DE69818793T2 - Tintenstrahlkopf - Google Patents

Tintenstrahlkopf Download PDF

Info

Publication number
DE69818793T2
DE69818793T2 DE69818793T DE69818793T DE69818793T2 DE 69818793 T2 DE69818793 T2 DE 69818793T2 DE 69818793 T DE69818793 T DE 69818793T DE 69818793 T DE69818793 T DE 69818793T DE 69818793 T2 DE69818793 T2 DE 69818793T2
Authority
DE
Germany
Prior art keywords
layer
piezoelectric
ink jet
jet head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69818793T
Other languages
German (de)
English (en)
Other versions
DE69818793D1 (de
Inventor
Isaku Yamatokoriyama-shi KANNO
Satoru Takatsuki-shi FUJII
Ryoichi Suita-Shi Takayama
Takeshi Nara-shi Kamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69818793D1 publication Critical patent/DE69818793D1/de
Publication of DE69818793T2 publication Critical patent/DE69818793T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/1425—Embedded thin film piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69818793T 1997-04-14 1998-04-14 Tintenstrahlkopf Expired - Lifetime DE69818793T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP09549197A JP3666177B2 (ja) 1997-04-14 1997-04-14 インクジェット記録装置
JP9549197 1997-04-14
PCT/JP1998/001691 WO1998046429A1 (en) 1997-04-14 1998-04-14 Ink-jet head

Publications (2)

Publication Number Publication Date
DE69818793D1 DE69818793D1 (de) 2003-11-13
DE69818793T2 true DE69818793T2 (de) 2004-09-30

Family

ID=14139077

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69818793T Expired - Lifetime DE69818793T2 (de) 1997-04-14 1998-04-14 Tintenstrahlkopf

Country Status (6)

Country Link
US (1) US6347862B1 (https=)
EP (1) EP0930165B1 (https=)
JP (1) JP3666177B2 (https=)
KR (1) KR100309405B1 (https=)
DE (1) DE69818793T2 (https=)
WO (1) WO1998046429A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110696493A (zh) * 2019-10-11 2020-01-17 大连瑞林数字印刷技术有限公司 一种喷墨打印头压电振动结构

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3823567B2 (ja) * 1998-10-20 2006-09-20 富士写真フイルム株式会社 インクジェット記録ヘッド及びその製造方法及びプリンタ装置
JP3241334B2 (ja) 1998-11-16 2001-12-25 松下電器産業株式会社 インクジェットヘッド及びその製造方法
JP3238674B2 (ja) * 1999-04-21 2001-12-17 松下電器産業株式会社 インクジェットヘッド及びその製造方法並びにインクジェット式記録装置
CN1310757C (zh) 1999-05-24 2007-04-18 松下电器产业株式会社 墨水喷射头及其制造方法
DE69931526T2 (de) * 1999-12-10 2007-04-26 Fuji Photo Film Co., Ltd., Minami-Ashigara Tintenstrahldruckkopf, verfahren zur herstellung von druckköpfen und drucker
DE19962028A1 (de) * 1999-12-22 2001-06-28 Philips Corp Intellectual Pty Filteranordnung
JP4403353B2 (ja) * 2000-02-18 2010-01-27 富士フイルム株式会社 インクジェット記録ヘッドの製造方法及びプリンタ装置
WO2001075985A1 (en) 2000-03-30 2001-10-11 Fujitsu Limited Piezoelectric actuator, its manufacturing method, and ink-jet head comprising the same
JP3796394B2 (ja) 2000-06-21 2006-07-12 キヤノン株式会社 圧電素子の製造方法および液体噴射記録ヘッドの製造方法
JP2002086725A (ja) 2000-07-11 2002-03-26 Matsushita Electric Ind Co Ltd インクジェットヘッド、その製造方法及びインクジェット式記録装置
US6900579B2 (en) * 2000-07-24 2005-05-31 Matsushita Electric Industrial Co., Ltd. Thin film piezoelectric element
JP2002134806A (ja) * 2000-10-19 2002-05-10 Canon Inc 圧電膜型アクチュエータおよび液体噴射ヘッドとその製造方法
JP4387623B2 (ja) 2000-12-04 2009-12-16 キヤノン株式会社 圧電素子の製造方法
CN1369371A (zh) 2001-01-30 2002-09-18 松下电器产业株式会社 喷墨头、传动装置的检查方法、喷墨头制造方法和喷墨式记录装置
JP3833070B2 (ja) 2001-02-09 2006-10-11 キヤノン株式会社 液体噴射ヘッドおよび製造方法
US20020158947A1 (en) * 2001-04-27 2002-10-31 Isaku Kanno Piezoelectric element, method for manufacturing piezoelectric element, and ink jet head and ink jet recording apparatus having piezoelectric element
JP4305016B2 (ja) 2002-03-18 2009-07-29 セイコーエプソン株式会社 圧電アクチュエータユニット、及び、それを用いた液体噴射ヘッド
US6886922B2 (en) 2002-06-27 2005-05-03 Matsushita Electric Industrial Co., Ltd. Liquid discharge head and manufacturing method thereof
US6993840B2 (en) 2002-07-18 2006-02-07 Canon Kabushiki Kaisha Manufacturing method of liquid jet head
US7009328B2 (en) * 2003-06-20 2006-03-07 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film and manufacturing method
JP4717344B2 (ja) * 2003-12-10 2011-07-06 キヤノン株式会社 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド
JP4192794B2 (ja) * 2004-01-26 2008-12-10 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、及び電子機器
US7500728B2 (en) 2004-03-03 2009-03-10 Fujifilm Corporation Liquid discharge head and manufacturing method thereof
CN100376396C (zh) 2004-05-19 2008-03-26 兄弟工业株式会社 压电机构及其制造方法、喷墨头以及喷墨打印机
CN100402293C (zh) * 2004-07-13 2008-07-16 兄弟工业株式会社 压电致动器和喷墨头以及其制造方法
US7419252B2 (en) * 2004-07-13 2008-09-02 Brother Kogyo Kabushiki Kaisha Ink jet head, piezo-electric actuator, and method of manufacturing them
US7739777B2 (en) * 2004-08-31 2010-06-22 Brother Kogyo Kabushiki Kaisha Method of manufacturing a liquid transporting apparatus
JP2006069151A (ja) 2004-09-06 2006-03-16 Canon Inc 圧電膜型アクチュエータの製造方法及び液体噴射ヘッド
JP4802469B2 (ja) * 2004-09-14 2011-10-26 富士ゼロックス株式会社 液滴吐出装置
US7594308B2 (en) 2004-10-28 2009-09-29 Brother Kogyo Kabushiki Kaisha Method for producing a piezoelectric actuator and a liquid transporting apparatus
US7466067B2 (en) 2004-11-01 2008-12-16 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, method for producing piezoelectric actuator, liquid transporting apparatus, and method for producing liquid transporting apparatus
TW200637044A (en) * 2005-04-12 2006-10-16 Avision Inc Piezoelectric vibration plate with electrodes formed between a vibration layer and a piezoelectric layer
