the cooling air connection 11 (FIG. 2).
  • the return air (arrows 25) is drawn in by the fan 9 via the return air duct 18. Since the cooling air 11 is sucked in centrally to the fan 9 and the return air is drawn in transversely thereto, the cooling air is mixed well with the return air 25, as a result of which a rapid temperature compensation is also achieved.
  • the sucked-in air is guided by the fan 9 in the direction of the arrows in FIG. 2 into the ring channels 21 and 23 and is directed vertically downwards to the filter 7 in them. After passing through the filter 7, the cleaned air enters the clean room 1 (FIG. 1).
  • the gradation of the wall parts 13a to 13d, 20a to 20d and 22a to 22d is selected in such a way that a uniform speed is achieved across the filter surface.
  • This filter-fan unit 8 is thus distinguished by a uniform flow distribution with a compact design and high noise insulation.
  • the flow paths from the fan 9 to the filter 7 are extremely short due to the ring channel, so that there are only very small flow losses and therefore only a very low energy requirement.
  • the individual wall parts can be relatively low, so that in addition to the advantage of low flow losses, the unit 8 is also made extremely compact. Since the fan 9 is arranged centrally, there is a uniform flow over the circumference of the ring channels 21 and 23.
  • the filter-fan unit 8 can be suspended from the ceiling or used in a grid ceiling.
  • the units 8 can be used individually as well as modular to clean rooms of any size. Maintenance work on the units 8 only slightly affect clean room operation.
  • the individual filter-fan units 8 can be replaced individually quickly from below or from above.
  • the filter 7 can be changed from below.
  • the fans 9 are accessible from below, but also from above. This allows maintenance work to be carried out on walk-in units without having to shut down the entire clean room 1.
  • small and large clean rooms can be constructed inexpensively.
  • retrofitting with the filter-fan units 8 designed as modules is also possible at low cost. As a result of their compact design, the filter-fan units 8 also have only a low weight, so that simple assembly is possible. In addition, the ceiling load is relatively low.
  • the filter-fan unit 8 has only one ring channel, which is delimited by the outer wall parts 13a to 13d and the inner wall parts 22a to 22d.
  • Such a unit is even more compact and still has all the advantages with regard to high noise insulation, uniform flow distribution and low interference losses. It is sufficient here if only one boundary wall, that is to say the wall parts 13a to 13d or the wall parts 22a to 22d, consist of sound-absorbing material.
  • all wall parts consist of sound-absorbing material, so that very high noise insulation is achieved.
  • the filter-fan unit 8 can also have more than two ring channels.
  • are appropriate more wall parts are provided, which in turn are coordinated in height so that the wall height decreases from the outside inwards. This gradation is again chosen so that a uniform flow velocity of the air over the filter surface is achieved.
  • the units 8 can thus be very easily adapted to the respective applications by merely providing a different number of wall parts. All variants are characterized by the high noise insulation, the uniform flow distribution, the compact design, the low flow loss and the low weight.
  • the units 8 and the wall parts can also have any other suitable outline, for example a round outline.
  • Fig. 4 shows a clean room 1a, which has an air-permeable floor 2a. It lies at a distance above an air-impermeable floor 3a which, together with the permeable floor 2a, delimits a return air duct 4a.
  • a process device 5a is located in the clean room 1a.
  • the clean room 1a is delimited at the top by a ceiling 6a which is formed in a grid-like manner by filters 7a of the filter fan units 8a. They are designed as modules which are arranged side by side and one behind the other to form the grid ceiling 6a.
  • the individual filter fan units 8a can advantageously be replaced individually quickly, so that any repairs or maintenance can be carried out easily and quickly.
  • Each unit 8a has at least one fan 9a with which Return air 25a (FIGS. 4 and 5) is sucked in and conveyed through the filter 7a into the clean room 1a.
  • the filtered air flows at least approximately laminarly vertically downward to the bottom 2a, passes through it and is deflected at the lower, closed bottom 3a and flows outward in the return air duct 4a (see arrow in FIG. 4).
  • the filtered air can of course also flow turbulently through the clean room 1a, also in the embodiment according to FIGS. 1 to 3.
  • the filter-fan units 8a which are designed as modules, are each advantageously identical. They will be explained in detail with reference to FIGS. 5 and 6.
  • the unit 8a has an approximately square outline, but can also have a rectangular or any other suitable, for example round, outline.
  • the square or rectangular outline shape has the advantage that the ceiling of the clean room 1a can be constructed in a grid form from only a few units 8a.
  • the unit 8a has an outer wall 13a which is formed from four wall parts (not shown) which are placed at right angles to one another. They extend upwards from a support 14a (FIG. 5).
  • the support 14a can be formed by rails, rods or the like.
  • a horizontal ceiling part 15a is placed on the wall parts of the outer wall 13a 'and has the same outline as the unit 8a.
  • the ceiling part 15a has an opening 16a (FIGS. 5 and 6) into which the fan 9a is inserted. It projects downward over the ceiling part 15a.
  • a further ceiling part 17a is provided at a distance above the ceiling part 15a, which lies parallel to the ceiling part 15a and together with this delimits a return air duct 18a.
  • the ceiling part 17a can have the same outline as the ceiling part 15a and is held in the region of its circumference by spacers 19a (FIG. 6) at a distance from the ceiling part 15a.
  • the spacers 19a are provided at the corners of the ceiling part 17a and are preferably formed by upright angle pieces.
  • the spacers 19a can also have any other suitable design.
  • the ceiling part 17a is preferably slightly smaller than the ceiling part 15a. This makes it easier to draw in the return air.
  • the ceiling part 17a can of course also have a different outline than the ceiling part 15a.
  • the fan 9a advantageously does not protrude into the return air duct 18a, but lies flush with the top of the ceiling part 15a facing the ceiling part 17a.
  • an intermediate wall 20a' is provided which runs parallel to the outer wall 13a 'and also extends upwards from the support 14a.
  • the intermediate wall 20a ' is formed when the unit 8a is of an angular design, butting wall parts.
  • the intermediate wall 20a ' ends at a distance from the ceiling part 15a (FIG. 5).
  • the intermediate wall 20a ' has the same height over its circumference and is thicker than the outer wall 13a' in the exemplary embodiment.
  • An annular channel 21a is formed between the intermediate wall 20a 'and the outer wall 13a', in which the air sucked in by the fan 9a flows downwards in the direction of the filter 7a.
  • an inner wall 22a' is arranged at a distance from the intermediate wall 20a ', which likewise extends upwards and parallel from the support 14a extends to the intermediate wall 20a '. It has a lower height than the intermediate wall 20a '(FIG. 5).
  • the inner wall 22a ' is formed by abutting wall parts which, together with the intermediate wall 20a', delimit a further annular channel 23a.
  • the inner wall 22a ′ surrounds the fan 9a at a small distance, as seen in a plan view of the filter-fan unit 8a.
  • the space enclosed by the inner wall 22a ' is closed by a plate 24a in the direction of the filter 7a.
  • the plate 24a fills the interior enclosed by the inner wall 22a '.
  • the plate 24a is attached to the inside of the inner wall 22a 'approximately halfway up.
  • the filter 7a is provided, which is either part of the filter-fan unit 8a or a separate component that is connected to the unit during assembly.
  • all walls 13 ', 20a' and 22a ' are made of sound-absorbing material, such as mineral wool, foam or the like.
  • the ceiling parts 15a and 17a also consist of sound-absorbing material. This results in a very high level of noise insulation for the filter-fan unit 8a.
  • the plate 24a also advantageously consists of sound-absorbing material. Since the individual walls 13a ', 20a' and 22a 'are composed of wall parts, they can be assembled from prefabricated parts. This means that only individual wall parts can be used if required replace so that the entire wall does not have to be replaced if only one part of the wall is damaged or worn. Of course, the wall parts of the walls 13a ', 20a' and 22a 'can also be formed in one piece with one another.
  • the walls of the filter-fan unit 8 do not have to be made of sound-absorbing material. Conventional materials such as sheet metal or the like can be used for the walls.
  • the filter 7a is made of conventional material.
  • the units 8a can thus be used for all classes of clean rooms.
  • the return air 25a is drawn in by the fan 9a via the return air duct 18a.
  • the sucked-in air is guided by the fan 9a in the direction of the arrows in FIG. 5 into the ring channels 21a and 23a and is directed in them vertically downwards to the filter 7a.
