DE69711083D1 - Kontaktstift für prüfzwecke - Google Patents

Kontaktstift für prüfzwecke

Info

Publication number
DE69711083D1
DE69711083D1 DE69711083T DE69711083T DE69711083D1 DE 69711083 D1 DE69711083 D1 DE 69711083D1 DE 69711083 T DE69711083 T DE 69711083T DE 69711083 T DE69711083 T DE 69711083T DE 69711083 D1 DE69711083 D1 DE 69711083D1
Authority
DE
Germany
Prior art keywords
contact pin
testing purposes
testing
purposes
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69711083T
Other languages
English (en)
Other versions
DE69711083T2 (de
Inventor
Toshio Kazama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NHK Spring Co Ltd
Original Assignee
NHK Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=5178041&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69711083(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NHK Spring Co Ltd filed Critical NHK Spring Co Ltd
Priority claimed from PCT/JP1997/004877 external-priority patent/WO1998029751A1/en
Publication of DE69711083D1 publication Critical patent/DE69711083D1/de
Application granted granted Critical
Publication of DE69711083T2 publication Critical patent/DE69711083T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
DE69711083T 1996-12-27 1997-12-26 Kontaktstift für prüfzwecke Expired - Lifetime DE69711083T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP35068096 1996-12-27
JP18001697A JP3326095B2 (ja) 1996-12-27 1997-07-04 導電性接触子
PCT/JP1997/004877 WO1998029751A1 (en) 1996-04-12 1997-12-26 Contact probe unit

Publications (2)

Publication Number Publication Date
DE69711083D1 true DE69711083D1 (de) 2002-04-18
DE69711083T2 DE69711083T2 (de) 2002-07-18

Family

ID=5178041

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69711083T Expired - Lifetime DE69711083T2 (de) 1996-12-27 1997-12-26 Kontaktstift für prüfzwecke

Country Status (8)

