GB1502935A - Microwave discharge ion source - Google Patents

Microwave discharge ion source

Info

Publication number
GB1502935A
GB1502935A GB1984076A GB1984076A GB1502935A GB 1502935 A GB1502935 A GB 1502935A GB 1984076 A GB1984076 A GB 1984076A GB 1984076 A GB1984076 A GB 1984076A GB 1502935 A GB1502935 A GB 1502935A
Authority
GB
United Kingdom
Prior art keywords
ion source
electrodes
ion
waveguide
sp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1984076A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to GB1984076A priority Critical patent/GB1502935A/en
Publication of GB1502935A publication Critical patent/GB1502935A/en
Application status is Expired legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/16Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Abstract

1502935 Ion sources HITACHI Ltd 13 May 1976 19840/76 Heading H1D An ion source energized by microwaves comprises electrodes 34 defining a discharge space 8 which is rectangular in cross-section perpendicular to the ion extraction direction, these electrodes setting up a microwave electric field perpendicular to a magnetic field generated by means not shown, and an extraction electrode 22 having a rectangular aperture. In Fig. 6A, the electrodes 34 are connected to ridges 4<SP>1</SP> within a waveguide 4 but they can alternatively be connected to a coaxial line, Fig. 12A, or a Lecher line, Fig. 13A (these Figs., not shown). The material to be ionized is heated in a furnace 35 and heaters 37 are provided adjacent the discharge space 8 to prevent deposition of vapour there. Conventional microwave choke flanges can be provided in the waveguide or transmission line to decouple D.C. voltages applied to the ion source from the microwave generator.
GB1984076A 1976-05-13 1976-05-13 Microwave discharge ion source Expired GB1502935A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1984076A GB1502935A (en) 1976-05-13 1976-05-13 Microwave discharge ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1984076A GB1502935A (en) 1976-05-13 1976-05-13 Microwave discharge ion source

Publications (1)

Publication Number Publication Date
GB1502935A true GB1502935A (en) 1978-03-08

Family

ID=10136111

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1984076A Expired GB1502935A (en) 1976-05-13 1976-05-13 Microwave discharge ion source

Country Status (1)

Country Link
GB (1) GB1502935A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5920076A (en) * 1995-07-21 1999-07-06 Applied Materials, Inc. Ion beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5920076A (en) * 1995-07-21 1999-07-06 Applied Materials, Inc. Ion beam apparatus

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years

Effective date: 19960512