DE69924131D1 - Sortier- und lagerungsanlage für wafer und ein verfahren zu deren handhabung - Google Patents

Sortier- und lagerungsanlage für wafer und ein verfahren zu deren handhabung

Info

Publication number
DE69924131D1
DE69924131D1 DE69924131T DE69924131T DE69924131D1 DE 69924131 D1 DE69924131 D1 DE 69924131D1 DE 69924131 T DE69924131 T DE 69924131T DE 69924131 T DE69924131 T DE 69924131T DE 69924131 D1 DE69924131 D1 DE 69924131D1
Authority
DE
Germany
Prior art keywords
sorting
wafer
handling
storage system
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69924131T
Other languages
English (en)
Other versions
DE69924131T2 (de
Inventor
Albert Hasper
Eliza Nooten
Menso Hendriks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM International NV
Original Assignee
ASM International NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM International NV filed Critical ASM International NV
Publication of DE69924131D1 publication Critical patent/DE69924131D1/de
Application granted granted Critical
Publication of DE69924131T2 publication Critical patent/DE69924131T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
DE69924131T 1998-10-14 1999-09-21 Sortier- und lagerungsanlage für wafer und ein verfahren zu deren handhabung Expired - Fee Related DE69924131T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL1010317 1998-10-14
NL1010317A NL1010317C2 (nl) 1998-10-14 1998-10-14 Sorteer/opslaginrichting voor wafers en werkwijze voor het hanteren daarvan.
PCT/NL1999/000583 WO2000022653A1 (en) 1998-10-14 1999-09-21 Sorting/storage device for wafers and method for handling thereof

Publications (2)

Publication Number Publication Date
DE69924131D1 true DE69924131D1 (de) 2005-04-14
DE69924131T2 DE69924131T2 (de) 2006-04-13

Family

ID=19767964

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69924131T Expired - Fee Related DE69924131T2 (de) 1998-10-14 1999-09-21 Sortier- und lagerungsanlage für wafer und ein verfahren zu deren handhabung

Country Status (8)

Country Link
US (1) US7077614B1 (de)
EP (1) EP1121712B1 (de)
JP (1) JP2002527901A (de)
KR (1) KR20010075625A (de)
DE (1) DE69924131T2 (de)
NL (1) NL1010317C2 (de)
TW (1) TW424292B (de)
WO (1) WO2000022653A1 (de)

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DE69924131T2 (de) 2006-04-13
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EP1121712A1 (de) 2001-08-08
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WO2000022653A1 (en) 2000-04-20
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