EP0234989B1 - Herstellungsverfahren einer feldeffektangeregten Kathodenlumineszenz-Wiedergabevorrichtung - Google Patents
Herstellungsverfahren einer feldeffektangeregten Kathodenlumineszenz-Wiedergabevorrichtung Download PDFInfo
- Publication number
- EP0234989B1 EP0234989B1 EP87400140A EP87400140A EP0234989B1 EP 0234989 B1 EP0234989 B1 EP 0234989B1 EP 87400140 A EP87400140 A EP 87400140A EP 87400140 A EP87400140 A EP 87400140A EP 0234989 B1 EP0234989 B1 EP 0234989B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- coating
- process according
- production process
- holes
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 238000005136 cathodoluminescence Methods 0.000 title claims description 8
- 238000003384 imaging method Methods 0.000 title 1
- 238000000034 method Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 10
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052758 niobium Inorganic materials 0.000 claims description 8
- 239000010955 niobium Substances 0.000 claims description 8
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 230000008030 elimination Effects 0.000 claims description 6
- 238000003379 elimination reaction Methods 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 5
- 238000001312 dry etching Methods 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims 29
- 239000011248 coating agent Substances 0.000 claims 27
- 239000004411 aluminium Substances 0.000 claims 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 239000011347 resin Substances 0.000 description 13
- 229920005989 resin Polymers 0.000 description 13
- 229910003437 indium oxide Inorganic materials 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 230000008021 deposition Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000009304 pastoral farming Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- WHJFNYXPKGDKBB-UHFFFAOYSA-N hafnium;methane Chemical compound C.[Hf] WHJFNYXPKGDKBB-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
Definitions
- the present invention relates to a method of manufacturing a display device by cathodoluminescence excited by field emission or cold emission. It applies in particular to the production of simple matrix displays, allowing the viewing of fixed images, and to the production of complex multiplexed screens, allowing the viewing of moving images, of the television image type.
- This display device comprises a display cell 2, sealed and evacuated, comprising two glass walls 4 and 6, located opposite one another.
- the lower wall 6 of the cell 2 is equipped with a first series of conductive strips 8, mutually parallel, playing the role of cathodes and a second series of conductive strips 10, parallel to each other, playing the role of grids.
- the conductive strips 10 are oriented perpendicular to the conductive strips 8 and isolated from the conductive strips 8 by an insulating and continuous layer 12, in particular made of silica.
- the conductive strips 8 and 10 respectively represent columns and rows. Each crossing of a line and a column corresponds to an elementary display point 14.
- the conductive strips or grids 10 and the insulating layer 12 are pierced with a large number of holes 16 in which are housed microemitters or electron microchannels.
- Each elementary display point 14 corresponds to a multitude of micro-transmitters.
- microemitters each consist of a metal cone 18 emitting electrons when a suitable electric field is applied to them.
- These metal cones 18 rest by their base directly on the cathodes 8 and the top of these cones is substantially at the level of the conductive strips 10.
- the base diameter of the cones and their height are for example of the order of 1 lim.
- the upper wall 4 of the cell 2, as shown in FIG. 1, is provided with a continuous conductive layer 20 acting as an anode.
- This anode 20 is covered with a layer 22 made of a material emitting light when it is subjected to an electronic bombardment coming from the microemitters 18.
- the emission of electrons by a microemitter 18 can be achieved by simultaneously polarizing the cathode 8 and the grids 10 located opposite, as well as the anode 20.
- the anode 20 can in particular be brought to ground, the grids 10 are , either brought to the potential of the anode, or negatively polarized with respect to the latter using a voltage source 24.
- the cathodes 8 are negatively polarized with respect to the grid using a source voltage 26.
- the cathodes 8 and the grids 10 can be polarized sequentially in order to make appear a point-by-point image on the display cell 2. The image is observed from the side of the upper wall 4 of the cell.
- the number of microemitters 18 per display point 14, that is to say by crossing a cathode and a grid, is generally high, which makes it possible to have a more uniform emission characteristic of one display point to another (average effect); this gives a certain redundancy of the microemitters making it possible to tolerate a certain proportion of microemitters not functioning.
- the number of microemitters is between 10 4 and 10 5 transmitters per mm 2 . Consequently, traditional manufacturing, requiring precise positioning of the microemitters facing the cathodes and grids, would be complex and would increase the cost of the display device.
- the object of the present invention is precisely a relatively simple and inexpensive method for manufacturing a display device operating by cathodoluminescence excited by field effect as described above.
- This method has the advantage of simple implementation. In particular, it allows the production of electron microemitters in the holes formed in the second and third layers, distributed over the entire display device, without requiring precise positioning with respect to the cathodes and grids. Only microemitters located at an intersection of a cathode and a grid are effectively active.
- an insulating intermediate layer is advantageously interposed between the substrate and the first conductive layer, in which the cathodes are made.
- the first conductive layer In order to minimize the resistance to access to the microemitters, the first conductive layer must be made of a material that conducts electricity well. Furthermore, this first conductive layer must have good compatibility with the second insulating layer and in particular good adhesion and must be inert with respect to the etching method of this second insulating layer.
- the first conductive layer is made of a material chosen from indium oxide, tin oxide and aluminum. Indium oxide and tin oxide are preferably used for producing screens of small dimensions and of low complexity such as screens used for viewing still images.
- aluminum is preferably used when producing complex multiplexed screens and of large dimensions used in particular for viewing animated images of the television image type.
- the second insulating layer In order to minimize the capacitances between the cathodes and the grids, and therefore to minimize the response time of the microemitters, the second insulating layer must have as low a dielectric constant as possible. To this end, this second insulating layer is preferably made of silicon oxide (Si0 2 ) or silica.
- This silicon oxide layer can be deposited by the chemical vapor deposition (CVD) technique, by sputtering or by vacuum evaporation.
