DE69704408T2 - Drehgeschwindigkeitserfassungsvorrichtung - Google Patents

Drehgeschwindigkeitserfassungsvorrichtung

Info

Publication number
DE69704408T2
DE69704408T2 DE69704408T DE69704408T DE69704408T2 DE 69704408 T2 DE69704408 T2 DE 69704408T2 DE 69704408 T DE69704408 T DE 69704408T DE 69704408 T DE69704408 T DE 69704408T DE 69704408 T2 DE69704408 T2 DE 69704408T2
Authority
DE
Germany
Prior art keywords
detection device
rotational speed
speed detection
rotational
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69704408T
Other languages
English (en)
Other versions
DE69704408D1 (de
DE69704408T3 (de
Inventor
Shinji Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17535920&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69704408(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69704408D1 publication Critical patent/DE69704408D1/de
Publication of DE69704408T2 publication Critical patent/DE69704408T2/de
Application granted granted Critical
Publication of DE69704408T3 publication Critical patent/DE69704408T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
DE69704408T 1996-09-25 1997-09-10 Drehgeschwindigkeitserfassungsvorrichtung Expired - Lifetime DE69704408T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27402596 1996-09-25
JP27402596A JP3603501B2 (ja) 1996-09-25 1996-09-25 角速度検出装置

Publications (3)

Publication Number Publication Date
DE69704408D1 DE69704408D1 (de) 2001-05-03
DE69704408T2 true DE69704408T2 (de) 2001-11-08
DE69704408T3 DE69704408T3 (de) 2005-08-11

Family

ID=17535920

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69704408T Expired - Lifetime DE69704408T3 (de) 1996-09-25 1997-09-10 Drehgeschwindigkeitserfassungsvorrichtung

Country Status (4)

Country Link
US (1) US5969225A (de)
EP (1) EP0833127B2 (de)
JP (1) JP3603501B2 (de)
DE (1) DE69704408T3 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005012155B4 (de) * 2004-03-19 2013-06-13 Denso Corporation Vibrations-Winkelgeschwindigkeitssensor
DE102009047018B4 (de) 2009-11-23 2023-02-09 Robert Bosch Gmbh Verfahren zum Abgleich eines Beschleunigungssensors und Beschleunigungssensor

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KR100393183B1 (ko) * 1996-10-31 2003-10-17 삼성전자주식회사 마이크로액츄에이터의상보형정전구동장치
EP0911606A1 (de) * 1997-10-23 1999-04-28 STMicroelectronics S.r.l. Integrierter Winkelgeschwindigkeitssensor und Verfahren zu seiner Herstellung
JP3106395B2 (ja) * 1998-07-10 2000-11-06 株式会社村田製作所 角速度センサ
JP3489487B2 (ja) 1998-10-23 2004-01-19 トヨタ自動車株式会社 角速度検出装置
US6450033B1 (en) * 1999-07-22 2002-09-17 Denso Corporation Semiconductor physical quantity sensor
JP2001174264A (ja) 1999-12-21 2001-06-29 Murata Mfg Co Ltd 共振素子およびその振動調整方法
JP2001227954A (ja) * 2000-02-15 2001-08-24 Toyota Motor Corp 物理量検出装置
JP3659160B2 (ja) * 2000-02-18 2005-06-15 株式会社デンソー 角速度センサ
JP2002139322A (ja) * 2000-10-31 2002-05-17 Murata Mfg Co Ltd 振動ジャイロの自己診断方法、及び、振動ジャイロ及びそれを用いた電子装置
JP2002188924A (ja) * 2000-12-20 2002-07-05 Denso Corp 半導体装置
US6742389B2 (en) 2001-01-24 2004-06-01 The Regents Of The University Of Michigan Filter-based method and system for measuring angular speed of an object
JP4765171B2 (ja) * 2001-01-29 2011-09-07 株式会社村田製作所 振動ジャイロおよび振動ジャイロの自己診断方法
JP2003166999A (ja) 2001-12-03 2003-06-13 Denso Corp 半導体力学量センサ
US7316161B2 (en) * 2002-01-12 2008-01-08 Robert Bosch Gmbh Rotation rate sensor
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
WO2006038669A1 (ja) * 2004-10-07 2006-04-13 Matsushita Electric Industrial Co., Ltd. 角速度センサユニット及び角速度センサ診断装置
DE102004061804B4 (de) * 2004-12-22 2015-05-21 Robert Bosch Gmbh Mikromechanischer Drehratensensor mit Fehlerunterdrückung
KR100657424B1 (ko) 2005-11-23 2006-12-14 세종대학교산학협력단 단일 질량소자 기반 진동형 자이로스코프의 1축 각속도 및2축 선형가속도 측정방법
JP2007248327A (ja) * 2006-03-17 2007-09-27 Matsushita Electric Ind Co Ltd 加速度センサ
JP5408961B2 (ja) * 2008-10-30 2014-02-05 日立オートモティブシステムズ株式会社 角速度センサ
JP5244562B2 (ja) 2008-11-28 2013-07-24 日立オートモティブシステムズ株式会社 角速度検出装置
US8783103B2 (en) 2009-08-21 2014-07-22 Analog Devices, Inc. Offset detection and compensation for micromachined inertial sensors
JP2011058860A (ja) * 2009-09-08 2011-03-24 Hitachi Automotive Systems Ltd 角速度検出装置
JP5494202B2 (ja) 2010-05-10 2014-05-14 株式会社デンソー 角速度センサ
JP5287790B2 (ja) 2010-05-10 2013-09-11 株式会社デンソー 角速度センサ
JP4831241B2 (ja) * 2010-05-26 2011-12-07 株式会社村田製作所 振動ジャイロ及びそれを用いた電子装置
JP2011137824A (ja) * 2011-01-21 2011-07-14 Denso Corp 力学量センサ
WO2013073161A1 (ja) * 2011-11-15 2013-05-23 富士電機株式会社 静電容量検出回路
US9417066B2 (en) * 2012-01-11 2016-08-16 The Boeing Company Electronic bias compensation for a gyroscope
US9417067B1 (en) 2012-01-11 2016-08-16 The Boeing Company Electronic bias compensation for a gyroscope
JP6024163B2 (ja) * 2012-04-04 2016-11-09 セイコーエプソン株式会社 ジャイロセンサー、及び電子機器
US9212908B2 (en) 2012-04-26 2015-12-15 Analog Devices, Inc. MEMS gyroscopes with reduced errors
JP6435631B2 (ja) 2014-04-23 2018-12-12 株式会社デンソー 角速度センサ
US9869552B2 (en) 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
WO2016164543A1 (en) * 2015-04-07 2016-10-13 Analog Devices, Inc. Quality factor estimation for resonators
JP6828544B2 (ja) 2017-03-23 2021-02-10 セイコーエプソン株式会社 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
JP2018185188A (ja) 2017-04-25 2018-11-22 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、物理量センサーデバイス、電子機器および移動体
US10578435B2 (en) 2018-01-12 2020-03-03 Analog Devices, Inc. Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
US11041722B2 (en) 2018-07-23 2021-06-22 Analog Devices, Inc. Systems and methods for sensing angular motion in the presence of low-frequency noise
JP7226246B2 (ja) * 2019-10-29 2023-02-21 株式会社デンソー 角速度センサおよび角速度センサシステム

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SE327869B (de) * 1969-01-13 1970-08-31 Stefa Industri Ab
DE3818134A1 (de) * 1988-05-27 1989-11-30 Siemens Ag Sensor zur erfassung eines bewegungsparameters, z. b. crashsensor fuer ein kfz
JPH0526894A (ja) * 1991-07-19 1993-02-02 Mitsubishi Petrochem Co Ltd 自己診断回路付き加速度センサ
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
JP3293194B2 (ja) * 1992-10-13 2002-06-17 株式会社デンソー 力学量センサ
US5426970A (en) * 1993-08-02 1995-06-27 New Sd, Inc. Rotation rate sensor with built in test circuit
DE4439886A1 (de) * 1994-03-12 1995-09-14 Bosch Gmbh Robert Elektronisches Gerät mit einem beschleunigungsempfindlichen Sensor
FR2726361B1 (fr) * 1994-10-28 1997-01-17 Sextant Avionique Microgyrometre
JP3412293B2 (ja) * 1994-11-17 2003-06-03 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
DE4447005A1 (de) * 1994-12-29 1996-07-04 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005012155B4 (de) * 2004-03-19 2013-06-13 Denso Corporation Vibrations-Winkelgeschwindigkeitssensor
DE102009047018B4 (de) 2009-11-23 2023-02-09 Robert Bosch Gmbh Verfahren zum Abgleich eines Beschleunigungssensors und Beschleunigungssensor

Also Published As

Publication number Publication date
EP0833127B2 (de) 2004-12-15
EP0833127B1 (de) 2001-03-28
DE69704408D1 (de) 2001-05-03
US5969225A (en) 1999-10-19
JPH10103960A (ja) 1998-04-24
DE69704408T3 (de) 2005-08-11
JP3603501B2 (ja) 2004-12-22
EP0833127A1 (de) 1998-04-01

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Legal Events

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8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings