DE69829738T2 - Verfahren zur Entfernung einer porösen Halbleiterzone und Verfahren zur Herstellung eines halbleitenden Substrats - Google Patents

Verfahren zur Entfernung einer porösen Halbleiterzone und Verfahren zur Herstellung eines halbleitenden Substrats Download PDF

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Publication number
DE69829738T2
DE69829738T2 DE69829738T DE69829738T DE69829738T2 DE 69829738 T2 DE69829738 T2 DE 69829738T2 DE 69829738 T DE69829738 T DE 69829738T DE 69829738 T DE69829738 T DE 69829738T DE 69829738 T2 DE69829738 T2 DE 69829738T2
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DE
Germany
Prior art keywords
layer
substrate
porous
ultrasonic wave
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69829738T
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German (de)
English (en)
Other versions
DE69829738D1 (de
Inventor
Kiyofumi Ohta-ku Sakaguchi
Kazutaka Ohta-ku Yanagita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69829738D1 publication Critical patent/DE69829738D1/de
Application granted granted Critical
Publication of DE69829738T2 publication Critical patent/DE69829738T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76259—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along a porous layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
  • Drying Of Semiconductors (AREA)
DE69829738T 1998-01-09 1998-12-18 Verfahren zur Entfernung einer porösen Halbleiterzone und Verfahren zur Herstellung eines halbleitenden Substrats Expired - Lifetime DE69829738T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP00339798A JP3847935B2 (ja) 1998-01-09 1998-01-09 多孔質領域の除去方法及び半導体基体の製造方法
JP339798 1998-01-09

Publications (2)

Publication Number Publication Date
DE69829738D1 DE69829738D1 (de) 2005-05-19
DE69829738T2 true DE69829738T2 (de) 2006-02-09

Family

ID=11556241

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69829738T Expired - Lifetime DE69829738T2 (de) 1998-01-09 1998-12-18 Verfahren zur Entfernung einer porösen Halbleiterzone und Verfahren zur Herstellung eines halbleitenden Substrats

Country Status (9)

Country Link
US (1) US6127281A (enExample)
EP (1) EP0938132B1 (enExample)
JP (1) JP3847935B2 (enExample)
KR (1) KR100354918B1 (enExample)
AT (1) ATE293284T1 (enExample)
AU (1) AU745396B2 (enExample)
DE (1) DE69829738T2 (enExample)
SG (1) SG75147A1 (enExample)
TW (1) TW440950B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7148119B1 (en) * 1994-03-10 2006-12-12 Canon Kabushiki Kaisha Process for production of semiconductor substrate
US6391067B2 (en) 1997-02-04 2002-05-21 Canon Kabushiki Kaisha Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus
JPH10223585A (ja) * 1997-02-04 1998-08-21 Canon Inc ウェハ処理装置及びその方法並びにｓｏｉウェハの製造方法
US6767840B1 (en) * 1997-02-21 2004-07-27 Canon Kabushiki Kaisha Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method
JP3218564B2 (ja) 1998-01-14 2001-10-15 キヤノン株式会社 多孔質領域の除去方法及び半導体基体の製造方法
AU5210300A (en) * 1999-04-27 2000-11-10 Gebruder Decker Gmbh & Co. Kg Device for treating silicon wafers
JP3810968B2 (ja) * 1999-12-03 2006-08-16 東京エレクトロン株式会社 液処理装置および液処理方法
JP2004228150A (ja) * 2003-01-20 2004-08-12 Canon Inc エッチング方法
US7040330B2 (en) * 2003-02-20 2006-05-09 Lam Research Corporation Method and apparatus for megasonic cleaning of patterned substrates
TWI227932B (en) * 2003-06-23 2005-02-11 Promos Technologies Inc Method for forming a bottle-shaped trench
US20050132332A1 (en) * 2003-12-12 2005-06-16 Abhay Sathe Multi-location coordinated test apparatus
US20050181572A1 (en) * 2004-02-13 2005-08-18 Verhoeven Tracy B. Method for acoustically isolating an acoustic resonator from a substrate
JP2005327856A (ja) * 2004-05-13 2005-11-24 Komatsu Electronic Metals Co Ltd 半導体ウェーハのエッチング装置
JP4955264B2 (ja) 2005-03-11 2012-06-20 エルピーダメモリ株式会社 多孔質単結晶層を備えた半導体チップおよびその製造方法
US8327861B2 (en) * 2006-12-19 2012-12-11 Lam Research Corporation Megasonic precision cleaning of semiconductor process equipment components and parts
DE102008003453A1 (de) * 2008-01-08 2009-07-09 Robert Bosch Gmbh Verfahren zur Herstellung poröser Mikrostrukturen, nach diesem Verfahren hergestellte poröse Mikrostrukturen sowie deren Verwendung
CN102125921B (zh) * 2010-01-20 2012-09-05 常州瑞择微电子科技有限公司 一种光掩模在清洗过程中的传输方法
JP7276036B2 (ja) * 2019-09-19 2023-05-18 大日本印刷株式会社 エッチング装置およびエッチング方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05217824A (ja) * 1992-01-31 1993-08-27 Canon Inc 半導体ウエハ及びその製造方法
JP3352340B2 (ja) * 1995-10-06 2002-12-03 キヤノン株式会社 半導体基体とその製造方法
US5593505A (en) * 1995-04-19 1997-01-14 Memc Electronic Materials, Inc. Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface
US6103598A (en) * 1995-07-13 2000-08-15 Canon Kabushiki Kaisha Process for producing semiconductor substrate
JPH09331049A (ja) * 1996-04-08 1997-12-22 Canon Inc 貼り合わせｓｏｉ基板の作製方法及びｓｏｉ基板

Also Published As

Publication number Publication date
EP0938132A2 (en) 1999-08-25
JP3847935B2 (ja) 2006-11-22
US6127281A (en) 2000-10-03
AU9818898A (en) 1999-07-29
JPH11204494A (ja) 1999-07-30
KR19990066873A (ko) 1999-08-16
TW440950B (en) 2001-06-16
SG75147A1 (en) 2000-09-19
EP0938132A3 (en) 1999-12-22
DE69829738D1 (de) 2005-05-19
ATE293284T1 (de) 2005-04-15
AU745396B2 (en) 2002-03-21
KR100354918B1 (ko) 2002-11-18
EP0938132B1 (en) 2005-04-13

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