DE69840813D1 - Gerät und verfahren für ein sekundärelektronenemissionsmikroskop - Google Patents

Gerät und verfahren für ein sekundärelektronenemissionsmikroskop

Info

Publication number
DE69840813D1
DE69840813D1 DE69840813T DE69840813T DE69840813D1 DE 69840813 D1 DE69840813 D1 DE 69840813D1 DE 69840813 T DE69840813 T DE 69840813T DE 69840813 T DE69840813 T DE 69840813T DE 69840813 D1 DE69840813 D1 DE 69840813D1
Authority
DE
Germany
Prior art keywords
electron emission
secondary electron
emission microscope
microscope
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840813T
Other languages
English (en)
Inventor
David A Adler
David J Walker
Fred Babian
Travis Wolfe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Application granted granted Critical
Publication of DE69840813D1 publication Critical patent/DE69840813D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69840813T 1997-11-05 1998-10-26 Gerät und verfahren für ein sekundärelektronenemissionsmikroskop Expired - Lifetime DE69840813D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/964,544 US5973323A (en) 1997-11-05 1997-11-05 Apparatus and method for secondary electron emission microscope
PCT/US1998/022706 WO1999023684A1 (en) 1997-11-05 1998-10-26 Apparatus and method for secondary electron emission microscope

Publications (1)

Publication Number Publication Date
DE69840813D1 true DE69840813D1 (de) 2009-06-18

Family

ID=25508673

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840813T Expired - Lifetime DE69840813D1 (de) 1997-11-05 1998-10-26 Gerät und verfahren für ein sekundärelektronenemissionsmikroskop

Country Status (6)

Country Link
US (4) US5973323A (de)
EP (1) EP1029340B1 (de)
JP (1) JP2001522054A (de)
AU (1) AU1365799A (de)
DE (1) DE69840813D1 (de)
WO (1) WO1999023684A1 (de)

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US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
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US7019292B1 (en) 2004-06-15 2006-03-28 Kla-Tencor Technologies Corporation E-beam detection of defective contacts/vias with flooding and energy filter
US7256606B2 (en) * 2004-08-03 2007-08-14 Applied Materials, Inc. Method for testing pixels for LCD TFT displays
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US7391033B1 (en) 2005-05-04 2008-06-24 Kla-Tencor Technologies Corporation Skew-oriented multiple electron beam apparatus and method
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JP5403852B2 (ja) * 2005-08-12 2014-01-29 株式会社荏原製作所 検出装置及び検査装置
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JP5771256B2 (ja) * 2013-10-01 2015-08-26 株式会社荏原製作所 インプリント用ガラス基板、レジストパターン形成方法、インプリント用ガラス基板の検査方法及び検査装置
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Also Published As

Publication number Publication date
EP1029340B1 (de) 2009-05-06
US20020104964A1 (en) 2002-08-08
EP1029340A1 (de) 2000-08-23
WO1999023684A1 (en) 1999-05-14
US6984822B2 (en) 2006-01-10
EP1029340A4 (de) 2001-09-26
US5973323A (en) 1999-10-26
JP2001522054A (ja) 2001-11-13
AU1365799A (en) 1999-05-24
US6087659A (en) 2000-07-11
WO1999023684A9 (en) 1999-08-12
US20030205669A1 (en) 2003-11-06
US6713759B2 (en) 2004-03-30

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