DE69622009D1 - Ionenstrahlgerät - Google Patents
IonenstrahlgerätInfo
- Publication number
- DE69622009D1 DE69622009D1 DE69622009T DE69622009T DE69622009D1 DE 69622009 D1 DE69622009 D1 DE 69622009D1 DE 69622009 T DE69622009 T DE 69622009T DE 69622009 T DE69622009 T DE 69622009T DE 69622009 D1 DE69622009 D1 DE 69622009D1
- Authority
- DE
- Germany
- Prior art keywords
- ion beam
- beam device
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9515090.0A GB9515090D0 (en) | 1995-07-21 | 1995-07-21 | An ion beam apparatus |
PCT/GB1996/001715 WO1997004474A1 (en) | 1995-07-21 | 1996-07-19 | An ion beam apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69622009D1 true DE69622009D1 (de) | 2002-08-01 |
DE69622009T2 DE69622009T2 (de) | 2003-01-16 |
Family
ID=10778135
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69622009T Expired - Lifetime DE69622009T2 (de) | 1995-07-21 | 1996-07-19 | Ionenstrahlgerät |
DE69637765T Expired - Lifetime DE69637765D1 (de) | 1995-07-21 | 1996-07-19 | Ionenstrahlgerät |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69637765T Expired - Lifetime DE69637765D1 (de) | 1995-07-21 | 1996-07-19 | Ionenstrahlgerät |
Country Status (7)
Country | Link |
---|---|
US (1) | US5920076A (de) |
EP (2) | EP1178517B1 (de) |
JP (1) | JPH10508425A (de) |
KR (1) | KR970706598A (de) |
DE (2) | DE69622009T2 (de) |
GB (1) | GB9515090D0 (de) |
WO (1) | WO1997004474A1 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5200072A (en) | 1990-08-16 | 1993-04-06 | Ahlstrom Screen Plates Inc. | Screen plates and methods of manufacture |
US6207964B1 (en) * | 1999-02-19 | 2001-03-27 | Axcelis Technologies, Inc. | Continuously variable aperture for high-energy ion implanter |
EP1105908B1 (de) * | 1999-06-23 | 2005-03-02 | Applied Materials, Inc. | Vorrichtung zur erzeugung von ionenstrahlen |
US6452338B1 (en) | 1999-12-13 | 2002-09-17 | Semequip, Inc. | Electron beam ion source with integral low-temperature vaporizer |
US6501078B1 (en) * | 2000-03-16 | 2002-12-31 | Applied Materials, Inc. | Ion extraction assembly |
US6782337B2 (en) | 2000-09-20 | 2004-08-24 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension an a presence of defects on a specimen |
US7196782B2 (en) | 2000-09-20 | 2007-03-27 | Kla-Tencor Technologies Corp. | Methods and systems for determining a thin film characteristic and an electrical property of a specimen |
US6673637B2 (en) | 2000-09-20 | 2004-01-06 | Kla-Tencor Technologies | Methods and systems for determining a presence of macro defects and overlay of a specimen |
US6891627B1 (en) | 2000-09-20 | 2005-05-10 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension and overlay of a specimen |
US6694284B1 (en) | 2000-09-20 | 2004-02-17 | Kla-Tencor Technologies Corp. | Methods and systems for determining at least four properties of a specimen |
US6812045B1 (en) | 2000-09-20 | 2004-11-02 | Kla-Tencor, Inc. | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation |
US6793766B2 (en) * | 2001-01-04 | 2004-09-21 | Applied Materials Inc. | Apparatus having platforms positioned for precise centering of semiconductor wafers during processing |
US6300177B1 (en) * | 2001-01-25 | 2001-10-09 | Chartered Semiconductor Manufacturing Inc. | Method to form transistors with multiple threshold voltages (VT) using a combination of different work function gate materials |
GB0131097D0 (en) * | 2001-12-31 | 2002-02-13 | Applied Materials Inc | Ion sources |
GB2386247B (en) * | 2002-01-11 | 2005-09-07 | Applied Materials Inc | Ion beam generator |
EP1695038B1 (de) | 2003-12-12 | 2013-02-13 | Semequip, Inc. | Steuerung des flusses von aus feststoffen sublimierten dämpfen |
JP5100963B2 (ja) * | 2004-11-30 | 2012-12-19 | 株式会社Sen | ビーム照射装置 |
US7102139B2 (en) * | 2005-01-27 | 2006-09-05 | Varian Semiconductor Equipment Associates, Inc. | Source arc chamber for ion implanter having repeller electrode mounted to external insulator |
US8089052B2 (en) * | 2008-04-24 | 2012-01-03 | Axcelis Technologies, Inc. | Ion source with adjustable aperture |
US7767986B2 (en) * | 2008-06-20 | 2010-08-03 | Varian Semiconductor Equipment Associates, Inc. | Method and apparatus for controlling beam current uniformity in an ion implanter |
US7842931B2 (en) * | 2008-09-25 | 2010-11-30 | Axcelis Technologies, Inc. | Extraction electrode manipulator |
US8466431B2 (en) | 2009-02-12 | 2013-06-18 | Varian Semiconductor Equipment Associates, Inc. | Techniques for improving extracted ion beam quality using high-transparency electrodes |
US8044374B2 (en) * | 2009-06-30 | 2011-10-25 | Twin Creeks Technologies, Inc. | Ion implantation apparatus |
CN102347191A (zh) * | 2010-08-02 | 2012-02-08 | 北京中科信电子装备有限公司 | 一种分体式离子源引出电极系统 |
US9499921B2 (en) * | 2012-07-30 | 2016-11-22 | Rayton Solar Inc. | Float zone silicon wafer manufacturing system and related process |
JP6076838B2 (ja) * | 2013-05-31 | 2017-02-08 | 住友重機械イオンテクノロジー株式会社 | 絶縁構造及び絶縁方法 |
US10221476B2 (en) * | 2013-06-03 | 2019-03-05 | Varian Semiconductor Equipment Associates, Inc. | Coating insulating materials for improved life |
CN108962708A (zh) * | 2013-11-14 | 2018-12-07 | 迈普尔平版印刷Ip有限公司 | 电极堆栈布置 |
JP6253362B2 (ja) * | 2013-11-21 | 2017-12-27 | 住友重機械イオンテクノロジー株式会社 | 高エネルギーイオン注入装置、ビーム電流調整装置、及びビーム電流調整方法 |
US9496117B2 (en) * | 2014-01-20 | 2016-11-15 | Varian Semiconductor Equipment Associates, Inc. | Two-dimensional mass resolving slit mechanism for semiconductor processing systems |
US9793094B2 (en) * | 2014-03-24 | 2017-10-17 | Ion Technology Solutions, Llc | Extraction electrode |
US9748072B2 (en) * | 2014-06-23 | 2017-08-29 | Advanced Ion Beam Technology, Inc. | Lower dose rate ion implantation using a wider ion beam |
US9318302B1 (en) * | 2015-03-31 | 2016-04-19 | Axcelis Technologies, Inc. | Integrated extraction electrode manipulator for ion source |
US11017974B2 (en) * | 2016-11-11 | 2021-05-25 | Nissin Ion Equipment Co., Ltd. | Ion source |
KR20210094104A (ko) | 2018-12-17 | 2021-07-28 | 어플라이드 머티어리얼스, 인코포레이티드 | 경사 격자들의 롤링 k 벡터들의 조절 |
EP4169053A1 (de) * | 2020-06-22 | 2023-04-26 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Ionenstrahl-extraktionsvorrichtung und verfahren zur erzeugung eines ionenstrahls |
JP7065162B2 (ja) * | 2020-09-30 | 2022-05-11 | 住友重機械工業株式会社 | イオン源装置 |
US20240145206A1 (en) * | 2022-10-27 | 2024-05-02 | Applied Materials, Inc. | Temperature controlled electrode to limit deposition rates and distortion |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1502935A (en) * | 1976-05-13 | 1978-03-08 | Hitachi Ltd | Microwave discharge ion source |
FR2383702A1 (fr) * | 1977-03-18 | 1978-10-13 | Anvar | Perfectionnements aux procedes et dispositifs de dopage de materiaux semi-conducteurs |
US4166952A (en) * | 1978-02-24 | 1979-09-04 | E. I. Du Pont De Nemours And Company | Method and apparatus for the elemental analysis of solids |
JPS55104057A (en) * | 1979-02-02 | 1980-08-09 | Hitachi Ltd | Ion implantation device |
JPS59165359A (ja) * | 1983-03-11 | 1984-09-18 | Hitachi Ltd | イオン打込装置 |
JPH0727766B2 (ja) * | 1983-08-15 | 1995-03-29 | アプライド マテリアルズ インコーポレーテッド | イオン打込み装置及びイオン源装置作動方法 |