Country Link
US (1) US6323667B1 (de)
EP (1) EP0950191B1 (de)
JP (1) JP3326095B2 (de)
KR (1) KR100348698B1 (de)
CN (2) CN1769897A (de)
DE (1) DE69711083T2 (de)
IL (1) IL122768A (de)
MY (1) MY119910A (de)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3326095B2 (ja) * 1996-12-27 2002-09-17 日本発条株式会社 導電性接触子
US6856152B2 (en) * 1999-05-31 2005-02-15 Microcraft K.K. Impedance measuring device for printed wiring board
JP2000338151A (ja) * 1999-05-31 2000-12-08 Micro Craft Kk プリント配線基板用インピーダンス測定装置
JP2001235486A (ja) * 2000-02-21 2001-08-31 Seiken Co Ltd 検査用プローブ、及び該検査用プローブを備えた検査装置
WO2001096883A2 (en) 2000-06-16 2001-12-20 Nhk Spring Co., Ltd. Microcontactor probe and electric probe unit
US6815959B2 (en) 2001-04-09 2004-11-09 Kla-Tencor Technologies Corp. Systems and methods for measuring properties of conductive layers
JP2003014779A (ja) * 2001-07-02 2003-01-15 Nhk Spring Co Ltd 導電性接触子
WO2003076957A1 (en) * 2002-03-05 2003-09-18 Rika Denshi America, Inc. Apparatus for interfacing electronic packages and test equipment
US6688906B2 (en) 2002-05-28 2004-02-10 Agilent Technologies Inc. Probes and methods for testing electrical circuits
US6696850B1 (en) * 2002-10-02 2004-02-24 Interconnect Devices, Inc. Contact probe with off-centered back-drilled aperture
KR100977324B1 (ko) * 2003-05-09 2010-08-20 동부일렉트로닉스 주식회사 계측기의 멀티 탐침 장치
US7980325B2 (en) * 2004-01-16 2011-07-19 Credo Technology Corporation Rotating shaft locking mechanism
JP4695337B2 (ja) * 2004-02-04 2011-06-08 日本発條株式会社 導電性接触子および導電性接触子ユニット
JPWO2005083773A1 (ja) * 2004-02-27 2007-08-30 株式会社アドバンテスト プローブカード及びその製造方法
WO2006007440A1 (en) * 2004-06-16 2006-01-19 Rika Denshi America, Inc. Electrical test probes, methods of making, and methods of using
US7626408B1 (en) * 2005-02-03 2009-12-01 KK Technologies, Inc. Electrical spring probe
US7154286B1 (en) * 2005-06-30 2006-12-26 Interconnect Devices, Inc. Dual tapered spring probe
DE102006005319B4 (de) * 2006-02-06 2010-12-30 Infineon Technologies Ag Heizvorrichtung zum Testen integrierter Bauelemente
JP2007285882A (ja) * 2006-04-17 2007-11-01 Nidec-Read Corp 基板検査用接触子、基板検査用治具および基板検査装置
JP2007304008A (ja) * 2006-05-12 2007-11-22 Nidec-Read Corp 基板検査用接触子、基板検査用治具及び基板検査装置
US7601009B2 (en) * 2006-05-18 2009-10-13 Centipede Systems, Inc. Socket for an electronic device
JP4857046B2 (ja) 2006-08-02 2012-01-18 株式会社エンプラス 電気接触子及び電気部品用ソケット
KR100854267B1 (ko) * 2006-08-08 2008-08-26 정운영 포고핀의 제조방법과, 이를 이용한 테스트 소켓
JP4939879B2 (ja) * 2006-09-13 2012-05-30 株式会社エンプラス 電気接触子、及び、電気部品用ソケット
CN101563617A (zh) * 2006-12-19 2009-10-21 日本发条株式会社 导电性接触件单元
KR100806379B1 (ko) * 2006-12-22 2008-02-27 세크론 주식회사 프로브 및 이를 포함하는 프로브 카드
KR100769891B1 (ko) 2007-01-25 2007-10-24 리노공업주식회사 검사용 탐침 장치 및 이를 이용한 검사용 소켓
KR100759082B1 (ko) 2007-02-06 2007-09-19 주식회사 엔티에스 프로브장치 및 이의 제조방법
JP4999079B2 (ja) 2007-04-10 2012-08-15 サンユー工業株式会社 プローブ
WO2008136396A1 (ja) * 2007-04-27 2008-11-13 Nhk Spring Co., Ltd. 導電性接触子
FR2916106B1 (fr) * 2007-05-09 2009-06-26 Sonceboz Automotive Sa Module indicateur de tableau de bord forme d'un moteur et de moyens de connexion electrique.
KR100877234B1 (ko) * 2007-07-27 2009-01-07 한국표준과학연구원 접촉저항을 최소화한 면저항 측정용 프로브
JP4566248B2 (ja) * 2008-03-06 2010-10-20 日本電子材料株式会社 垂直コイルスプリングプローブ
JP2010025665A (ja) * 2008-07-17 2010-02-04 Nidec-Read Corp 基板検査治具及び接触子
WO2010048971A1 (en) * 2008-10-30 2010-05-06 Verigy (Singapore) Pte., Ltd. Test arrangement, pogo-pin and method for testing a device under test
US7798867B2 (en) * 2008-11-12 2010-09-21 Interconnect Devices, Inc. Environmentally sealed contact
DE102008060985A1 (de) * 2008-12-06 2010-06-10 Dr. Ing. H.C. F. Porsche Aktiengesellschaft Prüfverfahren und Vorrichtung zur Durchführung des Prüfverfahrens
JP4900843B2 (ja) 2008-12-26 2012-03-21 山一電機株式会社 半導体装置用電気接続装置及びそれに使用されるコンタクト
US7874880B2 (en) * 2009-02-26 2011-01-25 Ironwood Electronics, Inc. Adapter apparatus with sleeve spring contacts
TWI482973B (zh) * 2009-04-03 2015-05-01 Nhk Spring Co Ltd 彈簧用線材、接觸探針及探針單元
WO2011115082A1 (ja) * 2010-03-15 2011-09-22 日本電産リード株式会社 接続端子及び接続治具
JP6116903B2 (ja) 2010-06-25 2017-04-19 日本発條株式会社 コンタクトプローブおよびプローブユニット
WO2012014673A1 (ja) * 2010-07-29 2012-02-02 Nishikawa Hideo 検査治具及び接触子
JP5345598B2 (ja) * 2010-09-01 2013-11-20 秀雄 西川 検査治具及び接触子
WO2012039226A1 (ja) 2010-09-21 2012-03-29 Nishikawa Hideo 検査治具及び接触子
US8506307B2 (en) 2010-12-02 2013-08-13 Interconnect Devices, Inc. Electrical connector with embedded shell layer
JP6109072B2 (ja) * 2011-10-07 2017-04-05 日本発條株式会社 プローブユニット
JP2013096699A (ja) * 2011-10-27 2013-05-20 Japan Electronic Materials Corp 電気的接触子構造
JP5465229B2 (ja) * 2011-11-14 2014-04-09 株式会社エンプラス 電気接触子
JP5858781B2 (ja) 2011-12-29 2016-02-10 株式会社エンプラス プローブピン及び電気部品用ソケット
KR101348206B1 (ko) * 2013-01-08 2014-01-10 주식회사 아이에스시 복수의 스프링부재를 가지는 탐침장치
KR101348205B1 (ko) * 2013-01-08 2014-01-10 주식회사 아이에스시 탐침장치
US20140266277A1 (en) * 2013-03-18 2014-09-18 Cheng Yun Technology Co., Ltd. Semiconductor testing probe needle
US9894773B2 (en) * 2013-12-17 2018-02-13 Lenovo Enterprise Solutions (Singapore) Pte. Ltd. Adding test access to a back-drilled VIA
WO2015105209A1 (ko) * 2014-01-09 2015-07-16 주식회사 아이에스시 탐침장치
JP2015215328A (ja) 2014-04-21 2015-12-03 大熊 克則 プローブピンおよびｉｃソケット
WO2015163160A1 (ja) * 2014-04-21 2015-10-29 オーキンス エレクトロニクス カンパニー，リミテッド プローブピンおよびｉｃソケット
TWI560454B (en) * 2014-11-07 2016-12-01 Primax Electronics Ltd Testing base
CN104459227A (zh) * 2014-12-31 2015-03-25 中国科学院上海硅酸盐研究所 一种太阳能电池测试夹具
US10161963B2 (en) * 2015-08-17 2018-12-25 Chaojiong Zhang Electrical contact and testing apparatus
JP6837283B2 (ja) 2016-02-29 2021-03-03 株式会社ヨコオ ソケット
JP6642359B2 (ja) * 2016-09-21 2020-02-05 オムロン株式会社 プローブピンおよび検査ユニット
JP2018107011A (ja) * 2016-12-27 2018-07-05 株式会社エンプラス 電気接触子及び電気部品用ソケット
CN106841999B (zh) * 2017-03-24 2023-05-30 深圳市斯纳达科技有限公司 集成电路测试装置及其测试探针
CN108241078B (zh) * 2017-05-18 2020-06-02 苏州韬盛电子科技有限公司 垂直探针卡
JP7098886B2 (ja) * 2017-07-04 2022-07-12 日本電産リード株式会社 接触端子、検査治具、及び検査装置
KR102279465B1 (ko) * 2017-07-21 2021-07-21 주식회사 기가레인 프로브 카드용 박막 저항기
WO2019241530A1 (en) 2018-06-14 2019-12-19 Formfactor, Inc. Electrical test probes having decoupled electrical and mechanical design
JP6837513B2 (ja) * 2019-05-07 2021-03-03 株式会社ヨコオ ソケット
CN112129975A (zh) * 2019-06-25 2020-12-25 中国探针股份有限公司 电连接组件
CN112688104A (zh) * 2020-12-24 2021-04-20 奥普家居股份有限公司 通过开闭门板切换控制器有线通讯的集成灶
CN113295192B (zh) * 2021-05-18 2023-04-07 南京大学 一种接触型力和声复合传感器

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3340431C2 (de) 1983-11-09 1985-12-19 Feinmetall Gmbh, 7033 Herrenberg Gefederter Kontaktstift für Prüfzwecke
US4931726A (en) 1987-06-22 1990-06-05 Hitachi, Ltd. Apparatus for testing semiconductor device
JP2539453B2 (ja) 1987-09-11 1996-10-02 株式会社日立製作所 半導体素子検査装置
US5003255A (en) * 1989-06-15 1991-03-26 Nhk Spring Co., Ltd. Electric contact probe
JP2993980B2 (ja) 1989-12-29 1999-12-27 新光電気工業株式会社 基板用コンタクトプローブ
JPH06201725A (ja) 1992-11-09 1994-07-22 Nhk Spring Co Ltd 導電性接触子及び導電性接触子ユニット
US5414369A (en) * 1992-11-09 1995-05-09 Nhk Spring Co., Ltd. Coil spring-pressed needle contact probe modules with offset needles
JP2532331B2 (ja) 1992-11-09 1996-09-11 日本発条株式会社 導電性接触子
JPH07115253A (ja) 1993-10-18 1995-05-02 Hitachi Chem Co Ltd 金属ベース基板
JPH0823013A (ja) 1994-07-05 1996-01-23 Aging Tesuta Kaihatsu Kyodo Kumiai ウエハー用プローバ
JP3149316B2 (ja) 1994-08-01 2001-03-26 アルプス電気株式会社 サーマルヘッドおよびその製造方法
JPH0954116A (ja) 1995-08-10 1997-02-25 Nippon Denshi Zairyo Kk 高温測定用プローブカード
JP3326095B2 (ja) * 1996-12-27 2002-09-17 日本発条株式会社 導電性接触子
JP3634074B2 (ja) 1996-06-28 2005-03-30 日本発条株式会社 導電性接触子
JPH1038920A (ja) 1996-07-29 1998-02-13 Sankyo Seiki Mfg Co Ltd プローブユニット
JPH10111315A (ja) 1996-10-04 1998-04-28 Mitsubishi Electric Corp プローブカードおよびこれを用いた試験装置

Also Published As

Publication number Publication date
CN1236316C (zh) 2006-01-11
IL122768A (en) 2000-06-29
US6323667B1 (en) 2001-11-27
IL122768A0 (en) 1998-08-16
EP0950191B1 (de) 2002-03-13
KR20000062366A (ko) 2000-10-25
JP3326095B2 (ja) 2002-09-17
DE69711083T2 (de) 2002-07-18
KR100348698B1 (ko) 2002-08-13
CN1769897A (zh) 2006-05-10
EP0950191A1 (de) 1999-10-20
MY119910A (en) 2005-08-30
JPH10239349A (ja) 1998-09-11
CN1242078A (zh) 2000-01-19

Similar Documents

Publication Publication Date Title
DE69711083T2 (de) Kontaktstift für prüfzwecke
DE69830854D1 (de) Mehrfaches testverfahren
DE69908639D1 (de) Testkarte für chips mit erhöhten kontaktelementen
DE69523860T2 (de) Prüfkarte für Hochtemperaturverwendung
DE69828827D1 (de) Verbessertes Prüfsystem für Proben
PT902894E (pt) Dispositivo para ensaio imunocromatografico
DE69824957D1 (de) Kabelanordnung für prüfvorrichtung
DE69625833T2 (de) Testkarte für Analysen
DE19882529T1 (de) Motoreinsatzprüfung
DE69941322D1 (de) Verbindungstestverfahren
DE29604276U1 (de) Prüfgerät
DE69809184D1 (de) Kontaktmessfühler
DE69808682D1 (de) Multi-Adhäsion Teststrecke
DE29602238U1 (de) Prüfgerät
DE59911513D1 (de) Prüfanordnung für Bondpad
TR199700344A3 (tr) Dio-sensitest hizli antibakteriyel duyarlilik testi.
DE29714238U1 (de) Muffenprüfgerät
DE29810978U1 (de) Prüfleck
DE29606519U1 (de) Materialprüfsonde
DE69731987D1 (de) Trockentestelement
DE59401150D1 (de) Kontaktstift für Steckverbindungen
DE29607030U1 (de) Prüfanlage
DE69931988D1 (de) Schnelles Funktionsprüfverfahren für Kühlgeräte
DE69901299T2 (de) Pruefstand
DE29610510U1 (de) Prüfstecker

Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8328 Change in the person/name/address of the agent

Representative=s name: LENZING GERBER STUTE PARTNERSCHAFTSGESELLSCHAFT VO