  • the cleaned air After passing through the filter 7, the cleaned air enters the clean room 1a (FIG. 4).
  • the gradation of the walls 13a ', 20a' and 22a ' is selected in such a way that a uniform speed is achieved across the filter surface.
  • This filter-fan unit 8a is thus characterized by an even flow distribution with a compact design and high noise insulation.
  • the flow paths from the fan 9a to the filter 7a are extremely short as a result of the ring channels 21a, 23a, so that there are only slight flow losses and thus only a very low energy requirement.
  • the walls can be relatively low, so that, in addition to the advantage of low flow losses, the unit 8a is also made extremely compact. Since the fan 9 is arranged centrally, it results a uniform flow over the circumference of the ring channels 21a and 23a.
  • the return air 25a is sucked in on all sides by the fan 9a into the return air duct 18a.
  • a heat exchanger 27 via which the return air 25a is guided as it enters the return air duct 18a.
  • the heat exchanger 27 is preferably formed by a tube through which cooling medium flows, on which fins extending at intervals from one another and perpendicular to the tube axis are seated.
  • the tube has a connection end 28 (FIG.
  • the heat exchanger 27 can also be arranged at a distance from the inlet openings 26 within the return air duct 18a. In this case, however, higher inflow velocities and thus higher pressure losses occur, which increases the energy requirement of this unit.
  • an inlet opening 26 for the return air can be provided only on one side of the unit 8a, while a closed wall or a reduced free cross section is provided on the remaining sides between the two ceiling parts 15a and 17a.
  • the heat exchanger 27 is provided only on one side of the unit 8a.
  • the return air duct can also be designed such that the return air 25a is not sucked in laterally into the return air duct 18a, but rather that the ceiling part 17a has at least one suction opening for the return air 25a. In this case, these suction openings are advantageously located in the edge region of the ceiling part 17a.
  • the heat exchanger 27 is then arranged so that the return air 25a must flow through the heat exchanger on its way to the fan 9a.
  • the return air 25a When flowing past the heat exchanger 27, the return air 25a gives off heat to the heat exchanger 27 and is cooled accordingly.
  • the degree of cooling of the return air 25a is set by the corresponding temperature of the cooling medium that flows through the heat exchanger.
  • a heat medium can also flow through the heat exchanger 27 if this should be necessary for the particular application of the filter-fan unit 8a.
  • the filter-fan unit 8a has two ring channels 21a and 23a. In the simplest embodiment, only a single ring channel is provided, which is delimited by the outer wall 13a 'and the inner wall 22a'. Such a unit 8a is of extremely compact design and nevertheless has all the advantages with regard to the uniform flow distribution, the low flow losses and the very low energy requirement. If a high level of noise insulation is important, both walls 13a 'and 22a' again consist of sound-absorbing material. With lower requirements with regard to noise insulation, it is sufficient if only one boundary wall 13a 'or 20a' is made of sound-absorbing material.
  • the filter-fan unit 8a can also have more than two ring channels. In this case, correspondingly more walls are provided, the height of which is in turn coordinated with one another in such a way that the wall height decreases from the outside inwards. This gradation is chosen so that a uniform flow velocity of the air over the filter surface is achieved.
  • the units 8a can thus be very easily adapted to the particular application. All variants are characterized by the uniform flow distribution, the compact design, the low flow loss, the low weight and by a very low energy requirement.
  • the cover part 17a can rest on the heat exchanger 27, so that there is no need for separate spacers 19a. So that the heat exchanger 27 can be easily replaced or is easily accessible for maintenance work, the ceiling part 17a is detachably arranged.
  • each heat exchanger 27 has an inlet and an outlet for the cooling or heating medium.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
EP92101413A 1991-02-01 1992-01-29 Installation de filtre-ventilateur pour l'utilisation dans des salles blanches Expired - Lifetime EP0497296B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4103026A DE4103026C1 (fr) 1991-02-01 1991-02-01
DE4103026 1991-02-01
DE4133093 1991-10-05
DE4133093A DE4133093A1 (de) 1991-10-05 1991-10-05 Filter-ventilator-einrichtung zur verwendung bei reinraeumen

