DE69636079D1 - Reinraumanlage mit Luftfilter - Google Patents

Reinraumanlage mit Luftfilter

Info

Publication number
DE69636079D1
DE69636079D1 DE69636079T DE69636079T DE69636079D1 DE 69636079 D1 DE69636079 D1 DE 69636079D1 DE 69636079 T DE69636079 T DE 69636079T DE 69636079 T DE69636079 T DE 69636079T DE 69636079 D1 DE69636079 D1 DE 69636079D1
Authority
DE
Germany
Prior art keywords
air filter
clean room
room system
clean
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69636079T
Other languages
English (en)
Other versions
DE69636079T2 (de
Inventor
Kobayashi
Imafuku
Wakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taisei Corp
Original Assignee
Taisei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taisei Corp filed Critical Taisei Corp
Publication of DE69636079D1 publication Critical patent/DE69636079D1/de
Application granted granted Critical
Publication of DE69636079T2 publication Critical patent/DE69636079T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0001—Making filtering elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/10—Filter screens essentially made of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
    • B01D39/1607—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous
    • B01D39/1623—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2003—Glass or glassy material
    • B01D39/2017—Glass or glassy material the material being filamentary or fibrous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • B01D46/06—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material with means keeping the working surfaces flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
    • D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
    • D04H1/42—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties characterised by the use of certain kinds of fibres insofar as this use has no preponderant influence on the consolidation of the fleece
    • D04H1/4209—Inorganic fibres
    • D04H1/4218—Glass fibres
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/02—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with hydrocarbons
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/10—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with compounds containing oxygen
    • D06M13/11—Compounds containing epoxy groups or precursors thereof
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/10—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with compounds containing oxygen
    • D06M13/144—Alcohols; Metal alcoholates
    • D06M13/148—Polyalcohols, e.g. glycerol or glucose
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M13/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment
    • D06M13/10—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with non-macromolecular organic compounds; Such treatment combined with mechanical treatment with compounds containing oxygen
    • D06M13/224—Esters of carboxylic acids; Esters of carbonic acid
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/21—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/227—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds of hydrocarbons, or reaction products thereof, e.g. afterhalogenated or sulfochlorinated
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M15/00—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment
    • D06M15/19—Treating fibres, threads, yarns, fabrics, or fibrous goods made from such materials, with macromolecular compounds; Such treatment combined with mechanical treatment with synthetic macromolecular compounds
    • D06M15/37—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • D06M15/507—Polyesters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0414—Surface modifiers, e.g. comprising ion exchange groups
    • B01D2239/0428—Rendering the filter material hydrophobic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0457—Specific fire retardant or heat resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0464—Impregnants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0471—Surface coating material
    • B01D2239/0492—Surface coating material on fibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
    • B01D2239/0604—Arrangement of the fibres in the filtering material
    • B01D2239/0618—Non-woven
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/08—Special characteristics of binders
    • B01D2239/086—Binders between particles or fibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/10—Filtering material manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2271/00—Sealings for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2271/02—Gaskets, sealings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
    • B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
    • B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Textile Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Emergency Medicine (AREA)
  • Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Filtering Materials (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE69636079T 1995-07-27 1996-07-25 Reinraumanlage mit Luftfilter Expired - Fee Related DE69636079T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19209095 1995-07-27
JP19209095 1995-07-27

Publications (2)

Publication Number Publication Date
DE69636079D1 true DE69636079D1 (de) 2006-06-01
DE69636079T2 DE69636079T2 (de) 2007-05-03

Family

ID=16285490

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69634687T Expired - Fee Related DE69634687T2 (de) 1995-07-27 1996-07-25 Luftfilter
DE69636079T Expired - Fee Related DE69636079T2 (de) 1995-07-27 1996-07-25 Reinraumanlage mit Luftfilter

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69634687T Expired - Fee Related DE69634687T2 (de) 1995-07-27 1996-07-25 Luftfilter

Country Status (6)

Country Link
US (4) US5997598A (de)
EP (5) EP1291065A3 (de)
JP (1) JP3282113B2 (de)
DE (2) DE69634687T2 (de)
TW (1) TW319708B (de)
WO (1) WO1997004851A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0755991A3 (de) 1995-07-27 1997-08-13 Taisei Corp Trocken- oder Nassdichtungsmaterial und Verfahren zu deren Herstellung
EP1291065A3 (de) * 1995-07-27 2004-01-14 Taisei Corporation Luftfilter, Verfahren zur Herstellung von Luftfiltern, örtlichen Anlagen, Reinraumanlagen, Behandlungen und Verfahren zur Herstellung eines Filtermediums
US6929985B2 (en) * 1995-07-27 2005-08-16 Taisei Corporation Air filter, method of manufacturing air filter, local facility, clean room, treating agent, and method of manufacturing filter medium
WO2000037160A1 (fr) * 1998-12-22 2000-06-29 Taisei Corporation Milieu filtrant pour filtre a air et procede de fabrication correspondant
JP2000325700A (ja) * 1999-05-25 2000-11-28 Mitsubishi Electric Corp 無塵衣管理装置，エアシャワ室及びコンピュータ読み取り可能な記録媒体
WO2001023649A1 (en) 1999-09-29 2001-04-05 Shin-Etsu Handotai Co., Ltd. Wafer, epitaxial filter, and method of manufacture thereof
KR100394786B1 (ko) * 2000-08-14 2003-08-14 다이킨 고교 가부시키가이샤 에어필터용 부품, 그 패키지 및 그 패키징 방법
ATE538860T1 (de) 2000-08-21 2012-01-15 Hokuetsu Kishu Paper Co Ltd Filtermedium zur luftfiltration und verfahren zu dessen herstellung
WO2002049935A1 (fr) * 2000-12-21 2002-06-27 Hokuetsu Paper Mills,Ltd. Produit d'adsorption de matieres filtrees pour filtre a air
DE10342416A1 (de) * 2003-09-13 2005-04-07 Outlast Technologies, Inc., Boulder Filtermaterial
US8057567B2 (en) 2004-11-05 2011-11-15 Donaldson Company, Inc. Filter medium and breather filter structure
AU2005304879B2 (en) * 2004-11-05 2010-02-04 Donaldson Company, Inc. Filter medium and structure
US8021457B2 (en) 2004-11-05 2011-09-20 Donaldson Company, Inc. Filter media and structure
EA011777B1 (ru) 2005-02-04 2009-06-30 Дональдсон Компани, Инк. Фильтр и система вентиляции картера
ATE442893T1 (de) 2005-02-22 2009-10-15 Donaldson Co Inc Aerosolabscheider
US8343247B2 (en) * 2005-09-09 2013-01-01 Dexwet Usa Llc Filter module
WO2008028025A2 (en) * 2006-08-31 2008-03-06 Honeywell International Inc. Cast formed filter and method of making the same
JP2010529902A (ja) 2007-02-22 2010-09-02 ドナルドソン カンパニー インコーポレイテッド フイルタ要素及び方法
EP2125149A2 (de) 2007-02-23 2009-12-02 Donaldson Company, Inc. Geformtes filterelement
US8673040B2 (en) 2008-06-13 2014-03-18 Donaldson Company, Inc. Filter construction for use with air in-take for gas turbine and methods
US8267681B2 (en) 2009-01-28 2012-09-18 Donaldson Company, Inc. Method and apparatus for forming a fibrous media
JP5319380B2 (ja) * 2009-04-24 2013-10-16 北越紀州製紙株式会社 低坪量エアフィルタ用濾材
DE102010020240A1 (de) 2010-05-11 2011-11-17 TÜV Rheinland Industrie Service GmbH Luftdurchlässige OP-Decke
CN102353727B (zh) * 2011-06-28 2015-05-20 上海华虹宏力半导体制造有限公司 气态分子级污染物测试的标准品制备及测试方法和设备
JP5818072B2 (ja) * 2011-07-06 2015-11-18 Dic株式会社 ウレタン樹脂用可塑剤、それを用いたウレタン樹脂組成物及びその硬化物
DE102013221826A1 (de) 2013-10-28 2015-04-30 Wacker Chemie Ag Verfahren zur Herstellung von polykristallinem Silicium
DE102018204261A1 (de) * 2018-03-20 2019-09-26 Filtration Group Gmbh Filterelement mit Filtermaterial und Herstellungsverfahren
JP7055261B1 (ja) 2021-10-04 2022-04-15 北越コーポレーション株式会社 エアフィルタ用濾材及びその製造方法
WO2023062964A1 (ja) 2021-10-15 2023-04-20 北越コーポレーション株式会社 高性能エアフィルタ用濾材及びその製造方法

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2608499A (en) * 1946-09-12 1952-08-26 Westinghouse Electric Corp Heat treated glass fabric
NL245012A (de) * 1958-11-05
US3066462A (en) * 1959-02-09 1962-12-04 Shell Oil Co Demisting gas with mats
US3520416A (en) * 1968-02-12 1970-07-14 Pall Corp Liquid and gas-permeable microporous materials and process for making the same
LU76471A1 (de) * 1976-12-24 1978-07-10
US4248929A (en) * 1979-10-24 1981-02-03 Monsanto Company Filter media coated with flame resistant compositions
US4270933A (en) * 1980-03-19 1981-06-02 Meny Allan H Regenerative, fluid filter
US4370376A (en) * 1980-04-18 1983-01-25 E. I. Du Pont De Nemours And Company Tetrafluoroethylene polymer dispersions
WO1985002351A1 (en) * 1983-11-23 1985-06-06 Donaldson Company, Inc. Filter with integral structural framework
JPS6256614A (ja) * 1985-05-08 1987-03-12 Masahiro Morita 自動調心軸受ユニツト
JPH0321523Y2 (de) 1985-09-30 1991-05-10
JPS6286248A (ja) * 1985-10-14 1987-04-20 大成建設株式会社 壁パネルの接合方法
JPS62124102A (ja) * 1985-11-25 1987-06-05 Nippon Oil & Fats Co Ltd 不飽和基含有重合または共重合体の製造法
JPS62124102U (de) 1986-01-30 1987-08-06
JP2585244B2 (ja) * 1987-02-25 1997-02-26 株式会社日立製作所 薬品処理装置
JP2750686B2 (ja) * 1987-08-04 1998-05-13 日東電工株式会社 補強型多孔質シート
JPH0283009A (ja) * 1988-09-19 1990-03-23 Gakken Co Ltd 食用油の再生濾材
JPH02108712A (ja) 1988-09-22 1990-04-20 Tatsujun Rin 水中基盤構造
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
JPH02108712U (de) * 1989-02-17 1990-08-29
US5986012A (en) * 1989-04-24 1999-11-16 E. I. Du Pont De Nemours And Company Fluorination of radiation crosslinked perfluoroelastomers
US5032450A (en) * 1990-01-31 1991-07-16 Ppg Industries, Inc. Microporous material having a coating of hydrophobic polymer
JP3026226B2 (ja) * 1990-07-21 2000-03-27 日本無機株式会社 焼却に適したエアフィルタ並びにその焼却方法
JPH04120186A (ja) * 1990-09-10 1992-04-21 Kyowa Kako Kk パッキング
JPH057316A (ja) 1991-02-01 1993-01-14 Gakken Co Ltd 撮像転写カメラ
EP0598908A1 (de) * 1992-01-14 1994-06-01 Daikin Industries, Ltd. Filter und filterelement
US5262444A (en) * 1992-11-30 1993-11-16 Borden, Inc. Porous plastic film product, useful as a breathable wall covering or filters
JP3334929B2 (ja) * 1993-02-04 2002-10-15 東京エレクトロン株式会社 熱処理装置
US5350515A (en) * 1993-03-29 1994-09-27 W. L. Gore & Associates, Inc. Internally potted end cap for a pleated filter medium
JP2841151B2 (ja) * 1993-04-02 1998-12-24 富士通株式会社 エアーフィルタ及び濾過システム
JPH07328359A (ja) * 1994-06-01 1995-12-19 Mitsubishi Nuclear Fuel Co Ltd 濾紙及びその製造方法
US5507847A (en) * 1994-07-29 1996-04-16 W. L. Gore & Associates, Inc. ULPA filter
US5525136A (en) * 1994-09-06 1996-06-11 Rosen; Richard M. Gasketed multi-media air cleaner
US5833726A (en) * 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
EP1291065A3 (de) * 1995-07-27 2004-01-14 Taisei Corporation Luftfilter, Verfahren zur Herstellung von Luftfiltern, örtlichen Anlagen, Reinraumanlagen, Behandlungen und Verfahren zur Herstellung eines Filtermediums
JPH10106908A (ja) * 1996-10-01 1998-04-24 Mitsubishi Electric Corp ケミカルフリー乾燥空気の発生装置

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EP1291063B1 (de) 2006-04-26
DE69634687T2 (de) 2006-03-16
TW319708B (de) 1997-11-11
EP1291065A2 (de) 2003-03-12
EP1291065A3 (de) 2004-01-14
DE69634687D1 (de) 2005-06-09
US6293982B1 (en) 2001-09-25
EP1541213A3 (de) 2007-12-26
EP1291064A3 (de) 2004-01-07
EP0785013A4 (de) 1999-09-22
US6471740B2 (en) 2002-10-29
EP1291064A2 (de) 2003-03-12
US5997598A (en) 1999-12-07
US6106586A (en) 2000-08-22
EP0785013B1 (de) 2005-05-04
EP1291063A2 (de) 2003-03-12
US20010000375A1 (en) 2001-04-26
WO1997004851A1 (fr) 1997-02-13
EP1291063A3 (de) 2004-01-07
EP1541213A2 (de) 2005-06-15
DE69636079T2 (de) 2007-05-03
EP0785013A1 (de) 1997-07-23
JP3282113B2 (ja) 2002-05-13

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