DE69303409D1 - Ionenimplantergerät - Google Patents

Ionenimplantergerät

Info

Publication number
DE69303409D1
DE69303409D1 DE69303409T DE69303409T DE69303409D1 DE 69303409 D1 DE69303409 D1 DE 69303409D1 DE 69303409 T DE69303409 T DE 69303409T DE 69303409 T DE69303409 T DE 69303409T DE 69303409 D1 DE69303409 D1 DE 69303409D1
Authority
DE
Germany
Prior art keywords
ion implanter
implanter device
ion
implanter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69303409T
Other languages
English (en)
Other versions
DE69303409T2 (de
Inventor
Kensuke Amemiya
Yoshimi Hakamata
Katsumi Tokiguchi
Noriyuki Sakudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd Tokio/tokyo Jp New Energy And Indu
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69303409D1 publication Critical patent/DE69303409D1/de
Publication of DE69303409T2 publication Critical patent/DE69303409T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
DE69303409T 1992-04-10 1993-04-07 Ionenimplantergerät Expired - Fee Related DE69303409T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4090734A JP2863962B2 (ja) 1992-04-10 1992-04-10 イオン打ち込み装置

Publications (2)

Publication Number Publication Date
DE69303409D1 true DE69303409D1 (de) 1996-08-08
DE69303409T2 DE69303409T2 (de) 1997-02-13

Family

ID=14006804

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69303409T Expired - Fee Related DE69303409T2 (de) 1992-04-10 1993-04-07 Ionenimplantergerät

Country Status (4)

Country Link
US (1) US5349196A (de)
EP (1) EP0565089B1 (de)
JP (1) JP2863962B2 (de)
DE (1) DE69303409T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2731886B2 (ja) * 1993-04-27 1998-03-25 ▲巌▼ 大泊 シングルイオン注入装置及び方法
JP3123345B2 (ja) * 1994-05-31 2001-01-09 株式会社日立製作所 イオン打込み装置
JP2713692B2 (ja) * 1994-09-07 1998-02-16 株式会社日立製作所 イオン打込み装置
US5504341A (en) * 1995-02-17 1996-04-02 Zimec Consulting, Inc. Producing RF electric fields suitable for accelerating atomic and molecular ions in an ion implantation system
DE19751401B4 (de) * 1997-11-20 2007-03-01 Bruker Daltonik Gmbh Quadrupol-Hochfrequenz-Ionenfallen für Massenspektrometer
US6119884A (en) * 1998-07-02 2000-09-19 Sonoco Development, Inc. Container for storing and dispensing food products
US6423976B1 (en) * 1999-05-28 2002-07-23 Applied Materials, Inc. Ion implanter and a method of implanting ions
US6291828B1 (en) * 1999-12-21 2001-09-18 Axchlisrtechnologies, Inc. Glass-like insulator for electrically isolating electrodes from ion implanter housing
TW523796B (en) * 2000-12-28 2003-03-11 Axcelis Tech Inc Method and apparatus for improved ion acceleration in an ion implantation system
JP4691347B2 (ja) * 2004-10-14 2011-06-01 株式会社アルバック イオン注入装置
US20120086364A1 (en) * 2010-10-06 2012-04-12 Lawrence Livermore National Security, Llc Particle beam coupling system and method
US9870891B1 (en) * 2016-02-24 2018-01-16 Euclid Techlabs LLC High gradient permanent magnet elements for charged particle beamlines

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2222736A1 (de) * 1972-05-09 1973-11-22 Siemens Ag Verfahren zur ionenimplantation
JPS5913151A (ja) * 1982-05-29 1984-01-23 Aisin Warner Ltd 車両用自動変速機の軸支持装置
JPS598949A (ja) * 1982-07-08 1984-01-18 横河電機株式会社 穿刺用超音波探触子
US4801847A (en) * 1983-11-28 1989-01-31 Hitachi, Ltd. Charged particle accelerator using quadrupole electrodes
JPH0612661B2 (ja) * 1983-12-02 1994-02-16 株式会社日立製作所 イオン打込み装置
JPS62241248A (ja) * 1986-04-11 1987-10-21 Hitachi Ltd 集束イオン線装置
JPH0254156U (de) * 1988-10-13 1990-04-19
JPH061678B2 (ja) * 1988-11-24 1994-01-05 工業技術院長 外部共振回路型ｒｆｑ加速器
JPH0451446A (ja) * 1990-06-18 1992-02-19 Nec Corp イオン注入装置

Also Published As

Publication number Publication date
US5349196A (en) 1994-09-20
JPH05287525A (ja) 1993-11-02
EP0565089A1 (de) 1993-10-13
DE69303409T2 (de) 1997-02-13
EP0565089B1 (de) 1996-07-03
JP2863962B2 (ja) 1999-03-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HITACHI, LTD., TOKIO/TOKYO, JP NEW ENERGY AND INDU

8339 Ceased/non-payment of the annual fee