- CVD chemical vapor deposition
- the chemical vapor deposition technique is preferably used, a technique which makes it possible to obtain an oxide layer of uniform quality and of constant thickness.
- the opening of the holes in the insulating layer in particular of silicon oxide, can be carried out by dry or wet etching techniques well known to those skilled in the art.
- the third conductive layer in which the grids are formed must be made of a material having good adhesion to the second insulating layer, for example made of silicon oxide, as well as good chemical resistance to the various products used to make the microemitters.
- the third conductive layer is preferably made of a metal chosen from niobium, tantalum and aluminum.
- this third conductive layer of a size close to one micron, the formation of these holes is advantageously carried out by an anisotropic dry etching technique.
- the fourth layer playing the role of mask for the deposition of the fifth layer is made of metal and in particular nickel.
- the deposition of this fourth layer of nickel is advantageously carried out by evaporation under vacuum at a grazing incidence so as not to cover the holes made in the second and third layers.
- the elimination of this metallic layer is advantageously carried out by electrochemical dissolution.
- the choice of the material of the fifth layer is essentially dictated by these properties with respect to the emission by field effect or cold emission as well as by its chemical resistance to the techniques of deposition and elimination of the fourth layer serving the production of microemitters.
- the electron-emitting material can be hafnium, niobium, molybdenum, zirconium, lanthanum hexaboride (LaB s ), titanium carbide, tantalum carbide, hafnium carbide, carbide zirconium, etc. We choose for example molybdenum.
- the cleaning of the lower substrate 6 is first of all carried out in order to obtain good flatness and a good surface condition to allow optimized production of the microemitters.
- the substrate 6 can be a glass or ceramic plate.
- a layer of silicon oxide (Si0 2 ) 7 of approximately 100 nm is then deposited by sputtering.
- the insulating layer 7 is then covered with a conductive layer 8a of indium oxide in which the cathodes 8 will be produced.
- This layer of indium oxide has a thickness of 160 nm, and can be deposited by sputtering.
- a positive resin mask 11 representing the image of the cathodes to be produced.
- the layer of indium oxide 8a is etched to form, as shown in FIG. 4, cathodes 8 0.7 mm wide at a pitch P of 1 mm.
- the etching of the layer 8a is carried out by chemical attack with orthophosphoric acid brought to 110 ° C.
- the etching of the layer of indium oxide 8a is carried out over the entire thickness of the layer.
- the resin mask is then removed by chemical dissolution. 1 0
- the silicon oxide layer 12 is then deposited, as shown in FIG. 5, by the technique chemical vapor deposition from silane, phosphine and oxygen gases.
- This oxide layer 12 has a thickness of 1 li m.
- the oxide layer 12 is then completely covered with a conductive layer 10a in which the grids will be produced subsequently. 20 this layer 10a is deposited by vacuum evaporation. It has a thickness of 0.4 ⁇ m and is made of niobium.
- a resin mask 13 is then formed on the conductive layer 10a by the conventional photolithography methods 25 (resin deposition, irradiation, development). This resin mask 13 represents the positive image of the holes to be produced in the grid layer 10a and the insulating layer 12.
- the holes 16 are made in the layer of grid material 10a and the insulating layer 12. These holes 16 pass right through the layers 10a and 12.
- the etchings of layers 10a and 12 are produced successively.
- the etching of the layer 10a is carried out by a reactive ion etching (GIR) process using a sulfur hexafluoride plasma (SF 6 ).
- GIR reactive ion etching
- SF 6 sulfur hexafluoride plasma
- the holes 16 made in the conductive layer 10a have a diameter equal to 50 1.31 ⁇ m to ⁇ 0.1 ⁇ m.
- the holes in the silica layer 12 are produced, for example by chemical attack by immersing the structure in an attack solution of hydrofluoric acid and ammonium fluoride.
- the resin mask 55 is chemically removed 55.
- the profile of the holes 16 thus produced is illustrated in FIG. 7.
- a layer of 60 nickel 23 is deposited by evaporation under vacuum at a grazing incidence relative to the surface of the structure; the angle a formed between the axis of evaporation and the surface of the layer 10a is close to 15 ° .
- the nickel layer 23 has a thickness of 150 nm. 6 5 This deposition technique makes it possible not to plug the holes 16.
- a layer of molybdenum 18a is deposited on the entire structure.
- This layer 18a has a thickness of 1.8 ⁇ m. It is deposited under normal incidence relative to the surface of the structure; this deposition technique makes it possible to obtain cones 18 of molybdenum housed in the 1 holes 16 having a height of 1.2 to 1.5 ⁇ m.
- the nickel layer 23 is then selectively dissolved by an electrochemical process so as to release, as shown in FIG. 9, the perforated niobium layer 10a and to reveal the 15 electron-emitting microtips 18.
- etching the layer 10a and an etching of the insulating layer 12 in order to disengage the ends 9 of the cathode 8 to allow a later 20 ment the electrical contacting of these cathodes.
- This etching is carried out through a resin mask (not shown), obtained according to conventional photolithography methods, the resin forming the mask must have a sufficiently high viscosity 25 in order to cover all the holes 16 formed in the niobium layer 10a and the silicon oxide layer 12.
- the etching of the niobium layer 10a is performed as above by a reactive ion etching process 30 and the etching of the silica layer 12 by etching.
- a resin mask 25 is then produced on the structure obtained representing the image of the grids 10 to be produced in the niobium layer 10a.
- This mas- 35 as resin is formed using conventional photolithography methods. Then carried out, through the mask 25, a dry etching of the reactive ionic type with SF 6 so as to release the conductive strips 10 perpendicular to the 40 conductive strips 8.
- the resin mask 25 is then removed by chemical attack.
- the structure obtained after elimination of the mask 25 is that shown in FIG. 11.
- a conductive layer 20 is made of indium oxide (In 2 0 3 ) or tin oxide (Sn0 2 ) by sputtering corresponding to the anode of the display cell 2.
- This layer 20 has a thickness of 50 of the order of 100 nm.
- the anode 20 is then covered with a cathodoluminescent layer 22 by sputtering.
- This layer 22 is made of zinc oxide and has a thickness of 1 wm.
- the substrate 4 covered with the anode 20 and the cathodoluminescent material 55 is then presented above the grids 10.
- a space of 30 to 50 ⁇ m is maintained between the cathodoluminescent material 22 and the grids 10 by means of spacers glass 27 randomly distributed.
- the periphery of the anode 20 is hermetically welded to the lower part of the cell, by means of a fusible glass 29. The assembly obtained is then placed under vacuum.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Cold Cathode And The Manufacture (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8601024 | 1986-01-24 | ||
FR8601024A FR2593953B1 (fr) | 1986-01-24 | 1986-01-24 | Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0234989A1 EP0234989A1 (de) | 1987-09-02 |
EP0234989B1 true EP0234989B1 (de) | 1990-09-05 |
Family
ID=9331463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87400140A Expired - Lifetime EP0234989B1 (de) | 1986-01-24 | 1987-01-21 | Herstellungsverfahren einer feldeffektangeregten Kathodenlumineszenz-Wiedergabevorrichtung |
Country Status (5)
Country | Link |
---|---|
US (1) | US4857161A (de) |
EP (1) | EP0234989B1 (de) |
JP (1) | JPH07111869B2 (de) |
DE (1) | DE3764668D1 (de) |
FR (1) | FR2593953B1 (de) |
Families Citing this family (156)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8720792D0 (en) * | 1987-09-04 | 1987-10-14 | Gen Electric Co Plc | Vacuum devices |
FR2623013A1 (fr) * | 1987-11-06 | 1989-05-12 | Commissariat Energie Atomique | Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source |
FR2634059B1 (fr) * | 1988-07-08 | 1996-04-12 | Thomson Csf | Microcomposant electronique autoscelle sous vide, notamment diode, ou triode, et procede de fabrication correspondant |
FR2637123B1 (fr) * | 1988-09-26 | 1995-12-15 | Commissariat Energie Atomique | Vidicon plat a lecture matricielle par cathodes a micropointes |
GB8908871D0 (en) * | 1989-04-19 | 1989-06-07 | Hugle William B | Manufacture of flat panel displays |
FR2647580B1 (fr) * | 1989-05-24 | 1991-09-13 | Clerc Jean | Dispositif d'affichage electroluminescent utilisant des electrons guides et son procede de commande |
US5160871A (en) * | 1989-06-19 | 1992-11-03 | Matsushita Electric Industrial Co., Ltd. | Flat configuration image display apparatus and manufacturing method thereof |
US5007873A (en) * | 1990-02-09 | 1991-04-16 | Motorola, Inc. | Non-planar field emission device having an emitter formed with a substantially normal vapor deposition process |
US5047830A (en) * | 1990-05-22 | 1991-09-10 | Amp Incorporated | Field emitter array integrated circuit chip interconnection |
FR2663462B1 (fr) * | 1990-06-13 | 1992-09-11 | Commissariat Energie Atomique | Source d'electrons a cathodes emissives a micropointes. |
US5103145A (en) * | 1990-09-05 | 1992-04-07 | Raytheon Company | Luminance control for cathode-ray tube having field emission cathode |
JP2656851B2 (ja) * | 1990-09-27 | 1997-09-24 | 工業技術院長 | 画像表示装置 |
US5332627A (en) * | 1990-10-30 | 1994-07-26 | Sony Corporation | Field emission type emitter and a method of manufacturing thereof |
GB9027618D0 (en) * | 1990-12-20 | 1991-02-13 | Smiths Industries Plc | Displays |
FR2716571B1 (fr) * | 1994-02-22 | 1996-05-03 | Pixel Int Sa | Procédé de fabrication de cathode d'écran fluorescent à micropointes et produit obtenu par ce procédé . |
US5245248A (en) * | 1991-04-09 | 1993-09-14 | Northeastern University | Micro-emitter-based low-contact-force interconnection device |
US5220725A (en) * | 1991-04-09 | 1993-06-22 | Northeastern University | Micro-emitter-based low-contact-force interconnection device |
US5660570A (en) * | 1991-04-09 | 1997-08-26 | Northeastern University | Micro emitter based low contact force interconnection device |
DE69208154T2 (de) * | 1991-06-10 | 1996-08-29 | Motorola Inc | Anzeigesystem für elektronische Einrichtungen |
CA2070478A1 (en) * | 1991-06-27 | 1992-12-28 | Wolfgang M. Feist | Fabrication method for field emission arrays |
FR2679653B1 (fr) * | 1991-07-23 | 1993-09-24 | Commissariat Energie Atomique | Vacumetre a ionisation. |
US5227699A (en) * | 1991-08-16 | 1993-07-13 | Amoco Corporation | Recessed gate field emission |
US5536193A (en) * | 1991-11-07 | 1996-07-16 | Microelectronics And Computer Technology Corporation | Method of making wide band gap field emitter |
US5696028A (en) * | 1992-02-14 | 1997-12-09 | Micron Technology, Inc. | Method to form an insulative barrier useful in field emission displays for reducing surface leakage |
US5548185A (en) * | 1992-03-16 | 1996-08-20 | Microelectronics And Computer Technology Corporation | Triode structure flat panel display employing flat field emission cathode |
US6127773A (en) * | 1992-03-16 | 2000-10-03 | Si Diamond Technology, Inc. | Amorphic diamond film flat field emission cathode |
US5679043A (en) * | 1992-03-16 | 1997-10-21 | Microelectronics And Computer Technology Corporation | Method of making a field emitter |
US5675216A (en) * | 1992-03-16 | 1997-10-07 | Microelectronics And Computer Technololgy Corp. | Amorphic diamond film flat field emission cathode |
US5449970A (en) * | 1992-03-16 | 1995-09-12 | Microelectronics And Computer Technology Corporation | Diode structure flat panel display |
US5763997A (en) * | 1992-03-16 | 1998-06-09 | Si Diamond Technology, Inc. | Field emission display device |
US5686791A (en) * | 1992-03-16 | 1997-11-11 | Microelectronics And Computer Technology Corp. | Amorphic diamond film flat field emission cathode |
US5543684A (en) | 1992-03-16 | 1996-08-06 | Microelectronics And Computer Technology Corporation | Flat panel display based on diamond thin films |
EP0564028B1 (de) * | 1992-04-02 | 1997-07-16 | Koninklijke Philips Electronics N.V. | Verfahren zum Herstellen einer zugespitzten Elektrode |
US5278475A (en) * | 1992-06-01 | 1994-01-11 | Motorola, Inc. | Cathodoluminescent display apparatus and method for realization using diamond crystallites |
JPH06310043A (ja) * | 1992-08-25 | 1994-11-04 | Sharp Corp | 電子放出デバイス |
EP0589523B1 (de) * | 1992-09-25 | 1997-12-17 | Koninklijke Philips Electronics N.V. | Anzeigevorrichtung |
US5347292A (en) * | 1992-10-28 | 1994-09-13 | Panocorp Display Systems | Super high resolution cold cathode fluorescent display |
CA2112180C (en) * | 1992-12-28 | 1999-06-01 | Yoshikazu Banno | Electron source and manufacture method of same, and image forming device and manufacture method of same |
US5717285A (en) * | 1993-03-17 | 1998-02-10 | Commissariat A L 'energie Atomique | Microtip display device having a current limiting layer and a charge avoiding layer |
FR2707795B1 (fr) * | 1993-07-12 | 1995-08-11 | Commissariat Energie Atomique | Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes. |
US5378182A (en) * | 1993-07-22 | 1995-01-03 | Industrial Technology Research Institute | Self-aligned process for gated field emitters |
US5814367A (en) | 1993-08-13 | 1998-09-29 | General Atomics | Broadband infrared and signature control materials and methods of producing the same |
US5462467A (en) * | 1993-09-08 | 1995-10-31 | Silicon Video Corporation | Fabrication of filamentary field-emission device, including self-aligned gate |
US5404070A (en) * | 1993-10-04 | 1995-04-04 | Industrial Technology Research Institute | Low capacitance field emission display by gate-cathode dielectric |
FR2711450B1 (fr) * | 1993-10-18 | 1996-01-05 | Pixel Int Sa | Installation et procédé pour la fabrication d'écrans plats de visualisation. |
CN1134754A (zh) * | 1993-11-04 | 1996-10-30 | 微电子及计算机技术公司 | 制作平板显示系统和元件的方法 |
US5461009A (en) * | 1993-12-08 | 1995-10-24 | Industrial Technology Research Institute | Method of fabricating high uniformity field emission display |
US5445550A (en) * | 1993-12-22 | 1995-08-29 | Xie; Chenggang | Lateral field emitter device and method of manufacturing same |
US5394006A (en) * | 1994-01-04 | 1995-02-28 | Industrial Technology Research Institute | Narrow gate opening manufacturing of gated fluid emitters |
US5451830A (en) * | 1994-01-24 | 1995-09-19 | Industrial Technology Research Institute | Single tip redundancy method with resistive base and resultant flat panel display |
FR2717304B1 (fr) * | 1994-03-09 | 1996-04-05 | Commissariat Energie Atomique | Source d'électrons à cathodes émissives à micropointes. |
FR2718269B1 (fr) * | 1994-03-31 | 1996-06-28 | Pixel Int Sa | Procédé d'amélioration de la conductivité des conducteurs colonnes des écrans plats à micropointes, et écrans ainsi obtenus. |
FR2719155B1 (fr) * | 1994-04-25 | 1996-05-15 | Commissariat Energie Atomique | Procédé de réalisation de sources d'électrons à micropointes et source d'électrons à micropointes obtenue par ce procédé. |
FR2719156B1 (fr) * | 1994-04-25 | 1996-05-24 | Commissariat Energie Atomique | Source d'électrons à micropointes, les micropointes comportant deux parties. |
US5538450A (en) * | 1994-04-29 | 1996-07-23 | Texas Instruments Incorporated | Method of forming a size-arrayed emitter matrix for use in a flat panel display |
US5629583A (en) * | 1994-07-25 | 1997-05-13 | Fed Corporation | Flat panel display assembly comprising photoformed spacer structure, and method of making the same |
US5504385A (en) * | 1994-08-31 | 1996-04-02 | At&T Corp. | Spaced-gate emission device and method for making same |
FR2724264B1 (fr) * | 1994-09-06 | 1996-10-18 | Commissariat Energie Atomique | Antenne cylindrique utilisable pour generer un plasma dans les conditions de resonance cyclotronique electronique |
EP0706164A1 (de) | 1994-10-03 | 1996-04-10 | Texas Instruments Incorporated | Leistungssteuerung für Anzeigegeräte |
FR2725558B1 (fr) | 1994-10-10 | 1996-10-31 | Commissariat Energie Atomique | Procede de formation de trous dans une couche de resine photosensible application a la fabrication de sources d'electrons a cathodes emissives a micropointes et d'ecrans plats de visualisation |