US9590534B1 (en) 2006-12-07 2017-03-07 Dmitriy Yavid Generator employing piezoelectric and resonating elements
US7696673B1 (en) 2006-12-07 2010-04-13 Dmitriy Yavid Piezoelectric generators, motor and transformers
US10355623B1 (en) 2006-12-07 2019-07-16 Dmitriy Yavid Generator employing piezolectric and resonating elements with synchronized heat delivery
JP5164244B2 (ja) * 2007-03-13 2013-03-21 富士フイルム株式会社 圧電アクチュエータ、液体吐出ヘッド、画像形成装置、及び圧電アクチュエータの製造方法
JP5288530B2 (ja) 2007-03-30 2013-09-11 富士フイルム株式会社 圧電素子製造方法及び液体吐出ヘッド製造方法
JP4829165B2 (ja) 2007-03-30 2011-12-07 富士フイルム株式会社 圧電素子製造方法及び液体吐出ヘッド製造方法
EP1997637B1 (en) * 2007-05-30 2012-09-12 Océ-Technologies B.V. Method of manufacturing a piezoelectric ink jet device
JP5382905B2 (ja) 2008-03-10 2014-01-08 富士フイルム株式会社 圧電素子の製造方法及び液体吐出ヘッドの製造方法
JP2009218401A (ja) 2008-03-11 2009-09-24 Fujifilm Corp 圧電アクチュエータの駆動方法及び液体吐出ヘッドの駆動方法
JP5384843B2 (ja) * 2008-03-19 2014-01-08 富士フイルム株式会社 圧電素子構造体の製造方法および圧電素子構造体
TW200943140A (en) * 2008-04-02 2009-10-16 Asustek Comp Inc Electronic apparatus and control method thereof
KR100975283B1 (ko) * 2008-05-22 2010-08-12 한국기계연구원 상온 전도성 막을 포함하는 고성능 압전 후막 및 이의제조방법
JP2010161330A (ja) 2008-12-08 2010-07-22 Hitachi Cable Ltd 圧電薄膜素子
JP2010137485A (ja) * 2008-12-15 2010-06-24 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置並びに液体噴射ヘッドの製造方法
JP5035374B2 (ja) 2009-06-10 2012-09-26 日立電線株式会社 圧電薄膜素子及びそれを備えた圧電薄膜デバイス
JP5471612B2 (ja) 2009-06-22 2014-04-16 日立金属株式会社 圧電性薄膜素子の製造方法及び圧電薄膜デバイスの製造方法
JP5035378B2 (ja) 2009-06-22 2012-09-26 日立電線株式会社 圧電薄膜素子及びその製造方法、並びに圧電薄膜デバイス
JP5024399B2 (ja) * 2009-07-08 2012-09-12 日立電線株式会社 圧電薄膜素子、圧電薄膜デバイス及び圧電薄膜素子の製造方法
JP5531635B2 (ja) 2010-01-18 2014-06-25 日立金属株式会社 圧電薄膜素子及び圧電薄膜デバイス
JP5531653B2 (ja) 2010-02-02 2014-06-25 日立金属株式会社 圧電薄膜素子、その製造方法及び圧電薄膜デバイス
WO2011121863A1 (ja) 2010-03-29 2011-10-06 日立電線株式会社 圧電薄膜素子及びその製造方法、並びに圧電薄膜デバイス
JP5399970B2 (ja) * 2010-03-31 2014-01-29 パナソニック株式会社 強誘電体デバイスの製造方法
JP2013016776A (ja) * 2011-06-06 2013-01-24 Hitachi Cable Ltd 圧電膜素子の製造方法、及び圧電体デバイスの製造方法
US8939556B2 (en) * 2011-06-09 2015-01-27 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP5774399B2 (ja) 2011-07-15 2015-09-09 株式会社サイオクス 圧電体膜素子の製造方法
JP5380756B2 (ja) 2011-08-10 2014-01-08 日立金属株式会社 圧電体膜素子の製造方法
US8866367B2 (en) 2011-10-17 2014-10-21 The United States Of America As Represented By The Secretary Of The Army Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making
JP5808262B2 (ja) 2012-01-23 2015-11-10 株式会社サイオクス 圧電体素子及び圧電体デバイス
CN103963467B (zh) * 2014-04-25 2015-12-09 珠海赛纳打印科技股份有限公司 振动板、液体喷射装置及打印设备
JP2016032007A (ja) * 2014-07-28 2016-03-07 株式会社リコー 圧電膜の製造方法、圧電素子の製造方法、液体吐出ヘッド及び画像形成装置
JP2016184692A (ja) 2015-03-26 2016-10-20 住友化学株式会社 強誘電体薄膜素子の製造方法
JP6605216B2 (ja) 2015-03-26 2019-11-13 住友化学株式会社 強誘電体薄膜積層基板、強誘電体薄膜素子、および強誘電体薄膜積層基板の製造方法
JP6605215B2 (ja) 2015-03-26 2019-11-13 住友化学株式会社 強誘電体薄膜積層基板、強誘電体薄膜素子、および強誘電体薄膜積層基板の製造方法
JP6566682B2 (ja) 2015-03-30 2019-08-28 住友化学株式会社 強誘電体薄膜素子の製造方法
JP2017042952A (ja) * 2015-08-25 2017-03-02 セイコーエプソン株式会社 電子デバイス、圧電デバイス、液体噴射ヘッド、及び、これらの製造方法
US9662880B2 (en) * 2015-09-11 2017-05-30 Xerox Corporation Integrated thin film piezoelectric printhead
JP6790776B2 (ja) 2016-12-07 2020-11-25 Tdk株式会社 圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置
JP6874351B2 (ja) 2016-12-07 2021-05-19 Tdk株式会社 圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置
EP3825100B1 (en) * 2019-11-19 2025-10-29 Quantica GmbH Material ejection system, print head, 3d printer, and method for material ejection

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05286132A (ja) 1992-04-16 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
KR0147245B1 (ko) * 1993-12-01 1998-09-15 모리시타 요이찌 강유전체박막 및 그 제조방법
US5719607A (en) * 1994-08-25 1998-02-17 Seiko Epson Corporation Liquid jet head
JPH08118630A (ja) * 1994-10-26 1996-05-14 Mita Ind Co Ltd インクジェットプリンタ用印字ヘッド及びその製造方法
DE4442598A1 (de) 1994-11-30 1996-06-05 Philips Patentverwaltung Komplexer, substituierter Lanthan-Blei-Zirkon-Titan-Perowskit, keramische Zusammensetzung und Aktuator
US5648012A (en) * 1994-12-22 1997-07-15 Kyocera Corporation Piezoelectric ceramic composition
JPH08267744A (ja) * 1995-03-31 1996-10-15 Minolta Co Ltd インクジェット記録装置
EP0827218A4 (en) * 1995-06-06 1999-09-08 Kasei Optonix Piezoelectric device and method of its driving

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110696493A (zh) * 2019-10-11 2020-01-17 大连瑞林数字印刷技术有限公司 一种喷墨打印头压电振动结构
CN110696493B (zh) * 2019-10-11 2020-12-15 大连瑞林数字印刷技术有限公司 一种喷墨打印头压电振动结构

Also Published As

Publication number Publication date
JP3666177B2 (ja) 2005-06-29
KR100309405B1 (ko) 2001-12-12
EP0930165B1 (en) 2003-10-08
KR20000016488A (ko) 2000-03-25
WO1998046429A1 (en) 1998-10-22
EP0930165A4 (en) 2001-02-14
US6347862B1 (en) 2002-02-19
JPH10286953A (ja) 1998-10-27
DE69818793D1 (de) 2003-11-13
EP0930165A1 (en) 1999-07-21

Similar Documents

Publication Publication Date Title
DE69818793T2 (de) Tintenstrahlkopf
DE60214612T2 (de) Piezoelektrische Struktur, Flüssigkeitsstrahlkopf und Verfahren zur Herstellung
DE60128863T2 (de) Verfahren zur Herstellung einer Piezoelementstruktur sowie eines Aufzeichnungskopfes mit Flüssigkeitsausstoss
DE69624282T2 (de) Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
DE69610482T2 (de) Laminierter druckkopf für das tintenstrahlaufzeichnen, herstellungsverfahren dafür und mit dem aufzeichnungskopf ausgerüsteter drucker
DE69401855T2 (de) Piezoelektrische Anordnung
DE69717175T2 (de) Tintenstrahlaufzeichnungskopf und Herstellungsverfahren dafür
DE60000948T2 (de) Dünnschichtiges piezoelektrisches bilaminares Element, diese benutzender mechanischer Detektor und Tintenstrahldruckkopf und Herstellungsverfahren dafür
DE69404504T2 (de) Piezoelektrischer/elektrostriktiver Antrieb mit keramischem Substrat, das neben Druckkammerfenstern auch Hilfsfenster hat
DE3427850C2 (https=)
DE69324975T2 (de) Farbstrahldruckkopf mit Bestandteilen mit verschiedenen Wärme-Ausdehnungskoeffizienten
DE69600167T2 (de) Tintenstrahldruckkopf und dessen Herstellungsverfahren
DE69305232T2 (de) Tintenstrahldruckkopf
DE69829256T2 (de) Tinstrahlaufzeichnungskopf und -gerät
DE69515708T2 (de) Tintenstrahlaufzeichnungsgerät
DE69504493T2 (de) Tintenstrahlkopf und verfahren zu dessen herstellung
DE602005002060T2 (de) Piezoelektrisches Element und dessen Herstellungsverfahren sowie Tintenstrahldruckkopf und -aufzeichnungsgerät mit demselben
DE69401447T2 (de) Piezoelektrische Anordnung
DE69223096T2 (de) Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
DE69128951T2 (de) Tintenstrahlaufzeichnungsgerät und Verfahren zur Herstellung des Kopfes davon
DE69214359T2 (de) Tintenstrahlkopf geringer Empfindlichkeit gegenüber gerichteter Diffusion und Verfahren zu seiner Herstellung
DE2944005C2 (https=)
DE69502210T2 (de) Piezoelektrischer und/oder elektrostriktiver Antrieb
DE69508220T2 (de) Geschichtetes piezoelektrisches Element und Verfahren zur Herstellung eines solchen Elementes
DE60032041T2 (de) Piezoelektrisches Antriebselement, Tintenstrahldruckkopf, Herstellungsverfahren dafür, und Tintenstrahldrucker

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP