DE69818793D1 - Tintenstrahlkopf - Google Patents
TintenstrahlkopfInfo
- Publication number
- DE69818793D1 DE69818793D1 DE69818793T DE69818793T DE69818793D1 DE 69818793 D1 DE69818793 D1 DE 69818793D1 DE 69818793 T DE69818793 T DE 69818793T DE 69818793 T DE69818793 T DE 69818793T DE 69818793 D1 DE69818793 D1 DE 69818793D1
- Authority
- DE
- Germany
- Prior art keywords
- ink jet
- jet head
- head
- ink
- jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/1425—Embedded thin film piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14258—Multi layer thin film type piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14379—Edge shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9549197 | 1997-04-14 | ||
JP09549197A JP3666177B2 (ja) | 1997-04-14 | 1997-04-14 | インクジェット記録装置 |
PCT/JP1998/001691 WO1998046429A1 (fr) | 1997-04-14 | 1998-04-14 | Tete a jet d'encre |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69818793D1 true DE69818793D1 (de) | 2003-11-13 |
DE69818793T2 DE69818793T2 (de) | 2004-09-30 |
Family
ID=14139077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69818793T Expired - Lifetime DE69818793T2 (de) | 1997-04-14 | 1998-04-14 | Tintenstrahlkopf |
Country Status (6)
Country | Link |
---|---|
US (1) | US6347862B1 (de) |
EP (1) | EP0930165B1 (de) |
JP (1) | JP3666177B2 (de) |
KR (1) | KR100309405B1 (de) |
DE (1) | DE69818793T2 (de) |
WO (1) | WO1998046429A1 (de) |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3823567B2 (ja) * | 1998-10-20 | 2006-09-20 | 富士写真フイルム株式会社 | インクジェット記録ヘッド及びその製造方法及びプリンタ装置 |
JP3241334B2 (ja) | 1998-11-16 | 2001-12-25 | 松下電器産業株式会社 | インクジェットヘッド及びその製造方法 |
JP3238674B2 (ja) * | 1999-04-21 | 2001-12-17 | 松下電器産業株式会社 | インクジェットヘッド及びその製造方法並びにインクジェット式記録装置 |
CN1170681C (zh) | 1999-05-24 | 2004-10-13 | 松下电器产业株式会社 | 一种墨水喷射头 |
JP4269136B2 (ja) * | 1999-12-10 | 2009-05-27 | 富士フイルム株式会社 | インクジェットヘッドおよびインクジェットヘッドの製造方法並びに印刷装置 |
EP1256450B1 (de) * | 2000-02-18 | 2012-01-11 | FUJIFILM Corporation | Tintenstrahlaufzeichnungskopf und herstellungsverfahren dafür |
WO2001075985A1 (fr) | 2000-03-30 | 2001-10-11 | Fujitsu Limited | Actionneur piezoelectrique, son procede de fabrication et tete a jet d'encre dotee de cet actionneur |
JP3796394B2 (ja) * | 2000-06-21 | 2006-07-12 | キヤノン株式会社 | 圧電素子の製造方法および液体噴射記録ヘッドの製造方法 |
JP2002086725A (ja) | 2000-07-11 | 2002-03-26 | Matsushita Electric Ind Co Ltd | インクジェットヘッド、その製造方法及びインクジェット式記録装置 |
US6900579B2 (en) * | 2000-07-24 | 2005-05-31 | Matsushita Electric Industrial Co., Ltd. | Thin film piezoelectric element |
JP2002134806A (ja) * | 2000-10-19 | 2002-05-10 | Canon Inc | 圧電膜型アクチュエータおよび液体噴射ヘッドとその製造方法 |
JP4387623B2 (ja) | 2000-12-04 | 2009-12-16 | キヤノン株式会社 | 圧電素子の製造方法 |
CN1369371A (zh) | 2001-01-30 | 2002-09-18 | 松下电器产业株式会社 | 喷墨头、传动装置的检查方法、喷墨头制造方法和喷墨式记录装置 |
JP3833070B2 (ja) * | 2001-02-09 | 2006-10-11 | キヤノン株式会社 | 液体噴射ヘッドおよび製造方法 |
US20020158947A1 (en) * | 2001-04-27 | 2002-10-31 | Isaku Kanno | Piezoelectric element, method for manufacturing piezoelectric element, and ink jet head and ink jet recording apparatus having piezoelectric element |
JP4305016B2 (ja) * | 2002-03-18 | 2009-07-29 | セイコーエプソン株式会社 | 圧電アクチュエータユニット、及び、それを用いた液体噴射ヘッド |
US6886922B2 (en) | 2002-06-27 | 2005-05-03 | Matsushita Electric Industrial Co., Ltd. | Liquid discharge head and manufacturing method thereof |
US6993840B2 (en) | 2002-07-18 | 2006-02-07 | Canon Kabushiki Kaisha | Manufacturing method of liquid jet head |
US7009328B2 (en) * | 2003-06-20 | 2006-03-07 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film and manufacturing method |
JP4717344B2 (ja) | 2003-12-10 | 2011-07-06 | キヤノン株式会社 | 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド |
JP4192794B2 (ja) * | 2004-01-26 | 2008-12-10 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、及び電子機器 |
US7500728B2 (en) | 2004-03-03 | 2009-03-10 | Fujifilm Corporation | Liquid discharge head and manufacturing method thereof |
US7479729B2 (en) | 2004-05-19 | 2009-01-20 | Brother Kogyo Kabushiki Kaisha | Piezoelectric actuator, ink-jet head provided with the same, ink-jet printer, and method for manufacturing piezoelectric actuator |
US7419252B2 (en) * | 2004-07-13 | 2008-09-02 | Brother Kogyo Kabushiki Kaisha | Ink jet head, piezo-electric actuator, and method of manufacturing them |
CN100402293C (zh) * | 2004-07-13 | 2008-07-16 | 兄弟工业株式会社 | 压电致动器和喷墨头以及其制造方法 |
US7739777B2 (en) * | 2004-08-31 | 2010-06-22 | Brother Kogyo Kabushiki Kaisha | Method of manufacturing a liquid transporting apparatus |
JP2006069151A (ja) * | 2004-09-06 | 2006-03-16 | Canon Inc | 圧電膜型アクチュエータの製造方法及び液体噴射ヘッド |
JP4802469B2 (ja) * | 2004-09-14 | 2011-10-26 | 富士ゼロックス株式会社 | 液滴吐出装置 |
US7594308B2 (en) | 2004-10-28 | 2009-09-29 | Brother Kogyo Kabushiki Kaisha | Method for producing a piezoelectric actuator and a liquid transporting apparatus |
US7466067B2 (en) | 2004-11-01 | 2008-12-16 | Brother Kogyo Kabushiki Kaisha | Piezoelectric actuator, method for producing piezoelectric actuator, liquid transporting apparatus, and method for producing liquid transporting apparatus |
TW200637044A (en) * | 2005-04-12 | 2006-10-16 | Avision Inc | Piezoelectric vibration plate with electrodes formed between a vibration layer and a piezoelectric layer |
US10355623B1 (en) | 2006-12-07 | 2019-07-16 | Dmitriy Yavid | Generator employing piezolectric and resonating elements with synchronized heat delivery |
US7696673B1 (en) | 2006-12-07 | 2010-04-13 | Dmitriy Yavid | Piezoelectric generators, motor and transformers |
US9590534B1 (en) | 2006-12-07 | 2017-03-07 | Dmitriy Yavid | Generator employing piezoelectric and resonating elements |
JP5164244B2 (ja) * | 2007-03-13 | 2013-03-21 | 富士フイルム株式会社 | 圧電アクチュエータ、液体吐出ヘッド、画像形成装置、及び圧電アクチュエータの製造方法 |
JP4829165B2 (ja) | 2007-03-30 | 2011-12-07 | 富士フイルム株式会社 | 圧電素子製造方法及び液体吐出ヘッド製造方法 |
JP5288530B2 (ja) | 2007-03-30 | 2013-09-11 | 富士フイルム株式会社 | 圧電素子製造方法及び液体吐出ヘッド製造方法 |
EP1997637B1 (de) * | 2007-05-30 | 2012-09-12 | Océ-Technologies B.V. | Verfahren zur Herstellung einer piezoelektrischen Tintenstrahlvorrichtung |
JP5382905B2 (ja) * | 2008-03-10 | 2014-01-08 | 富士フイルム株式会社 | 圧電素子の製造方法及び液体吐出ヘッドの製造方法 |
JP2009218401A (ja) | 2008-03-11 | 2009-09-24 | Fujifilm Corp | 圧電アクチュエータの駆動方法及び液体吐出ヘッドの駆動方法 |
JP5384843B2 (ja) * | 2008-03-19 | 2014-01-08 | 富士フイルム株式会社 | 圧電素子構造体の製造方法および圧電素子構造体 |
TW200943140A (en) * | 2008-04-02 | 2009-10-16 | Asustek Comp Inc | Electronic apparatus and control method thereof |
KR100975283B1 (ko) * | 2008-05-22 | 2010-08-12 | 한국기계연구원 | 상온 전도성 막을 포함하는 고성능 압전 후막 및 이의제조방법 |
JP2010161330A (ja) | 2008-12-08 | 2010-07-22 | Hitachi Cable Ltd | 圧電薄膜素子 |
JP2010137485A (ja) * | 2008-12-15 | 2010-06-24 | Seiko Epson Corp | 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置並びに液体噴射ヘッドの製造方法 |
JP5035374B2 (ja) | 2009-06-10 | 2012-09-26 | 日立電線株式会社 | 圧電薄膜素子及びそれを備えた圧電薄膜デバイス |
JP5035378B2 (ja) | 2009-06-22 | 2012-09-26 | 日立電線株式会社 | 圧電薄膜素子及びその製造方法、並びに圧電薄膜デバイス |
JP5471612B2 (ja) | 2009-06-22 | 2014-04-16 | 日立金属株式会社 | 圧電性薄膜素子の製造方法及び圧電薄膜デバイスの製造方法 |
JP5024399B2 (ja) * | 2009-07-08 | 2012-09-12 | 日立電線株式会社 | 圧電薄膜素子、圧電薄膜デバイス及び圧電薄膜素子の製造方法 |
JP5531635B2 (ja) | 2010-01-18 | 2014-06-25 | 日立金属株式会社 | 圧電薄膜素子及び圧電薄膜デバイス |
JP5531653B2 (ja) | 2010-02-02 | 2014-06-25 | 日立金属株式会社 | 圧電薄膜素子、その製造方法及び圧電薄膜デバイス |
CN102823007B (zh) | 2010-03-29 | 2014-04-09 | 日立金属株式会社 | 压电薄膜器件及其制造方法以及压电薄膜装置 |
JP5399970B2 (ja) * | 2010-03-31 | 2014-01-29 | パナソニック株式会社 | 強誘電体デバイスの製造方法 |
JP2013016776A (ja) * | 2011-06-06 | 2013-01-24 | Hitachi Cable Ltd | 圧電膜素子の製造方法、及び圧電体デバイスの製造方法 |
US8939556B2 (en) * | 2011-06-09 | 2015-01-27 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
JP5774399B2 (ja) | 2011-07-15 | 2015-09-09 | 株式会社サイオクス | 圧電体膜素子の製造方法 |
JP5380756B2 (ja) | 2011-08-10 | 2014-01-08 | 日立金属株式会社 | 圧電体膜素子の製造方法 |
US8866367B2 (en) | 2011-10-17 | 2014-10-21 | The United States Of America As Represented By The Secretary Of The Army | Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making |
JP5808262B2 (ja) | 2012-01-23 | 2015-11-10 | 株式会社サイオクス | 圧電体素子及び圧電体デバイス |
CN103963467B (zh) * | 2014-04-25 | 2015-12-09 | 珠海赛纳打印科技股份有限公司 | 振动板、液体喷射装置及打印设备 |
JP2016032007A (ja) * | 2014-07-28 | 2016-03-07 | 株式会社リコー | 圧電膜の製造方法、圧電素子の製造方法、液体吐出ヘッド及び画像形成装置 |
JP6605216B2 (ja) | 2015-03-26 | 2019-11-13 | 住友化学株式会社 | 強誘電体薄膜積層基板、強誘電体薄膜素子、および強誘電体薄膜積層基板の製造方法 |
JP6605215B2 (ja) | 2015-03-26 | 2019-11-13 | 住友化学株式会社 | 強誘電体薄膜積層基板、強誘電体薄膜素子、および強誘電体薄膜積層基板の製造方法 |
JP2016184692A (ja) | 2015-03-26 | 2016-10-20 | 住友化学株式会社 | 強誘電体薄膜素子の製造方法 |
JP6566682B2 (ja) | 2015-03-30 | 2019-08-28 | 住友化学株式会社 | 強誘電体薄膜素子の製造方法 |
JP2017042952A (ja) * | 2015-08-25 | 2017-03-02 | セイコーエプソン株式会社 | 電子デバイス、圧電デバイス、液体噴射ヘッド、及び、これらの製造方法 |
US9662880B2 (en) * | 2015-09-11 | 2017-05-30 | Xerox Corporation | Integrated thin film piezoelectric printhead |
JP6790776B2 (ja) | 2016-12-07 | 2020-11-25 | Tdk株式会社 | 圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置 |
JP6874351B2 (ja) | 2016-12-07 | 2021-05-19 | Tdk株式会社 | 圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置 |
CN110696493B (zh) * | 2019-10-11 | 2020-12-15 | 大连瑞林数字印刷技术有限公司 | 一种喷墨打印头压电振动结构 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05286132A (ja) | 1992-04-16 | 1993-11-02 | Rohm Co Ltd | インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド |
KR0147245B1 (ko) | 1993-12-01 | 1998-09-15 | 모리시타 요이찌 | 강유전체박막 및 그 제조방법 |
DE69510284T2 (de) * | 1994-08-25 | 1999-10-14 | Seiko Epson Corp | Flüssigkeitsstrahlkopf |
JPH08118630A (ja) | 1994-10-26 | 1996-05-14 | Mita Ind Co Ltd | インクジェットプリンタ用印字ヘッド及びその製造方法 |
DE4442598A1 (de) | 1994-11-30 | 1996-06-05 | Philips Patentverwaltung | Komplexer, substituierter Lanthan-Blei-Zirkon-Titan-Perowskit, keramische Zusammensetzung und Aktuator |
FI956170A (fi) * | 1994-12-22 | 1996-06-23 | Kyocera Corp | Piezosähköinen keraaminen koostumus |
JPH08267744A (ja) * | 1995-03-31 | 1996-10-15 | Minolta Co Ltd | インクジェット記録装置 |
US6091183A (en) * | 1995-06-06 | 2000-07-18 | Kasei Optonix, Ltd. | Piezoelectric element and method for driving the same |
-
1997
- 1997-04-14 JP JP09549197A patent/JP3666177B2/ja not_active Expired - Fee Related
-
1998
- 1998-04-14 KR KR1019980710073A patent/KR100309405B1/ko not_active IP Right Cessation
- 1998-04-14 DE DE69818793T patent/DE69818793T2/de not_active Expired - Lifetime
- 1998-04-14 US US09/202,419 patent/US6347862B1/en not_active Expired - Lifetime
- 1998-04-14 EP EP98912786A patent/EP0930165B1/de not_active Expired - Lifetime
- 1998-04-14 WO PCT/JP1998/001691 patent/WO1998046429A1/ja active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP0930165A1 (de) | 1999-07-21 |
EP0930165A4 (de) | 2001-02-14 |
JPH10286953A (ja) | 1998-10-27 |
EP0930165B1 (de) | 2003-10-08 |
JP3666177B2 (ja) | 2005-06-29 |
WO1998046429A1 (fr) | 1998-10-22 |
KR20000016488A (ko) | 2000-03-25 |
US6347862B1 (en) | 2002-02-19 |
KR100309405B1 (ko) | 2001-12-12 |
DE69818793T2 (de) | 2004-09-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69818793D1 (de) | Tintenstrahlkopf | |
DE69728693D1 (de) | Tintenstrahltinte | |
DE69809807T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69809618D1 (de) | Tintenstrahlaufzeichnungskopf | |
DE69818140D1 (de) | Tintenstrahlaufzeichnungstinten | |
DE69509986T2 (de) | Vereinfachter tintenstrahldruckkopf | |
DE69713922T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69710240D1 (de) | Tintenstrahlaufzeichnungskopf | |
DE69701898T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69717872T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69810357T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69819818D1 (de) | Tintenstrahlkopf | |
DE69823613D1 (de) | Tintenstrahlaufzeichnungskopf | |
DE69805457T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69719607D1 (de) | Kontinuierlich arbeitender Farbstrahldruckkopf | |
DE69810835D1 (de) | Tintenstrahlaufzeichnungskopf | |
DE69810691T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69822031D1 (de) | Tintenstrahlaufzeichnungskopf | |
DE69807951T2 (de) | Tintenstrahlaufzeichnungskopf | |
DE69823594D1 (de) | Tintenstrahldruckkopf | |
DE69822928D1 (de) | Tintenstrahldruckkopf | |
DE69818121D1 (de) | Tintenstrahldruckkopf | |
DE69806663D1 (de) | Tintenstrahldruckkopf | |
DE69818728D1 (de) | Tintenstrahldruckkopf | |
DE69804063T2 (de) | Elektrostatischer Tintenstrahldruckkopf |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PANASONIC CORP., KADOMA, OSAKA, JP |