JPS6444036A - Mechanism for transferring wafer between apparatuses - Google Patents

Mechanism for transferring wafer between apparatuses

Info

Publication number
JPS6444036A
JPS6444036A JP19977587A JP19977587A JPS6444036A JP S6444036 A JPS6444036 A JP S6444036A JP 19977587 A JP19977587 A JP 19977587A JP 19977587 A JP19977587 A JP 19977587A JP S6444036 A JPS6444036 A JP S6444036A
Authority
JP
Japan
Prior art keywords
wafer
valve
opening
carriage
circular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19977587A
Other languages
Japanese (ja)
Inventor
Takemasa Iwasaki
Sadao Shimosha
Haruo Otani
Koichi Sugimoto
Hisahiro Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP19977587A priority Critical patent/JPS6444036A/en
Publication of JPS6444036A publication Critical patent/JPS6444036A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To prevent dust from generating in a wafer transferring step by moving first and second gate valves together along a circular-arc locus by means of a double linkage to perform opening and closing operations. CONSTITUTION:When a wafer 19 is transferred between a clean box 1 and a wafer carriage, the carriage is moved toward a wafer exist formed at the box 1, and a second gate valve 12 provided in the opening of a wafer carrier is brought into close contact with a first gate valve 9 provided at the wafer exist. Since the valves 9, 12 are integrally connected and moved along a circular- arc locus by means of double linkages 27a, 27b, it can prevent dust due to frictions between the exit 8 and the valve 9 and between the opening 11 of the wafer carrier 10 and valve 12 from generating.
JP19977587A 1987-08-12 1987-08-12 Mechanism for transferring wafer between apparatuses Pending JPS6444036A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19977587A JPS6444036A (en) 1987-08-12 1987-08-12 Mechanism for transferring wafer between apparatuses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19977587A JPS6444036A (en) 1987-08-12 1987-08-12 Mechanism for transferring wafer between apparatuses

Publications (1)

Publication Number Publication Date
JPS6444036A true JPS6444036A (en) 1989-02-16

Family

ID=16413408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19977587A Pending JPS6444036A (en) 1987-08-12 1987-08-12 Mechanism for transferring wafer between apparatuses

Country Status (1)

Country Link
JP (1) JPS6444036A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5382127A (en) * 1992-08-04 1995-01-17 International Business Machines Corporation Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment
US5509772A (en) * 1992-01-16 1996-04-23 Commissariat A L'energie Atomique System for the handling and confinement of flat objects in individual boxes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5509772A (en) * 1992-01-16 1996-04-23 Commissariat A L'energie Atomique System for the handling and confinement of flat objects in individual boxes
US5382127A (en) * 1992-08-04 1995-01-17 International Business Machines Corporation Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment

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