DE59602769D1 - Ionenquelle - Google Patents

Ionenquelle

Info

Publication number
DE59602769D1
DE59602769D1 DE59602769T DE59602769T DE59602769D1 DE 59602769 D1 DE59602769 D1 DE 59602769D1 DE 59602769 T DE59602769 T DE 59602769T DE 59602769 T DE59602769 T DE 59602769T DE 59602769 D1 DE59602769 D1 DE 59602769D1
Authority
DE
Germany
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59602769T
Other languages
English (en)
Inventor
Michael Falz
Ruediger Wilberg
Wladimir F Suprjanovitsch
Nikolai K Kasinski
Wladimir St Tomal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochvakuum Dresden VEB
VTD Vakuumtechnik Dresden GmbH
Original Assignee
Hochvakuum Dresden VEB
VTD Vakuumtechnik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19531141A external-priority patent/DE19531141C2/de
Application filed by Hochvakuum Dresden VEB, VTD Vakuumtechnik Dresden GmbH filed Critical Hochvakuum Dresden VEB
Application granted granted Critical
Publication of DE59602769D1 publication Critical patent/DE59602769D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3142—Ion plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE59602769T 1995-05-16 1996-05-11 Ionenquelle Expired - Fee Related DE59602769D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
BY950242 1995-05-16
DE19531141A DE19531141C2 (de) 1995-05-16 1995-08-24 Ionenquelle

Publications (1)

Publication Number Publication Date
DE59602769D1 true DE59602769D1 (de) 1999-09-23

Family

ID=25665740

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59602769T Expired - Fee Related DE59602769D1 (de) 1995-05-16 1996-05-11 Ionenquelle

Country Status (3)

Country Link
EP (1) EP0743669B1 (de)
DE (1) DE59602769D1 (de)
EA (1) EA000064B1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109216151B (zh) * 2018-08-16 2024-07-09 兰州大学 一种内置天线式高频离子源装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4862032A (en) * 1986-10-20 1989-08-29 Kaufman Harold R End-Hall ion source
DE69207720T2 (de) * 1991-11-04 1996-05-30 Fakel Enterprise Plasmabeschleuniger mit geschlossener Elektronenlaufbahn

Also Published As

Publication number Publication date
EA000064B1 (ru) 1998-04-30
EP0743669A1 (de) 1996-11-20
EP0743669B1 (de) 1999-08-18
EA199600050A3 (ru) 1996-12-30
EA199600050A1 (ru) 1997-03-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee