DK2907527T3 - Driftsprocedure for ebestrålingsanordning - Google Patents

Driftsprocedure for ebestrålingsanordning Download PDF

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Publication number
DK2907527T3
DK2907527T3 DK15154264.4T DK15154264T DK2907527T3 DK 2907527 T3 DK2907527 T3 DK 2907527T3 DK 15154264 T DK15154264 T DK 15154264T DK 2907527 T3 DK2907527 T3 DK 2907527T3
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DK
Denmark
Prior art keywords
emitter
temperature
operating procedure
irradiation
heating element
Prior art date
Application number
DK15154264.4T
Other languages
English (en)
Inventor
Silke Schloemp
Josef Zoltan Lott
Karl-Wilhelm Brieden
Original Assignee
Heraeus Noblelight Gmbh
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Filing date
Publication date
Application filed by Heraeus Noblelight Gmbh filed Critical Heraeus Noblelight Gmbh
Application granted granted Critical
Publication of DK2907527T3 publication Critical patent/DK2907527T3/da

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/08—Radiation
    • A61L2/10—Ultra-violet radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
    • B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
    • B41F23/0403—Drying webs
    • B41F23/0406—Drying webs by radiation
    • B41F23/0409—Ultra-violet dryers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
    • B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
    • B41F23/044—Drying sheets, e.g. between two printing stations
    • B41F23/045—Drying sheets, e.g. between two printing stations by radiation
    • B41F23/0453—Drying sheets, e.g. between two printing stations by radiation by ultraviolet dryers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B55/00—Preserving, protecting or purifying packages or package contents in association with packaging
    • B65B55/02—Sterilising, e.g. of complete packages
    • B65B55/12—Sterilising contents prior to, or during, packaging
    • B65B55/16—Sterilising contents prior to, or during, packaging by irradiation

Claims (10)

  1. DRIFTSPROCEDURE FOR EBESTRÅLINGSARORDNING PATERTKRAV
    1. Driftsprocedure for en bestråiingsanordning ti! bestråling af et substart (2) ved hjælp afen UV-emitier (9a; 205a-205h; 405a-405h, 503), hvilken driftsprocedure består af følgende proceduretrin: (a) Drift af UV-emitteren (9a; 205a-205h; 405a-405h, 503) ved en nominel drifissiråleeffekt, der er en funktion af en nominel drifistemperatur; (b) Kontinuerlig tilførsel af substratet (2) med en tilførselshastighed ind i et bestrålingsområde, der er defineret af UV-emitteren (9a; 205a~205h; 405a-405h, 503); (c) Bestråling af substratet (2) i bestrålingsområdet, kendetegnet ved, at UV-emitteren (9a; 205a-205h; 405a-405h, 503) slukkes, hvis der forekommer en afbrydelse af den kontinuerlige substrattilførsel, hvorved emitter-temperaturen for den slukkede UV-emitter (9a; 205a-205h; 405a-405h,503) måles, og at der tilvejebringes en opvarmning som modforanstaltning for at modvirke, at emitter-temperaturen falder med mere end 10°C under den nominelle driftstemperatur.
  2. 2. Driftsprocedure ifølge krav 1, kendetegnet ved, at den tiivejebringer opvarmning af UV-emitteren (9a; 205a-205h; 405a-405h) ved hjælp af et varmeelement (10a, 10b, 10c, 404) som modforanstaltning.
  3. 3. Driftsprocedure ifølge krav 1, kendetegnet ved, at emitter-temperaturen påvirkes ved hjælp af en luftstrøm, der genereres af en iuftkøiing (202, 203), og ved at der tilvejebringes opvarmning af luftstrømmen ved hjælp af et varmeelement (204) som modforanstaltning.
  4. 4. Driftsprocedure ifølge et af de foregående krav 1, kendetegnet ved, at emitter-temperaturen påvirkes af en luftstrøm, der genereres af en luftkøling (202, 203), og at der som modforanstaltning tilvejebringes en ændring af luftstrømmens massestrømning.
  5. 5. Driftsprocedure ifølge krav 2 eller 3, kendetegnet ved, at hvis den kontinuerlige substrattilførsel afbrydes (aa) UV-emitteren (9a; 205a-250h; 405a-405h)slukkes, og (bb) varmeelementet (10a, 10b, 10c, 404) tændes, og at ved ophævelse af afbrydelsen af den kontinuerlige substrattilførsel (cc) UV-emitteren (9a; 205a-205h; 405a-405h, 503) tændes, og (dd) varmeelementet (10a, 10b, 10c, 404) slukkes.
  6. 6. Driftsprocedure ifølge krav 3, kendetegnet ved, at opvarmningen af luftstrømmen sker i en lufttilførselskanal (202) i lufikølingen (202, 203).
  7. 7. Driftsprocedure ifølge et af de foregående krav 3 eller 6, kendetegnet ved, at bestrålingsanordningen har en reflektor (402) med en side, der vender ind mod UV-emitteren (405a-405h) og en side, der vender bort fra UV-emitteren (405a-405h), og at opvarmningen af luftstrømmen sker via et varmeelement (404), der er anbragt på den bortvendte side af reflektoren (402).
  8. 8. Driftsprocedure ifølge et af de foregående krav 3, 4, 6 eiler 7, kendetegnet ved, at luftstrømmen strømmer omkring UV-emitteren (9a; 205a-205h) i en retning, der er lodret på emitterens langsgående retning.
  9. 9. Driftsprocedure ifølge et af de foregående krav, kendetegnet ved, at tilførselshastigheden detekteres fortløbende af en sensor (11).
  10. 10. Driftsprocedure ifølge et af de foregående krav, kendetegnet ved, attemperaturen af UV-emitteren (9a; 205a-205h; 405a-405h, 503) detekteres fortløbende afen sensor (12).
DK15154264.4T 2014-02-17 2015-02-09 Driftsprocedure for ebestrålingsanordning DK2907527T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014101935.0A DE102014101935B4 (de) 2014-02-17 2014-02-17 Betriebsverfahren für eine Bestrahlungsvorrichtung

Publications (1)

Publication Number Publication Date
DK2907527T3 true DK2907527T3 (da) 2016-11-28

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Application Number Title Priority Date Filing Date
DK15154264.4T DK2907527T3 (da) 2014-02-17 2015-02-09 Driftsprocedure for ebestrålingsanordning

Country Status (10)

Country Link
US (1) US9281093B2 (da)
EP (1) EP2907527B1 (da)
JP (1) JP5980357B2 (da)
CN (1) CN104851472B (da)
DE (1) DE102014101935B4 (da)
DK (1) DK2907527T3 (da)
ES (1) ES2603802T3 (da)
HU (1) HUE031085T2 (da)
LT (1) LT2907527T (da)
PL (1) PL2907527T3 (da)

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DE102014101935B4 (de) * 2014-02-17 2018-05-30 Heraeus Noblelight Gmbh Betriebsverfahren für eine Bestrahlungsvorrichtung
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US20220189759A1 (en) * 2020-12-11 2022-06-16 The Boeing Company Ultraviolet light-emitting module and disinfecting system

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Also Published As

Publication number Publication date
DE102014101935A1 (de) 2015-08-20
US20150235727A1 (en) 2015-08-20
CN104851472B (zh) 2017-11-10
PL2907527T3 (pl) 2017-02-28
ES2603802T3 (es) 2017-03-01
CN104851472A (zh) 2015-08-19
JP5980357B2 (ja) 2016-08-31
LT2907527T (lt) 2016-11-25
DE102014101935B4 (de) 2018-05-30
JP2015150561A (ja) 2015-08-24
US9281093B2 (en) 2016-03-08
EP2907527A1 (de) 2015-08-19
HUE031085T2 (hu) 2017-06-28
EP2907527B1 (de) 2016-08-24

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