IL122768A - Contact probe unit - Google Patents
Contact probe unitInfo
- Publication number
- IL122768A IL122768A IL12276897A IL12276897A IL122768A IL 122768 A IL122768 A IL 122768A IL 12276897 A IL12276897 A IL 12276897A IL 12276897 A IL12276897 A IL 12276897A IL 122768 A IL122768 A IL 122768A
- Authority
- IL
- Israel
- Prior art keywords
- probe unit
- contact probe
- contact
- unit
- probe
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35068096 | 1996-12-27 | ||
JP18001697A JP3326095B2 (ja) | 1996-12-27 | 1997-07-04 | 導電性接触子 |
Publications (2)
Publication Number | Publication Date |
---|---|
IL122768A0 IL122768A0 (en) | 1998-08-16 |
IL122768A true IL122768A (en) | 2000-06-29 |
Family
ID=5178041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL12276897A IL122768A (en) | 1996-12-27 | 1997-12-25 | Contact probe unit |
Country Status (8)
Country | Link |
---|---|
US (1) | US6323667B1 (xx) |
EP (1) | EP0950191B1 (xx) |
JP (1) | JP3326095B2 (xx) |
KR (1) | KR100348698B1 (xx) |
CN (2) | CN1769897A (xx) |
DE (1) | DE69711083T2 (xx) |
IL (1) | IL122768A (xx) |
MY (1) | MY119910A (xx) |
Families Citing this family (75)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3326095B2 (ja) * | 1996-12-27 | 2002-09-17 | 日本発条株式会社 | 導電性接触子 |
JP2000338151A (ja) * | 1999-05-31 | 2000-12-08 | Micro Craft Kk | プリント配線基板用インピーダンス測定装置 |
US6856152B2 (en) * | 1999-05-31 | 2005-02-15 | Microcraft K.K. | Impedance measuring device for printed wiring board |
JP2001235486A (ja) * | 2000-02-21 | 2001-08-31 | Seiken Co Ltd | 検査用プローブ、及び該検査用プローブを備えた検査装置 |
WO2001096883A2 (en) * | 2000-06-16 | 2001-12-20 | Nhk Spring Co., Ltd. | Microcontactor probe and electric probe unit |
WO2003012828A2 (en) * | 2001-04-09 | 2003-02-13 | Kla-Tencor, Inc. | Systems and methods for measuring properties of conductive layers |
JP2003014779A (ja) * | 2001-07-02 | 2003-01-15 | Nhk Spring Co Ltd | 導電性接触子 |
ATE371196T1 (de) * | 2002-03-05 | 2007-09-15 | Rika Denshi America Inc | Vorrichtung für eine schnittstelle zwischen elektronischen gehäusen und testgeräten |
US6688906B2 (en) | 2002-05-28 | 2004-02-10 | Agilent Technologies Inc. | Probes and methods for testing electrical circuits |
US6696850B1 (en) * | 2002-10-02 | 2004-02-24 | Interconnect Devices, Inc. | Contact probe with off-centered back-drilled aperture |
KR100977324B1 (ko) * | 2003-05-09 | 2010-08-20 | 동부일렉트로닉스 주식회사 | 계측기의 멀티 탐침 장치 |
US7980325B2 (en) * | 2004-01-16 | 2011-07-19 | Credo Technology Corporation | Rotating shaft locking mechanism |
JP4695337B2 (ja) * | 2004-02-04 | 2011-06-08 | 日本発條株式会社 | 導電性接触子および導電性接触子ユニット |
WO2005083773A1 (ja) * | 2004-02-27 | 2005-09-09 | Advantest Corporation | プローブカード及びその製造方法 |
US7315176B2 (en) | 2004-06-16 | 2008-01-01 | Rika Denshi America, Inc. | Electrical test probes, methods of making, and methods of using |
US7626408B1 (en) * | 2005-02-03 | 2009-12-01 | KK Technologies, Inc. | Electrical spring probe |
US7154286B1 (en) * | 2005-06-30 | 2006-12-26 | Interconnect Devices, Inc. | Dual tapered spring probe |
DE102006005319B4 (de) * | 2006-02-06 | 2010-12-30 | Infineon Technologies Ag | Heizvorrichtung zum Testen integrierter Bauelemente |
JP2007285882A (ja) * | 2006-04-17 | 2007-11-01 | Nidec-Read Corp | 基板検査用接触子、基板検査用治具および基板検査装置 |
JP2007304008A (ja) * | 2006-05-12 | 2007-11-22 | Nidec-Read Corp | 基板検査用接触子、基板検査用治具及び基板検査装置 |
US7601009B2 (en) * | 2006-05-18 | 2009-10-13 | Centipede Systems, Inc. | Socket for an electronic device |
JP4857046B2 (ja) | 2006-08-02 | 2012-01-18 | 株式会社エンプラス | 電気接触子及び電気部品用ソケット |
KR100854267B1 (ko) * | 2006-08-08 | 2008-08-26 | 정운영 | 포고핀의 제조방법과, 이를 이용한 테스트 소켓 |
JP4939879B2 (ja) * | 2006-09-13 | 2012-05-30 | 株式会社エンプラス | 電気接触子、及び、電気部品用ソケット |
WO2008084627A1 (ja) * | 2006-12-19 | 2008-07-17 | Nhk Spring Co., Ltd. | 導電性接触子ユニット |
KR100806379B1 (ko) * | 2006-12-22 | 2008-02-27 | 세크론 주식회사 | 프로브 및 이를 포함하는 프로브 카드 |
KR100769891B1 (ko) | 2007-01-25 | 2007-10-24 | 리노공업주식회사 | 검사용 탐침 장치 및 이를 이용한 검사용 소켓 |
KR100759082B1 (ko) | 2007-02-06 | 2007-09-19 | 주식회사 엔티에스 | 프로브장치 및 이의 제조방법 |
JP4999079B2 (ja) | 2007-04-10 | 2012-08-15 | サンユー工業株式会社 | プローブ |
US20100123476A1 (en) * | 2007-04-27 | 2010-05-20 | Nhk Spring Co., Ltd. | Conductive contact |
FR2916106B1 (fr) * | 2007-05-09 | 2009-06-26 | Sonceboz Automotive Sa | Module indicateur de tableau de bord forme d'un moteur et de moyens de connexion electrique. |
KR100877234B1 (ko) * | 2007-07-27 | 2009-01-07 | 한국표준과학연구원 | 접촉저항을 최소화한 면저항 측정용 프로브 |
JP4566248B2 (ja) * | 2008-03-06 | 2010-10-20 | 日本電子材料株式会社 | 垂直コイルスプリングプローブ |
JP2010025665A (ja) * | 2008-07-17 | 2010-02-04 | Nidec-Read Corp | 基板検査治具及び接触子 |
WO2010048971A1 (en) * | 2008-10-30 | 2010-05-06 | Verigy (Singapore) Pte., Ltd. | Test arrangement, pogo-pin and method for testing a device under test |
US7798867B2 (en) * | 2008-11-12 | 2010-09-21 | Interconnect Devices, Inc. | Environmentally sealed contact |
DE102008060985A1 (de) * | 2008-12-06 | 2010-06-10 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Prüfverfahren und Vorrichtung zur Durchführung des Prüfverfahrens |
JP4900843B2 (ja) | 2008-12-26 | 2012-03-21 | 山一電機株式会社 | 半導体装置用電気接続装置及びそれに使用されるコンタクト |
US7874880B2 (en) * | 2009-02-26 | 2011-01-25 | Ironwood Electronics, Inc. | Adapter apparatus with sleeve spring contacts |
TWI482973B (zh) * | 2009-04-03 | 2015-05-01 | Nhk Spring Co Ltd | 彈簧用線材、接觸探針及探針單元 |
WO2011115082A1 (ja) * | 2010-03-15 | 2011-09-22 | 日本電産リード株式会社 | 接続端子及び接続治具 |
WO2011162362A1 (ja) | 2010-06-25 | 2011-12-29 | 日本発條株式会社 | コンタクトプローブおよびプローブユニット |
WO2012014673A1 (ja) * | 2010-07-29 | 2012-02-02 | Nishikawa Hideo | 検査治具及び接触子 |
JP5345598B2 (ja) * | 2010-09-01 | 2013-11-20 | 秀雄 西川 | 検査治具及び接触子 |
WO2012039226A1 (ja) | 2010-09-21 | 2012-03-29 | Nishikawa Hideo | 検査治具及び接触子 |
US8506307B2 (en) | 2010-12-02 | 2013-08-13 | Interconnect Devices, Inc. | Electrical connector with embedded shell layer |
JP6109072B2 (ja) * | 2011-10-07 | 2017-04-05 | 日本発條株式会社 | プローブユニット |
JP2013096699A (ja) * | 2011-10-27 | 2013-05-20 | Japan Electronic Materials Corp | 電気的接触子構造 |
JP5465229B2 (ja) * | 2011-11-14 | 2014-04-09 | 株式会社エンプラス | 電気接触子 |
JP5858781B2 (ja) * | 2011-12-29 | 2016-02-10 | 株式会社エンプラス | プローブピン及び電気部品用ソケット |
KR101348206B1 (ko) * | 2013-01-08 | 2014-01-10 | 주식회사 아이에스시 | 복수의 스프링부재를 가지는 탐침장치 |
KR101348205B1 (ko) * | 2013-01-08 | 2014-01-10 | 주식회사 아이에스시 | 탐침장치 |
US20140266277A1 (en) * | 2013-03-18 | 2014-09-18 | Cheng Yun Technology Co., Ltd. | Semiconductor testing probe needle |
US9894773B2 (en) * | 2013-12-17 | 2018-02-13 | Lenovo Enterprise Solutions (Singapore) Pte. Ltd. | Adding test access to a back-drilled VIA |
WO2015105209A1 (ko) * | 2014-01-09 | 2015-07-16 | 주식회사 아이에스시 | 탐침장치 |
WO2015163160A1 (ja) * | 2014-04-21 | 2015-10-29 | オーキンス エレクトロニクス カンパニー,リミテッド | プローブピンおよびicソケット |
JP6442668B2 (ja) * | 2014-04-21 | 2018-12-26 | 株式会社ネバーグ | プローブピンおよびicソケット |
TWI560454B (en) * | 2014-11-07 | 2016-12-01 | Primax Electronics Ltd | Testing base |
CN104459227A (zh) * | 2014-12-31 | 2015-03-25 | 中国科学院上海硅酸盐研究所 | 一种太阳能电池测试夹具 |
US10161963B2 (en) * | 2015-08-17 | 2018-12-25 | Chaojiong Zhang | Electrical contact and testing apparatus |
JP6837283B2 (ja) | 2016-02-29 | 2021-03-03 | 株式会社ヨコオ | ソケット |
JP6642359B2 (ja) * | 2016-09-21 | 2020-02-05 | オムロン株式会社 | プローブピンおよび検査ユニット |
JP2018107011A (ja) * | 2016-12-27 | 2018-07-05 | 株式会社エンプラス | 電気接触子及び電気部品用ソケット |
CN106841999B (zh) * | 2017-03-24 | 2023-05-30 | 深圳市斯纳达科技有限公司 | 集成电路测试装置及其测试探针 |
CN108241078B (zh) * | 2017-05-18 | 2020-06-02 | 苏州韬盛电子科技有限公司 | 垂直探针卡 |
JP7098886B2 (ja) * | 2017-07-04 | 2022-07-12 | 日本電産リード株式会社 | 接触端子、検査治具、及び検査装置 |
KR102279465B1 (ko) * | 2017-07-21 | 2021-07-21 | 주식회사 기가레인 | 프로브 카드용 박막 저항기 |
KR20210021349A (ko) | 2018-06-14 | 2021-02-25 | 폼팩터, 인크. | 디커플링된 전기적 및 기계적 설계를 갖는 전기 테스트 프로브들 |
JP6837513B2 (ja) * | 2019-05-07 | 2021-03-03 | 株式会社ヨコオ | ソケット |
CN112129975A (zh) * | 2019-06-25 | 2020-12-25 | 中国探针股份有限公司 | 电连接组件 |
CN112688104A (zh) * | 2020-12-24 | 2021-04-20 | 奥普家居股份有限公司 | 通过开闭门板切换控制器有线通讯的集成灶 |
CN113295192B (zh) * | 2021-05-18 | 2023-04-07 | 南京大学 | 一种接触型力和声复合传感器 |
CN113708724A (zh) * | 2021-08-27 | 2021-11-26 | 西安隆基乐叶光伏科技有限公司 | 一种太阳能电池片的检测探针 |
CN117434314B (zh) * | 2023-09-11 | 2024-07-12 | 法特迪精密科技(苏州)有限公司 | 一种旋转探针与配套插座的适配装置及方法 |
CN117805592B (zh) * | 2024-01-08 | 2024-06-07 | 安盈半导体技术(常州)有限公司 | 一种柔性介质芯片测试接口 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3340431C2 (de) | 1983-11-09 | 1985-12-19 | Feinmetall Gmbh, 7033 Herrenberg | Gefederter Kontaktstift für Prüfzwecke |
JP2539453B2 (ja) | 1987-09-11 | 1996-10-02 | 株式会社日立製作所 | 半導体素子検査装置 |
US4931726A (en) | 1987-06-22 | 1990-06-05 | Hitachi, Ltd. | Apparatus for testing semiconductor device |
US5003255A (en) * | 1989-06-15 | 1991-03-26 | Nhk Spring Co., Ltd. | Electric contact probe |
JP2993980B2 (ja) | 1989-12-29 | 1999-12-27 | 新光電気工業株式会社 | 基板用コンタクトプローブ |
US5414369A (en) * | 1992-11-09 | 1995-05-09 | Nhk Spring Co., Ltd. | Coil spring-pressed needle contact probe modules with offset needles |
JP2532331B2 (ja) | 1992-11-09 | 1996-09-11 | 日本発条株式会社 | 導電性接触子 |
JPH06201725A (ja) | 1992-11-09 | 1994-07-22 | Nhk Spring Co Ltd | 導電性接触子及び導電性接触子ユニット |
JPH07115253A (ja) | 1993-10-18 | 1995-05-02 | Hitachi Chem Co Ltd | 金属ベース基板 |
JPH0823013A (ja) | 1994-07-05 | 1996-01-23 | Aging Tesuta Kaihatsu Kyodo Kumiai | ウエハー用プローバ |
JP3149316B2 (ja) | 1994-08-01 | 2001-03-26 | アルプス電気株式会社 | サーマルヘッドおよびその製造方法 |
JPH0954116A (ja) | 1995-08-10 | 1997-02-25 | Nippon Denshi Zairyo Kk | 高温測定用プローブカード |
JP3326095B2 (ja) * | 1996-12-27 | 2002-09-17 | 日本発条株式会社 | 導電性接触子 |
JP3634074B2 (ja) * | 1996-06-28 | 2005-03-30 | 日本発条株式会社 | 導電性接触子 |
JPH1038920A (ja) | 1996-07-29 | 1998-02-13 | Sankyo Seiki Mfg Co Ltd | プローブユニット |
JPH10111315A (ja) | 1996-10-04 | 1998-04-28 | Mitsubishi Electric Corp | プローブカードおよびこれを用いた試験装置 |
-
1997
- 1997-07-04 JP JP18001697A patent/JP3326095B2/ja not_active Expired - Lifetime
- 1997-12-25 IL IL12276897A patent/IL122768A/xx not_active IP Right Cessation
- 1997-12-26 CN CNA2005101198824A patent/CN1769897A/zh active Pending
- 1997-12-26 DE DE69711083T patent/DE69711083T2/de not_active Expired - Lifetime
- 1997-12-26 CN CNB97181032XA patent/CN1236316C/zh not_active Expired - Fee Related
- 1997-12-26 KR KR1019997005862A patent/KR100348698B1/ko not_active IP Right Cessation
- 1997-12-26 US US09/331,806 patent/US6323667B1/en not_active Expired - Lifetime
- 1997-12-26 MY MYPI97006317A patent/MY119910A/en unknown
- 1997-12-26 EP EP97950425A patent/EP0950191B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6323667B1 (en) | 2001-11-27 |
EP0950191B1 (en) | 2002-03-13 |
JP3326095B2 (ja) | 2002-09-17 |
IL122768A0 (en) | 1998-08-16 |
KR100348698B1 (ko) | 2002-08-13 |
CN1769897A (zh) | 2006-05-10 |
EP0950191A1 (en) | 1999-10-20 |
MY119910A (en) | 2005-08-30 |
KR20000062366A (ko) | 2000-10-25 |
DE69711083D1 (de) | 2002-04-18 |
DE69711083T2 (de) | 2002-07-18 |
CN1242078A (zh) | 2000-01-19 |
JPH10239349A (ja) | 1998-09-11 |
CN1236316C (zh) | 2006-01-11 |
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Legal Events
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FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed | ||
KB | Patent renewed | ||
KB | Patent renewed | ||
EXP | Patent expired |