US4580058A (en) * | 1984-03-29 | 1986-04-01 | Zymet, Inc. | Scanning treatment apparatus |
US4843563A (en) * | 1985-03-25 | 1989-06-27 | Canon Kabushiki Kaisha | Step-and-repeat alignment and exposure method and apparatus |
JPS61287229A (ja) * | 1985-06-14 | 1986-12-17 | Nippon Kogaku Kk <Nikon> | 露光装置、及び該露光装置を用いた回路パターン製造方法 |
EP0217616A3 (de) * | 1985-09-23 | 1989-01-25 | Vg Instruments Group Limited | Gerät zur Bearbeitung von Substraten |
JPS62272444A (ja) * | 1986-05-20 | 1987-11-26 | Fujitsu Ltd | イオン注入用タ−ゲツト機構 |
DE3803355A1 (de) * | 1988-02-05 | 1989-08-17 | Leybold Ag | Teilchenquelle fuer eine reaktive ionenstrahlaetz- oder plasmadepositionsanlage |
EP0339554A3 (de) * | 1988-04-26 | 1989-12-20 | Hauzer Holding B.V. | Hochfrequenz-Ionenstrahlquelle |
EP0342933B1 (de) * | 1988-05-18 | 1996-09-18 | Varian Associates, Inc. | Gerät zur Abrasterung einer Tragplatte in einer Schub-Ionen-Implantierungsanlage |
US4873467A (en) * | 1988-05-23 | 1989-10-10 | Kaufman Harold R | Ion source with particular grid assembly |
JPH0635363Y2 (ja) * | 1988-08-22 | 1994-09-14 | 日新電機株式会社 | イオン源 |
JPH0257549U (de) * | 1988-10-20 | 1990-04-25 | ||
US5229607A (en) * | 1990-04-19 | 1993-07-20 | Hitachi, Ltd. | Combination apparatus having a scanning electron microscope therein |
JPH0443542A (ja) * | 1990-06-11 | 1992-02-13 | Fujitsu Ltd | 粒子ビーム照射装置 |
US5096536A (en) * | 1990-06-12 | 1992-03-17 | Micron Technology, Inc. | Method and apparatus useful in the plasma etching of semiconductor materials |
JPH0451448A (ja) * | 1990-06-20 | 1992-02-19 | Hitachi Nakaseiki Ltd | 電子ビーム用絞り板の汚染除去ならびにコーテングのための装置と方法 |
JPH04196528A (ja) * | 1990-11-28 | 1992-07-16 | Toshiba Corp | マグネトロンエッチング装置 |
JP2965739B2 (ja) * | 1991-03-28 | 1999-10-18 | 大日本印刷株式会社 | 集束イオンビーム装置 |
EP0515352A1 (de) * | 1991-05-24 | 1992-11-25 | IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H. | Ionenquelle |
US5198677A (en) * | 1991-10-11 | 1993-03-30 | The United States Of America As Represented By The United States Department Of Energy | Production of N+ ions from a multicusp ion beam apparatus |
JPH06231723A (ja) * | 1993-01-31 | 1994-08-19 | Sony Corp | イオン注入装置 |
JPH06231724A (ja) * | 1993-02-02 | 1994-08-19 | Nissin Electric Co Ltd | イオン注入装置 |
US5420415A (en) * | 1994-06-29 | 1995-05-30 | Eaton Corporation | Structure for alignment of an ion source aperture with a predetermined ion beam path |
-
1995
- 1995-07-21 GB GBGB9515090.0A patent/GB9515090D0/en active Pending
-
1996
- 1996-07-19 EP EP01203085A patent/EP1178517B1/de not_active Expired - Lifetime
- 1996-07-19 DE DE69622009T patent/DE69622009T2/de not_active Expired - Lifetime
- 1996-07-19 DE DE69637765T patent/DE69637765D1/de not_active Expired - Lifetime
- 1996-07-19 EP EP96924984A patent/EP0782763B1/de not_active Expired - Lifetime
- 1996-07-19 JP JP9506428A patent/JPH10508425A/ja active Pending
- 1996-07-19 WO PCT/GB1996/001715 patent/WO1997004474A1/en active IP Right Grant
- 1996-07-19 KR KR1019970701843A patent/KR970706598A/ko active IP Right Grant
- 1996-07-19 US US08/809,547 patent/US5920076A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH10508425A (ja) | 1998-08-18 |
DE69637765D1 (de) | 2009-01-08 |
DE69622009T2 (de) | 2003-01-16 |
US5920076A (en) | 1999-07-06 |
EP1178517A1 (de) | 2002-02-06 |
KR970706598A (ko) | 1997-11-03 |
EP0782763A1 (de) | 1997-07-09 |
EP1178517B1 (de) | 2008-11-26 |
WO1997004474A1 (en) | 1997-02-06 |
EP0782763B1 (de) | 2002-06-26 |
GB9515090D0 (en) | 1995-09-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |