HUE031085T2 - Üzemeltetési eljárás besugárzókészülékhez - Google Patents

Üzemeltetési eljárás besugárzókészülékhez Download PDF

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HUE031085T2
HUE031085T2 HUE15154264A HUE15154264A HUE031085T2 HU E031085 T2 HUE031085 T2 HU E031085T2 HU E15154264 A HUE15154264 A HU E15154264A HU E15154264 A HUE15154264 A HU E15154264A HU E031085 T2 HUE031085 T2 HU E031085T2
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emitter
tee
ens ens
ens
brain
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HUE15154264A
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English (en)
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Josef Zoltan Lott
Karl-Wilhelm Brieden
Silke Schloemp
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Heraeus Noblelight Gmbh
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Publication of HUE031085T2 publication Critical patent/HUE031085T2/hu

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    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00Irradiation devices
    • G21K5/10Irradiation devices with provision for relative movement of beam source and object to be irradiated
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/08Radiation
    • A61L2/10Ultraviolet radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F23/00Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
    • B41F23/04Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
    • B41F23/0403Drying webs
    • B41F23/0406Drying webs by radiation
    • B41F23/0409Ultraviolet dryers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F23/00Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
    • B41F23/04Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
    • B41F23/044Drying sheets, e.g. between two printing stations
    • B41F23/045Drying sheets, e.g. between two printing stations by radiation
    • B41F23/0453Drying sheets, e.g. between two printing stations by radiation by ultraviolet dryers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B55/00Preserving, protecting or purifying packages or package contents in association with packaging
    • B65B55/02Sterilising, e.g. of complete packages
    • B65B55/12Sterilising contents prior to, or during, packaging
    • B65B55/16Sterilising contents prior to, or during, packaging by irradiation

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Mechanical Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)

Description

ÔPSSATI4Û METHOD FOR AN IRRADIATION DEVICE DESCRIPTOR
MieöIM ιη®;#*ν#$ΜΜ #11® :fe & irÄditf $ mmm w mmm mm mm, mmm ïifpssss steps of:. (â) the UV emitter d a radradon ^we? thai Is s a ifcj coMsrsuousiy feeding the anbsiraia, at s fæd rats tnfô m-irradiation f 5ärss|e|ne?l sy tho UV «|ξ fff irradiating the. f distille Iss dm f r #||Ikirs ΜΑ
SdpR :0S|£8ÉKt p?tsö§äS®S: #|i: jfef S® Opefë&SO of îîOKlspfiôR iSÖVSOAS îf? «A- dnlhfeebon, visier ;i«afrníím rx fcf cur^ïïj ίοοοοοητ adhesrvaspr pesties. ,?8SOÜ :n rhô casa ci srown madkiou oewces orra or sevrea! ÜV rtmimxs sas provided es a redialing source UV emitters *f»
Sri.'. Sx cxsixpHx mercury vsaos- row p;essu:e emitters, 'tcssxrx pressssrrs cxxsxx ex: n,!ph p>etssurs xsxssxx «v rue rus madrason devisas the U" emitter or enwtters su? arranged m such s xpï HO they Patine dm srradxeboo area, wslf-o whs® an srsedrason or -ho audstrase occurs ei a x\ hm- r v ·> vau »> ’v-t * > ^ o>* *. 5 ’'^'v a transport devise. whored it paus? through dm madron areu if pmesibie at a conot&nt spued. M irradratiDo devise di this type ts Known, lot exemple. írom JP 200&2SS83Ô A. whorsin fori oaps Cdhiinuotrsiy pass Ufdlpé UV üradiStkm dames amt are thereby sleeked bdrxe they sert subæquongy Sited with a sterling iiqrxd.
At a ryvid radiation r« dtne UV lamp mMMW® i» eubstme wkhio dre irradiation area daines the »ta&iäon energy irspacdtrg sise substrate. By moans of a cwtroi of the ftpsfmd speed of the srsbsfrsre the irradiation energy fmpscbng the sr&hdits ean bo sd|rsted to 8te tmso.
To achieve a good energy efficiency in pnrtcspis an as continuons an ocrxsxon of the irradmtkm device so double that is, an c-seralics without tnterrxsptröos, is desv^He. I: a UH are re the ptneachnn process occurs a nmd he ensured mat a substrate: remainmg rn the rrratiafeem area is not dmeygeb try ercsssxo madia;® ;. -8$$?: &. to the ^Sftäii/ffa. \Μ· iiÄiÄ idled tie; dmifdM dft ihlborehiS: ab HnierrxpIionrof: fho production process, Ho*fS\v. fmy need a cerhxn s-ns sash erne ihey ate s&iiehed on, in order to roach thrtrr rÄnet mdilboo poASr agam The- radrason powar ¢1 tha Uv emrhersdspsnas mnrohy to prtPaiar on thsu rersperafeori irr tha corse of a cold start of the UV enUror iha iatte; worms a a ahor Pei no swdciies on consnuoosly until ;? reoohos lis oporonn-j Umporltuhv· Pf# fellfild: ; is s ccosiant rsdialroo : power : atiaiirolihTbd Ι||ό rapf iTbb^ ditoraing tempersrurm is rsacr-xH >s rstorred tr,· as the warm-up bore As a sex. e r$ sevens sxirmtsu. A now start of ids UV Unip tnerofore rs regoiarry rraauinprrared by a deray of me prodschos procaea, in order to grsarasdorr orr ss short a wann· up mop as possk-ie site· an Interruption, m ins poor .rrr :: swrtchir-p off «* the UV snider is fharekre olspeuced wil'n Irrstead ire use d a shie-de p e^mont m proposed lor the Interruption of mo beam pptn hotweoo ihu UV e-mmtes end substrate, so that tne UV emihe? can also corAmus bo ormrate rrr the event of a steppe of the pnxipch!>d process. witrsoul it srxnediotcly hssurg an Impast on Xo substrate.
Such an Irradiation devise is Know from sp 0$ (tel 1¾ A The »radiation dew« irradiation ataa, «s «atlas a franspoK devirte.: yteteh ir*?«^tfe 8œ substrate throu^blhs ííráSibob ma\ um® te prevent -aa axsosstee brateatmn of a substrate remaining sn the irradiation area during a etoopags of tee franset device. :t ;« proposed. » anango a shutiof Mfwssp lie yy gesmÄi lamp sod the substrate* ,Äh shutter interrupts the be&m path b®mm UV germteteas lamp ar$ sotedtete bonng a stepap .#% paeucft** gropeste:
The shatter. trowessr, has the disadvantage, that it partially absorbs, parfiaPy rettents. mdtefia« emitted try tiro UV ereiltet, so that mss on as pad can conîoôole te a slang focal heating of the femaraorsen: of mo UVÄier m$ Ä lo a hoalp of ihi ilV piÄs A%a strong hasting of «so UV ete§ter s®, on $se one hand, ΐ-ττρο« its rtedredsn power. in addition. si edhteebM piff aging eftlteteteltter, ttetetete its emisstettdedtees er fhs Uv range and the service ie of the emitter Is reduced In adásion, a eoofcooas^mS?#Mii:|[VWriöef debug ailohgor Édgpp? is secotegarsied by a consoropkin te enerpand frequently also by damage to the substrate to 0¾ treated.
Furthermore, ere dee of a shutter recites the presence of a enttarn installation space, deflate,®Äte£$te emitter te the substrate. Hamm, this distance reduces the «rabiatem intensity. Basically, if is tea csss, teat as greet an irradteien mtemffy as possible iblÉtevs# when the disterms between the emitter and subsists ss a steal es possible Finally,. a buffer -is s movable cempcmsof, which tees! ho activated and bas a certain susceptibility to error.
Thsreftete: ere problem addressed by the invention te to indicate a simple and cost-effective opetebng process ter err Irradtefe device. which prevents tee above-arte itemed disadvantage*' and at tee same lote meter? possible a short warm-op hme after ao interruption of tes production pmeessa Λ 'ίλ; '*0 ' X tev h'1' 'frÍ:py|#ill|s:dáte baidioh shteprphg píXps te fh! ;typ: rnplppteabtee corset according te tee present !nver||p; |η: test tee uv emitter is switched on d teen is so interruption of tee continuous substrate feed, wherein ire envper tenrperaters of iiers^^tad'-ÄÜV' «site? ^^tiÿ. '^@E.l^fili^.-âs·:« counter-measure to counteract a decePd of lip: ΡΐΙΡ?Ρη·ϊΡΡΐΐ?ό: iy : morelhse ï Ψ··&amp; bslrp Ég horfibitepraldgi Ϊ^ρφϊφ®:·:·. aôPfterig te tee inoentterseiositeteioss opefaferr: of tee UV emitter end tee use of a shutter !Ä·-; tesfiail-.I' It^pl^itd-'awtesg' si - teéfÂnisa'dô'Âsh .dfl. fr?« 'f 'it'rvi «»"v o < * a· s-iOstrste feed As a result 0! tee feet, teat the operating process aourrdirig to the mvermon esspsnses o tn a continuous operate Of the UV :0(01¾ wftf bpreleg racSate power, if there is 3 Sfoppege of tie producte process the energy consumption *s f^iÄ feaua« of teisi, on the one η«κί. a parfroafatly energy-etenierh operstlrrg pmcess is made prvsssore and 00 me emer hand, the service life of the emitter isextsnbrte.
The dlsadvsrxtage of tee irxcsssive fieafing off tee UV emitter associated with fixe steeteg efesr^ent if there is a steppage of tee pmxriion process afid ttm accompanying impalmerrt of tee ir##::fgdidtterr :pÄrtÄ!M-fW *n the precase accerOrng fetee present mvansoo fn oÄineueAtteisssstetetaie |i<sssHèsfe: giiïGîïafit Qiïôp. e- < mr 1 p3i, >'<; -r ^eoocxri: 'wVSSSK t >CiX\i O'U Ai hîXo te'" ' m fgte »νΐ lu en t|. aîtf" a%r an iiÄ::IÄiÜ,e: teeíiiV emittehaite io bier tefafes telfe: Í uilfetefo r|bhtei|bf : g decretuteof the erntear temperatere sr tee swiitesd-oif state.
The m emie? is in principle deigned fer s spéciid opereunp rsmpcranee and an opsrecng semmin power. ÄbPAP íre «ed'iMÏwmamM mmo* isenss i fia m Φ^ ** WH** ^™;re of 9m mm m mmmmmmrn is *> uv «*» Both an «tig tmmm of me ψ mm mCh is mo high as we« as one whah is too ίο» is mm^ b? a <ötod «**» adjustment of the desired radiation powis &amp;&amp;&amp;$> >, y is ^ ) * " «-v^e w. \ 1 * v Av1-' vn. o ' '(f v\' v" a p m\ C\> Λ a NVc! \tl5 IS^seht iytiiftnasä CPdhibmdase'e m cd© îcc srseniarsc-t. s nocrpASWm tcç smite? tenrptefthns oy morédra?» Id %· '-alow tho nommai ^ tsmpnreÄ To m «Mf^**«*4* «to* ***"*»»&amp; temá and sods«# Wddf# ids nominal operaiig temperature. tense me UV est hier is Kept a* a tareperetere close to its nomine; epmahng inreperatere. a shod vs«rm-?.rp trme m tnaon possAhe, As a result of ice is?.; mot during rrre operation ma UV emitrer säsperaidsre peviotea at ttt^ fr/ .ms&amp;isisy In &amp; mom me opfstiagimrdpe?aiiire,lm yft «meter e® seam ns operahng rateatmn power m teipsn ·? seconds The dëdf^dg î^mdétssrs o? the aradiadon device ses sdiusfcd to fits spralng ra-hm so p war ? me yy:e?plter;, in» st?npt«ét mM is opmâ mmm *|!ΐ«ι«ϋ«·Φ^ .¾¾ ^mm$k> ce êta one hand *s dradrsteo with eeifereoi radiation energy and, on the other hand an * h-gh speed of the production process ss posvbie ;s guaranteed in a pi'éídóid: design >sl is pprstingipreeass armoiding to the pidsept invehfiph if ispretedteh tepfft itefthraj e? is ytepnftípr to provided as a eorrnter-measor«
In m simpteeî casa, id the eternity of *e UV «mitte; a mrnpefig unit is provy^MÉ 8 hsafeg eiemestt. icrs*®mpre, ;c ate form ot ars sdIVared emitter or a hoattaci roil w® wmch ma ©miter temeereture can da Kept ;;t tee temparsitee range areusxi tits operating iemperstdre: f has, It Ip ms-be that Hi pAlandiar can develop its maximal radratson powdihitihip eiflW seconds. ln so alternative, also pfefetred dss^e ei the operating process according to the present invent©;; It is provided, the; the emitter isfhpgrsiyie ;s Muenosd tf ededhs M cdsldgi iand ilmt ègailnf sí the air %ty |ty;p|§ens pis heat-ηρ element is provided as a eotiolsredfssetsii te ©tto td dseräts dit td¥ Ä? t^:;;:l|^-dálPW'W êahtph.ftSSsáh: dplmlseé rtssalrm power, en air poing ΐ&amp;:ψ·α^φφ. i^T Iff ^ ^il|# Τ1ιρ^3ΐρρρρ:ίρ§ §ρηρρ5ΐρό an ρ tPa sddgcp sí the iy V femttt^ or ©eeP the seiecaef Ée yipmi;ter:and thhaifiildsfipplts çsilpf teyperaire | ^Èm$Wv$ê$:$êé%M epersttng femperat;.;;e. mereim'd. It psssiisld rddeeasm Idoresses the oenenl: emitter saspsrafeie:; I hap thSfpSy preyen tp |e jpettelciy, ft the air höwfkt»s around the surface of the UV eniltte?.
The emitter temperature can also Oe infseencsd |y: Sdtttspseitt of the elr mo temporaior;; of the smitiertt air drawn ;;; hem tlte sir coollg, heating or einselhg n! the emitter ftupaseiisftppdd possible with the air cc-ftcg: is sihlttiftaft Ihisj about ppth an increase as wen as a mdeefior; cl the emitter tempefature. An sir flow, whan lows by the Uft dilit# ftf ibis ©oadd is itten Ütt fe ieiUV emitter b«fnp nested sr soctsd ss ufil%ttí|ypipsii^:rliiö p excesssvSdooi ttea|:tg of the UV emilte; being prevented.
As <5 ktS* of 8-¾ ten tent ms .tœa&amp;®.Âà&amp; boats dbe sir ?b®. ms1ef5ipsfaiurs oi toe UV ennter ess bo mnitesed by ftp air
fiöwabíl tette be; kpgVte .ifs# IWÄsä hsiinâ pf HW g;|te.
Wsff s ä iÎëèlii>f éfèrfie^ san sei asx1;8i®ia#: fsaasiv· m eiactrica! heaSfsg esenrantosn be sircpiy sctteated Pmio-obiy. 8¾ heabng etemet« la 3 shotf-wav* »^ared sráipb; là 1¾ ease of a snort-wave emitter fe hsat output :¾ vry ^tx-sy ansiabe. so mat rapid temperaters changes anti « mpidbeaitgpf 8® UV emitter are msdeposssbie: 8¾ a fumsa? advsÉspoans design el tee opafa^ng ppsp Spcorcitog *0 te* passent tewrnüep ifl crowded. miiis snttef t^?^»rsaa:iPijenoea by mttarrs of an m δ-y an air cooling, ana ihat a change offre mass $0# of Stiver is provided as a cocäntei-messuro.
As a result of toe fact that fire air flow te vsnabfe. an mtloenoe olths értette? lempsfsfere is made possible by a change of the mass ilo«f of the ah How. if. for examples É# temperature of 8-0 m ÜI btgh§r thars iio ensifer temperature, a heating oi the «outer is attained by an inc?sase of the mass ftow. Howeverf-if fe ifemparatpre of tee asr Sow Ä-Äf-'Ä te «miser temperature. a teducfaon of me moss howoptnbutas to keeping is yVepftef warm as tong as postÄ
Tne air δ.·Λν of tbs ar cookng make» possible an osaet setting oi the emitter temperature afso during in« operate ol the tfatteon device and contributes to a uniÄ-shÄ temperature:: if has proven successful if the «^ányou||úf#^'^:^iöf##pe 53s) ft:s UV emitter is switched off, and (bh) tns nesting etemerd is switched on.- and when the interruption of the (cc) the UV emitter ia switched on. and fdd) the hea&amp;?g element ip switched off.
By switching off the emitter and swiidnngjn tee hsafng olemteilWhen there is so iotemtpte of the predtÄn p^essçèa emeter temperature is kopt in a temperát®:#range around tee operating temperature during the ini^nipte^^Äi-iif^tecfcar. macnos a high rotate power In this connection, if hás fhéí^Vólpföven M baiMspelifph if the UV emitter is switched on and at me same tese tee heahng etemeot is swifted off. The sisMtep#Ml: switching off of ttefféatirig element contributes to preventing an exsæssl^he^g.o^lteiiV'^ilsf under operating ttehcisopf ft has pmvap to be: Isnefidai. «1 the heetmg of tbs aif few ocoms In an airfeetf chanrtef of the air ooofing; A heafbS slMpt srranged m an air teed channel has the advantage, that thé # fan #s heated in spitta; proximo to the UV erteilen so that an especial* energy offices? operating process 1$ made possible At the same Urns, a non-u-Vonn heating of tee u¥ emitter· fe counteracted: m tee case of s pféíoTted design of tee jpilsf'ÄÄtg to the •pmæÂvmite itesprotetteii thsftlp ρ?ρ0ιΙ1#η glvteeftes # taftecfor having a side iaong tee UV emitter and a side facing away from the UV emifterpand teat the heating of eie sirgow fakes piece by a heeling element arranged on the s*te of te-iiÉÉ» teeing away.
The refieefor is firmly connected with the UV emitter or g is a reflector component arranged separately from m t has a Side tec-ug tfielfV artetterdéd teáidé tetepgawsffw
As s tm&amp; of foe * «wng*» behind me retfecfor therefore on ms sise facing away mo UV
Oi fe- c«%««'*wcfe-«stf**heatedU8i f'•vr Ps'ra to* iv fovtfoc: » 4U\ oerbe -xi‘eater by me beatme 6'Weni and « moss is I«**«* leafed m fee «»». a raunte and to heabng of the UV softer is prevented Such ar amangemeot úwfc» oonfehurselp s arsííorm te%öf««Ä foefersfely.the a* tv* *** M*nd me UV emie? in
Thus, a uniform tempering of fee UV em*«er « msem possitm tfbas pmvsn sisrssssmi. if eh« fesd rate is detected h> * s*Ä
An ijffecsve aomtomem of the redder; pow&amp;£ of ina UV smfeer to tos feed rais is msdn powtote. I» tos foss näfe i$ detected consecutively - thai is, continuously or fern hme to terns, Ins sensor provided sor fhs detection of ths fesd rais ősre detect the toed rote. tor exampm. by detecting es efestrfeat or optical measured value Preferably, too msasuremant of the fesd rats ooctss without contact by using an optical cooofaitorr measuring system, for example, lay means of a camera. I! has proven to be seneftoist u fee esmpefa? m* of fee Lfv sm tier is detected consecutively by a sensor
