DE69322944D1 - Handhabungssystem und Verfahren für flache Gegenstände in Einzelbehältern - Google Patents
Handhabungssystem und Verfahren für flache Gegenstände in EinzelbehälternInfo
- Publication number
- DE69322944D1 DE69322944D1 DE69322944T DE69322944T DE69322944D1 DE 69322944 D1 DE69322944 D1 DE 69322944D1 DE 69322944 T DE69322944 T DE 69322944T DE 69322944 T DE69322944 T DE 69322944T DE 69322944 D1 DE69322944 D1 DE 69322944D1
- Authority
- DE
- Germany
- Prior art keywords
- handling system
- individual containers
- flat objects
- objects
- flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Ventilation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9212422A FR2697003B1 (fr) | 1992-10-16 | 1992-10-16 | Système de manipulation et de confinement d'objets plats dans des boîtes individuelles. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69322944D1 true DE69322944D1 (de) | 1999-02-18 |
DE69322944T2 DE69322944T2 (de) | 1999-07-15 |
Family
ID=9434622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69322944T Expired - Fee Related DE69322944T2 (de) | 1992-10-16 | 1993-10-14 | Handhabungssystem und Verfahren für flache Gegenstände in Einzelbehältern |
Country Status (6)
Country | Link |
---|---|
US (1) | US5509772A (de) |
EP (1) | EP0598633B1 (de) |
JP (1) | JPH06191639A (de) |
KR (1) | KR100306313B1 (de) |
DE (1) | DE69322944T2 (de) |
FR (1) | FR2697003B1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100221983B1 (ko) * | 1993-04-13 | 1999-09-15 | 히가시 데쓰로 | 처리장치 |
DE59611078D1 (de) | 1995-03-28 | 2004-10-14 | Brooks Automation Gmbh | Be- und Entladestation für Halbleiterbearbeitungsanlagen |
FR2747112B1 (fr) * | 1996-04-03 | 1998-05-07 | Commissariat Energie Atomique | Dispositif de transport d'objets plats et procede de transfert de ces objets entre ledit dispositif et une machine de traitement |
US6183183B1 (en) * | 1997-01-16 | 2001-02-06 | Asm America, Inc. | Dual arm linear hand-off wafer transfer assembly |
US6155768A (en) * | 1998-01-30 | 2000-12-05 | Kensington Laboratories, Inc. | Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput |
US6899805B2 (en) | 1998-05-01 | 2005-05-31 | Semitool, Inc. | Automated chemical management system executing improved electrolyte analysis method |
FR2779421B1 (fr) * | 1998-06-08 | 2000-08-18 | Incam Solutions | Dispositif adaptateur pour des boites de confinement d'au moins un objet plat sous atmosphere ultrapropre |
KR100540815B1 (ko) * | 1998-12-31 | 2006-02-28 | 주식회사 케이씨씨 | 알킬 글리시딜 에테르 또는 에스테르-아민 도막 형성 첨가제를함유한 양이온 전착 도료 조성물 |
JP4302817B2 (ja) * | 1999-05-13 | 2009-07-29 | 東京エレクトロン株式会社 | 真空処理システム |
US6354781B1 (en) * | 1999-11-01 | 2002-03-12 | Chartered Semiconductor Manufacturing Company | Semiconductor manufacturing system |
JP2001229584A (ja) * | 2000-02-14 | 2001-08-24 | Sony Corp | 光記録媒体の製造方法 |
US6364593B1 (en) | 2000-06-06 | 2002-04-02 | Brooks Automation | Material transport system |
US20030159921A1 (en) * | 2002-02-22 | 2003-08-28 | Randy Harris | Apparatus with processing stations for manually and automatically processing microelectronic workpieces |
US6991710B2 (en) * | 2002-02-22 | 2006-01-31 | Semitool, Inc. | Apparatus for manually and automatically processing microelectronic workpieces |
AU2003231451A1 (en) * | 2002-05-10 | 2003-11-11 | Tokyo Electron Limited | Substrate processing device |
JPWO2003105216A1 (ja) * | 2002-06-07 | 2005-10-13 | 平田機工株式会社 | 容器搬送システム |
US6869263B2 (en) | 2002-07-22 | 2005-03-22 | Brooks Automation, Inc. | Substrate loading and unloading station with buffer |
US7677859B2 (en) * | 2002-07-22 | 2010-03-16 | Brooks Automation, Inc. | Substrate loading and uploading station with buffer |
WO2004088743A1 (ja) * | 2003-03-28 | 2004-10-14 | Hirata Corporation | 基板搬送システム |
JP2006168896A (ja) * | 2004-12-15 | 2006-06-29 | Murata Mach Ltd | トレイ搬送システム |
CN206768212U (zh) * | 2017-06-08 | 2017-12-19 | 合肥鑫晟光电科技有限公司 | 成膜设备 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4014576A (en) * | 1975-06-19 | 1977-03-29 | International Business Machines Corporation | Article carrier |
JPS5860555A (ja) * | 1981-10-06 | 1983-04-11 | Mitsubishi Electric Corp | ウエハ搬送装置 |
JPS6026662A (ja) * | 1983-07-21 | 1985-02-09 | バルツエルス・アクチエンゲゼルシヤフト | 材料担体を使用する真空スライド装置 |
US4764076A (en) * | 1986-04-17 | 1988-08-16 | Varian Associates, Inc. | Valve incorporating wafer handling arm |
US4715764A (en) * | 1986-04-28 | 1987-12-29 | Varian Associates, Inc. | Gate valve for wafer processing system |
US4724874A (en) * | 1986-05-01 | 1988-02-16 | Asyst Technologies | Sealable transportable container having a particle filtering system |
US4717461A (en) * | 1986-09-15 | 1988-01-05 | Machine Technology, Inc. | System and method for processing workpieces |
FR2620049B2 (fr) * | 1986-11-28 | 1989-11-24 | Commissariat Energie Atomique | Procede de traitement, stockage et/ou transfert d'un objet dans une atmosphere de haute proprete, et conteneur pour la mise en oeuvre de ce procede |
US4776745A (en) * | 1987-01-27 | 1988-10-11 | The United States Of America As Represented By The Secretary Of The Air Force | Substrate handling system |
JP2539447B2 (ja) * | 1987-08-12 | 1996-10-02 | 株式会社日立製作所 | 枚葉キャリアによる生産方法 |
JPS6444036A (en) * | 1987-08-12 | 1989-02-16 | Hitachi Ltd | Mechanism for transferring wafer between apparatuses |
US4901011A (en) * | 1988-11-04 | 1990-02-13 | Tokyo Electron Limited | Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a wafer probing machine fitted with the handling apparatus for the wafer carrier |
US4995430A (en) * | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
IT1235835B (it) * | 1989-08-08 | 1992-11-03 | Sgs Thomson Microelectronics | Movimentazione automatica di contenitori diversi con punti di prelievo e di codificazione standarizzati |
WO1991004213A1 (en) * | 1989-09-12 | 1991-04-04 | Rapro Technology, Inc. | Automated wafer transport system |
US5137063A (en) * | 1990-02-05 | 1992-08-11 | Texas Instruments Incorporated | Vented vacuum semiconductor wafer cassette |
US5067218A (en) * | 1990-05-21 | 1991-11-26 | Motorola, Inc. | Vacuum wafer transport and processing system and method using a plurality of wafer transport arms |
DE4024973C2 (de) * | 1990-08-07 | 1994-11-03 | Ibm | Anordnung zum Lagern, Transportieren und Einschleusen von Substraten |
US5145303A (en) * | 1991-02-28 | 1992-09-08 | Mcnc | Method and apparatus for reducing particulate contamination in processing chambers |
JP3149206B2 (ja) * | 1991-05-30 | 2001-03-26 | 東京エレクトロン株式会社 | 熱処理装置 |
EP0582018B1 (de) * | 1992-08-04 | 1995-10-18 | International Business Machines Corporation | Unter Druck stehende Koppelsysteme zum Transferieren von einem Halbleiterwafer zwischen einem tragbaren abdichtbaren unter druckstehenden Behälter und einer Bearbeitungsanlage |
-
1992
- 1992-10-16 FR FR9212422A patent/FR2697003B1/fr not_active Expired - Fee Related
-
1993
- 1993-10-06 US US08/132,696 patent/US5509772A/en not_active Expired - Lifetime
- 1993-10-14 DE DE69322944T patent/DE69322944T2/de not_active Expired - Fee Related
- 1993-10-14 KR KR1019930021323A patent/KR100306313B1/ko not_active IP Right Cessation
- 1993-10-14 EP EP93402532A patent/EP0598633B1/de not_active Expired - Lifetime
- 1993-10-15 JP JP5258605A patent/JPH06191639A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0598633A1 (de) | 1994-05-25 |
KR940009035A (ko) | 1994-05-16 |
EP0598633B1 (de) | 1999-01-07 |
DE69322944T2 (de) | 1999-07-15 |
JPH06191639A (ja) | 1994-07-12 |
FR2697003B1 (fr) | 1994-11-18 |
KR100306313B1 (ko) | 2001-12-15 |
US5509772A (en) | 1996-04-23 |
FR2697003A1 (fr) | 1994-04-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |