EP0884753A1 - Verfahren zur Herstellung von Abstandshaltern für einen flachen Bildschirm - Google Patents

Verfahren zur Herstellung von Abstandshaltern für einen flachen Bildschirm Download PDF

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Publication number
EP0884753A1
EP0884753A1 EP98401420A EP98401420A EP0884753A1 EP 0884753 A1 EP0884753 A1 EP 0884753A1 EP 98401420 A EP98401420 A EP 98401420A EP 98401420 A EP98401420 A EP 98401420A EP 0884753 A1 EP0884753 A1 EP 0884753A1
Authority
EP
European Patent Office
Prior art keywords
central core
spacers
reinforcements
pixels
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98401420A
Other languages
English (en)
French (fr)
Inventor
Aimé Perrin
Jean-Francois Boronat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP0884753A1 publication Critical patent/EP0884753A1/de
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242—Spacers between faceplate and backplate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86—Vessels; Containers; Vacuum locks
    • H01J29/864—Spacers between faceplate and backplate of flat panel cathode ray tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/86—Vessels
    • H01J2329/8625—Spacing members
    • H01J2329/863—Spacing members characterised by the form or structure

Definitions

  • the present invention relates to a method of manufacturing spacers for flat screen visualization.
  • spacers can be used, especially in display devices by cathodoluminescence excited by field emission.
  • a display device by cathodoluminescence excited by field emission is shown in cross section at figure 1.
  • This screen-shaped device is limited by two glass blades 1 and 2.
  • the blade 1 supports a cathode 3 provided with emissive tips 4.
  • a layer insulator 5 is deposited on the cathode 3 presenting holes 6 in order to release the emissive points 4.
  • the insulating layer 5 is covered with a metallization 7 serving as an extraction grid for the electrons emitted by the tips 4.
  • the blade 2 supports, on its internal face, an electrode 8 acting as an anode which supports turn a layer 9 of cathodoluminescent material also called luminophore.
  • electrode 8 must be transparent and for example consists of oxide mixed of tin and indium (ITO electrode).
  • Blades 1 and 2 are held at a distance determined from each other and are separated by a space 10 in which a vacuum has been created. Of spacers 11 allow this distance to be maintained determined despite the atmospheric pressure which is exerted on the blades of the device.
  • spacers In flat screens of the emission type field, like the one shown in Figure 1, it's important to maintain a high vacuum between the two blades. Therefore, the pressure difference with the outside creates a force which tends to crush the screen.
  • spacers For screens larger than a few centimeters, the use of spacers is essential. These spacers must have certain properties. They must of course be able to resist crushing due to pressure surrounding. Their electrical resistance must be large enough to avoid strikes between electrodes located on either side of the space interior while this interior space is subject to potential differences reaching a few hundreds of volts (typically 300 V) and which will go in increasing in future applications (up to several thousand volts). The spacers must ability to withstand relatively high temperatures (of the order of 400 to 450 ° C) necessary for the sealing of devices. Finally, these spacers must be thin enough to remain invisible to a screen user.
  • the spacing between the two electrodes is around of 200 ⁇ m. This spacing is achieved by balls (as shown in Figure 1) or by glass balusters evenly distributed.
  • the distance between the two blades must be increased. This spacing can then vary between 0.5 mm and a few millimeters. In this case, the balls, which should be the same diameter, become visible by the screen user. As for the balusters, which should keep their current diameter of 25 to 50 ⁇ m, their height would make them too fragile.
  • FIG. 2 represents, in perspective view, such a source of microtip electrons.
  • a network of conductive columns 21 for supplying emissive points 22 then an insulating layer 23.
  • Des holes 24 made in the insulating layer 23 allow the microtips to be released 22.
  • the grid of electron extraction consists of a network of conductive lines 25 perpendicular to the columns 21 and provided with holes aligned with the holes 24 of the insulating layer to release the microtips 22. In appropriately feeding a line and a column, we will get an electron emission for points of the image element (or pixel) located at the crossing of this line and this column.
  • the present invention provides a solution to this problem.
  • the cutting step may include the transverse and / or longitudinal cutting of the profiled structure.
  • the substrate used is made of a material such as silicon, photosensitive glass or quartz, its machining can be carried out by etching anisotropic.
  • the machining step can be carried out that said section includes a straight central core and that the side reinforcements constitute ribs grafted onto the central core.
  • These lateral reinforcements may only be present on one side of the soul central. They can also be arranged both sides of the central core, either symmetrically by relation to the central core, either alternately along the central soul.
  • Figure 3 is a perspective view of a profiled structure 30. It was obtained by example by anisotropic etching of a substrate of silicon.
  • the substrate of initial thickness h, has been engraved so as to reduce its thickness to the value e.
  • the engraving therefore made it possible to obtain a profiled structure with cross section 32 has a straight central core 33 and reinforcements lateral 34.
  • the thickness h of the substrate, the thickness e of the central core, the width d of the ribs and their no p are provided so that section 32 can fit between the pixels of a flat screen visualization without covering them.
  • the ribs 31 are perpendicular to the core 33 for a use of spacers in an access screen matrix where the pixels are square or rectangular. For a screen where the pixels would be different shape, for example hexagonal, the inclination of the ribs relative to the central core should be planned accordingly.
  • the profiled structure 30 is then cut perpendicular to the direction of ribs 34 in strips 35 of width 1.
  • This width 1 corresponds to the desired spacing between the plates constituting a flat display screen.
  • Groups 35 can directly constitute the desired spacers or, if they are too long, be cut again parallel to the ribs 34 to provide spacers shorter length.
  • Figures 4 to 6 illustrate, in a way schematic, the arrangement of the spacers according to the invention with respect to the pixels of a screen of visualization.
  • the pixels were represented by squares 28 representing the crossing of lines and addressing columns.
  • Figures 4 to 6 correspond so to a top view of the electron source at microtips shown in perspective in Figure 2. For this reason, a single address line 21 and a single addressing column 25 was initiated in mixed line.
  • Figure 4 shows how the spacers 35 (seen in perspective in FIG. 3), of which we only see the shape of section 32, between the pixels 28 that is to say in the line spaces and intercolumns.
  • the length of the side reinforcements 34 may possibly cover several pixels.
  • Figure 5 shows how to insert, between the pixels 28, spacers whose section 42 has a central core 43 and reinforcements 44 located on one side of the central core.
  • the length of side reinforcements can possibly cover several pixels.
  • Figure 6 shows how to insert, between the pixels 28, spacers whose section 52 has a central core 53 and lateral reinforcements 54 located alternately along the central core. As before, the length of the side reinforcements can span multiple pixels.
  • the pitch P of ribs or side reinforcements is identical to the pitch pixels.
  • the pitch of the side reinforcements can also be a multiple of the pixel pitch, this pitch can moreover vary along the same spacer.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
EP98401420A 1997-06-13 1998-06-11 Verfahren zur Herstellung von Abstandshaltern für einen flachen Bildschirm Withdrawn EP0884753A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9707340 1997-06-13
FR9707340A FR2764729A1 (fr) 1997-06-13 1997-06-13 Procede de fabrication d'espaceurs pour ecran plat de visualisation

Publications (1)

Publication Number Publication Date
EP0884753A1 true EP0884753A1 (de) 1998-12-16

Family

ID=9507936

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98401420A Withdrawn EP0884753A1 (de) 1997-06-13 1998-06-11 Verfahren zur Herstellung von Abstandshaltern für einen flachen Bildschirm

Country Status (4)

Country Link
US (1) US5989090A (de)
EP (1) EP0884753A1 (de)
JP (1) JPH1116494A (de)
FR (1) FR2764729A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506087B1 (en) * 1998-05-01 2003-01-14 Canon Kabushiki Kaisha Method and manufacturing an image forming apparatus having improved spacers
US6155900A (en) 1999-10-12 2000-12-05 Micron Technology, Inc. Fiber spacers in large area vacuum displays and method for manufacture
KR100335627B1 (ko) * 2000-02-15 2002-05-08 김순택 십자 구조의 스페이서가 적용된 평판 표시 소자
KR100403081B1 (ko) * 2001-04-18 2003-10-30 엘지전자 주식회사 전계방출형 표시소자의 셀 및 스페이서 구조
KR100444506B1 (ko) * 2001-12-27 2004-08-16 엘지전자 주식회사 전계방출 표시소자의 스페이서 및 그의 형성 및 설치방법
US20060066235A1 (en) * 2004-09-27 2006-03-30 Brody Thomas P Receptacles for inkjet deposited PLED/OLED devices and method of making the same

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994018694A1 (en) * 1993-02-01 1994-08-18 Silicon Video Corporation Flat panel device with internal support structure and/or raised black matrix
EP0616354A2 (de) * 1993-03-18 1994-09-21 International Business Machines Corporation Abstandhalter für flaches Anzeigepaneel
FR2704672A1 (fr) * 1993-04-26 1994-11-04 Futaba Denshi Kogyo Kk Enveloppe hermétique pour panneau d'affichage d'images, panneau d'affichage d'images et méthode pour la production dudit panneau.
WO1996003764A1 (en) * 1994-07-25 1996-02-08 Fed Corporation Flat display spacer structure and manufacturing method
US5503582A (en) * 1994-11-18 1996-04-02 Micron Display Technology, Inc. Method for forming spacers for display devices employing reduced pressures
WO1996016429A2 (en) * 1994-11-21 1996-05-30 Candescent Technologies Corporation Field emission device with internal structure for aligning phosphor pixels with corresponding field emitters
WO1996018204A1 (en) * 1994-12-05 1996-06-13 Color Planar Displays, Inc. Support structure for flat panel displays
WO1997015912A1 (en) * 1995-10-26 1997-05-01 Pixtech, Inc. Cold cathode field emitter flat screen display
EP0780873A1 (de) * 1995-12-18 1997-06-25 Motorola, Inc. Eigenständiger Abstandshalter einer flachen Anzeigevorrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5842897A (en) * 1995-02-28 1998-12-01 Institute For Advanced Engineering Spacers for field emission display and their fabrication method
US5785569A (en) * 1996-03-25 1998-07-28 Micron Technology, Inc. Method for manufacturing hollow spacers

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994018694A1 (en) * 1993-02-01 1994-08-18 Silicon Video Corporation Flat panel device with internal support structure and/or raised black matrix
EP0616354A2 (de) * 1993-03-18 1994-09-21 International Business Machines Corporation Abstandhalter für flaches Anzeigepaneel
FR2704672A1 (fr) * 1993-04-26 1994-11-04 Futaba Denshi Kogyo Kk Enveloppe hermétique pour panneau d'affichage d'images, panneau d'affichage d'images et méthode pour la production dudit panneau.
WO1996003764A1 (en) * 1994-07-25 1996-02-08 Fed Corporation Flat display spacer structure and manufacturing method
US5503582A (en) * 1994-11-18 1996-04-02 Micron Display Technology, Inc. Method for forming spacers for display devices employing reduced pressures
WO1996016429A2 (en) * 1994-11-21 1996-05-30 Candescent Technologies Corporation Field emission device with internal structure for aligning phosphor pixels with corresponding field emitters
WO1996018204A1 (en) * 1994-12-05 1996-06-13 Color Planar Displays, Inc. Support structure for flat panel displays
WO1997015912A1 (en) * 1995-10-26 1997-05-01 Pixtech, Inc. Cold cathode field emitter flat screen display
EP0780873A1 (de) * 1995-12-18 1997-06-25 Motorola, Inc. Eigenständiger Abstandshalter einer flachen Anzeigevorrichtung

Also Published As

Publication number Publication date
JPH1116494A (ja) 1999-01-22
FR2764729A1 (fr) 1998-12-18
US5989090A (en) 1999-11-23

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