The temperature sensor converts me temperature into so etecto oteaedrefevafos. et démets fee fembefetoff Of fee UV Pditef coosecobvsiy. feat ,s, toteouuiy or trsprsfee id bme in particular, in fee ease of simuStanesos dSddi several Uv efeiifefS. each of fee emitters son be nrovkieo wifirá ternpiatore sensor. Aiternabvely. omy fee tsrnperaiure ai a sfogteffofesf *iV5:vidu^f emitters con also be dstoctedi W doteifen of fee temperature takes piacé preferably on tee tuba Through fee consecubve detection top« smlar.temperature il is possible, to identify deviate of fee emitter terstpensore from a preset nominfe value as rapidly as possible. Thus, an sspoorriiy dynamic operating process Is guaranteed. todoodimeni
Tns inveotim <s îtesglfeçfo forteil ifeidwfey totesrteef an embodiment «ad-several :iÉ^d|s, fo sdheiplio rogfeserî||p Figure 1 shoves err embodiment ol an nradahon dsvme operating according to fee operaimg process atæoô%ytfe.p|^ï :; tovanttefetor
Figure 2 snows a fest emirtortnodsfoter osa in tiro msêsSm dayle adiferdfe|;to Jjgifj ,¾ tyhfeh ifeiifedii is: adihpd sir ‘feed channel,:
Figure 3 jteöws^ÜliriÄute acoordmg to Figue 2 in »mmmm
Figure 4 shows a second emitter modem for use irr fee irradiation device according to Figure 1 in tennfef perpendfeuiar to tee tongftodrnsf dsrttotfon of the emitter modnfe is arfenpd fedhind a reftedor,
Figure 5 shows a forrd emitter modem for use to tee «radiation device according to Fiprs 1, in which a ho^?5| etontonf ruopfeg : m the toeghufeffe direction of fee: emitter:medeBs ar- snpd behmd s mnoctor. sed . F|gyyr;s;;#::Sihiöyv^d^ácíí^g^iryfy «Mon of an UV emitter . fee popot feyp-tion is dopefed dopeotong or; fee pmaifef the start of ip emitter for variously sfconçiy pse-tempsreç Figure f shoysto scPonraPcsiiy an ornPdlment or an irtsdiaftofe ietovip ^^ifeg''3cdifeihg'te''tee:r^>orahr^'pn>o^ie.;e^^g so fhe present invention, to which the reference s>gn f is assigrred overall. Tno irradtotiou device 1 is used for fee ©.«mg and dsrdensng of a cospg 3 on fee work pieces 2 inlbs ferm of pssítofods
The irradiation device 1 comprises an^femittor unit 5 fo? the rrradiaäon of fee won« pfettes 2 and a iroirspon oovice 4 which commuousfy feeds M yfoik pieces 2 in ipisssprt dheeiion ï of fee irrPigdon tenpgh fee emitter mi 5.
Ils emitter pmi δ has Sa. Sig Se sirte'ged in s rosé &amp;. Oc. Tr« eredte? raodoies· Síp 6¾. &amp; ;?« designod "totestem. otey tea emstíer smPte« ás -s dsccabso m oatas balms.
Tne emitis? module §s cwpsteè UV emitter Sa. te ateich a hsettegteteatete 10* » ass;g?;sd te? heating U» UV amitte; 9a. ïhs UV eoteteî 9s ha* s cylindrical értette? teoa made d quartz glass sdte sa emitter tuba io?i§;h.id=nsî a** H :s ensiautenifed oy a wem#, púm? o? 300 W «va a tertgth oJ tes aK-sBar tnbe oi 1ÄÄ.: 'ne emtem a ede?es da tes be am a-s-angeo Ά s she mMter un; 5 'te&amp;dve te '«s t'ategO'f dewe a *» soU* a btb -'^ m®* fctó fangtotaai ®m a 8» uv mm nm te me Äseöd <m$w ? The «ternit S *»&amp;«* sa
Irredialida hete as dia sorlacs ol (.de transport bestes a 1-x dm eradsabon of tes wort. pietec y ]Ρ* edensrcm of tœ srradsaaon Sold «'s «h« transport rteec-tm ·?. Is om® m In Figure. 1 by dashed Uses 0a: δο. fos vsnepori asvoe a moves tee wxx pieces 2 nefabve to dm etrstter ami 5 »««diabvo, U a '' 4 , .V 's emmar une δ te tes smls-ie U tes otete ptese 3 e 30 msn soc cso be ste via s devcte tes sstenc tes disfedceilftefdslteteô}.