FR2726122B1 (fr) * | 1994-10-19 | 1996-11-22 | Commissariat Energie Atomique | Procede de fabrication d'une source d'electrons a micropointes |
FR2726688B1 (fr) * | 1994-11-08 | 1996-12-06 | Commissariat Energie Atomique | Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence |
FR2726689B1 (fr) * | 1994-11-08 | 1996-11-29 | Commissariat Energie Atomique | Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence |
US5557159A (en) * | 1994-11-18 | 1996-09-17 | Texas Instruments Incorporated | Field emission microtip clusters adjacent stripe conductors |
EP0713236A1 (de) | 1994-11-18 | 1996-05-22 | Texas Instruments Incorporated | Elektron-emittierenden Vorrichtung |
US5541466A (en) * | 1994-11-18 | 1996-07-30 | Texas Instruments Incorporated | Cluster arrangement of field emission microtips on ballast layer |
US5536993A (en) * | 1994-11-18 | 1996-07-16 | Texas Instruments Incorporated | Clustered field emission microtips adjacent stripe conductors |
US5569975A (en) * | 1994-11-18 | 1996-10-29 | Texas Instruments Incorporated | Cluster arrangement of field emission microtips |
US5608286A (en) * | 1994-11-30 | 1997-03-04 | Texas Instruments Incorporated | Ambient light absorbing face plate for flat panel display |
US6235105B1 (en) | 1994-12-06 | 2001-05-22 | General Atomics | Thin film pigmented optical coating compositions |
US5566011A (en) * | 1994-12-08 | 1996-10-15 | Luncent Technologies Inc. | Antiflector black matrix having successively a chromium oxide layer, a molybdenum layer and a second chromium oxide layer |
KR100343222B1 (ko) * | 1995-01-28 | 2002-11-23 | 삼성에스디아이 주식회사 | 전계방출표시소자의제조방법 |
US5537738A (en) * | 1995-02-10 | 1996-07-23 | Micron Display Technology Inc. | Methods of mechanical and electrical substrate connection |
US5766053A (en) * | 1995-02-10 | 1998-06-16 | Micron Technology, Inc. | Internal plate flat-panel field emission display |
US5612256A (en) * | 1995-02-10 | 1997-03-18 | Micron Display Technology, Inc. | Multi-layer electrical interconnection structures and fabrication methods |
US5594297A (en) * | 1995-04-19 | 1997-01-14 | Texas Instruments Incorporated | Field emission device metallization including titanium tungsten and aluminum |
US5601466A (en) * | 1995-04-19 | 1997-02-11 | Texas Instruments Incorporated | Method for fabricating field emission device metallization |
US5628659A (en) * | 1995-04-24 | 1997-05-13 | Microelectronics And Computer Corporation | Method of making a field emission electron source with random micro-tip structures |
US6296740B1 (en) | 1995-04-24 | 2001-10-02 | Si Diamond Technology, Inc. | Pretreatment process for a surface texturing process |
FR2733253B1 (fr) | 1995-04-24 | 1997-06-13 | Commissariat Energie Atomique | Dispositif pour deposer un materiau par evaporation sur des substrats de grande surface |
US5630741A (en) * | 1995-05-08 | 1997-05-20 | Advanced Vision Technologies, Inc. | Fabrication process for a field emission display cell structure |
US5644188A (en) * | 1995-05-08 | 1997-07-01 | Advanced Vision Technologies, Inc. | Field emission display cell structure |
US5543691A (en) * | 1995-05-11 | 1996-08-06 | Raytheon Company | Field emission display with focus grid and method of operating same |
US5686782A (en) * | 1995-05-30 | 1997-11-11 | Texas Instruments Incorporated | Field emission device with suspended gate |
US5621272A (en) * | 1995-05-30 | 1997-04-15 | Texas Instruments Incorporated | Field emission device with over-etched gate dielectric |
US5589728A (en) * | 1995-05-30 | 1996-12-31 | Texas Instruments Incorporated | Field emission device with lattice vacancy post-supported gate |
US5759078A (en) * | 1995-05-30 | 1998-06-02 | Texas Instruments Incorporated | Field emission device with close-packed microtip array |
US5811929A (en) * | 1995-06-02 | 1998-09-22 | Advanced Vision Technologies, Inc. | Lateral-emitter field-emission device with simplified anode |
US5666024A (en) * | 1995-06-23 | 1997-09-09 | Texas Instruments Incorporated | Low capacitance field emission device with circular microtip array |
FR2737928B1 (fr) * | 1995-08-17 | 1997-09-12 | Commissariat Energie Atomique | Dispositif d'insolation de zones micrometriques et/ou submicrometriques dans une couche photosensible et procede de realisation de motifs dans une telle couche |
FR2737927B1 (fr) * | 1995-08-17 | 1997-09-12 | Commissariat Energie Atomique | Procede et dispositif de formation de trous dans une couche de materiau photosensible, en particulier pour la fabrication de sources d'electrons |
US5635791A (en) * | 1995-08-24 | 1997-06-03 | Texas Instruments Incorporated | Field emission device with circular microtip array |
US5818165A (en) * | 1995-10-27 | 1998-10-06 | Texas Instruments Incorporated | Flexible fed display |
US5669802A (en) * | 1995-10-30 | 1997-09-23 | Advanced Vision Technologies, Inc. | Fabrication process for dual carrier display device |
US5672933A (en) * | 1995-10-30 | 1997-09-30 | Texas Instruments Incorporated | Column-to-column isolation in fed display |
US5831384A (en) * | 1995-10-30 | 1998-11-03 | Advanced Vision Technologies, Inc. | Dual carrier display device |
US6680489B1 (en) | 1995-12-20 | 2004-01-20 | Advanced Technology Materials, Inc. | Amorphous silicon carbide thin film coating |
US6031250A (en) * | 1995-12-20 | 2000-02-29 | Advanced Technology Materials, Inc. | Integrated circuit devices and methods employing amorphous silicon carbide resistor materials |
US6252347B1 (en) | 1996-01-16 | 2001-06-26 | Raytheon Company | Field emission display with suspended focusing conductive sheet |
US20010045794A1 (en) * | 1996-01-19 | 2001-11-29 | Alwan James J. | Cap layer on glass panels for improving tip uniformity in cold cathode field emission technology |
US6027632A (en) * | 1996-03-05 | 2000-02-22 | Candescent Technologies Corporation | Multi-step removal of excess emitter material in fabricating electron-emitting device |
US5766446A (en) * | 1996-03-05 | 1998-06-16 | Candescent Technologies Corporation | Electrochemical removal of material, particularly excess emitter material in electron-emitting device |
US5893967A (en) * | 1996-03-05 | 1999-04-13 | Candescent Technologies Corporation | Impedance-assisted electrochemical removal of material, particularly excess emitter material in electron-emitting device |
FR2751785A1 (fr) * | 1996-07-29 | 1998-01-30 | Commissariat Energie Atomique | Procede et dispositif de formation de motifs dans une couche de resine photosensible par insolation laser continue, application a la fabrication de sources d'electrons a cathodes emissives a micropointes et d'ecrans plats |
EP0834897B1 (de) | 1996-10-04 | 2002-05-02 | STMicroelectronics S.r.l. | Herstellungsverfahren einer flachen Feldemissionsanzeige und nach diesem Verfahren hergestellte Anzeige |
US6022256A (en) | 1996-11-06 | 2000-02-08 | Micron Display Technology, Inc. | Field emission display and method of making same |
US5836799A (en) * | 1996-12-06 | 1998-11-17 | Texas Instruments Incorporated | Self-aligned method of micro-machining field emission display microtips |
US5780960A (en) * | 1996-12-18 | 1998-07-14 | Texas Instruments Incorporated | Micro-machined field emission microtips |
US5938493A (en) * | 1996-12-18 | 1999-08-17 | Texas Instruments Incorporated | Method for increasing field emission tip efficiency through micro-milling techniques |
FR2757999B1 (fr) * | 1996-12-30 | 1999-01-29 | Commissariat Energie Atomique | Procede d'auto-alignement utilisable en micro-electronique et application a la realisation d'une grille de focalisation pour ecran plat a micropointes |
DE19811899A1 (de) * | 1997-03-19 | 1998-09-24 | Furukawa Electric Co Ltd | Stromverteilungsanlage und Stromquellengerät für ein Fahrzeug |
US6215243B1 (en) | 1997-05-06 | 2001-04-10 | St. Clair Intellectual Property Consultants, Inc. | Radioactive cathode emitter for use in field emission display devices |
US6323594B1 (en) | 1997-05-06 | 2001-11-27 | St. Clair Intellectual Property Consultants, Inc. | Electron amplification channel structure for use in field emission display devices |
US5982082A (en) * | 1997-05-06 | 1999-11-09 | St. Clair Intellectual Property Consultants, Inc. | Field emission display devices |
US6120674A (en) * | 1997-06-30 | 2000-09-19 | Candescent Technologies Corporation | Electrochemical removal of material in electron-emitting device |
US6007695A (en) * | 1997-09-30 | 1999-12-28 | Candescent Technologies Corporation | Selective removal of material using self-initiated galvanic activity in electrolytic bath |
FR2769751B1 (fr) | 1997-10-14 | 1999-11-12 | Commissariat Energie Atomique | Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source |
US5949185A (en) * | 1997-10-22 | 1999-09-07 | St. Clair Intellectual Property Consultants, Inc. | Field emission display devices |
US6255772B1 (en) | 1998-02-27 | 2001-07-03 | Micron Technology, Inc. | Large-area FED apparatus and method for making same |
US6174449B1 (en) | 1998-05-14 | 2001-01-16 | Micron Technology, Inc. | Magnetically patterned etch mask |
FR2779243B1 (fr) | 1998-05-26 | 2000-07-07 | Commissariat Energie Atomique | Procede de realisation par photolithographie d'ouvertures auto-alignees sur une structure, en particulier pour ecran plat a micropointes |
US7002287B1 (en) * | 1998-05-29 | 2006-02-21 | Candescent Intellectual Property Services, Inc. | Protected substrate structure for a field emission display device |
US6710538B1 (en) * | 1998-08-26 | 2004-03-23 | Micron Technology, Inc. | Field emission display having reduced power requirements and method |
US6391670B1 (en) | 1999-04-29 | 2002-05-21 | Micron Technology, Inc. | Method of forming a self-aligned field extraction grid |
JP3600126B2 (ja) * | 1999-07-29 | 2004-12-08 | シャープ株式会社 | 電子源アレイ及び電子源アレイの駆動方法 |
US7052350B1 (en) * | 1999-08-26 | 2006-05-30 | Micron Technology, Inc. | Field emission device having insulated column lines and method manufacture |
US6384520B1 (en) * | 1999-11-24 | 2002-05-07 | Sony Corporation | Cathode structure for planar emitter field emission displays |
US6989631B2 (en) * | 2001-06-08 | 2006-01-24 | Sony Corporation | Carbon cathode of a field emission display with in-laid isolation barrier and support |
EP1266321A4 (de) * | 2000-02-25 | 2003-05-21 | Telecomm Systems Inc | Kurznachrichten mit vorbezahlung |
US6849856B1 (en) * | 2001-04-17 | 2005-02-01 | Si Diamond Technology, Inc. | Electron beam duplication lithography method and apparatus |
US6682382B2 (en) * | 2001-06-08 | 2004-01-27 | Sony Corporation | Method for making wires with a specific cross section for a field emission display |
US6756730B2 (en) * | 2001-06-08 | 2004-06-29 | Sony Corporation | Field emission display utilizing a cathode frame-type gate and anode with alignment method |
US7002290B2 (en) * | 2001-06-08 | 2006-02-21 | Sony Corporation | Carbon cathode of a field emission display with integrated isolation barrier and support on substrate |
US6791278B2 (en) * | 2002-04-16 | 2004-09-14 | Sony Corporation | Field emission display using line cathode structure |
US6873118B2 (en) * | 2002-04-16 | 2005-03-29 | Sony Corporation | Field emission cathode structure using perforated gate |
US7012582B2 (en) * | 2002-11-27 | 2006-03-14 | Sony Corporation | Spacer-less field emission display |
US20040145299A1 (en) * | 2003-01-24 | 2004-07-29 | Sony Corporation | Line patterned gate structure for a field emission display |
US20040189552A1 (en) * | 2003-03-31 | 2004-09-30 | Sony Corporation | Image display device incorporating driver circuits on active substrate to reduce interconnects |
US7071629B2 (en) * | 2003-03-31 | 2006-07-04 | Sony Corporation | Image display device incorporating driver circuits on active substrate and other methods to reduce interconnects |
US20050246493A1 (en) * | 2004-04-29 | 2005-11-03 | International Business Machines Corporation | Detachable programmable memory card for a computer controlled instrument with an indicator on the memory card displaying that a predetermined level of the card memory has been used |
FR2886284B1 (fr) | 2005-05-30 | 2007-06-29 | Commissariat Energie Atomique | Procede de realisation de nanostructures |
US20070226705A1 (en) * | 2006-02-15 | 2007-09-27 | Microsoft Corporation | Wrap-up reads for logless persistent components |
FR2897718B1 (fr) | 2006-02-22 | 2008-10-17 | Commissariat Energie Atomique | Structure de cathode a nanotubes pour ecran emissif |
JP4303308B2 (ja) | 2007-11-20 | 2009-07-29 | シャープ株式会社 | 電子放出素子、電子放出装置、自発光デバイス、画像表示装置、送風装置、冷却装置、帯電装置、画像形成装置、電子線硬化装置、および電子放出素子の製造方法 |
JP4314307B1 (ja) * | 2008-02-21 | 2009-08-12 | シャープ株式会社 | 熱交換装置 |
US8299700B2 (en) | 2009-02-05 | 2012-10-30 | Sharp Kabushiki Kaisha | Electron emitting element having an electron acceleration layer, electron emitting device, light emitting device, image display device, cooling device, and charging device |
CN101814405B (zh) | 2009-02-24 | 2012-04-25 | 夏普株式会社 | 电子发射元件及其制造方法、使用电子发射元件的各装置 |
JP4777448B2 (ja) | 2009-05-19 | 2011-09-21 | シャープ株式会社 | 電子放出素子、電子放出装置、自発光デバイス、画像表示装置、送風装置、冷却装置、帯電装置、画像形成装置、及び電子線硬化装置 |
JP5073721B2 (ja) * | 2009-05-19 | 2012-11-14 | シャープ株式会社 | 電子放出素子、電子放出装置、自発光デバイス、画像表示装置、送風装置、冷却装置、帯電装置、画像形成装置、電子線硬化装置、電子放出素子の製造方法 |
JP4932873B2 (ja) * | 2009-05-19 | 2012-05-16 | シャープ株式会社 | 自発光素子、自発光装置、画像表示装置、自発光素子駆動方法、および自発光素子の製造方法 |
JP4732534B2 (ja) * | 2009-05-19 | 2011-07-27 | シャープ株式会社 | 電子放出素子、電子放出装置、帯電装置、画像形成装置、電子線硬化装置、自発光デバイス、画像表示装置、送風装置、冷却装置 |
JP4732533B2 (ja) * | 2009-05-19 | 2011-07-27 | シャープ株式会社 | 電子放出素子及びその製造方法、並びに、電子放出装置、帯電装置、画像形成装置、電子線硬化装置、自発光デバイス、画像表示装置、送風装置、冷却装置 |
CN101930884B (zh) * | 2009-06-25 | 2012-04-18 | 夏普株式会社 | 电子发射元件及其制造方法、电子发射装置、自发光设备、图像显示装置 |
JP4927152B2 (ja) * | 2009-11-09 | 2012-05-09 | シャープ株式会社 | 熱交換装置 |
JP4880740B2 (ja) * | 2009-12-01 | 2012-02-22 | シャープ株式会社 | 電子放出素子及びその製造方法、並びに、電子放出装置、帯電装置、画像形成装置、電子線硬化装置、自発光デバイス、画像表示装置、送風装置、冷却装置 |
CN104078293B (zh) * | 2013-03-26 | 2017-11-24 | 上海联影医疗科技有限公司 | 一种场发射电子源及其制备方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0172089A1 (de) * | 1984-07-27 | 1986-02-19 | Commissariat à l'Energie Atomique | Bildanzeigevorrichtung mittels feldemissions angeregter Kathodolumineszenz |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3453478A (en) * | 1966-05-31 | 1969-07-01 | Stanford Research Inst | Needle-type electron source |
US3755704A (en) * | 1970-02-06 | 1973-08-28 | Stanford Research Inst | Field emission cathode structures and devices utilizing such structures |
JPS5325632B2 (de) * | 1973-03-22 | 1978-07-27 | ||
JPS5436828B2 (de) * | 1974-08-16 | 1979-11-12 | ||
US4513308A (en) * | 1982-09-23 | 1985-04-23 | The United States Of America As Represented By The Secretary Of The Navy | p-n Junction controlled field emitter array cathode |
DE3243596C2 (de) * | 1982-11-25 | 1985-09-26 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München | Verfahren und Vorrichtung zur Übertragung von Bildern auf einen Bildschirm |
US4485158A (en) * | 1983-10-17 | 1984-11-27 | Rca Corporation | Method for preparing a mosaic luminescent screen using a mosaic precoating |
DE3340777A1 (de) * | 1983-11-11 | 1985-05-23 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München | Verfahren zur herstellung von duennfilm-feldeffekt-kathoden |
KR900002364B1 (ko) * | 1984-05-30 | 1990-04-12 | 후지쓰가부시끼가이샤 | 패턴 형성재의 제조방법 |
-
1986
- 1986-01-24 FR FR8601024A patent/FR2593953B1/fr not_active Expired
-
1987
- 1987-01-07 US US07/001,159 patent/US4857161A/en not_active Expired - Lifetime
- 1987-01-21 EP EP87400140A patent/EP0234989B1/de not_active Expired - Lifetime
- 1987-01-21 DE DE8787400140T patent/DE3764668D1/de not_active Expired - Lifetime
- 1987-01-23 JP JP1262387A patent/JPH07111869B2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0172089A1 (de) * | 1984-07-27 | 1986-02-19 | Commissariat à l'Energie Atomique | Bildanzeigevorrichtung mittels feldemissions angeregter Kathodolumineszenz |
Also Published As
Publication number | Publication date |
---|---|
US4857161A (en) | 1989-08-15 |
FR2593953A1 (fr) | 1987-08-07 |
EP0234989A1 (de) | 1987-09-02 |
DE3764668D1 (de) | 1990-10-11 |
FR2593953B1 (fr) | 1988-04-29 |
JPS62172631A (ja) | 1987-07-29 |
JPH07111869B2 (ja) | 1995-11-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0234989B1 (de) | Herstellungsverfahren einer feldeffektangeregten Kathodenlumineszenz-Wiedergabevorrichtung | |
EP0461990B1 (de) | Elektronenquelle mit Mikropunktkathoden | |
EP0222668B1 (de) | Verfahren zum Herstellen eines Dünnschichttransistors mit in Bezug auf Source und Drain selbstausrichtendem Gate durch stufenweises Ätzen und danach hergestellter Transistor | |
EP0350378B1 (de) | Unter Vakuum versiegeltes elektronisches Mikrobauteil, insbesondere Diode oder Triode, und dessen Herstellungsverfahren | |
EP1885649A2 (de) | Verfahren zur herstellung einer emissionskathode | |
FR2713394A1 (fr) | Source d'électron de type à émission de champ. | |
EP0696045A1 (de) | Kathode eines flachen Bildschirmes mit konstantem Zugriffswiderstand | |
EP0246945B1 (de) | Elektro-optischer Anzeigeschirm und sein Herstellungsverfahren | |
FR2506036A1 (fr) | Masque pour lithographie par rayonnement et procede de realisation de ce masque | |
EP0202150A1 (de) | Nichtlineares Steuerelement für elektrooptische Anzeigeschirmplatte und Verfahren zu dessen Herstellung | |
FR2723255A1 (fr) | Dispositif d'affichage a emission de champ et procede pour fabriquer de tels dispositifs | |
FR2748847A1 (fr) | Procede de fabrication d'une cathode froide a emission de champ | |
FR2742578A1 (fr) | Cathode a emission de champ et son procede de fabrication | |
FR2733253A1 (fr) | Dispositif pour deposer un materiau par evaporation sur des substrats de grande surface | |
FR2518788A1 (fr) | Dispositif a resistance dependant de la tension, son procede de fabrication et sa mise en oeuvre dans un ecran de visualisation a commande electrique | |
EP0362017A1 (de) | Vorrichtung, wie Diode, Triode oder flache und integrierte kathodolumineszierende Anzeigevorrichtung und Herstellungsverfahren | |
EP0697710B1 (de) | Herstellungsverfahren einer Mikrospitzen-Elektronenquelle | |
FR2756969A1 (fr) | Ecran d'affichage comprenant une source d'electrons a micropointes, observable a travers le support des micropointes, et procede de fabrication de cette source | |
EP0668604A1 (de) | Verfahren zur Herstellung einer Kathode eines Mikrospitzen-Fluoreszenzbildschirm und daraus hergestelltes Produkt | |
EP0616356B1 (de) | Mikrospitzebildwiedergabeanordnung und Herstellungsverfahren | |
EP1000433A1 (de) | Verfahren zur herstellung einer mikrospitzen-elektronenquelle, mit selbstjustierter fokussierelektrode | |
EP0884753A1 (de) | Verfahren zur Herstellung von Abstandshaltern für einen flachen Bildschirm | |
EP0709741B1 (de) | Photolithographisches Verfahren zur Herstellung von kreisförmigen Strukturen mit hoher Dichte | |
FR2779243A1 (fr) | Procede de realisation par photolithographie d'ouvertures auto-alignees sur une structure, en particulier pour ecran plat a micropointes | |
FR2719155A1 (fr) | Procédé de réalisation de sources d'électrons à micropointes et source d'électrons à micropointes obtenue par ce procédé. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): CH DE GB IT LI NL |
|
17P | Request for examination filed |
Effective date: 19880204 |
|
17Q | First examination report despatched |
Effective date: 19891123 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): CH DE GB IT LI NL |
|
REF | Corresponds to: |
Ref document number: 3764668 Country of ref document: DE Date of ref document: 19901011 |
|
ITF | It: translation for a ep patent filed | ||
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
ITTA | It: last paid annual fee | ||
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 19970110 Year of fee payment: 11 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 19970129 Year of fee payment: 11 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980131 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980131 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980801 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee |
Effective date: 19980801 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20060118 Year of fee payment: 20 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20060123 Year of fee payment: 20 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20060131 Year of fee payment: 20 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION Effective date: 20070120 |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: PE20 |