FR2769751B1 - Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source - Google Patents

Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source

Info

Publication number
FR2769751B1
FR2769751B1 FR9712826A FR9712826A FR2769751B1 FR 2769751 B1 FR2769751 B1 FR 2769751B1 FR 9712826 A FR9712826 A FR 9712826A FR 9712826 A FR9712826 A FR 9712826A FR 2769751 B1 FR2769751 B1 FR 2769751B1
Authority
FR
France
Prior art keywords
micropoints
source
high density
flat screen
focusing grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9712826A
Other languages
English (en)
Other versions
FR2769751A1 (fr
Inventor
Aime Perrin
Brigitte Montmayeul
Robert Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9712826A priority Critical patent/FR2769751B1/fr
Priority to DE69834928T priority patent/DE69834928T2/de
Priority to JP2000516366A priority patent/JP4220122B2/ja
Priority to US09/509,542 priority patent/US6534913B1/en
Priority to PCT/FR1998/002197 priority patent/WO1999019896A1/fr
Priority to EP98949053A priority patent/EP1023741B1/fr
Publication of FR2769751A1 publication Critical patent/FR2769751A1/fr
Application granted granted Critical
Publication of FR2769751B1 publication Critical patent/FR2769751B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
FR9712826A 1997-10-14 1997-10-14 Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source Expired - Lifetime FR2769751B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR9712826A FR2769751B1 (fr) 1997-10-14 1997-10-14 Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source
DE69834928T DE69834928T2 (de) 1997-10-14 1998-10-13 Mikrospitzen-elektronenquelle mit fokussierungsgitter und hoher mikrospitzendichte und flachschirm unter verwendung einer solchen quelle
JP2000516366A JP4220122B2 (ja) 1997-10-14 1998-10-13 マイクロチップ型電子ソースの製造方法
US09/509,542 US6534913B1 (en) 1997-10-14 1998-10-13 Electron source with microtips, with focusing grid and high microtip density, and flat screen using same
PCT/FR1998/002197 WO1999019896A1 (fr) 1997-10-14 1998-10-13 Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source
EP98949053A EP1023741B1 (fr) 1997-10-14 1998-10-13 Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9712826A FR2769751B1 (fr) 1997-10-14 1997-10-14 Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source

Publications (2)

Publication Number Publication Date
FR2769751A1 FR2769751A1 (fr) 1999-04-16
FR2769751B1 true FR2769751B1 (fr) 1999-11-12

Family

ID=9512198

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9712826A Expired - Lifetime FR2769751B1 (fr) 1997-10-14 1997-10-14 Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source

Country Status (6)

Country Link
US (1) US6534913B1 (fr)
EP (1) EP1023741B1 (fr)
JP (1) JP4220122B2 (fr)
DE (1) DE69834928T2 (fr)
FR (1) FR2769751B1 (fr)
WO (1) WO1999019896A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4219724B2 (ja) * 2003-04-08 2009-02-04 三菱電機株式会社 冷陰極発光素子の製造方法
US7911123B2 (en) * 2005-07-04 2011-03-22 Samsung Sdi Co., Ltd. Electron emission device and electron emission display using the electron emission device
JP2009508320A (ja) * 2005-09-14 2009-02-26 リッテルフューズ，インコーポレイティド ガス入りサージアレスタ、活性化化合物、点火ストライプ及びその方法
KR20070044175A (ko) * 2005-10-24 2007-04-27 삼성에스디아이 주식회사 전자 방출 소자 및 이를 구비한 전자 방출 디바이스
JP5403862B2 (ja) * 2006-11-28 2014-01-29 チェイル インダストリーズ インコーポレイテッド 微細金属パターンの製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2593953B1 (fr) 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2623013A1 (fr) 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
US5063327A (en) * 1988-07-06 1991-11-05 Coloray Display Corporation Field emission cathode based flat panel display having polyimide spacers
JP2653008B2 (ja) * 1993-01-25 1997-09-10 日本電気株式会社 冷陰極素子およびその製造方法
EP0614209A1 (fr) * 1993-03-01 1994-09-07 Hewlett-Packard Company Panneau d'affichage plat
TW272322B (fr) 1993-09-30 1996-03-11 Futaba Denshi Kogyo Kk
US5528103A (en) * 1994-01-31 1996-06-18 Silicon Video Corporation Field emitter with focusing ridges situated to sides of gate
US5543691A (en) * 1995-05-11 1996-08-06 Raytheon Company Field emission display with focus grid and method of operating same
FR2757999B1 (fr) * 1996-12-30 1999-01-29 Commissariat Energie Atomique Procede d'auto-alignement utilisable en micro-electronique et application a la realisation d'une grille de focalisation pour ecran plat a micropointes
FR2779271B1 (fr) * 1998-05-26 2000-07-07 Commissariat Energie Atomique Procede de fabrication d'une source d'electrons a micropointes, a grille de focalisation auto-alignee

Also Published As

Publication number Publication date
EP1023741A1 (fr) 2000-08-02
JP2001520437A (ja) 2001-10-30
US6534913B1 (en) 2003-03-18
WO1999019896A1 (fr) 1999-04-22
FR2769751A1 (fr) 1999-04-16
EP1023741B1 (fr) 2006-06-14
JP4220122B2 (ja) 2009-02-04
DE69834928T2 (de) 2007-02-01
DE69834928D1 (de) 2006-07-27

Similar Documents

Publication Publication Date Title
DE69806873D1 (de) Elektronenstrahlresist
DE60039513D1 (de) Echtzeit voraussagung der resist-erwärmung durch proximität und korrektur der raster scan elektronenstrahl-lithographie
DE69726080D1 (de) Photokathode und solche Kathode enthaltende Elektronenröhre
HK1048014A1 (zh) 具有平面發射區和聚焦結構的電子源
FR2769751B1 (fr) Source d'electrons a micropointes, a grille de focalisation et a densite elevee de micropointes, et ecran plat utilisant une telle source
FR2774508B1 (fr) Dispositif a faisceau lineaire possedant une cathode et une anode
DE69807151T2 (de) Rasterelektronenmikroskop
DE69700313D1 (de) Feldemissions-Elektronenkanone mit Kaltkathode
EP1198819A4 (fr) Canon a electrons compact a emission de champ et lentille a focale
FR2717304B1 (fr) Source d'électrons à cathodes émissives à micropointes.
DE69531220D1 (de) Feldemissionselektronenquelle und Bildschirm mit solcher Feldemissionselektronenquelle
KR960028931U (ko) 전자선가속기를 사용한 산기관 반응기
DE69601681T2 (de) Kathodenstrahlroehre und ablenkeinheit dafuer
KR960018979U (ko) 음극선관용전자총
KR960018987U (ko) 전자총 어셈블리의 캐소드 지지편
KR970025633U (ko) 전자총 비이딩 지그의 캐소드 지지구조
KR960012555U (ko) 전자총의 캐소드 조립장치
KR960009163U (ko) 전자총의 캐소드용접장치
KR960009162U (ko) 전자총의 캐소드용접장치
KR950009879U (ko) 전자총의 캐소우드 서포트 어셈블리
KR970011162U (ko) 음극선관의 인바새도우마스크-프레임 조립체
KR960025168U (ko) 전자총의 캐소드
KR960020481U (ko) 고능률 전자빔 용접장치
KR960018984U (ko) 전자총 어셈블리의 캐소드 지지편
KR960006176U (ko) 전자총의 캐소드전극

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 19

PLFP Fee payment

Year of fee payment: 20