Ids médiádon devsre t w esesd so tee operteirg process according is tee passent invenhors. Bestellte «4 ptecss 2m M ® the irradiation lltetef tes teteÄOtte 5. tes UV erteilte! Va, SO.· 9c a?s first switched ofi so tes! the ipf» tetete IN? vp^trng temps?sture, in :m site; natwe ossign cf the opemhng process if te provided test tee UV ensttets ted teilfalfyhq psoteope Kefte|y tee asteerteed besang teamen? iSa. 19b. 10c p;eneahte te pepstPiy st tee operebog feisperatere sad are mtesspesty stsned if tee UV eteteste 3s. 9o So hays machsd tees pjesst opening tempsrstefs end spempp rgoiatioo powso tee wste ptecss 2 am m b> the dsoepod device 4 si p^deitersiesd fraospod speed to tee itesdia|ôo-mm® c?#f ^^|àii.:«IIÜ.: opoîteos of tee asad^hoh device 1 tee f?srsepod sseed is estesfed te tee svemps -»eiping «teiaOts
Sa Sä>. 9c The «k pieces >op teidf;gh tes irm-hstioo sres ffwslypfte p céneïsof transport saeed is steeefes pstefsoesusiy « m spPosi sessor 11 vtefol leMis tee disfesce beaefes et s ygvs peói 2 te 0 ptssot ltee teM Tf-s censor !1 Osesteits tee aeosport spoíjs ceasrsexisiy te te« cooboi uoit f3olteefte»bdiite ff e steppage te tee pe?deot>ce tateitesc octess deene the process the depper erdas. fact tee a;cV gieses 2 fopoted !« tf« wssiafioe afsa cm e?f psod teö teO| te so Uv ifmdisdoe. so that tessa can be damaged te c:der te prevent ftes. :t te prov dod. fiat tee opetehog paráteeteís ef tee eovfter modules 6s. íte> fc sm coltÜM hy tee oopPsiiopit 13 depfoihO Ch tee bsospor? sfx:ed 9 teere fs a stefpapte! tee ptedscPso the emteer mociuias da. db. Te are svsecboc orr fo order fs be élite# îteartehtpe an sosok-teas of She wo« pieces vte« s regh in^ä^ten power es eaaedisteiy as peesöse >vres resteiid'ted prddflfoo, fhe fetepsrafoie of ine uv emlfefb Ote 3s teiteeippfSd d|s:|s lates:ltee,: Iteidf
Mwterffö 8 teasparatere cepss« 12 is erranged on m emitter fater of me UV eptefer Oc of the emitter modofe be. wfVm tempemtsro sorrso? detects tea ectsat famperatcro of the amete^ tecs to an ai^alh^;:=MiK^Pi^:|fc^· :ppfdÄ:#i·#' teipf^ided vpte a itepartenre sensr 12-s? Octempc :bf möttefhah W*&amp;teatew 9s dpb?#i tetepteteiMidv :ie räsoecb vs nesf-cp atea- e;c 10sy dp,: l|e ι sMitedtefftey fhs Ä shtt 13> se teat: tea air fbw vtefh whsoh She UV emitter is bathed te tee m<$o* ?%mnêctear to tea smittef foegltedinai d.-maflon.. is healed Tne mfmÊm 9s, %, Se er-e teas hspf tea temparatem m tea range pt tf|# ö^|f%fd^ÄÄrA'^pp prodectiop. Äs a shsnil of foefgci that the Uv sb; %b tept at the cptetieg temperature. foe tee is reouoed. Äh the Uv
Pisittsf Sp, Sb> »qum when msta®!>g; ; fo 5¾¾^¾) ste enemting --adistcn powar. Thus m immediate ted ot ite :|^pk tfeyicfoi ate a &amp; pbpfole wsi h|b báíspoít speed When rtearöng Ina 0-0300¾ ms hosting î-iamte 1¾ 1¾ 1D«;js::swPchíííf mmMmu -on sche^atæsil^ :s frösivlpf gf ap siÉr fopdute 20¾ w$&amp; $ft ||:^i||ií::|t jfi liÜÄ: #!Ps' aÄüftp# ?!i5ï.:fft 1 th« am« i>mp**ea a teitng M1:ä s|h? UV emitters 23:>2&amp;5h arranged iteem. The fusing ?yl >s msö* from stfomess test lihas a langte L of® mm, 3ÄI o?4^ mm aid a heghr h ο* Γ1 mm On tbs rear tee 0? à» honing 201 ventilation dads 202 203 are-arranged.
Tb» UV smiths 20&amp;S'20ffo hays foeach ossa a cvifodocsi sswiifof lube uesed on both ends made 0? tfoaiu: glass with an emste Äg fopgifodfo^ a«. The iVmfoitlerc 2ö5a-20$h are characterized by a nomfoa! power at 300 W 0» 15¾ case of a nommai temp idipboid 4 A;. an ermte Ä'ÄÄ1#%jh wem tee outer dimeter 0? 2¾ mm and ay s power density of 3 ¥V/cm. they ^f #fma§ed «stete Sie housing in suels way thsf fofo? smite robe fongfoifonsl eyas wo paratfei to each other,
Figure 3 shows schematic«^· a rear yilw of the teste msdfos 200 for use in ihe irradsatte device according to Figure 1 the emifeomdofo20i)comprisessífeusssig 20' wifo eight UYemitters205a-2Q$harranged foeiein{notdiscsmtele m lbs dmwisigi. Ob thé ÄÄlSa of foebbaibg 201 ventilation ducts 202 203 am besaget! through which the UV ernste car be coded duiitfg foe operation vis an air flow, which hows dip füredien pefpendleuis? to the ernte tengsiedioai direction. The veohtation duct 202 is 3d a-r supply duct; fos ventilation duel 203 is used as on exhaust dost. In the ven csation duct 2(?2 s heating cast 204 sc arranged. ti the emitter module ÍD0 sa heatfog tafeo place of the Uv emitters 205a-205h mstaiied sn foe teltbr foddufe 28δ> In order to prevent sn sxees#®hsofeg of foe uv énedére 205a-2QSh end of foe housing 201 and «5 «^es is bd sbiifo operate foe UV emtes 20§bM§iwsfo spfased mdiabon power, me emitters 2(i5e-205h can he bathed wa foe yénülhfenjuci 202 with coofcng aifoow apifforehy rooted: The tsotesg asr. hasted by the etfofes 20fe-2QSh; * iso away foimegb foe evhapsi air duct. Tho air few is ysrlphte; -rs pedicular, foe mass tev of fos at? flow can be a#sted is -adjust'· foe estisig capacity.-
In seder to prevent a cecétg #^-^^^p^#W«t»ters 20Sa-2öhn. a bsfo-do sismefo 204 is arranged in the supply foihifparse! 202, whsen hea&amp;stiiteÂ^te^ïto'.ctft as requtej. The nesting temen! 204 is used lor heating fos eh fed forosxjb the supply air diarsr-fti 202 which in turn contributes te a heatmg oi dm UV smites 2058-2050. Through a cdncof of the svppU air temperature foe UV smites 205s-2O5h can fe ksst at foe Ip^fcÉ^pr^lûmi· in Figur«; 4 a second smbodtment of foe smite modpts foc use m sectional depiction according to Figuie 1. The reterenoe stuether ddO iyïassighbd bferai|:fo; |te: ;:pf Ätehiter ffiÄÄÄii tn Figure 4 tame áilfousshg 4dt :^fo :®|hl UV efolfers: 4053405b siracgect therein and a fsousfog vvttdbs 4S3 msfet of qusfot gisse in Pddiisos!, a !»tete 402 made of ateinum ss sttached on fite inssde of the emitter ma^ÄCCfh'Ä^#ÄÄÄ.dÄte:i^ km Figures 2 and 3 the ernte module 400 nas no a* cooling, tn eddteon. a heaffog ëfsfoebtAOA is arranged behind foe rdW#4öti::^Ä'^at%tern^it-hgate-Sta remete· 40p and thus mditocSy ateo foe UV emitters 405a-405h. Tbs beating etetehfW htM-ThÄysI^teidibilir: fo foe tenteidmai axss of foe omter modute 400. Vsewed itiiteeUiregfen |re If rlhpei Tfofoipg psraiSlf breach ofoec: S tire leitete* «ρ^#:$ρ*ρΐ*«Μ**
The ermterr rnmmmmmmm^M m four UV iätansrrsad fr&amp;fa mW^m m $ s* ^raxetet «* ?he írom sideoîthe housing SOI. A hssïsngfiioroo^^ -s isomÎgsô ixtwsen if r#r was of the Ooesrng 50í <r-d mM mMtm* which iiili»;piÍMfe^tó« oitheUVemitter §03 ^^Â^rfl^rê-t.esiis tee UV «mission of an U¥ emitter si the xsveisrmth 254 ms impending cm id* it®« after tn* s»srt of tee UV emitter for various emitter sterling temperatures A tow pressure emitter with as artete lobe mods of dearth pis Used as UV é*i which M sised oh doth fc'tós vra piochas. fhe&amp;Är ü^lÜpiÄÄ'ii ®B. i?f>&amp; fe wnreivan &amp;tete§am
Tt:s to* pressure ernstes? is cteteteimf hy a nertemri power of 320 W (<« the og.se *f ä nomma! samp prtint #:4?43. pfítetfer' h:be tengte of 100 cm, an emteer tóba outer «mmoar cf 28 mm and hy a power density s? 3 VWom ?ho few pressure eeàtï&amp;r was nested heirs the »í ;f:iUa% tó « sfeteng amperage. For lis purpose,, Ore temperature of·fee fs><; pressure «m*ter in th« middte of the emitter fosa was <fete«*»teS with s temperature smm siteched on tiro mdaide of ;fe gioifto? tóba. 20 "€. SO X. 75X m 100yC «fern selected as teadrng temperatures. Soöseqosftífy the few praams Mite Ms Starred at ids point in time IM in Figure S, isr each of Is starting iemperatuH* a course of the Uf emission is deputed depending rm hvs time after the start Cotes x-axis tee time smes tee start oflheemMr is ptefiesiin sssortes. The yMs Meets tea «itratepfet radierten ernteten >« rteative «nits
Fs; a eeoti uv ertestepn performance fee tew piwssure emitter must have s cédám temperám?«. Since 8se tew pressure emitter fsrihs up dürfe« tee opersdon. ttes lemperateee *achieved after a nsdam pperet-no time. As tee cmve progressten tex-ite, te the olse of en Mii; ΜΜ Ä priemtet aha MrprMro :MW%-, W «tetetlii yv etteasted % attirseá after «ppfO^meteiï di? ««roods The dm« ente aciiieeemenf of an ecceptehis UV ermssten cun he reerteed by sr prehsafsix; td the emitter tetey .testeten« tempte'otofe of 50 *C feeds sccsrein^ tr> me durrrs pronrsssten 60S to s srareng time s? apprasimatete til seconds tn tee case of a startete temperature or ?5 *C the starting fe teísftórtendrf to «ppmomaiei? 23 seconds mé. fs paeoutor -f. tes «sss of s stafttrf lernperst«!« of 100 X IN starting time of less Oran 5 seconds sen he achfeaed pinte progressions «dt. 002).
BMllilOMâiM ítmdMon dsvidS 1
Vtesfecs -2
CsÉfog ···
TmnspMIsoiöe 4. c-ndïur UàO :§ EMIèf modulo S&amp;. §ô> èc
TmaspsH ddaetan ΐ
Iss Slslss Isis ®m&amp;} % lb yisMfes sa 41s§ ësmsnîs 10¾ 1¾... 1¾ %dsa! äsassr 11 tsrnpss-siurs ssnapf 1:2
CsaSil u$\\ 15
Edltlsr Sîsdyls 218
Haypig 281
Hpáisg'·««? sais 281s
VsstaaMa Suds 282,205
Hssfegeas: 284 üV euddsis 20Ss40Sh feaiar ;as8yis 480 Hödssug: 481
Ralgçfei 482
Hsussng wiolôw 483
Hssàa« dsmso! 484 y v uma-ars. 488a48S8
Eapps; fssSùia 808
Housing 401
Wsodova 888 UVSäSiSSf 803:
Air ocaing systso-! 804 v8?sîs pisgïSùaisPS 881-884

Claims (2)

  1. laiti iOÈNfPONtOK 1. usemelfelâsl otjaras bssagakkôkèssblsktms rétog i2; bosugtóséhos u^sugàæovsf ;0a 20Ss 2ô5h' 4û5a4û5h; 603), amely s kovefesső lökéseket ?o#akamgása. 3) so UV sugarad (0a: 2ô3s-20ôb; 4O5«-40Sh: §33} mtlkodfetèms egy ekiirt hőm«kto*toi lúggo eiâ-ri OsensolfelAs.; s«gôr^te!ÎS3itmèn8^!; h) a réfeg {2} folyamatom tartományba. ado u hoasávoset&amp;st sebességgel c) a retog <2) besugárzása 3 &amp;$ug&amp;2a$;to?to^p% s^Äaf piemaxve, ho§y a folyaoioîoa rêfiôgyiom^m megssaksdàs« esetén sí UV-sopraol: (Sa. 205a· 2D5b. 40δ»·40δΚ 502} kikapcsoltak, ah:>; a klkbpcsok Ud-sogàom (Oa. ?05ο~205Α 40504031·:; 300} suytetmomèrsèkiafet megmérik, és Aleahstment mefemfeíP Iperns vèg:e, hogy a sagiïé- lfemôm#|éidel< af iiiësii ÜÄÄiÄ:a#'Ätf tôflooè stsâysatèso alten hóénak,
  2. 2 Ai s gsnypom szerte?; asemékotês; agates, am! JAmeavo. hogy olteehalsskem s.;' uv-sugaf?«' (?·· 0m>2èSb:; 40;4·4ϋόν 003} msKpteste; eg>fem (U;a, H'b, fOc 404} ssgîîsfe^v^ vêgwaah S;ÄAl,kteoyponf amtefemmeilema; ekéms. am\jAmozvo, h$sy ..a$u^t«ftots*ktoMe§y pfÂ;|202: 303| Äi afealbtel? tèghaîés segítségéve: bofely0sot|ok. és hogy eltem;etesAi a igéramiât mefegeéeét igMmei (004) lèpkgik 4 te te igénypontok oayæo w·** ôze*r»«itosè$i %f|3ra$. aaat )Ama*v«, hogy képeotetefàrammst à8yyâso|os; ès ho^f eíAméskedésttem a kososat Amié gmegésisk yàifoëfâtisàrhifhadp végre. s g 2 vagy 3 menypooî mond «zemsltoie* e4;às, *mi JAmssve, hogy a felyamatos mfegvoaefes megszakadás* eseten iái a? UV-seg^bt (9a: 2öea-2(teb 40$a-40öh) kikepcsoiyfe. és (ob! a tűfesiemsi nOa. 10b, 10c. A > bekapcsolóig és hogy a tournâtes tetegvozetes megszakadása eseten tedSa-büeb; 4öss4o5a o%0 é&amp; (cd} kikapcsolok a fáteetemef \?öa, löd, 10¾. Ae 0 As 1. ^énypom szedne admette A eltems, sssafgstffmogvo. hogy a légáramlat melegítését a laghdîès (202: 203; agy }p|g&amp;b#sÄ ^ vg§fe>: : ΐ As eibeè 3. vagy b igénypontok egpo szánni! bseeelfeièe elérés, ami jeffemeeva, hogy a oeéegarzo stolze* í-cliaktera (402} van agy, as uvAsugárzá (4öáe-40oh} felek as agy. 32 üv-sogámivai (405a-405bj Rémérés oldalon, és hogy a mfrwűal «illésé! a rof**tot?ai (202) elteniétes sÄn átwKtezett Í04} végea&amp;sk, g * éléi? 3 4 0. vagy 2 igények egyfee am! járnom, hogy a l^ar#,p ^ g te ern&amp; Igénypontok egylko osonna Özemet eljárás. *m\ pisára, hogy afymm: mm&amp; *» :|(20Ío!Őp||1.1:i ; . KI. AS rn&amp; igénypontok agylka szmW dkoíooílsiés* cka^s. «a«? aöSh. 503) hétaóÍsékioío? agy aaékoióvei k-lyafeafesan (12; mglssî-aiwk.
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