Publications (3)

Publication Number Publication Date
EP0497296A2 true EP0497296A2 (fr) 1992-08-05
EP0497296A3 EP0497296A3 (en) 1993-04-14
EP0497296B1 EP0497296B1 (fr) 1996-04-03

Family

ID=25900684

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92101413A Expired - Lifetime EP0497296B1 (fr) 1991-02-01 1992-01-29 Installation de filtre-ventilateur pour l'utilisation dans des salles blanches

Country Status (6)

Country Link
US (1) US5297990A (fr)
EP (1) EP0497296B1 (fr)
DE (1) DE59205885D1 (fr)
ES (1) ES2085499T3 (fr)
FI (1) FI98158C (fr)
IE (1) IE74881B1 (fr)

Cited By (4)

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EP0743578A1 (fr) * 1995-05-19 1996-11-20 Meissner & Wurst GmbH & Co. Lufttechnische Anlagen Gebäude- und Verfahrenstechnik Aménagement de salle blanche
WO1999002926A1 (fr) * 1997-06-27 1999-01-21 ABB Fläkt AB Module de type ventilateur destine a des applications en salles propres
AU752348B2 (en) * 2000-05-16 2002-09-19 Lg Electronics Inc. Structure and method for attenuating noise from outdoor unit of air conditioner
CN110100102A (zh) * 2016-12-23 2019-08-06 施乐百有限公司 风扇模块和一个或多个这种风扇模块在流动管道中的布置

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DE19511158C2 (de) * 1995-03-27 2000-01-27 Meissner & Wurst Ventilatoreinheit für Reinräume
DE19518455C2 (de) * 1995-05-19 1998-07-02 Sfb Planungs Und Handelsgesell Schlauchbandförderer
JPH0960942A (ja) * 1995-08-25 1997-03-04 Mitsubishi Electric Corp 送風機
JP3090088B2 (ja) * 1997-02-07 2000-09-18 富士電機株式会社 クリーンルームのファンフィルタユニット
US6319297B1 (en) * 1998-03-27 2001-11-20 Asyst Technologies, Inc. Modular SMIF pod breather, adsorbent, and purge cartridges
US7630198B2 (en) * 2006-03-08 2009-12-08 Cray Inc. Multi-stage air movers for cooling computer systems and for other uses
US6383241B1 (en) 2000-02-16 2002-05-07 Battelle Memorial Institute Protective filtration system for enclosures within buildings
DE10019543C2 (de) * 2000-04-20 2002-03-07 Fraunhofer Ges Forschung Zuluftelement
US7137775B2 (en) * 2003-03-20 2006-11-21 Huntair Inc. Fan array fan section in air-handling systems
US11255332B2 (en) * 2003-03-20 2022-02-22 Nortek Air Solutions, Llc Modular fan housing with multiple modular units having sound attenuation for a fan array for an air-handling system
US7597534B2 (en) 2003-03-20 2009-10-06 Huntair, Inc. Fan array fan section in air-handling systems
US20050211190A1 (en) * 2004-02-26 2005-09-29 Weinblatt Richard C Device for keeping pets' ears clean or substantially clean
US7434657B2 (en) * 2004-05-11 2008-10-14 H-P Products, Inc. Acoustic foam sound reducer for vacuum power unit
US7314113B2 (en) * 2004-09-14 2008-01-01 Cray Inc. Acoustic absorbers for use with computer cabinet fans and other cooling systems
US7320721B2 (en) * 2005-03-17 2008-01-22 Samsung Electronics Co., Ltd. Chemical filter and fan filter unit having the same
JP2006263688A (ja) * 2005-03-25 2006-10-05 Seiko Epson Corp ファン・フィルタユニットおよびこれを備えたクリーンブース
EP1913310A1 (fr) * 2005-07-29 2008-04-23 BSH Bosch und Siemens Hausgeräte GmbH Systeme d'insonorisation, en particulier pour un appareil menager
DE102005062523A1 (de) * 2005-12-19 2007-06-21 M+W Zander Holding Ag Filter-Ventilator-Einheit
EP1916161B1 (fr) * 2006-10-20 2011-01-12 MANN+HUMMEL GmbH Système de filtration pour un moteur à combustion interne dans un véhicule automobile
US20090154091A1 (en) * 2007-12-17 2009-06-18 Yatskov Alexander I Cooling systems and heat exchangers for cooling computer components
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WO1999002926A1 (fr) * 1997-06-27 1999-01-21 ABB Fläkt AB Module de type ventilateur destine a des applications en salles propres
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CN110100102A (zh) * 2016-12-23 2019-08-06 施乐百有限公司 风扇模块和一个或多个这种风扇模块在流动管道中的布置

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US5297990A (en) 1994-03-29
FI98158C (fi) 1997-04-25
EP0497296A3 (en) 1993-04-14
IE920336A1 (en) 1992-08-12
IE74881B1 (en) 1997-08-13
ES2085499T3 (es) 1996-06-01
FI920433A (fi) 1992-08-02
FI98158B (fi) 1997-01-15
DE59205885D1 (de) 1996-05-09
EP0497296B1 (fr) 1996-04-03
FI920433A0 (fi) 1992-01-31

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